JP3848586B2 - 表面検査装置 - Google Patents
表面検査装置 Download PDFInfo
- Publication number
- JP3848586B2 JP3848586B2 JP2002059382A JP2002059382A JP3848586B2 JP 3848586 B2 JP3848586 B2 JP 3848586B2 JP 2002059382 A JP2002059382 A JP 2002059382A JP 2002059382 A JP2002059382 A JP 2002059382A JP 3848586 B2 JP3848586 B2 JP 3848586B2
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- 238000007689 inspection Methods 0.000 title claims description 16
- 238000004458 analytical method Methods 0.000 claims description 40
- 230000003287 optical effect Effects 0.000 claims description 31
- 238000005286 illumination Methods 0.000 claims description 20
- 238000003384 imaging method Methods 0.000 claims description 6
- 238000012937 correction Methods 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 description 50
- 238000005259 measurement Methods 0.000 description 22
- 238000003708 edge detection Methods 0.000 description 12
- 238000010586 diagram Methods 0.000 description 10
- 238000000034 method Methods 0.000 description 7
- 230000007246 mechanism Effects 0.000 description 5
- 230000010363 phase shift Effects 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000004907 flux Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 240000004050 Pentaglottis sempervirens Species 0.000 description 1
- 235000004522 Pentaglottis sempervirens Nutrition 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 238000010191 image analysis Methods 0.000 description 1
- 238000005305 interferometry Methods 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Images
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002059382A JP3848586B2 (ja) | 2002-03-05 | 2002-03-05 | 表面検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002059382A JP3848586B2 (ja) | 2002-03-05 | 2002-03-05 | 表面検査装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2003254729A JP2003254729A (ja) | 2003-09-10 |
| JP2003254729A5 JP2003254729A5 (enExample) | 2005-08-11 |
| JP3848586B2 true JP3848586B2 (ja) | 2006-11-22 |
Family
ID=28669097
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002059382A Expired - Fee Related JP3848586B2 (ja) | 2002-03-05 | 2002-03-05 | 表面検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3848586B2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107850555A (zh) * | 2015-06-30 | 2018-03-27 | 康宁股份有限公司 | 使用静态条纹图案的干涉法滚降测量 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102004022341A1 (de) * | 2004-05-04 | 2005-12-29 | Carl Mahr Holding Gmbh | Vorrichtung und Verfahren zur kombinierten interferometrischen und abbildungsbasierten Geometrieerfassung insbesondere in der Mikrosystemtechnik |
| JP6697285B2 (ja) * | 2015-02-25 | 2020-05-20 | 株式会社昭和電気研究所 | ウェハ欠陥検査装置 |
-
2002
- 2002-03-05 JP JP2002059382A patent/JP3848586B2/ja not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107850555A (zh) * | 2015-06-30 | 2018-03-27 | 康宁股份有限公司 | 使用静态条纹图案的干涉法滚降测量 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2003254729A (ja) | 2003-09-10 |
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