JPH11153552A5 - - Google Patents

Info

Publication number
JPH11153552A5
JPH11153552A5 JP1998090222A JP9022298A JPH11153552A5 JP H11153552 A5 JPH11153552 A5 JP H11153552A5 JP 1998090222 A JP1998090222 A JP 1998090222A JP 9022298 A JP9022298 A JP 9022298A JP H11153552 A5 JPH11153552 A5 JP H11153552A5
Authority
JP
Japan
Prior art keywords
light
sheet
main surfaces
distance
defect inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1998090222A
Other languages
English (en)
Japanese (ja)
Other versions
JP3819144B2 (ja
JPH11153552A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP09022298A priority Critical patent/JP3819144B2/ja
Priority claimed from JP09022298A external-priority patent/JP3819144B2/ja
Publication of JPH11153552A publication Critical patent/JPH11153552A/ja
Publication of JPH11153552A5 publication Critical patent/JPH11153552A5/ja
Application granted granted Critical
Publication of JP3819144B2 publication Critical patent/JP3819144B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP09022298A 1997-09-18 1998-04-02 透光性シート状物の欠陥検査装置 Expired - Fee Related JP3819144B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP09022298A JP3819144B2 (ja) 1997-09-18 1998-04-02 透光性シート状物の欠陥検査装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP9-253112 1997-09-18
JP25311297 1997-09-18
JP09022298A JP3819144B2 (ja) 1997-09-18 1998-04-02 透光性シート状物の欠陥検査装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2006008874A Division JP3860202B2 (ja) 1997-09-18 2006-01-17 透光性シート状物の欠陥検査装置

Publications (3)

Publication Number Publication Date
JPH11153552A JPH11153552A (ja) 1999-06-08
JPH11153552A5 true JPH11153552A5 (enExample) 2004-09-02
JP3819144B2 JP3819144B2 (ja) 2006-09-06

Family

ID=26431716

Family Applications (1)

Application Number Title Priority Date Filing Date
JP09022298A Expired - Fee Related JP3819144B2 (ja) 1997-09-18 1998-04-02 透光性シート状物の欠陥検査装置

Country Status (1)

Country Link
JP (1) JP3819144B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006029536A1 (en) * 2004-09-17 2006-03-23 De.Vice Scientific Incorporated Optical inspection of flat media using direct image technology
CN106292009A (zh) * 2016-09-12 2017-01-04 成都中光电科技有限公司 区分缺陷在玻璃基板a面还是b面的检查法
CN116429784A (zh) * 2023-03-31 2023-07-14 深圳市辰卓科技有限公司 一种钢化膜缺陷检测设备

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