JP3819144B2 - 透光性シート状物の欠陥検査装置 - Google Patents

透光性シート状物の欠陥検査装置 Download PDF

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Publication number
JP3819144B2
JP3819144B2 JP09022298A JP9022298A JP3819144B2 JP 3819144 B2 JP3819144 B2 JP 3819144B2 JP 09022298 A JP09022298 A JP 09022298A JP 9022298 A JP9022298 A JP 9022298A JP 3819144 B2 JP3819144 B2 JP 3819144B2
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Japan
Prior art keywords
light
sheet
light receiving
inspection
distance
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Expired - Fee Related
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JP09022298A
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English (en)
Japanese (ja)
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JPH11153552A (ja
JPH11153552A5 (enExample
Inventor
順一 原田
正樹 布施
慎太郎 田代
徳之 池田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Chemical Corp
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Mitsubishi Chemical Corp
Mitsubishi Rayon Co Ltd
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Priority to JP09022298A priority Critical patent/JP3819144B2/ja
Publication of JPH11153552A publication Critical patent/JPH11153552A/ja
Publication of JPH11153552A5 publication Critical patent/JPH11153552A5/ja
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Publication of JP3819144B2 publication Critical patent/JP3819144B2/ja
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JP09022298A 1997-09-18 1998-04-02 透光性シート状物の欠陥検査装置 Expired - Fee Related JP3819144B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP09022298A JP3819144B2 (ja) 1997-09-18 1998-04-02 透光性シート状物の欠陥検査装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP9-253112 1997-09-18
JP25311297 1997-09-18
JP09022298A JP3819144B2 (ja) 1997-09-18 1998-04-02 透光性シート状物の欠陥検査装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2006008874A Division JP3860202B2 (ja) 1997-09-18 2006-01-17 透光性シート状物の欠陥検査装置

Publications (3)

Publication Number Publication Date
JPH11153552A JPH11153552A (ja) 1999-06-08
JPH11153552A5 JPH11153552A5 (enExample) 2004-09-02
JP3819144B2 true JP3819144B2 (ja) 2006-09-06

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JP09022298A Expired - Fee Related JP3819144B2 (ja) 1997-09-18 1998-04-02 透光性シート状物の欠陥検査装置

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JP (1) JP3819144B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006029536A1 (en) * 2004-09-17 2006-03-23 De.Vice Scientific Incorporated Optical inspection of flat media using direct image technology
CN106292009A (zh) * 2016-09-12 2017-01-04 成都中光电科技有限公司 区分缺陷在玻璃基板a面还是b面的检查法
CN116429784A (zh) * 2023-03-31 2023-07-14 深圳市辰卓科技有限公司 一种钢化膜缺陷检测设备

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Publication number Publication date
JPH11153552A (ja) 1999-06-08

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