JP3830451B2 - 線幅測定方法及び線幅測定装置 - Google Patents

線幅測定方法及び線幅測定装置 Download PDF

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Publication number
JP3830451B2
JP3830451B2 JP2002376020A JP2002376020A JP3830451B2 JP 3830451 B2 JP3830451 B2 JP 3830451B2 JP 2002376020 A JP2002376020 A JP 2002376020A JP 2002376020 A JP2002376020 A JP 2002376020A JP 3830451 B2 JP3830451 B2 JP 3830451B2
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line width
measurement
substrate
width measuring
measured
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Japanese (ja)
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JP2003279318A (ja
JP2003279318A5 (enExample
Inventor
正吾 小菅
美智男 久木原
智 廣川
高博 清水
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Kokusai Denki Electric Inc
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Hitachi Kokusai Electric Inc
Kokusai Denki Electric Inc
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Publication of JP2003279318A5 publication Critical patent/JP2003279318A5/ja
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JP2002376020A 2002-01-21 2002-12-26 線幅測定方法及び線幅測定装置 Expired - Lifetime JP3830451B2 (ja)

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JP2002376020A JP3830451B2 (ja) 2002-01-21 2002-12-26 線幅測定方法及び線幅測定装置

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JP2002011764 2002-01-21
JP2002-11764 2002-01-21
JP2002376020A JP3830451B2 (ja) 2002-01-21 2002-12-26 線幅測定方法及び線幅測定装置

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JP2003279318A JP2003279318A (ja) 2003-10-02
JP2003279318A5 JP2003279318A5 (enExample) 2005-02-03
JP3830451B2 true JP3830451B2 (ja) 2006-10-04

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Publication number Priority date Publication date Assignee Title
KR100579603B1 (ko) 2001-01-15 2006-05-12 에이에스엠엘 네델란즈 비.브이. 리소그래피 장치
US7113258B2 (en) 2001-01-15 2006-09-26 Asml Netherlands B.V. Lithographic apparatus
JP4663334B2 (ja) 2005-01-11 2011-04-06 株式会社日立国際電気 線幅測定方法

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