JPH10191661A5 - - Google Patents

Info

Publication number
JPH10191661A5
JPH10191661A5 JP1996345263A JP34526396A JPH10191661A5 JP H10191661 A5 JPH10191661 A5 JP H10191661A5 JP 1996345263 A JP1996345263 A JP 1996345263A JP 34526396 A JP34526396 A JP 34526396A JP H10191661 A5 JPH10191661 A5 JP H10191661A5
Authority
JP
Japan
Prior art keywords
achieve
drive unit
quick response
operating range
control device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1996345263A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10191661A (ja
JP3849031B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP34526396A priority Critical patent/JP3849031B2/ja
Priority claimed from JP34526396A external-priority patent/JP3849031B2/ja
Publication of JPH10191661A publication Critical patent/JPH10191661A/ja
Publication of JPH10191661A5 publication Critical patent/JPH10191661A5/ja
Application granted granted Critical
Publication of JP3849031B2 publication Critical patent/JP3849031B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP34526396A 1996-12-25 1996-12-25 振動装置およびこれを備えた装置 Expired - Lifetime JP3849031B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP34526396A JP3849031B2 (ja) 1996-12-25 1996-12-25 振動装置およびこれを備えた装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP34526396A JP3849031B2 (ja) 1996-12-25 1996-12-25 振動装置およびこれを備えた装置

Publications (3)

Publication Number Publication Date
JPH10191661A JPH10191661A (ja) 1998-07-21
JPH10191661A5 true JPH10191661A5 (enrdf_load_stackoverflow) 2004-12-02
JP3849031B2 JP3849031B2 (ja) 2006-11-22

Family

ID=18375421

Family Applications (1)

Application Number Title Priority Date Filing Date
JP34526396A Expired - Lifetime JP3849031B2 (ja) 1996-12-25 1996-12-25 振動装置およびこれを備えた装置

Country Status (1)

Country Link
JP (1) JP3849031B2 (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6376966B1 (en) * 2000-05-22 2002-04-23 Caterpillar, Inc. Method and apparatus for controlling a piezoelectric device
JP4663350B2 (ja) * 2005-02-15 2011-04-06 キヤノン株式会社 制御装置および制御方法
JP5162750B2 (ja) * 2006-10-05 2013-03-13 国立大学法人静岡大学 位置決め装置及び位置決め方法
JP6579893B2 (ja) * 2015-09-30 2019-09-25 キヤノン株式会社 振動型アクチュエータの制御装置と制御方法、駆動装置、撮像装置及び自動ステージ

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