JP3808071B2 - 薬液制御弁 - Google Patents

薬液制御弁 Download PDF

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Publication number
JP3808071B2
JP3808071B2 JP2003401938A JP2003401938A JP3808071B2 JP 3808071 B2 JP3808071 B2 JP 3808071B2 JP 2003401938 A JP2003401938 A JP 2003401938A JP 2003401938 A JP2003401938 A JP 2003401938A JP 3808071 B2 JP3808071 B2 JP 3808071B2
Authority
JP
Japan
Prior art keywords
flow path
valve
communication
chemical
control valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2003401938A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005163874A5 (enExample
JP2005163874A (ja
Inventor
敏行 長尾
滋 大杉
洋 冨田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CKD Corp
Original Assignee
CKD Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CKD Corp filed Critical CKD Corp
Priority to JP2003401938A priority Critical patent/JP3808071B2/ja
Priority to PCT/JP2004/017057 priority patent/WO2005054727A1/ja
Priority to KR1020067012917A priority patent/KR100839064B1/ko
Publication of JP2005163874A publication Critical patent/JP2005163874A/ja
Publication of JP2005163874A5 publication Critical patent/JP2005163874A5/ja
Priority to US11/417,133 priority patent/US7322557B2/en
Application granted granted Critical
Publication of JP3808071B2 publication Critical patent/JP3808071B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/02—Construction of housing; Use of materials therefor of lift valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/32—Details
    • F16K1/34—Cutting-off parts, e.g. valve members, seats
    • F16K1/42—Valve seats
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/02—Construction of housing; Use of materials therefor of lift valves
    • F16K27/0236—Diaphragm cut-off apparatus
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F16K31/1221—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston one side of the piston being spring-loaded
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/17—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being actuated by fluid pressure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02002—Preparing wafers

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Fluid Mechanics (AREA)
  • Lift Valve (AREA)
  • Valve Housings (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
JP2003401938A 2003-12-01 2003-12-01 薬液制御弁 Expired - Fee Related JP3808071B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2003401938A JP3808071B2 (ja) 2003-12-01 2003-12-01 薬液制御弁
PCT/JP2004/017057 WO2005054727A1 (ja) 2003-12-01 2004-11-17 薬液制御弁
KR1020067012917A KR100839064B1 (ko) 2003-12-01 2004-11-17 화학 액체 제어 밸브
US11/417,133 US7322557B2 (en) 2003-12-01 2006-05-04 Chemical liquid control valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003401938A JP3808071B2 (ja) 2003-12-01 2003-12-01 薬液制御弁

Publications (3)

Publication Number Publication Date
JP2005163874A JP2005163874A (ja) 2005-06-23
JP2005163874A5 JP2005163874A5 (enExample) 2005-09-22
JP3808071B2 true JP3808071B2 (ja) 2006-08-09

Family

ID=34649994

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003401938A Expired - Fee Related JP3808071B2 (ja) 2003-12-01 2003-12-01 薬液制御弁

Country Status (4)

Country Link
US (1) US7322557B2 (enExample)
JP (1) JP3808071B2 (enExample)
KR (1) KR100839064B1 (enExample)
WO (1) WO2005054727A1 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7490625B1 (en) * 2001-04-23 2009-02-17 John Leslie Johnson Pilot valve manifold
JP4694341B2 (ja) * 2005-10-13 2011-06-08 シーケーディ株式会社 流体制御弁
US20070114480A1 (en) * 2005-11-23 2007-05-24 Burke Joseph M Vorticity generators for use with fluid control systems
JP4355738B2 (ja) * 2007-07-20 2009-11-04 シーケーディ株式会社 流体制御弁
US20110259923A1 (en) * 2010-04-26 2011-10-27 John Geoffrey Chan Plug And Valve System
DE102010041300A1 (de) * 2010-09-24 2012-03-29 Robert Bosch Gmbh Ventil zum Steuern von Fluiden
JP5226059B2 (ja) * 2010-11-17 2013-07-03 アドバンス電気工業株式会社 エア操作弁
CN114341534B (zh) * 2019-08-30 2024-05-10 旭有机材株式会社 阀装置

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US814402A (en) * 1904-05-25 1906-03-06 Charles E Simpson Valve.
US1471229A (en) * 1921-02-04 1923-10-16 Manning Maxwell & Moore Inc Check valve
US2727529A (en) * 1951-02-02 1955-12-20 Borg Warner Relief valve
US2792015A (en) * 1953-08-11 1957-05-14 J E Lonergan Company Liquid relief valve
JPS5420030U (enExample) * 1977-07-13 1979-02-08
JPS59140967A (ja) * 1983-01-31 1984-08-13 Yamatake Honeywell Co Ltd 単座型玉形弁用弁座およびその製造方法
JPS61215866A (ja) * 1985-03-19 1986-09-25 Babcock Hitachi Kk 高差圧型調節弁
US4624444A (en) * 1985-10-28 1986-11-25 Masco Corporation Control stop for flushing system
JPH0674862B2 (ja) * 1989-12-22 1994-09-21 キミツ機工株式会社 弁
JPH043170U (enExample) * 1990-04-25 1992-01-13
JPH05272648A (ja) * 1992-03-30 1993-10-19 Nippon Valqua Ind Ltd ダイアフラム弁
JP2896747B2 (ja) * 1994-08-18 1999-05-31 キミツ機工株式会社 減勢装置
JP3316362B2 (ja) * 1995-11-10 2002-08-19 三菱重工業株式会社 大型蒸気加減弁
AU734902B2 (en) * 1996-08-21 2001-06-28 Fisher Controls International Llc Elastomeric element valve
JP3909461B2 (ja) * 1996-09-17 2007-04-25 Ｓｍｃ株式会社 直動形２ポート電磁弁
JP3394661B2 (ja) * 1996-09-19 2003-04-07 株式会社日立製作所 蒸気加減弁
JP3940855B2 (ja) * 1997-05-14 2007-07-04 Ｓｍｃ株式会社 サックバックバルブ
JP3842870B2 (ja) * 1997-07-11 2006-11-08 Ｓｍｃ株式会社 開閉弁
JP4016156B2 (ja) * 1997-09-22 2007-12-05 Ｓｍｃ株式会社 スムースベントバルブ
SE9703810D0 (sv) * 1997-10-20 1997-10-20 Siemens Elema Ab Ventil
KR100302482B1 (ko) * 1998-06-23 2001-11-30 윤종용 반도체씨엠피공정의슬러리공급시스템
US6289934B1 (en) * 1999-07-23 2001-09-18 Welker Engineering Company Flow diffuser
JP3637282B2 (ja) 2001-01-15 2005-04-13 Ｓｍｃ株式会社 磁気センサ付き電磁弁
JP4633292B2 (ja) * 2001-04-09 2011-02-16 シーケーディ株式会社 流体制御弁
JP3828049B2 (ja) * 2002-06-14 2006-09-27 Ｓｍｃ株式会社 流量制御装置
TW571182B (en) * 2001-12-04 2004-01-11 Smc Kk Flow rate control apparatus

Also Published As

Publication number Publication date
US7322557B2 (en) 2008-01-29
JP2005163874A (ja) 2005-06-23
US20060196577A1 (en) 2006-09-07
KR100839064B1 (ko) 2008-06-19
KR20060096120A (ko) 2006-09-06
WO2005054727A1 (ja) 2005-06-16

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