JP3768854B2 - プラズマジェット発生装置 - Google Patents

プラズマジェット発生装置 Download PDF

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Publication number
JP3768854B2
JP3768854B2 JP2001297850A JP2001297850A JP3768854B2 JP 3768854 B2 JP3768854 B2 JP 3768854B2 JP 2001297850 A JP2001297850 A JP 2001297850A JP 2001297850 A JP2001297850 A JP 2001297850A JP 3768854 B2 JP3768854 B2 JP 3768854B2
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JP
Japan
Prior art keywords
plasma jet
jet generator
discharge tube
nozzle
plasma
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Expired - Lifetime
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JP2001297850A
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English (en)
Japanese (ja)
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JP2003109795A (ja
JP2003109795A5 (https=
Inventor
隆範 一木
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Japan Science and Technology Agency
National Institute of Japan Science and Technology Agency
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Japan Science and Technology Agency
National Institute of Japan Science and Technology Agency
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Priority to JP2001297850A priority Critical patent/JP3768854B2/ja
Publication of JP2003109795A publication Critical patent/JP2003109795A/ja
Publication of JP2003109795A5 publication Critical patent/JP2003109795A5/ja
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Publication of JP3768854B2 publication Critical patent/JP3768854B2/ja
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  • Plasma Technology (AREA)
JP2001297850A 2001-09-27 2001-09-27 プラズマジェット発生装置 Expired - Lifetime JP3768854B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001297850A JP3768854B2 (ja) 2001-09-27 2001-09-27 プラズマジェット発生装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001297850A JP3768854B2 (ja) 2001-09-27 2001-09-27 プラズマジェット発生装置

Publications (3)

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JP2003109795A JP2003109795A (ja) 2003-04-11
JP2003109795A5 JP2003109795A5 (https=) 2004-12-24
JP3768854B2 true JP3768854B2 (ja) 2006-04-19

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JP2001297850A Expired - Lifetime JP3768854B2 (ja) 2001-09-27 2001-09-27 プラズマジェット発生装置

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JP (1) JP3768854B2 (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4687543B2 (ja) * 2006-04-14 2011-05-25 パナソニック株式会社 大気圧プラズマ発生装置及び発生方法
JP4946456B2 (ja) * 2007-01-24 2012-06-06 パナソニック株式会社 大気圧プラズマ発生方法及び装置
JP5288810B2 (ja) * 2008-01-16 2013-09-11 株式会社ジャパンディスプレイ 局所プラズマ処理装置及び処理方法
JP5300283B2 (ja) * 2008-02-27 2013-09-25 学校法人トヨタ学園 窒化処理法
JP2013532349A (ja) * 2010-05-05 2013-08-15 ペルキネルマー ヘルス サイエンシーズ， インコーポレイテッド 耐酸化性誘導装置
JP6153118B2 (ja) 2013-08-30 2017-06-28 国立研究開発法人産業技術総合研究所 マイクロ波プラズマ処理装置
KR102173465B1 (ko) * 2019-10-15 2020-11-03 주성엔지니어링(주) 기판형 태양 전지의 도핑 장치

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JP2003109795A (ja) 2003-04-11

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