JP3720008B2 - 可変波長光源 - Google Patents

可変波長光源 Download PDF

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Publication number
JP3720008B2
JP3720008B2 JP2002284995A JP2002284995A JP3720008B2 JP 3720008 B2 JP3720008 B2 JP 3720008B2 JP 2002284995 A JP2002284995 A JP 2002284995A JP 2002284995 A JP2002284995 A JP 2002284995A JP 3720008 B2 JP3720008 B2 JP 3720008B2
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JP
Japan
Prior art keywords
substrate
movable plate
light source
diffraction grating
actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2002284995A
Other languages
English (en)
Japanese (ja)
Other versions
JP2004119933A5 (enExample
JP2004119933A (ja
Inventor
良文 高橋
崇記 斉藤
賢一 中村
利幸 松岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anritsu Corp
Original Assignee
Anritsu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anritsu Corp filed Critical Anritsu Corp
Priority to JP2002284995A priority Critical patent/JP3720008B2/ja
Publication of JP2004119933A publication Critical patent/JP2004119933A/ja
Publication of JP2004119933A5 publication Critical patent/JP2004119933A5/ja
Application granted granted Critical
Publication of JP3720008B2 publication Critical patent/JP3720008B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Mechanical Light Control Or Optical Switches (AREA)
  • Semiconductor Lasers (AREA)
JP2002284995A 2002-09-30 2002-09-30 可変波長光源 Expired - Lifetime JP3720008B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002284995A JP3720008B2 (ja) 2002-09-30 2002-09-30 可変波長光源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002284995A JP3720008B2 (ja) 2002-09-30 2002-09-30 可変波長光源

Publications (3)

Publication Number Publication Date
JP2004119933A JP2004119933A (ja) 2004-04-15
JP2004119933A5 JP2004119933A5 (enExample) 2005-04-07
JP3720008B2 true JP3720008B2 (ja) 2005-11-24

Family

ID=32278405

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002284995A Expired - Lifetime JP3720008B2 (ja) 2002-09-30 2002-09-30 可変波長光源

Country Status (1)

Country Link
JP (1) JP3720008B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20130079603A (ko) 2006-07-06 2013-07-10 가부시키가이샤 니콘 광학 디바이스, 노광 장치, 및 디바이스 제조 방법
JP2010107628A (ja) * 2008-10-29 2010-05-13 Topcon Corp Ｍｅｍｓ走査型ミラー及びその製造方法
JP2013029849A (ja) * 2012-09-14 2013-02-07 Topcon Corp Ｍｅｍｓ走査型ミラーの製造方法

Also Published As

Publication number Publication date
JP2004119933A (ja) 2004-04-15

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