JP2003254729A5 - - Google Patents

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Publication number
JP2003254729A5
JP2003254729A5 JP2002059382A JP2002059382A JP2003254729A5 JP 2003254729 A5 JP2003254729 A5 JP 2003254729A5 JP 2002059382 A JP2002059382 A JP 2002059382A JP 2002059382 A JP2002059382 A JP 2002059382A JP 2003254729 A5 JP2003254729 A5 JP 2003254729A5
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JP
Japan
Prior art keywords
edge
inspection apparatus
interference fringe
surface inspection
image
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Application number
JP2002059382A
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English (en)
Japanese (ja)
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JP3848586B2 (ja
JP2003254729A (ja
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Priority to JP2002059382A priority Critical patent/JP3848586B2/ja
Priority claimed from JP2002059382A external-priority patent/JP3848586B2/ja
Publication of JP2003254729A publication Critical patent/JP2003254729A/ja
Publication of JP2003254729A5 publication Critical patent/JP2003254729A5/ja
Application granted granted Critical
Publication of JP3848586B2 publication Critical patent/JP3848586B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2002059382A 2002-03-05 2002-03-05 表面検査装置 Expired - Fee Related JP3848586B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002059382A JP3848586B2 (ja) 2002-03-05 2002-03-05 表面検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002059382A JP3848586B2 (ja) 2002-03-05 2002-03-05 表面検査装置

Publications (3)

Publication Number Publication Date
JP2003254729A JP2003254729A (ja) 2003-09-10
JP2003254729A5 true JP2003254729A5 (enExample) 2005-08-11
JP3848586B2 JP3848586B2 (ja) 2006-11-22

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ID=28669097

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002059382A Expired - Fee Related JP3848586B2 (ja) 2002-03-05 2002-03-05 表面検査装置

Country Status (1)

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JP (1) JP3848586B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004022341A1 (de) * 2004-05-04 2005-12-29 Carl Mahr Holding Gmbh Vorrichtung und Verfahren zur kombinierten interferometrischen und abbildungsbasierten Geometrieerfassung insbesondere in der Mikrosystemtechnik
JP6697285B2 (ja) * 2015-02-25 2020-05-20 株式会社昭和電気研究所 ウェハ欠陥検査装置
KR102583096B1 (ko) * 2015-06-30 2023-09-27 코닝 인코포레이티드 정적 프린지 패턴을 사용하는 간섭 롤오프 측정

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