JP3816627B2 - パターン検査装置 - Google Patents
パターン検査装置 Download PDFInfo
- Publication number
- JP3816627B2 JP3816627B2 JP6288297A JP6288297A JP3816627B2 JP 3816627 B2 JP3816627 B2 JP 3816627B2 JP 6288297 A JP6288297 A JP 6288297A JP 6288297 A JP6288297 A JP 6288297A JP 3816627 B2 JP3816627 B2 JP 3816627B2
- Authority
- JP
- Japan
- Prior art keywords
- image
- distance
- imaging
- specifying
- specimen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000007689 inspection Methods 0.000 title claims description 130
- 238000005259 measurement Methods 0.000 claims description 82
- 238000003384 imaging method Methods 0.000 claims description 64
- 238000012545 processing Methods 0.000 claims description 47
- 238000001514 detection method Methods 0.000 claims description 32
- 238000003860 storage Methods 0.000 claims description 26
- 238000011156 evaluation Methods 0.000 claims description 3
- 230000007423 decrease Effects 0.000 claims 1
- 238000000034 method Methods 0.000 description 17
- 230000003287 optical effect Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 235000012431 wafers Nutrition 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000004973 liquid crystal related substance Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000011265 semifinished product Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Images
Landscapes
- Measurement Of Optical Distance (AREA)
- Focusing (AREA)
- Microscoopes, Condenser (AREA)
- Automatic Focus Adjustment (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6288297A JP3816627B2 (ja) | 1997-03-17 | 1997-03-17 | パターン検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6288297A JP3816627B2 (ja) | 1997-03-17 | 1997-03-17 | パターン検査装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH10260366A JPH10260366A (ja) | 1998-09-29 |
| JPH10260366A5 JPH10260366A5 (enExample) | 2004-12-24 |
| JP3816627B2 true JP3816627B2 (ja) | 2006-08-30 |
Family
ID=13213090
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6288297A Expired - Fee Related JP3816627B2 (ja) | 1997-03-17 | 1997-03-17 | パターン検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3816627B2 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003066341A (ja) | 2001-08-28 | 2003-03-05 | Nec Corp | レチクル検査装置 |
| JP3941668B2 (ja) * | 2002-11-11 | 2007-07-04 | 松下電器産業株式会社 | 細胞の観察方法 |
| JP5508214B2 (ja) * | 2005-08-25 | 2014-05-28 | クラリエント・インコーポレーテッド | 顕微鏡スライドの拡大イメージを作成するシステム及び方法 |
| JP2010054704A (ja) * | 2008-08-27 | 2010-03-11 | Olympus Corp | 観察装置及びその制御装置並びにプログラム |
| JP4820458B2 (ja) * | 2011-03-17 | 2011-11-24 | オリンパス株式会社 | 顕微鏡システム、顕微鏡システムの動作制御方法および動作制御プログラムを記録した記録媒体 |
-
1997
- 1997-03-17 JP JP6288297A patent/JP3816627B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH10260366A (ja) | 1998-09-29 |
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