CN101051114B - 具有隐藏铰链的钢琴型微电子机械镜 - Google Patents
具有隐藏铰链的钢琴型微电子机械镜 Download PDFInfo
- Publication number
- CN101051114B CN101051114B CN2007100908280A CN200710090828A CN101051114B CN 101051114 B CN101051114 B CN 101051114B CN 2007100908280 A CN2007100908280 A CN 2007100908280A CN 200710090828 A CN200710090828 A CN 200710090828A CN 101051114 B CN101051114 B CN 101051114B
- Authority
- CN
- China
- Prior art keywords
- platform
- torsion
- hinge
- axle
- chip architecture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29304—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by diffraction, e.g. grating
- G02B6/29305—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by diffraction, e.g. grating as bulk element, i.e. free space arrangement external to a light guide
- G02B6/2931—Diffractive element operating in reflection
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
- G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
- G02B6/12019—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by the optical interconnection to or from the AWG devices, e.g. integration or coupling with lasers or photodiodes
- G02B6/12021—Comprising cascaded AWG devices; AWG multipass configuration; Plural AWG devices integrated on a single chip
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29304—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by diffraction, e.g. grating
- G02B6/29305—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by diffraction, e.g. grating as bulk element, i.e. free space arrangement external to a light guide
- G02B6/29313—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by diffraction, e.g. grating as bulk element, i.e. free space arrangement external to a light guide characterised by means for controlling the position or direction of light incident to or leaving the diffractive element, e.g. for varying the wavelength response
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29379—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device
- G02B6/29395—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device configurable, e.g. tunable or reconfigurable
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29304—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by diffraction, e.g. grating
- G02B6/29305—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by diffraction, e.g. grating as bulk element, i.e. free space arrangement external to a light guide
- G02B6/29311—Diffractive element operating in transmission
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29379—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device
- G02B6/2938—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device for multiplexing or demultiplexing, i.e. combining or separating wavelengths, e.g. 1xN, NxM
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
- G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
- G02B6/3524—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being refractive
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
- G02B6/356—Switching arrangements, i.e. number of input/output ports and interconnection types in an optical cross-connect device, e.g. routing and switching aspects of interconnecting different paths propagating different wavelengths to (re)configure the various input and output links
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Optical Integrated Circuits (AREA)
Abstract
根据本发明的微电子机械镜装置,包括可绕两个互相垂直的轴枢转的平台,和设置在平台下面的铰链结构。铰链结构包括第一铰链和第二铰链以及在平台层下面单层制造的平衡环。铰链结构的一端从平台下表面延伸,而另一端从底座延伸,该底座从基片向上延伸。
Description
技术领域
本发明涉及一种绕轴旋转的微电子机械(MEMs)镜,具体涉及一种其中铰链位于反射平台下面的绕轴旋转的MEMs。
背景技术
用于光学开关的常规MEMs镜,例如于2003年3月18日授予Buzzetta等人的美国专利No.6,535,319中所公开的:其将光束引导至多个输出端口中的一个,并包括可绕单轴转动的静电控制镜。倾斜MEMs镜,例如于2002年12月10日授予Edward Hill的美国专利No.6,491,404所公开的,以及于2004年1月13日授予Dhuler等人的6,677,695所公开的,其在此通过参考合并入本申请中,它们包括可绕中心纵轴枢转的镜。在上述Hill的专利公开的MEMs镜装置1,如图1所示,其包括矩形平坦表面2,其由扭转(torsional)铰链4和5分别枢转安装到基片9上面的固定支柱7和8。扭转铰链可以采用蛇状铰链的形式,如于2001年12月11日授予Hill等的美国专利No.6,327,855中所公开,并如以RobertWood名义申请的于2002年9月12日公布的美国专利公开号为No.2002/0126455中所公开,在此通过参考将它们合并入本申请中。为了紧密地安置常规的MEMs镜,即使用高填充因子(fill factor)(填充因子=宽度/间距),它们必须使用彼此平行的旋转轴定位。不幸的是,这种镜构造限制大大约束了在制造总体开关时必须使用的其它设计选择。
当使用常规的MEMs布置时,设置在平坦表面2上的镜1,通过将平坦表面2的一侧10a或平坦表面2的另一侧10b向基片9牵引,可以以正和负的角度旋转,例如±2°。不幸的是,当装置在位于装置旋转路径末端的端口(port)之间切换时,随着镜1将光束扫过这些端口,中间的端口接收光线的时间不到一毫秒,由此引起不需要的光学瞬态现象(transient)或动态串扰(cross-talk)。
动态串扰问题的一个解决方案是开始或同时使镜绕第二轴旋转,由此避开中间端口。在图2中示出可绕两个轴旋转的MEMs镜的一个例子,它包括通过第一对扭转弹簧12和13枢转安装到外平衡环14的镜平台11,通过第二对扭转弹簧17和18将外平衡环14枢转安装到基片16。在于2003年3月4日授予Brenner的美国专利No.6,529,652和于2002年9月24日授予Yu等人的6,454,421中公开了外平衡装置的例子。不幸的是,外平衡环大大限制了在给定区域及其附近可以布置镜的数量,即填充因子。而且,外平衡环可以引起从支撑结构反射出的光的不合需要的反射,例如扭转弹簧12和13以及外平衡环14。
为解决此问题提出的另一个方案在于2003年3月18日授予Nasiri等人的美国专利No.6,533,947中公开,它包括在镜平台下面的铰链。不幸的是,这些类型的镜装置包括四个分开的绕轴旋转的杆,这需要大量的空间和昂贵的多步制造工艺。所以,整个铰链结构不能隐藏在镜平台下面。
克服由上面列出的原申请的发明人提出的现有技术的缺点的方案是提供一种高填充因子MEMs镜装置,它可以绕与相邻的镜相同的轴旋转。在优选实施方式中,MEMs镜装置相对容易制造,使用内部平衡环,并可以用于高填充因子的应用中。
通常在MEMs镜装置中,铰链和反射镜被限定在相同的半导体中,例如Si层,由此当前镜的最小厚度要求是15微米,以阻止由于金的应力松弛而引起的曲率半径的蠕变,规定铰链宽度应该小于1.5微米,以获得所需的弹性常数。这些铰链尺寸受当前特征分辨率(feature resolution)和晶片均匀性两者刻蚀工艺(DRIE process)所限制。通过独立地优化镜和铰链的厚度,所需的铰链宽度可以提高到宽松的(comfortable)制造公差内而不牺牲镜的平整度。而且,整个晶片的电压-倾角均一性和产率(yield)将提高。
本发明的一个目的是通过提供一种MEMs装置来克服现有技术的缺点,其包括隐藏在镜平台下面的铰链结构,从而消除铰链厚度和镜厚度之间的相互影响,并使镜曲率和铰链尺寸优化,同时保持了高填充因子。
发明内容
因此,本发明涉及一种微电子机械(MEMs)装置,包括:
平台,在基片上方可绕相互垂直的第一轴和第二轴枢转;
底座,在平台下面从基片向上延伸;
第一扭转铰链,由两个扭转梁构成,所述两个扭转梁从所述底座的相对面向外延伸,能使平台倾斜于第一轴;
平衡架,至少部分沿第一扭转铰链延伸,用于沿所述第一轴接收第一扭转铰链的外端;以及
第二扭转铰链,由两个扭转梁构成,所述第二扭转铰链的两个扭转梁从所述平衡架的相对面延伸,且所述第二扭转铰链的两个扭转梁的端部沿所述第二轴连接到从所述平台下面向下延伸的裙板,能使平台绕第二轴滚动;
其中将第一扭转铰链和第二扭转铰链完全设置在平台下面,以使相邻MEMs装置紧密组合在一起。
本发明的另一个方案涉及一种制造微电子机械装置的方法,包括如下步骤:
a)提供一种硅绝缘体(SOI)结构,其包括由第一蚀刻停止层(etch stop layer)分开的第一重叠晶片结构和第二重叠晶片结构,第一重叠晶片结构和第二重叠晶片结构的每一个包括支撑基片(handle substrate)、晶片层、以及其间的第二蚀刻停止层,其中第一重叠晶片结构和第二重叠晶片结构的晶片层设置在第一蚀刻停止层的任何一侧;
b)从SOI结构的第二重叠晶片结构中除去支撑基片(handle substrate)和第二蚀刻停止层;
c)从第二重叠晶片结构的晶片层蚀刻平衡架和第一扭转铰链和第二扭转铰链,包括除去包括第一蚀刻停止层的多余材料,留下所述平衡架,所述第一扭转铰链和所述第二扭转铰链;
d)将所述SOI结构的余下的元件粘结到基片,提供包括从其延伸的底座的基片层;
e)将所述第一扭转铰链附加到底座;以及
f)除去第一重叠晶片结构的支撑基片和第二蚀刻停止层。
附图说明
参考表示优选实施方式的附图具体描述本发明,其中:
图1是常规MEMs装置的立体图;
图2是常规外平衡MEMs装置的平面图;
图3是根据本发明的绕轴旋转的MEMs装置的立体图;
图4是从下面看的图3装置的立体图;
图5是图3中的装置沿线A-A的横截面图;
图6是图3装置的电极结构的示意图;
图7是根据本发明另一实施方式的绕轴旋转的MEMs装置的立体图,其具有被切开的一部分侧面以显示下面的倾斜电极和平台;
图8是取自图7中装置下面的立体图;
图9a是图7中装置的横截面图;
图9b是图7中装置的侧视图;
图10a是根据本发明另一实施方式的绕轴旋转的MEMs装置的横截面图,其具有阶梯式电极(stepped electrode)和下表面;
图10b是图10a中装置的侧视图;
图11a-11e表示图3中装置的制造步骤的横截面图;
图12是利用本发明的镜装置的波长开关的示意图;
图13是图12中波长开关的输入/输出组件的示意图;以及
图14是图12中波长开关的输入组件的可选实施方式的示意图。
具体实施方式
参考图3、4和5,根据本发明的MEMs镜装置21包括上平台22,其可以绕由下铰链结构23限定的相互垂直的轴旋转,例如绕x和z旋转,下铰链结构23枢转地连接到由基片25延伸的矩形底座24。通常,上平台22具有叠置在铰链结构23上方的中间部分26a,和悬浮在基片25上方的两个外平面部分26b和26c。反射涂层27,例如金,可以设置在上平台22的部分26a、26b和26c的任何组合上,用于使光束或光子束重新定向,如此后参考图11到13所讨论的。在铰链结构23上设置光学镜,从而平台22的长度可以减少原始钢琴型(Piano)MEMs长度的一半,即600μm而不是1200μm(不包括铰链面积)。因此,夹角(snap angle)可以大一倍,并可以获得更高的平台。
下铰链结构23包括第一扭转铰链,由从底座24的相对面向外延伸的扭转梁(beam)31a和31b构成。扭转梁31a和31b的外端连接到平衡架,例如环32,其至少部分环绕第一扭转铰链。将扭转梁31a和31b的端部沿z轴(即中心纵向轴)连接到底座24和平衡环32,使得上平台22沿此倾斜。
扭转梁31a和31b优选是蛇状扭转梁,它比常规的扭转梁铰链更加坚固(robust)。实际上蛇状铰链比普通的横跨相同距离的扭转铰链更长,由此提供更大的偏转和强度,而不要求延伸普通全长扭转铰链所需要的空间。所示的扭转束31a和31b包含多个臂,这些臂位于垂直于x轴延伸的各个端,并由一系列平行于x轴延伸的折叠(fold)连接。
由扭转梁33a和33b形成的第二扭转铰链从平衡环32的相对面延伸到与从上平台22向下延伸的裙板34接触。扭转梁33a和33b的端部沿x轴,即中心横轴连接到平衡环32和裙板34,使得上平台22沿此滚动。所示的扭转梁33a和33b为蛇状扭转梁,它包括在其每端垂直于z轴延伸的臂,它由一系列平行于z轴延伸的折叠连接。
平衡环32和扭转梁31a、31b、33a和33b优选由单层材料制造,所以具有相同的厚度并且在枢转的平台22的下面彼此相邻。
为了使平台22相对于第一扭转铰链(Z轴)倾斜,如图6所示,一个可能的电极结构包括第一θZ电极41和第二θZ电极42,第一θZ电极41位于第一外部分26b的下方,和第二θZ电极42位于底座24相对面上的第二外部分26c的下方。单个的θX电极43从相邻的第一θZ电极41延伸到相邻的第二θZ电极42,横跨其间的间隙并在第一外部分26b和第二外部分26c的一侧下面。由电极控制来控制电极41、42和43的启动,随着平台22在相对Z轴的各位置之间倾斜,电极控制使平台22绕X轴滚动。
为了阻止平台22的不需要的“响声”,随着单个θx电极43的电压Vx的增加,第一θZ电极41的电压VzR逐渐降低。随着电压VzR降低到零,第二θZ电极42的电压VzL逐渐增加。假设不需要补偿电压,那么随着电压VzL达到其设定值以使平台22保持在所需位置,电压Vx将降低到最小值。可以选择三和四电极结构,包括在美国专利No.6,968,101和7,010,188中公开的那些结构,在此通过参考将其合并入本发明中。
在所公开的开环结构中,平台22的角位置非线性地取决于由电极41(或42)施加的电压,即随着施加电压的线性增加,角平台位置的增量变化比随电压增加得更大。所以,存在一个最大电压,即平台角位置,在此处平台角位置变得不稳定并将不可控地倾斜直到撞到部分下结构,如电极41。该最大电压确定了平台22可以移动的角运动的范围。平台角位置的不稳定性是如此造成的:平台22和电极41(热电极)之间的距离在平台外部分26b和26c的外自由端比在更靠近枢轴θZ的内部分降低得更快。结果,沿平台22的单位长度的力在平台22的外自由端比内部分增加得更快。为了增加平台的角运动范围,必须减小场强,即单位面积上的力,其在平台22的外自由端被感受到。参考图7、8、9a、9b、10a和10b,这通过提供电极41和42两个阶梯式或倾斜结构来实现。
参考图7和8,已经除去平台22的侧面以便露出倾斜电极141和142,它们以与基片25成锐角的斜坡形式制造。倾斜电极141和142的上端或顶端与平台22的内端,即Y轴邻近,而下端或底端位于平台22的外自由端之下,由此使平台22和电极141和142之间的间隙在外自由端比内端大。为了增加电极141和142的底端和平台22的下表面之间的有效距离,从平台22的下表面可以蚀刻出三角形部分143,在电极141和142上面形成倾斜的底壁144,它与平台22的上表面成锐角。电极141和142的底端在蚀刻部分143的最深的部分之下,即电极141和142的顶端或高端靠近蚀刻部分143的浅端,由此降低在平台22的外自由端的单位长度的力。因此,在更大范围的倾斜位置上平台22更加稳定。作为选择,平台22或者电极141的下面可以是平坦的,而另一面是倾斜的以使平台22单位长度上的力下降得更多。
作为选择,如图10a和10b所示,可以将第一阶梯式θx电极241和第二阶梯式θx电极242分别设置在第一外部分26b和第二外部分26c下面。上台阶位于平台22的中间部分26a附近,即Y轴附近,而下台阶位于平台22的外侧部分26b和26c下面,由此使平台22和电极241和242之间的间隙在外自由端比内端大。下台阶的面积也可以做得更小,由此减小由平台22的外自由端感受到的单位面积上的力。例如三个或多个多阶梯式电极也可以提供更均匀的力的分布。如上所述,为了进一步增加电极241和242和平台22之间的有效距离,从平台22的下表面可以蚀刻出三角形部分143,可以从平台22的下表面蚀刻台阶矩形部分243。每部分243的最深的部分位于电极241和242的下(或外)台阶之上,而部分243的第一台阶或最浅的部分位于电极241和242的上台阶上面,由此降低在平台22的外自由端单位长度上的力。因此,在更大范围的倾斜位置上平台22更加稳定。作为选择,平台22或者电极141的下面可以是平坦的,而另一面是阶梯式的以使平台22单位长度上的力下降得更多。
密集组合(packed)的微镜的结果是,单个镜的启动将扭矩,即角旋转,传递给邻近的镜,导致电场散射。参考图8,为了使串扰最小化,接地电极屏蔽(electrodegrounding shields)91位于基片25上,在电极141和142任一例或其周围形成电极腔,它们彼此电绝缘。接地屏蔽91延伸至电极141和142的长度,与电极141和142的顶端一样高,完全或基本上在平台22之下,以使相邻的平台22能够紧密组合。接地屏蔽91保持在地电位,即与镜平台22相同,而第一电极141和第二电极142中的一个保持在启动电压,例如100伏。
为了进一步消除相邻电极间的串扰,可以将附加的平台屏蔽92(图8、9b和10b)添加到平台22的下面、接地屏蔽91的外侧或内侧。如图9b和10b所示,平台接地屏蔽92可以沿平台22一直延伸,或者它们可以仅仅延伸至或稍微大于电极141和142的长度。通常,在其余位置,两个不同组的屏蔽91和92基本上平行、隔开且不重叠;然而,随着平台22的倾斜,平台屏蔽92开始与接地屏蔽91重叠。当平台26的倾斜角与施加到电极36(或37)的电压成正比时,例如在开环结构中,由重叠屏蔽提供的附加保护是特别有利的。因此,倾斜角越大,所需的电压越大,潜在的串扰量越大,但结果分别由重叠的接地屏蔽41和平台屏蔽42提供的屏蔽量越大。
优选的制造工艺是基于在硅绝缘体(SOI)或者其它合适的材料,例如半导体,晶片结构61中限定平台22和铰链23,该晶片结构61包括由蚀刻停止层,例如氧化层64分开的第一和第二叠加的硅或其它合适的材料晶片结构62和63,参见图11a到11e。第一硅晶片结构62由在处理晶片期间提供支撑的支撑片65、形成上平台22的第一SOI晶片层66以及它们之间的可去除的蚀刻停止层67,例如掩埋氧化层(BOX)构成。第二硅晶片结构63由在处理晶片期间提供支撑的支撑片68、形成铰链结构23的第二SOI晶片层69以及它们之间的可去除的蚀刻停止层70,例如掩埋氧化层70(BOX)构成。优选,可去除的蚀刻停止层70足够薄,例如2-3nm,以使层66和69之间具有导电性,或者蚀刻停止层70由导电材料制成。作为选择,可去除的蚀刻停止层70可以由具有本征传导部分(locally conductive section)的基本上非导电材料制成,以确保平台22和串扰屏蔽92之间的导电性。
如图11a所示,在工艺的第一步中,用第一硅晶片结构62和第二硅晶片结构63之间的BOX层64将它们粘结在一起。可以在铰链结构23的位置的上面添加第一SOI晶片层66中的腔,以确保在平台22和铰链23之间具有充足的空间。为了有助于接下来的蚀刻步骤,可以在粘结之前对第二硅晶片层69进行构图。在第二步中,如图11b所示,除去支撑片(handle wafer)68和BOX层70,露出第二SOI晶片层69。BOX层作为第二SOI晶片层69,即铰链层的蚀刻停止层,由此提高晶片的均匀性。在第三步中,参见图11c,将第二SOI晶片层69构图(如果还没有)成铰链结构23的形状(以及平台22的阶梯式或者倾斜下面的形状,如果必要的话),并且蚀刻掉包括BOX层64的多余材料,留下铰链结构23和串扰屏蔽92(如果必要)。步骤4(图11d)包括将晶片61余下的元件粘结到基片或电极晶片层72,如果必要,它包括底座24和串扰屏蔽91,并除去支撑片(handle wafer)层65和BOX层67,露出第一SOI晶片层66,即平台22。使用定时(timed)蚀刻层或通过使用氧化蚀刻停止层来形成电极晶片层72,在电极晶片层72中形成基片25。在最后的步骤中,如图11e所示,将反射涂层,例如金施加到平台22的顶部,即第一SOI晶片层66。
双SOI工艺也能使镜串扰壁(x-talk walls)92在和铰链结构23相同的层从平台22的下表面延伸,因此无需在下电极晶片72中的复杂外形上进行电极构图。通过组合电极晶片72中的蚀刻腔与第一SOI晶片66下面的蚀刻腔143或243,通过从第一SOI晶片66的下面选择性地除去铰链层69,可以获得双阶梯式电极到镜的空间。因此在两个晶片66和69之间分配总的腔深度-避免两个蚀刻步骤,定时蚀刻和在深的外形上光刻。
如图12、13和14所示,根据本发明的钢琴型MEMs镜装置在波长开关301中特别有用。在操作中,通过输入/输出组件302发射具有多个不同波长信道的光束,组件302分别包括多个输入/输出端口,例如第一输入/输出端口303、第二输入/输出端口304、第三输入/输出端口305和第四输入/输出端口306。将光束定向到具有光能的元件,例如凹面镜309,其将光束重新定向到分光元件311,例如布拉格光栅。分光元件将光束分成不同的波长信道(λ1、λ2、λ3),再将这些波长信道定向到具有光能的元件,例如凹面镜309。凹面镜309再将各种波长信道重新定向到根据本发明的钢琴型MEMs镜装置312的阵列,它们被独立控制以将各种波长信道定向回到所需的任何输入/输出端口。将被分配用于相同端口的波长信道从凹面镜309反射回到分光元件311,用于从凹面镜309再组合和再定向到所需的输入/输出端口。可以由在其任何一侧具有其它开关元件的单个透镜或由在其间具有分光元件311的一对透镜替换凹面镜309。
具体参考图13,输入/输出组件302包括具有相应的准直透镜314a到314d的多个输入/输出光纤313a到313d。单个透镜316用于将输入/输出端口之间的空间补偿转换成角度补偿。图14示出了输入/输出组件的优选实施方式,其中利用双折射晶体317和波片318来消除不想要的偏振分集(polarization diversity)效应。对于入射光束,透镜316通过双折射晶体317定向每个光束,它将光束分成两个垂直偏振子光束(o和e)。半波片318位于一个子光束的光路中,用于使其偏振旋转90度,由此两个子光束具有相同的偏振,用于传输到开关的其余部分。作为选择,波片318是四分之一波片,并使一个子光束以一个方向旋转45度,而另一个四分之一波片319使另一个子光束以相反的方向旋转45度,由此两个子光束具有相同的偏振。对于出射光,相同偏振子光束的一个(或两个)的偏振被波片318(和319)旋转,由此子光束垂直偏振。然后通过双折射晶体317再混合垂直偏振子光束并输出适当的输入/输出端口。根据本发明的微电子机械特别适合用于具有偏振分集前端的开关装置,因为它们提供一对反射表面,即为每个子光束提供一个。
Claims (19)
1.一种微电子机械装置,包括:
平台,其在基片上方可绕相互垂直的第一轴和第二轴枢转;
底座,在所述平台下面从所述基片向上延伸;
第一扭转铰链;
平衡架,至少部分沿所述第一扭转铰链延伸,用于沿所述第一轴接收所述第一扭转铰链的外端;以及
第二扭转铰链;
其特征在于:
所述第一扭转铰链由两个扭转梁构成,所述第一扭转铰链的两个扭转梁从所述底座的相对面向外延伸,能使所述平台倾斜于所述第一轴;
所述第二扭转铰链由两个扭转梁构成,所述第二扭转铰链的两个扭转梁从所述平衡架的相对面延伸,且所述第二扭转铰链的两个扭转梁的端部沿所述第二轴连接到从所述平台下面向下延伸的裙板,能使所述平台绕所述第二轴滚动;和
所述第一扭转铰链和所述第二扭转铰链被完全设置在所述平台下面,以使相邻微电子机械装置紧密组合在一起。
2.根据权利要求1所述的装置,其中所述平衡架和所述第一扭转铰链与第二扭转铰链具有相同的厚度并彼此相邻,因此它们由单层材料制成。
3.根据权利要求2所述的装置,其中所述第一扭转铰链的扭转梁包括一对蛇状扭转梁,它们沿所述第一轴从底座的相对侧延伸到与所述平衡架接触;并且其中所述第二扭转铰链的扭转梁包括一对蛇状扭转梁,它们沿所述第二轴从所述平衡架的相对侧延伸出。
4.根据权利要求1所述的装置,进一步包括:
第一倾斜电极,其在所述第一轴一侧的平台下面,用于使所述平台倾斜于所述第一轴;以及
滚动电极,其在所述第二轴一侧的平台下面,用于使所述平台相对于所述第二轴滚动。
5.根据权利要求4所述的装置,进一步包括第二倾斜电极,其在所述第一轴一侧相对的另一侧的平台下面,用于使平台相对于所述第一轴倾斜。
6.根据权利要求4所述的装置,其中所述第一倾斜电极相对于所述平台的底面倾斜。
7.根据权利要求6所述的装置,其中在所述第一倾斜电极的上面的平台的底面的一部分是倾斜的。
8.根据权利要求4所述的装置,其中所述第一倾斜电极包括双阶梯式电极。
9.根据权利要求8所述的装置,其中在所述第一倾斜电极的上面的平台的底部包括两个阶梯腔。
10.根据权利要求4所述的装置,进一步包括串扰屏蔽,其从位于所述第一倾斜电极的任何一侧上的基片延伸,以使相邻电极间的串扰最小化。
11.根据权利要求4所述的装置,进一步包括串扰屏蔽,其从位于所述第一倾斜电极的任何一侧上的所述平台下表面延伸。
12.一种制造微电子机械装置的方法,包括如下步骤:
a)提供一种硅绝缘体SOI结构,其包括由第一蚀刻停止层分开的第一重叠晶片结构和第二重叠晶片结构,所述第一重叠晶片结构和第二重叠晶片结构中的每一个包括支撑基片、晶片层、以及其间的第二蚀刻停止层,其中所述第一重叠晶片结构和第二重叠晶片结构的所述晶片层分别设置在所述第一蚀刻停止层的两侧;
b)从所述SOI结构的所述第二重叠晶片结构除去所述第二重叠晶片结构的支撑基片和所述第二蚀刻停止层;
c)从所述第二重叠晶片结构的晶片层蚀刻平衡架和第一扭转铰链和第二扭转铰链,包括除去包括第一蚀刻停止层的多余材料,留下所述平衡架,所述第一扭转铰链和所述第二扭转铰链;
d)将所述SOI结构的余下的元件粘结到基片,提供基片层,其包括底座,所述底座从所述基片层延伸;
e)将所述第一扭转铰链附加到所述底座;以及
f)除去所述第一重叠晶片结构的所述支撑基片和所述第二蚀刻停止层。
13.根据权利要求12所述的方法,其中步骤a)包括在所述第一重叠晶片结构的所述晶片层提供腔体,在所述第一重叠晶片结构的所述晶片层上蚀刻铰链结构,以确保在所述铰链结构和所述第一重叠晶片结构的所述晶片层之间具有足够的空间。
14.根据权利要求12所述的方法,在步骤c)和d)之间进一步包括从所述第一重叠晶片结构的所述晶片层除去三角形部分,以在其中形成倾斜部分。
15.根据权利要求14所述的方法,其中在步骤d)中所述基片层还包括倾斜的电极表面。
16.根据权利要求12的方法,在步骤c)和d)之间进一步包括从所述第一重叠晶片结构的所述晶片层除去矩形部分,以在其中形成阶梯部分。
17.根据权利要求12所述的方法,其中步骤c)包括沿第一轴将所述第一扭转铰链蚀刻成从所述平衡架向内延伸的一对蛇状扭转梁;和沿第二轴将所述第二扭转铰链蚀刻成从所述平衡架的相对侧向外延伸的一对蛇状扭转梁。
18.根据权利要求12所述的方法,其中步骤c)包括从靠近所述第一重叠晶片结构的晶片层的外边缘的所述第二重叠晶片结构的所述晶片层蚀刻串扰屏蔽。
19.根据权利要求12所述的方法,其中在步骤d)中所述基片层还包括靠近其外边缘向上延伸的串扰屏蔽。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US78956406P | 2006-04-06 | 2006-04-06 | |
US60/789,564 | 2006-04-06 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101051114A CN101051114A (zh) | 2007-10-10 |
CN101051114B true CN101051114B (zh) | 2013-02-13 |
Family
ID=38561384
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2007100908280A Active CN101051114B (zh) | 2006-04-06 | 2007-04-06 | 具有隐藏铰链的钢琴型微电子机械镜 |
CN2007100908308A Active CN101051104B (zh) | 2006-04-06 | 2007-04-06 | 多单元波长色散装置 |
CNA2007100908276A Pending CN101051103A (zh) | 2006-04-06 | 2007-04-06 | 多单元平面光波电路色散装置 |
Family Applications After (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2007100908308A Active CN101051104B (zh) | 2006-04-06 | 2007-04-06 | 多单元波长色散装置 |
CNA2007100908276A Pending CN101051103A (zh) | 2006-04-06 | 2007-04-06 | 多单元平面光波电路色散装置 |
Country Status (3)
Country | Link |
---|---|
US (3) | US20070237451A1 (zh) |
CN (3) | CN101051114B (zh) |
CA (3) | CA2584149C (zh) |
Families Citing this family (52)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7292786B1 (en) * | 2002-09-24 | 2007-11-06 | Avanex Corporation | Method and system for a re-configurable optical multiplexer, de-multiplexer and optical add-drop multiplexer |
US8705960B2 (en) | 2007-02-08 | 2014-04-22 | Jds Uniphase Corporation | M×N wavelength selective switch (WSS) |
US8081875B2 (en) * | 2007-02-08 | 2011-12-20 | Jds Uniphase Corporation | Wavelength switch |
US7889991B2 (en) * | 2007-02-12 | 2011-02-15 | Jds Uniphase Corporation | Planar lightwave circuit based tunable 3 port filter |
JP4939341B2 (ja) * | 2007-08-23 | 2012-05-23 | 日本電信電話株式会社 | 光信号処理装置 |
JP2009134294A (ja) * | 2007-11-08 | 2009-06-18 | Fujitsu Ltd | 光デバイスおよび波長選択スイッチ |
WO2009063986A1 (ja) * | 2007-11-15 | 2009-05-22 | Nippon Telegraph And Telephone Corporation | 光回路およびそれを用いた光信号処理装置 |
ATE554413T1 (de) * | 2007-12-12 | 2012-05-15 | Jds Uniphase Corp | Verpackung eines rekonfigurierbaren optischen add-drop-moduls |
US7676126B2 (en) * | 2007-12-12 | 2010-03-09 | Jds Uniphase Corporation | Optical device with non-equally spaced output ports |
US7630599B2 (en) * | 2007-12-14 | 2009-12-08 | Jds Uniphase Corporation | Wavelength dispersive device with temperature compensation |
US7952778B2 (en) * | 2008-01-15 | 2011-05-31 | Jds Uniphase Corporation | Biaxial MEMS mirror with hidden hinge |
US8274722B2 (en) * | 2008-01-15 | 2012-09-25 | Moidu Abdul Jaleel K | Counter-balanced MEMS mirror with hidden hinge |
US8045854B2 (en) * | 2008-02-07 | 2011-10-25 | Jds Uniphase Corporation | M×N wavelength selective optical switch |
US8849115B2 (en) | 2008-03-11 | 2014-09-30 | Ciena Corporation | Directionless optical architecture and highly available network and photonic resilience methods |
US8625994B2 (en) * | 2008-03-11 | 2014-01-07 | Ciena Corporation | Directionless reconfigurable optical add-drop multiplexer systems and methods |
US8233794B2 (en) * | 2008-09-09 | 2012-07-31 | Paul Colbourne | Hitless MxN wavelength selective switch |
CA2695050C (en) * | 2009-02-27 | 2019-01-15 | Jds Uniphase Corporation | Method for auto-configuration of a wavelength selective switch in an optical network |
US8238018B2 (en) * | 2009-06-01 | 2012-08-07 | Zhou Tiansheng | MEMS micromirror and micromirror array |
KR20130010896A (ko) * | 2010-03-30 | 2013-01-29 | 파나소닉 주식회사 | 광학 반사 소자 |
US8300995B2 (en) | 2010-06-30 | 2012-10-30 | Jds Uniphase Corporation | M X N WSS with reduced optics size |
US10551613B2 (en) | 2010-10-20 | 2020-02-04 | Tiansheng ZHOU | Micro-electro-mechanical systems micromirrors and micromirror arrays |
US9036231B2 (en) | 2010-10-20 | 2015-05-19 | Tiansheng ZHOU | Micro-electro-mechanical systems micromirrors and micromirror arrays |
EP2447755B1 (en) | 2010-10-26 | 2019-05-01 | Lumentum Operations LLC | A pivotable MEMS device |
EP2520957B1 (en) * | 2011-05-06 | 2017-02-01 | Finisar Corporation | Optical Channel Monitor |
US9307301B2 (en) | 2011-09-16 | 2016-04-05 | Nippon Telegraph And Telephone Corporation | Optical switch |
DE102011089514B4 (de) | 2011-12-22 | 2022-09-01 | Robert Bosch Gmbh | Mikrospiegel und 2-Spiegelsystem |
US8885245B2 (en) | 2012-01-26 | 2014-11-11 | Jds Uniphase Corporation | Biaxial MEMS mirror with hidden hinge and staggered electrodes |
US9385634B2 (en) | 2012-01-26 | 2016-07-05 | Tiansheng ZHOU | Rotational type of MEMS electrostatic actuator |
GB201211296D0 (en) * | 2012-06-23 | 2012-08-08 | Bae Systems Plc | Apparatus and methods for combining and separating multiple beams |
CA2879170A1 (en) * | 2012-07-19 | 2014-01-23 | Finisar Corporation | Polarization diverse wavelength selective switch |
JP6142258B2 (ja) | 2012-07-25 | 2017-06-07 | サンテック株式会社 | 光ノード装置 |
US9645321B2 (en) | 2012-08-30 | 2017-05-09 | Nippon Telegraph And Telephone Corporation | Optical signal processing device |
AU2014235949B2 (en) * | 2013-03-20 | 2017-09-07 | Nistica, Inc. | Wavelength selective switch having integrated channel monitor |
US9696540B2 (en) | 2013-03-22 | 2017-07-04 | Lumentum Operations Llc | Hidden hinge MEMS with temporary gimbal anchor |
US9326050B2 (en) | 2013-07-17 | 2016-04-26 | Sumitomo Electric Industries, Ltd. | Wavelength selective switch and method of manufacturing same |
JP6191693B2 (ja) | 2013-07-17 | 2017-09-06 | 住友電気工業株式会社 | 波長選択スイッチ |
US20150085884A1 (en) * | 2013-09-20 | 2015-03-26 | Alcatel-Lucent Usa, Inc. | Wavelength-selective switch for space-division multiplexed systems |
US9329345B2 (en) * | 2013-11-22 | 2016-05-03 | Alcatel Lucent | Hybrid wavelength selective switch |
US9304257B2 (en) | 2014-03-31 | 2016-04-05 | Lumentum Operations Llc | Wavelength selective switch using orthogonally polarized optical beams |
US9866315B2 (en) | 2015-04-24 | 2018-01-09 | Lumentum Operations Llc | Super-channel multiplexing and de-multiplexing using a phased array switching engine |
CN106707409A (zh) * | 2015-08-14 | 2017-05-24 | 清华大学 | 一种实现空间光色散的装置及方法 |
CN105549155A (zh) * | 2015-10-15 | 2016-05-04 | 扬州瑞威光电科技有限公司 | 平面单片集成波分复用-解复用器及其实现方法 |
WO2018035865A1 (zh) * | 2016-08-26 | 2018-03-01 | 华为技术有限公司 | 一种用于波长选择开关wss的信号监控方法及装置 |
US10367596B1 (en) * | 2017-05-23 | 2019-07-30 | Ii-Vi Delaware, Inc. | Multiple wavelength selective switch with shared switch |
WO2019095133A1 (en) * | 2017-11-15 | 2019-05-23 | Source Photonics (Chengdu) Company Limited | Waveguide array module and receiver optical sub-assembly |
CN108459375A (zh) * | 2018-01-23 | 2018-08-28 | 武汉维莱特光电技术有限公司 | 一种波长选择开关 |
CN108469663B (zh) * | 2018-05-17 | 2024-01-19 | 深圳市锐伺科技有限公司 | 一种镜头组件与芯片组件的组装工艺和对位装置 |
CN109031585B (zh) * | 2018-08-31 | 2020-11-20 | 北京空间机电研究所 | 一种反射镜支撑固定装置及其柔性支座 |
CN111856658B (zh) * | 2019-04-30 | 2022-03-25 | 华为技术有限公司 | 一种光通信的装置和波长选择方法 |
US11381891B2 (en) * | 2020-04-30 | 2022-07-05 | Hewlett Packard Enterprise Development Lp | Virtual fiber adapter for wavelength-as-a-service communications |
CN113671624B (zh) * | 2020-05-13 | 2022-11-11 | 华为技术有限公司 | 光交换装置、重定向方法、可重构光分插复用器及系统 |
CN114019675B (zh) * | 2021-09-29 | 2022-11-01 | 北京理工大学 | 二维微镜 |
Family Cites Families (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5002350A (en) * | 1990-02-26 | 1991-03-26 | At&T Bell Laboratories | Optical multiplexer/demultiplexer |
US6028689A (en) * | 1997-01-24 | 2000-02-22 | The United States Of America As Represented By The Secretary Of The Air Force | Multi-motion micromirror |
US6097859A (en) | 1998-02-12 | 2000-08-01 | The Regents Of The University Of California | Multi-wavelength cross-connect optical switch |
US6315423B1 (en) * | 1999-07-13 | 2001-11-13 | Input/Output, Inc. | Micro machined mirror |
US6327855B1 (en) * | 2000-02-04 | 2001-12-11 | Jds Uniphase Inc. | Actuators including serpentine arrangements of alternating actuating and opposing segments and related methods |
US6498872B2 (en) | 2000-02-17 | 2002-12-24 | Jds Uniphase Inc. | Optical configuration for a dynamic gain equalizer and a configurable add/drop multiplexer |
US6480320B2 (en) * | 2001-02-07 | 2002-11-12 | Transparent Optical, Inc. | Microelectromechanical mirror and mirror array |
US20020126455A1 (en) * | 2001-02-14 | 2002-09-12 | Wood Robert L. | Tiled microelectromechanical device modules and fabrication methods |
US6491404B2 (en) * | 2001-02-23 | 2002-12-10 | Jds Uniphase Corporation | Microelectromechanical apparatus with tiltable bodies including variable tilt-stop engaging portions and methods of operation and fabrication therefor |
US6683721B2 (en) * | 2001-02-27 | 2004-01-27 | Jds Uniphase Corporation | Low dispersion interleaver |
US6529652B1 (en) * | 2001-03-15 | 2003-03-04 | Tellium, Inc. | Optical switch and method for aligning optical switch components |
WO2002079853A1 (en) * | 2001-03-16 | 2002-10-10 | Corning Intellisense Corporation | Electrostatically actuated micro-electro-mechanical devices and method of manufacture |
US6535319B2 (en) * | 2001-07-03 | 2003-03-18 | Network Photonics, Inc. | Free-space optical wavelength routing element based on stepwise controlled tilting mirrors |
US6707959B2 (en) * | 2001-07-12 | 2004-03-16 | Jds Uniphase Inc. | Wavelength switch |
EP1298467B1 (en) * | 2001-09-10 | 2004-12-29 | JDS Uniphase, Inc | Optical wavelength selective switch without distortion of unblocked channels |
US6677695B2 (en) * | 2001-09-18 | 2004-01-13 | Jds Uniphase Corporation | MEMS electrostatic actuators with reduced actuation voltage |
US6856437B2 (en) * | 2002-02-01 | 2005-02-15 | Terabeam Corporation | Fast steering mirror |
US6813405B1 (en) * | 2002-03-29 | 2004-11-02 | Teem Photonics | Compact apparatus and method for integrated photonic devices having folded directional couplers |
DE60308675T2 (de) * | 2002-05-20 | 2007-08-16 | Metconnex Canada Inc., Ottawa | Wellenlängenselektiver schalter |
EP1506633A2 (en) * | 2002-05-20 | 2005-02-16 | Metconnex Canada Inc. | Reconfigurable optical add-drop module, system and method |
US6968101B2 (en) * | 2002-05-28 | 2005-11-22 | Jds Uniphase Inc. | Electrode configuration for piano MEMs micromirror |
US6941073B2 (en) * | 2002-07-23 | 2005-09-06 | Optical Research Associates | East-west separable ROADM |
US7787720B2 (en) * | 2004-09-27 | 2010-08-31 | Optium Australia Pty Limited | Wavelength selective reconfigurable optical cross-connect |
US20070041683A1 (en) * | 2005-08-16 | 2007-02-22 | Barrie Keyworth | Tunable Optical Filter |
-
2007
- 2007-04-04 US US11/696,355 patent/US20070237451A1/en not_active Abandoned
- 2007-04-04 US US11/696,335 patent/US7616372B2/en active Active
- 2007-04-04 US US11/696,418 patent/US7725027B2/en active Active
- 2007-04-05 CA CA2584149A patent/CA2584149C/en not_active Expired - Fee Related
- 2007-04-05 CA CA2584145A patent/CA2584145C/en active Active
- 2007-04-05 CA CA002584147A patent/CA2584147A1/en not_active Abandoned
- 2007-04-06 CN CN2007100908280A patent/CN101051114B/zh active Active
- 2007-04-06 CN CN2007100908308A patent/CN101051104B/zh active Active
- 2007-04-06 CN CNA2007100908276A patent/CN101051103A/zh active Pending
Also Published As
Publication number | Publication date |
---|---|
CN101051103A (zh) | 2007-10-10 |
US20070236775A1 (en) | 2007-10-11 |
CA2584145C (en) | 2014-09-23 |
US20070237451A1 (en) | 2007-10-11 |
CA2584147A1 (en) | 2007-10-06 |
CA2584149C (en) | 2014-06-17 |
US7616372B2 (en) | 2009-11-10 |
CN101051104B (zh) | 2010-12-01 |
CN101051114A (zh) | 2007-10-10 |
CN101051104A (zh) | 2007-10-10 |
CA2584149A1 (en) | 2007-10-06 |
US20070242953A1 (en) | 2007-10-18 |
US7725027B2 (en) | 2010-05-25 |
CA2584145A1 (en) | 2007-10-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN101051114B (zh) | 具有隐藏铰链的钢琴型微电子机械镜 | |
US7302132B2 (en) | Electrical x-talk shield for MEMs micromirrors | |
US7010188B2 (en) | Electrode configuration for piano MEMs micromirror | |
US6934439B2 (en) | Piano MEMs micromirror | |
US7031045B2 (en) | Two-dimensional micro-mirror array enhancements | |
US20020037128A1 (en) | Micro electromechanical system and method for transmissively switching optical signals | |
US20040027671A1 (en) | Tunable optical filter | |
US8599460B2 (en) | Micromirror device and micromirror array | |
US7203413B2 (en) | Sunken electrode configuration for MEMs micromirror | |
US6429976B1 (en) | Optical switch using tilt mirrors | |
US7167613B2 (en) | Interlaced array of piano MEMs micromirrors | |
US20040184718A1 (en) | Optical switch and optical switch system | |
US7187485B2 (en) | Integrated continuous spectrum spatial light modulator | |
US7110637B2 (en) | Two-step electrode for MEMs micromirrors | |
US6888470B2 (en) | Sensing of mirror position in an optical switch | |
EP1479647A2 (en) | Electrical X-talk shield for MEMs micromirrors | |
CA2468139C (en) | Electrical cross-talk shields for mems micromirrors | |
CA2482163C (en) | Two-step electrode for mems micromirrors | |
CA2501012C (en) | Interlaced array of piano mems micromirrors | |
CA2468132C (en) | Electrode configuration for piano mems micromirror | |
EP1479646A2 (en) | Electrode configuration for pivotable MEMS micromirror | |
US20100033796A1 (en) | Optical module, optical control method by optical module, optical switch, and optical switching method |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20151105 Address after: American California Patentee after: JDS UNIPHASE CORPORATION Address before: No. 430 California Milpitas Boulevard Mccarthy Patentee before: Flex Products Inc. A. JDS Unipha |