Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
干渉縞形成用の光学素子と被測定物とにより形成される干渉縞像を撮像し、該干渉縞像を基に被測定物の表面形状を解析する表面検査装置において、前記被測定物のエッジを含む領域を照明する照明光学系と、該照明光学系により照明された前記被測定物のエッジ像を撮像するエッジ像撮像手段と、該撮像されたエッジ像に基づいて前記干渉縞像の解析領域を決定する解析領域決定手段と、を備えることを特徴とする表面検査装置。 In a surface inspection apparatus that captures an interference fringe image formed by an optical element for forming interference fringes and a measured object, and analyzes the surface shape of the measured object based on the interference fringe image, the edge of the measured object An illumination optical system that illuminates a region including the edge, an edge image imaging unit that captures an edge image of the object illuminated by the illumination optical system, and an analysis of the interference fringe image based on the captured edge image A surface inspection apparatus comprising: an analysis region determination means for determining a region. 請求項１の解析領域決定手段は、前記光学素子の使用の有無により生じる前記干渉縞像とエッジ像との位置ずれを補正する補正手段を備えることを特徴とする表面検査装置。 The surface inspection apparatus according to claim 1, wherein the analysis region determination unit includes a correction unit that corrects a positional shift between the interference fringe image and the edge image caused by the use of the optical element. 請求項１の表面検査装置において、前記照明光学系は広帯域波長の光を発する照明光源を持つことを特徴とする表面検査装置。 2. The surface inspection apparatus according to claim 1, wherein the illumination optical system has an illumination light source that emits light of a broadband wavelength.