JP2003269908A5 - - Google Patents

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Publication number
JP2003269908A5
JP2003269908A5 JP2002066890A JP2002066890A JP2003269908A5 JP 2003269908 A5 JP2003269908 A5 JP 2003269908A5 JP 2002066890 A JP2002066890 A JP 2002066890A JP 2002066890 A JP2002066890 A JP 2002066890A JP 2003269908 A5 JP2003269908 A5 JP 2003269908A5
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JP
Japan
Prior art keywords
measured
shape
light
measuring
reflected light
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JP2002066890A
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English (en)
Japanese (ja)
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JP3740427B2 (ja
JP2003269908A (ja
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Application filed filed Critical
Priority to JP2002066890A priority Critical patent/JP3740427B2/ja
Priority claimed from JP2002066890A external-priority patent/JP3740427B2/ja
Priority to US10/374,142 priority patent/US6972850B2/en
Priority to DE10309586A priority patent/DE10309586B4/de
Publication of JP2003269908A publication Critical patent/JP2003269908A/ja
Publication of JP2003269908A5 publication Critical patent/JP2003269908A5/ja
Application granted granted Critical
Publication of JP3740427B2 publication Critical patent/JP3740427B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2002066890A 2002-03-06 2002-03-12 干渉計を用いた形状測定方法および装置 Expired - Fee Related JP3740427B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2002066890A JP3740427B2 (ja) 2002-03-12 2002-03-12 干渉計を用いた形状測定方法および装置
US10/374,142 US6972850B2 (en) 2002-03-06 2003-02-27 Method and apparatus for measuring the shape of an optical surface using an interferometer
DE10309586A DE10309586B4 (de) 2002-03-06 2003-03-05 Form-Messverfahren und -vorrichtung unter Verwendung eines Interferometers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002066890A JP3740427B2 (ja) 2002-03-12 2002-03-12 干渉計を用いた形状測定方法および装置

Publications (3)

Publication Number Publication Date
JP2003269908A JP2003269908A (ja) 2003-09-25
JP2003269908A5 true JP2003269908A5 (enExample) 2005-04-07
JP3740427B2 JP3740427B2 (ja) 2006-02-01

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002066890A Expired - Fee Related JP3740427B2 (ja) 2002-03-06 2002-03-12 干渉計を用いた形状測定方法および装置

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JP (1) JP3740427B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12498293B2 (en) * 2023-03-20 2025-12-16 Mloptic Corp. Multi-configurable wavefront tester

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