JP3740427B2 - 干渉計を用いた形状測定方法および装置 - Google Patents

干渉計を用いた形状測定方法および装置 Download PDF

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Publication number
JP3740427B2
JP3740427B2 JP2002066890A JP2002066890A JP3740427B2 JP 3740427 B2 JP3740427 B2 JP 3740427B2 JP 2002066890 A JP2002066890 A JP 2002066890A JP 2002066890 A JP2002066890 A JP 2002066890A JP 3740427 B2 JP3740427 B2 JP 3740427B2
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measured
shape
light
lens
measuring
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Expired - Fee Related
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JP2002066890A
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Japanese (ja)
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JP2003269908A (ja
JP2003269908A5 (enExample
Inventor
仁 飯島
誠一 神谷
勝 大塚
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Canon Inc
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Canon Inc
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Priority to JP2002066890A priority Critical patent/JP3740427B2/ja
Priority to US10/374,142 priority patent/US6972850B2/en
Priority to DE10309586A priority patent/DE10309586B4/de
Publication of JP2003269908A publication Critical patent/JP2003269908A/ja
Publication of JP2003269908A5 publication Critical patent/JP2003269908A5/ja
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  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2002066890A 2002-03-06 2002-03-12 干渉計を用いた形状測定方法および装置 Expired - Fee Related JP3740427B2 (ja)

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Application Number Priority Date Filing Date Title
JP2002066890A JP3740427B2 (ja) 2002-03-12 2002-03-12 干渉計を用いた形状測定方法および装置
US10/374,142 US6972850B2 (en) 2002-03-06 2003-02-27 Method and apparatus for measuring the shape of an optical surface using an interferometer
DE10309586A DE10309586B4 (de) 2002-03-06 2003-03-05 Form-Messverfahren und -vorrichtung unter Verwendung eines Interferometers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002066890A JP3740427B2 (ja) 2002-03-12 2002-03-12 干渉計を用いた形状測定方法および装置

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JP2003269908A JP2003269908A (ja) 2003-09-25
JP2003269908A5 JP2003269908A5 (enExample) 2005-04-07
JP3740427B2 true JP3740427B2 (ja) 2006-02-01

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20240319041A1 (en) * 2023-03-20 2024-09-26 Mloptic Corp Multi-configurable wavefront tester
US12498293B2 (en) * 2024-03-28 2025-12-16 Mloptic Corp. Multi-configurable wavefront tester

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20240319041A1 (en) * 2023-03-20 2024-09-26 Mloptic Corp Multi-configurable wavefront tester
US12498293B2 (en) * 2024-03-28 2025-12-16 Mloptic Corp. Multi-configurable wavefront tester

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JP2003269908A (ja) 2003-09-25

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