JP3717251B2

JP3717251B2 - Board warpage inspection equipment

Info

Publication number: JP3717251B2
Application number: JP30478396A
Authority: JP
Inventors: 昌孝林; 益弘棚田
Original assignee: Hokuriku Electric Industry Co Ltd
Current assignee: Hokuriku Electric Industry Co Ltd
Priority date: 1996-11-15
Filing date: 1996-11-15
Publication date: 2005-11-16
Anticipated expiration: 2016-11-15
Also published as: JPH10141931A

Description

【０００１】
【発明の属する技術分野】
本発明は、回路基板のような板材の反りを検査する板材の反り検査装置に関するねのである。
【０００２】
【従来の技術】
例えば、回路基板の製造に際しては、これを製造する各工程の終りで基板の反りの検査を行っている。このように各工程の終りで基板の反りの検査を行うのは、例えばパターン印刷工程の前工程で基板に反りが発生していると、パターン印刷工程で印刷時の光学像がゆがみ、正確なパターンを印刷できないことになるからである。
【０００３】
このような基板の反りの検出を従来は、基板の搬送経路の途中にゲートを設けて、反りが生じている基板はこのゲートを通過できないようにして反りを検査するゲート方式の反り検査装置か、あるいは基板の搬送経路の途中に基準面を有する基準ベースと、この基準面の四隅の上方にそれぞれに対向させて静電容量センサを対向配置し、各静電容量センサの静電容量値の違いで反りを検査する静電容量式の反り検査装置等が用いられていた。
【０００４】
【発明が解決しようとする課題】
しかしながら、ゲート方式の反り検査装置では、反りのある基板が搬送装置で送られてきてゲートを通過できずにその位置で停止すると、次々に送られてくる基板も反りのある基板に進行を阻止されて停止することになり、反り検査を円滑に行えない問題点がある。
【０００５】
一方、静電容量式の反り検査装置では、搬送経路の途中に基準面を有する基準ベースを昇降自在に配置し、搬送装置で基板が運ばれてきて基準ベースの真上に到達したとき、基準ベースを上昇させて基板を搬送装置から浮かせ、基準ベースの上昇位置でその基準面の四隅の上方にそれぞれに対向して存在する各静電容量センサが測定する静電容量値の違いで基板の反りを検査する構造であるため、基準ベースの上昇位置が測定精度に影響を及ぼし、換言すれば検査すべき基板の位置決めに高い精度が要求され、検査を正しく行い難い問題点があった。またこの装置では、４つの静電容量センサを必要とし、その測定感度を一定に揃える調整を４箇所で行わなければならず、調整に手間と時間がかかる問題点があった。
【０００６】
本発明の目的は、反りのある板材が検出されても、次に検査する板材の検査に支障を及ぼさない板材の反り検査装置を提供することにある。
【０００７】
本発明の他の目的は、検査すべき板材の位置決めにそれほど高い精度が要求されない板材の反り検査装置を提供することにある。
【０００８】
本発明の他の目的は、検査すべき板材の四隅の反りを個々に検査しなくても板材の反りを検査することができる板材の反り検査装置を提供することにある。
【０００９】
本発明の他の目的は、検査すべき板材の反りが基準面に向かって凹となる反りであっても検出を行える板材の反り検査装置を提供することにある。
【００１０】
本発明の他の目的は、反り検査ユニットの設置が容易な板材の反り検査装置を提供することにある。
【００１１】
本発明の他の目的は、大きさの異なる板材であっても、その反りの検査ができる板材の反り検査装置を提供することにある。
【００１２】
本発明の他の目的は、１つの反り検査ユニットで、板材のどのような反りでも検査できる板材の反り検査装置を提供することにある。
【００１３】
本発明の他の目的は、厚みや材質の異なる板材の反りを検査する場合の反りの許容範囲の調整ができる板材の反り検査装置を提供することにある。
【００１４】
本発明の他の目的は、検査のたびに板材を搬送装置から浮かすために基準面を上下させる必要がない板材の反り検査装置を提供することにある。
【００１５】
本発明の更に他の目的は、検査ステーションに板材を停止させたストッパ部材をこの板材から逃がす際に板材を上下振動させない板材の反り検査装置を提供することにある。
【００１６】
【課題を解決するための手段】
本発明は、検査ステーションに配置された基準面を有する基準ベースと、板材を検査ステーションに搬入してその板材の板面を基準面に向けた状態で板材を基準面上に載置し、検査後に検査ステーションから板材を搬出する搬送装置と、基準ベースの基準面に載置されて静止した板材の基準面からの反り量が許容範囲内にあるか否かを検査する反り検査器とを具備する板材の反り検査装置を改良するものである。
【００１７】
このような板材の反り検査装置において、反り検査器は、帯状の光線を出す発光手段とこの発光手段から出た帯状の光線を受光する受光手段とが組み合わされてなる第１及び第２の反り検査ユニットと、これら第１及び第２の反り検査ユニットの出力に基づいて板材の基準面からの反り量が許容範囲内にないときに反り検出信号を出力する判定部とで構成する。第１及び第２の反り検査ユニットを構成する発光手段及び受光手段は、それぞれ基準ベースの基準面とほぼ平行に帯状の光線が延びるように基準面の両側に配置する。第１及び第２の反り検査ユニットは、それぞれのユニットで用いる帯状の光線が板材の大きさに応じた所定の間隔をあけてほぼ平行に延びる位置関係で配置する。板材の反りの許容範囲は、基準ベースの基準面と帯状の光線との間の距離によって定める。反り検査器の判定部は、第１及び第２の反り検査ユニットの少なくとも１つの反り検査ユニットにおいて受光量の減少を検出すると反り検出信号を出力するように構成する。
【００１８】
このような板材の反り検査装置では、第１及び第２の反り検査ユニットを構成する発光手段及び受光手段をそれぞれ基準ベースの基準面とほぼ平行に帯状の光線が延びるように基準面の両側に配置して、基準ベースの基準面の上に置かれた板材の反りを検査する。即ち、基準ベースの基準面の上に置かれた板材が反っていて、発光手段が出す帯状の光線を遮ると、受光手段が受光する受光量が減少して、判定部が反りありと判定して反り検出信号を出力する。回路基板等の板材は、反る方向が通常決まっており、その反りの有無の検査をする際には、通常、板材はその反りが基準面から離れて上向きに凸となる向きで搬送装置に供給することが行われているので、板材に反りがあれば反り検査ユニットで容易に検出することができる。
【００１９】
本発明のように発光手段と受光手段とを組み合わせた第１及び第２の反り検査ユニットを用いて、これら第１及び第２の反り検査ユニットを構成する発光手段及び受光手段をそれぞれ基準ベースの基準面とほぼ平行に帯状の光線が延びるように基準面の両側に配置して検査をすると、板材の上方から静電容量センサで検査する場合と違って、検査のときの板材の位置決め精度はそれほど高くなくてよく、検査を容易に行うことができる。
【００２０】
また、基準面の両側に発光手段と受光手段とを配置して検査をする第１及び第２の反り検査ユニットによれば、検査すべき板材の四隅の反りを個々に検査しなくても板材の反りを検査することができ、少ない数の検査ユニットを用いて検査を行うことができ、反り検査装置の価格が安くなる。また、検査ユニットの数が少ない分だけ、検査ユニットの位置決めや設定作業が楽になる。
【００２１】
この装置では、発光手段は帯状の光線を出し、受光手段はこの帯状の光線を受光するので、線状の光線と違って、この光線の帯状の幅内に板材の反り部分が入っていれば板材の反りを検出することができ、反りの検出を安定して容易に行うことができる。
【００２２】
本発明の装置で、特に、反り検査器を、帯状の光線を出す発光手段とこの発光手段から出た帯状の光線を受光する受光手段とが組み合わされてなる第１乃至第３の反り検査ユニットと、これら第１乃至第３の反り検査ユニットの出力に基づいて板材の基準面からの反り量が許容範囲内にないときに反り検出信号を出力する判定部とで構成し、これら第１乃至第３の反り検査ユニットを構成する発光手段及び受光手段をそれぞれ基準ベースの基準面とほぼ平行に帯状の光線が延びるように基準面の両側に配置すると共に第３の反り検査ユニットを第１及び第２の反り検査ユニットの間に配置し、反り検査器の判定部を第１乃至第３の反り検査ユニットの少なくとも１つの反り検査ユニットが受光量の減少を検出した際に反り検出信号を出力するように構成すると、板材の四隅のいずれかが上向きになる反りは勿論のこと、誤って板材がその四隅の反りが下向きになる向きで供給されても、この場合には板材の中央側が上向きに凸になっているので第３の反り検査ユニットでその反りを検出することができる。
【００２３】
本発明で用いる第１及び第２の反り検査ユニットは、それぞれのユニットで用いる帯状の光線が、板材の搬入方向とほぼ直交する方向に延びるように配置し、第１及び第２の反り検査ユニットの間隔を搬入方向両側に位置する板材の２つの辺の反りを検出するように定めると、反り検査ユニットを構成する発光手段と受光手段とを板材の搬入方向とほぼ直交する方向の両側に配置すればよく、反り検査ユニットの設置を容易に行うことができる。
【００２４】
また、第１及び第２の反り検査ユニットを、両者間の間隔が調整可能となるように設けると、大きさの異なる板材であっても、その大きさに合わせて第１及び第２の反り検査ユニット間の間隔を調整することにより、大きさの異なる板材であっても、その反りの検査を行うことができる。
【００２５】
また本発明の装置で、特に、反り検査器を、基準面と平行する向きでこの基準面とほぼ全体的に対向する帯状の光線を出す発光手段とこの発光手段から出た帯状の光線を受光する受光手段とが組み合わされてなる１つの反り検査ユニットと、この反り検査ユニットの出力に基づいて板材の基準面からの反り量が許容範囲内にないときに反り検出信号を出力する判定部とで構成し、反り検査ユニットを構成する発光手段及び受光手段を基準ベースの基準面とほぼ平行に帯状の光線が延びるように基準面の両側に配置すると、１つの反り検査ユニットで、板材のどのような反りでも検査することができる。
【００２６】
また本発明の装置で、基準ベースを、反り検査ユニットに対する位置の調整を可能にする位置調整機構を備えた支持手段によって支持させると、厚みや材質の異なる（反り量の異なる）板材の反りを検査する場合の反りの許容範囲の調整を容易に行うことができる。反り検査ユニット側を動かすと、反り検査ユニットの設定のやり直しが必要になるが、基準ベースを移動させる場合にはこのような設定のやり直しが不要になる。
【００２７】
また本発明の装置は、搬送装置を板材の板面と接触してこの板材を搬送する回転ベルトを備えたベルトコンベアで構成し、基準ベースの基準面側の表面部には回転ベルトの厚み寸法よりも深さ寸法が長く且つ回転ベルトが通過するベルト通過溝を形成することが好ましい。更に、ベルトコンベアの回転ベルトの上に乗って搬送されてきた板材を基準ベースの基準面に対応した位置で停止させる板材ストッパ機構と、少なくともベルト通過溝内における回転ベルトの上下位置を変更するベルト位置変更装置とを備えて、ベルト位置変更装置は板材が板材ストッパ機構によって停止させられるまでは回転ベルトの板材の板面と接触する接触面をベルト通過溝の開口面より上に位置させ、板材が板材ストッパ機構によって停止させられて反り検査が実行されているときには、回転ベルトの接触面をベルト通過溝の開口面より下に位置させるように構成することが好ましい。
【００２８】
このように基準ベースの基準面側の表面部に回転ベルトの厚み寸法よりも深さ寸法が長く且つ回転ベルトが通過するベルト通過溝を形成し、このベルト通過溝内における回転ベルトの上下位置をベルト位置変更装置で変更すると、基準ベースの基準面を上昇させずに回転ベルトの方を下降させることにより、板材を回転ベルトから浮かして基準ベースの基準面上に置くことができ、検査のたびに板材を搬送装置から浮かすために基準面を上下させる必要がない板材の反り検査装置を提供することができる。このように基準ベースの基準面の位置を変えないで検査が行えると、基準面の位置の変化による誤差が入らず、検査を容易に精度よく行うことができる。
【００２９】
また、板材ストッパ機構によりベルトコンベアの回転ベルトの上に乗って搬送されてきた板材を基準ベースの基準面に対応した位置で容易に停止させることができる。
【００３０】
また本発明の装置で、板材ストッパ機構を、ストッパ部材と、このストッパ部材を板材停止位置または退避位置に移動させるストッパ部材移動装置とで構成し、且つストッパ部材を、板材停止位置にあるときに、板材の搬送方向側の辺と当接して板材を停止させるが回転ベルトの通過は許容するように構成することが好ましい。またストッパ部材移動装置は、ベルト位置変更装置の動作によって回転ベルトの接触面がベルト通過溝の開口面より下に位置させた際に、ストッパ部材を搬送方向側に移動させて退避位置に退避させ、反りの検査が終了して板材が検査ステーションから搬出された後にストッパ部材を板材停止位置に移動させるように構成することが好ましい。
【００３１】
このようにベルト位置変更装置の動作によって回転ベルトの接触面がベルト通過溝の開口面より下に位置した際に、ストッパ部材移動装置がストッパ部材を搬送方向側に移動させて退避位置に退避させると、検査ステーションに板材を停止させたストッパ部材をこの板材から逃がす際に、ストッパ部材を上下方向に逃がすタイプのものと違って、板材を上下振動させることがなく、このため板材の反りの検出精度を悪化させることなく安定して検査を行うことができる。
【００３２】
【発明の実施の形態】
図１（Ａ）（Ｂ）乃至図４は本発明に係る板材の反り検査装置における実施の形態の第１例を示したものであり、図１（Ａ）はこの反り検査装置における要部平面図、図１（Ｂ）は図１（Ａ）の側面図、図２は図１（Ａ）のＸ−Ｘ線断面図、図３は第１例で用いているベルト位置変更機構と搬送装置との関係を示す一部縦断側面図、図４は第１例で回転ベルトが下降された状態における回転ベルト，基準ベース，板材の相互関係を示す縦断側面図である。
【００３３】
この板材の反り検査装置では、検査ステーション１に基準ベース２がその基準面２ａを上に向けて水平向きに設置されている。基準ベース２は後述する反り検査ユニットに対する位置の調整を可能にするように位置調整機構３ａを備えた支持手段３によって支持されている。位置調整機構３ａは、例えばラックとピニオンとによる構造のもの、或いはスクリューネジとその回転で昇降するナットブロックとによる構造のもの等を用いることができる。回路基板の如き板材４は、搬送装置５によって検査ステーション１に搬入されて、板面を基準面２ａに向けた状態でこの基準面２ａ上に載置され、検査後に検査ステーション１から搬出されるようになっている。
【００３４】
図３に詳しく説明するように、この搬送装置５は、板材４の板面と接触して板材４を搬送するエンドレスの２本の回転ベルト６と、これら回転ベルト６の長手方向の両端でこれら回転ベルト６を掛け渡しているローラ７と、このローラ７を回転させるモータ８と備えたベルトコンベアで構成されている。基準ベース２の基準面２ａ側の表面部には、回転ベルト６の厚み寸法よりも深さ寸法が長く且つ回転ベルト６を通過させように縦断させてベルト通過溝９が形成されている。
【００３５】
搬送装置５の回転ベルト６の上に乗って搬送されてきた板材４を基準ベース２の基準面２ａに対応した位置で停止させるために板材ストッパ機構１０が、板材４の移動方向に対して基準ベース２の下流側の位置に設けられている。この板材ストッパ機構１０は、ストッパ部材１０ａと、このストッパ部材１０ａを板材停止位置または退避位置に移動させる油圧シリンダの如きストッパ部材移動装置１０ｂとを具備して構成されている。ストッパ部材１０ａは、板材停止位置にあるときに、板材４の搬送方向側の辺と当接して板材４を停止させるが回転ベルト６の通過は許容するように上面にベルト通過溝１０ｃを備えている。ストッパ部材移動装置１０ｂは、後述するベルト位置変更装置の動作によって回転ベルト６の接触面をベルト通過溝９の開口面より下に位置させた際に、ストッパ部材１０ａを搬送方向側に移動させて退避位置に退避させ、反りの検査が終了して板材４が検査ステーション１から搬出された後にストッパ部材１０ａを板材停止位置に移動させるように構成されている。
【００３６】
図３に示すように、この板材の反り検査装置は、少なくともベルト通過溝９内における回転ベルト６の上下位置を変更するベルト位置変更装置１１を備えている。このベルト位置変更装置１１は、搬送装置５の前後のローラ７を同時に昇降させる油圧シリンダ１１ａ，１１ｂにより構成されている。このようなベルト位置変更装置１１は、板材４が板材ストッパ機構１０によって停止させられるまでは図３に示すように回転ベルト６の板材４の板面と接触する接触面６ａをベルト通過溝９の開口面９ａより上に位置させ、板材４が板材ストッパ機構１０によって停止させられて反り検査が実行されているときには、図４に示すように回転ベルト６の接触面６ａをベルト通過溝９の開口面９ａより下に位置させるように制御する構造になっている。
【００３７】
検査ステーション１には、基準ベース２の基準面２ａに載置されて静止した板材４の基準面２ａからの反り量が許容範囲内にあるか否かを検査する反り検査器１２が配置されている。反り検査器１２は、帯状の光線１３，１４を出す発光手段１５ａ，１６ａと、これら発光手段１５ａ，１６ａから出た帯状の光線１３，１４を受光する受光手段１５ｂ，１６ｂとが組み合わされてなる第１及び第２の反り検査ユニット１５，１６と、第１及び第２の反り検査ユニット１５，１６の出力に基づいて板材４の基準面２ａからの反り量が許容範囲内にないときに反り検出信号を出力する判定部１７とで構成されている。板材４の基準面２ａからの反り量の許容範囲は、基準ベース２の基準面２ａと帯状の光線１３，１４との間の距離によって定められている。
【００３８】
これら第１及び第２の反り検査ユニット１５，１６を構成する発光手段１５ａ，１６ａ及び受光手段１５ｂ，１６ｂは、それぞれ基準ベース２の基準面２ａとほぼ平行に帯状の光線１３，１４が延びるようにして基準面２ａの両側に配置されている。この場合には、第１及び第２の反り検査ユニット１５，１６は、それぞれのユニットで用いる帯状の光線１３，１４が、板材４の搬入方向とほぼ直交する方向に延びるように配置されている。
【００３９】
第１及び第２の反り検査ユニット１５，１６の間隔は、板材４の大きさに応じた所定の間隔をあけてほぼ平行に延びる位置関係で配置され、搬入方向の両側に位置する板材４の２つの辺の反りを検出するように定められている。このため第１及び第２の反り検査ユニット１５，１６は、両者間の間隔が調整可能に設けられている。第１及び第２の反り検査ユニット１５，１６の間隔の調整は、板材４の移動方向に対して下流側に存在する第２の反り検査ユニット１６を固定として、発光手段１５ａと受光手段１５ｂとからなる第１の反り検査ユニット１５を例えば共通の架台に支持させておいてこの架台を図示しないスクリューネジ等のユニット移動手段で第２の反り検査ユニット１６の方向に平行移動させることが好ましい。
【００４０】
反り検査器１２の判定部１７は、第１及び第２の反り検査ユニット１５，１６の少なくとも１つの反り検査ユニットにおいて受光量の減少を検出すると、反り検出信号を出力するように構成されている。
【００４１】
次に、かかる構成の反り検査装置の動作について説明する。この板材の反り検査装置では、検査すべき板材４の四隅のいずれかに反りがあった場合、その反りが上向きになる面側を上にしてサプライ側で板材４が搬送装置４の各回転ベルト６の上に跨がって載せられて検査ステーション１に搬送される。反りは主に板材４の四隅に現れ、このため反りが現れた板材４の隅部は上向きに反り返る。
【００４２】
このとき検査ステーション１では、図１（Ｂ）に示すように基準ベース２の下流側の末端位置でストッパ部材１０ａがストッパ部材移動装置１０ｂの操作により基準ベース２の基準面２ａより上にストッパ部材１０ａの一部が存在するようにして待機させられている。また、基準ベース２の位置では、各回転ベルト６は基準面２ａの上方を通過している。これら回転ベルト６の通過を邪魔しないようにストッパ部材１０ａの上部には、前述したようにベルト通過溝１０ｃが設けられている。
【００４３】
各回転ベルト６で運ばれてきた板材４がストッパ部材１０ａに当たると、図示しないセンサがこれを検出してベルト位置変更装置１１に信号を出し、これにより油圧シリンダ１１ａ，１１ｂが作動して搬送装置５の前後のローラ７を同時に下降させる。この操作により搬送装置５の各回転ベルト６が下降して図４に示すように基準ベース２の各ベルト通過溝９に入り、これらベルト通過溝９内を通って走行する状態になる。この状態になると、板材４は各回転ベルト６で支えられた状態から離れて、基準ベース２の基準面２ａに支えられた状態に変わる。またこの状態になると、ストッパ部材移動装置１０ｂの操作によりストッパ部材１０ａが搬送方向側に移動されて退避位置に退避させられる。ストッパ部材１０ａの退避が搬送方向側に行われると、ストッパ部材１０ａの退避が真下に向けて行われる場合に生ずるストッパ部材１０ａが板材４の端縁を下向きにこすって板材４に上下振動を起こすのを回避することができ、板材４を基準面２ａ上で静止状態に保持できる。
【００４４】
かかる状態で、反り検査器１２の第１，第２の反り検査ユニット１５，１６により基準面２ａ上の板材４の反りがあるか否かの検査を行う。この検査は、第１，第２の反り検査ユニット１５，１６の発光手段１５ａ，１６ａから帯状の光線１３，１４を図５に示すように板材４の搬送方向の前後両端の位置をカバーできるような位置関係で出すことにより行う。帯状の光線１３，１４の高さは、板材４に反りがなければこの板材４で各帯状の光線１３，１４が遮光されない位置に予め定められている。
【００４５】
このため板材４に反りがなければ、帯状の光線１３，１４は板材４で遮光されないので、判定部１７から反り検出信号がでない。このように反り検出信号が出なかった板材４は、回路基板の製造に際しては搬送装置５の末端から次工程に運ばれて回路基板を製造するための次の加工を受ける。
【００４６】
板材４の四隅のいずれかに反りがあると、図５の場合では帯状の光線１３が一部遮光されるので、受光手段１５ｂに受光される光量が減少し、判定部１７から反り検出信号が出る。反り検出信号が出た板材４は、搬送装置５の末端から反り矯正工程に運ばれて反りの矯正を受ける。反りの矯正が終わった板材４は、再度反り検査をする。
【００４７】
１つの板材４の反りの検査が終了すると、ベルト位置変更装置１１の油圧シリンダ１１ａ，１１ｂが作動して搬送装置５の前後のローラ７を同時に上昇させる。この操作により、搬送装置５の各回転ベルト６が上昇して図３に示すように基準ベース２の基準面２ａの上方を各回転ベルト６が走行する状態に戻る。
【００４８】
このような操作が繰り返されて、多数枚の板材４の反りの検査が順次行われる。
【００４９】
図６（Ａ）（Ｂ）は本発明に係る板材の反り検査装置における実施の形態の第２例を示したものであり、（Ａ）はこの反り検査装置における要部平面図、（Ｂ）は（Ａ）の側面図である。
【００５０】
この反り検査装置においては、検査ステーション１の反り検査器１２が、板材４の進行方向の両端の反りの検査を行う第１及び第２の反り検査ユニット１５，１６の他に、これら第１及び第２の反り検査ユニット１５，１６の間にあって板材４の進行方向の中間の反りの検査を行う第３の反り検査ユニット１８を備えている点で第１例と相違している。この第３の反り検査ユニット１８は、帯状の光線９を出す発光手段１８ａと、これら発光手段１８ａから出た帯状の光線１９を受光する受光手段１８ｂとが組み合わされて構成されている。これら発光手段１８ａと受光手段１８ｂも、基準ベース２の基準面２ａとほぼ平行に帯状の光線１９が延びるようにして基準面２ａの両側に配置されている。この場合も、第３の反り検査ユニット１８は、帯状の光線１９が板材４の搬入方向とほぼ直交する方向に延びるように配置されている。受光手段１８ｂからの検出信号は判定部１７に入力されている。判定部１７は、いずれかの反り検査ユニット１５，１６，１８の受光手段１５ｂ，１６ｂ，１８ｂから減光信号が入力されると、反り検出信号を出すようになっている。その他の構成は、第１例と同様である。
【００５１】
このような構成の板材の反り検査装置によれば、誤って反りの方向が逆向きの板材４が供給されて、前述したようにストッパ部材１０ａで停止させられ、搬送装置５の下降で該板材４が基準ベース２の基準面２ａに載せられた場合、この板材４では反りが四隅のいずれかに現れているとすると、この反りで板材４の隅部は下向きに反り返り、この反り部分で持ち上げられて板材４の上面中央側が上に凸形に突出する形になっている。このため板材４は、第１及び第２の反り検査ユニット１５，１６の発光手段１５ａ，１６ａ出す帯状の光線１３，１４を遮光しないが、第３の反り検査ユニット１８の発光手段１８ａが出す帯状の光線９を遮光することとなり、受光手段１８ｂの受光量が減少し、判定部１７に減光信号が入力されるので、判定部１７は反り検出信号を出す。この場合、判定部１７からは板材４の搬入姿勢が誤っていることを示す信号を出すことができる。
【００５２】
従って、反りの向きが逆向きになっている板材４の反りも、この第２例の反り検査装置によれば検出することができる。板材４の反りが図５のようなものは、第１例と同様に第１及び第２の反り検査ユニット１５，１６でその反りを検出することができる。
【００５３】
図８（Ａ）（Ｂ）は本発明に係る板材の反り検査装置における実施の形態の第３例を示したものであり、（Ａ）はこの反り検査装置における要部平面図、（Ｂ）は（Ａ）の側面図である。
【００５４】
この反り検査装置においては、検査ステーション１の反り検査器１２が１つの反り検査ユニット２０で構成されている。この反り検査ユニット２０は、基準ベース２の基準面２ａと平行する向きでこの基準面２ａとほぼ全体的に対向する帯状の光線２１を出す発光手段２０ａとこの発光手段２０ａから出た帯状の光線２１を受光する受光手段２０ｂとの組み合わせで構成されている。発光手段２０ａは、並設した複数の光源を用いるか、１つの光源の光の幅を光学系を用いて広げること等により、所定幅の帯状の光線２１を得ることができる。これら発光手段２０ａと受光手段２０ｂも、基準ベース２の基準面２ａとほぼ平行に帯状の光線２１が延びるようにして基準面２ａの両側に配置されている。この場合も、反り検査ユニット２０は、帯状の光線２１が板材４の搬入方向とほぼ直交する方向に延びるように配置されている。受光手段２０ｂからの検出信号は判定部１７に入力されている。判定部１７は、受光手段２０ｂから減光信号が入力されると、反り検出信号を出すようになっている。その他の構成は、第１例と同様である。
【００５５】
このような１つの帯状の光線２１の幅が板材４全体をカバーできるようになっている反り検査ユニット２０を用いると、１つの反り検査ユニット２０で、板材４のどのような反りでも検査することができる。
【００５６】
なお、図１（Ａ）や図６（Ａ）に示す板材の反り検査装置においては、第１及び第２の反り検査ユニット１５，１６の発光手段１５ａ，１６ａと受光手段１５ｂ，１６ｂを、各回転ベルト６に沿ってこれら回転ベルト６の外側の基準ベース２の両側に配置することもできる。
【００５７】
また、ベルト位置変更装置１１は各ローラ７を軸受けスタンドでそれぞれ支持させておき、これら軸受けスタンドを共通のベース上に設置し、このベースを共通の昇降手段で昇降させる構成にすることもできる。
【００５８】
【発明の効果】
本発明に係る板材の反り検査装置では、第１及び第２の反り検査ユニットを構成する発光手段及び受光手段をそれぞれ基準ベースの基準面とほぼ平行に帯状の光線が延びるように基準面の両側に配置して、基準ベースの基準面の上に置かれた板材の反りを検査するので、基準ベースの基準面の上に置かれた板材が反っていれば発光手段が出す帯状の光線を遮って、受光手段が受光する受光量が減少し、判定部が反りありと判定して反り検出信号を出力することになり、板材の反りを光電的に容易に検出することができる。
【００５９】
本発明のように発光手段と受光手段とを組み合わせた第１及び第２の反り検査ユニットを用いて、これら第１及び第２の反り検査ユニットを構成する発光手段及び受光手段をそれぞれ基準ベースの基準面とほぼ平行に帯状の光線が延びるように基準面の両側に配置して検査をすると、板材の上方から静電容量センサで検査する場合と違って、検査のときの板材の位置決め精度はそれほど高くなくてよく、検査を容易に行うことができる。
【００６０】
また、基準面の両側に発光手段と受光手段とを配置して検査をする第１及び第２の反り検査ユニットによれば、検査すべき板材の四隅の反りを個々に検査しなくても板材の反りを検査することができ、少ない数の検査ユニットを用いて検査を行うことができ、反り検査装置の低価格化を図ることができる。また、検査ユニットの数が少ない分だけ、検査ユニットの位置決めや設定作業が楽になる利点がある。
【００６１】
更にこの装置では、発光手段は帯状の光線を出し、受光手段はこの帯状の光線を受光するので、線状の光線と違って、この光線の帯状の幅内に板材の反り部分が入っていれば板材の反りを検出でき、反りの検出を安定して容易に行うことができる。
【図面の簡単な説明】
【図１】本発明に係る板材の反り検査装置における実施の形態の第１例を示したものであり、（Ａ）はこの反り検査装置における要部平面図、（Ｂ）は（Ａ）の側面図である。
【図２】図１（Ａ）のＸ−Ｘ線断面図である。
【図３】第１例で用いているベルト位置変更機構と搬送装置との関係を示す一部縦断側面図である。
【図４】第１例で回転ベルトが下降された状態における回転ベルト，基準ベース，板材の相互関係を示す縦断側面図である。
【図５】第１例で板材の反りの検出を行っている状態を示す説明図である。
【図６】本発明に係る板材の反り検査装置における実施の形態の第２例を示したものであり、（Ａ）はこの反り検査装置における要部平面図、（Ｂ）は（Ａ）の側面図である。
【図７】第２例で板材の反りの検出を行っている状態を示す説明図である。
【図８】本発明に係る板材の反り検査装置における実施の形態の第３例を示したものであり、（Ａ）はこの反り検査装置における要部平面図、（Ｂ）は（Ａ）の側面図である。
【符号の説明】
１検査ステーション
２基準ベース
２ａ基準面
３支持手段
３ａ位置調整機構
４板材
５搬送装置
６回転ベルト
６ａ接触面
７ローラ
８モータ
９ベルト通過溝
９ａ開口面
１０板材ストッパ機構
１０ａストッパ部材
１０ｂストッパ部材移動装置
１０ｃベルト通過溝
１１ベルト位置変更装置
１１ａ，１１ｂ油圧シリンダ
１２反り検査器
１３，１４帯状の光線
１５，１６第１及び第２の反り検査ユニット
１５ａ，１６ａ発光手段
１５ｂ，１６ｂ受光手段
１７判定部
１８第３の反り検査ユニット
１９帯状の光線
２０反り検査ユニット
２０ａ発光手段
２０ｂ受光手段[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a board warpage inspection apparatus for inspecting warpage of a board material such as a circuit board.
[0002]
[Prior art]
For example, when manufacturing a circuit board, the warpage of the board is inspected at the end of each process of manufacturing the circuit board. Thus, the inspection of the warpage of the substrate at the end of each process is performed, for example, if the substrate is warped in the previous process of the pattern printing process, the optical image at the time of printing is distorted in the pattern printing process, and the accurate This is because the pattern cannot be printed.
[0003]
Conventionally, it is possible to detect such warpage of a substrate by using a gate-type warpage inspection apparatus in which a gate is provided in the middle of a substrate transport path and the warped substrate is not allowed to pass through the gate. Or, a reference base having a reference surface in the middle of the substrate transport path and a capacitance sensor opposite to each other above the four corners of the reference surface are arranged to face each other. Capacitance type warpage inspection devices that inspect warpage due to differences have been used.
[0004]
[Problems to be solved by the invention]
However, in the gate type warpage inspection device, if a warped substrate is sent by the transfer device and cannot pass through the gate and stops at that position, the next substrate sent will also be prevented from progressing to the warped substrate. Therefore, there is a problem that the warp inspection cannot be performed smoothly.
[0005]
On the other hand, in a capacitance type warpage inspection device, a reference base having a reference surface is arranged in the middle of the transport path so that it can be raised and lowered, and when the substrate is transported by the transport device and reaches directly above the reference base, The base is lifted to lift the substrate from the transfer device, and the difference in the capacitance value measured by each of the capacitance sensors that are located above the four corners of the reference plane at the rising position of the reference base. Since the warp is inspected, the raised position of the reference base affects the measurement accuracy. In other words, high accuracy is required for positioning of the substrate to be inspected, and there is a problem that it is difficult to perform the inspection correctly. In addition, this apparatus requires four capacitance sensors, and adjustments that make the measurement sensitivity constant must be performed at four locations, which has the problem that adjustment takes time and effort.
[0006]
An object of the present invention is to provide a warpage inspection apparatus for a plate material that does not hinder the inspection of the next plate material to be inspected even if a warped plate material is detected.
[0007]
Another object of the present invention is to provide a warp inspection device for a plate material that does not require so high accuracy for positioning of the plate material to be inspected.
[0008]
Another object of the present invention is to provide a warpage inspection apparatus for a plate material that can inspect the warpage of the plate material without individually inspecting the warpage of the four corners of the plate material to be inspected.
[0009]
Another object of the present invention is to provide a warp inspection device for a plate material that can detect even if the warpage of the plate material to be inspected is a warp that becomes concave toward the reference plane.
[0010]
Another object of the present invention is to provide a warp inspection device for a plate material in which a warp inspection unit can be easily installed.
[0011]
Another object of the present invention is to provide a warpage inspection apparatus for a plate material that can inspect the warpage even if the plate materials have different sizes.
[0012]
Another object of the present invention is to provide a warpage inspection apparatus for a plate material that can inspect any warpage of the plate material with a single warpage inspection unit.
[0013]
Another object of the present invention is to provide a warpage inspection apparatus for a plate material capable of adjusting an allowable range of warpage when inspecting warpage of plate materials having different thicknesses and materials.
[0014]
Another object of the present invention is to provide a warp inspection device for a plate material that does not require the reference surface to be moved up and down in order to float the plate material from the conveying device every time inspection is performed.
[0015]
Still another object of the present invention is to provide a warp inspection apparatus for a plate material that does not vibrate the plate material when a stopper member whose plate material has been stopped at an inspection station is released from the plate material.
[0016]
[Means for Solving the Problems]
The present invention includes a reference base having a reference surface arranged in an inspection station, and a plate material placed on the reference surface in a state where the plate material is carried into the inspection station and the plate surface of the plate material faces the reference surface. A transport device that later unloads the plate material from the inspection station, and a warp inspection device that inspects whether the amount of warpage of the plate material placed on the reference surface of the reference base and stationary from the reference surface is within an allowable range. It is intended to improve a warping inspection apparatus for a plate material.
[0017]
In such a plate warpage inspection apparatus, the warpage inspection device includes first and second warpage formed by combining a light emitting means for emitting a strip-shaped light beam and a light receiving means for receiving the belt-shaped light beam emitted from the light emitting means. The inspection unit and a determination unit that outputs a warp detection signal when the warp amount from the reference surface of the plate material is not within the allowable range based on the outputs of the first and second warp inspection units. The light emitting means and the light receiving means constituting the first and second warp inspection units are respectively arranged on both sides of the reference surface so that the strip-shaped light beam extends substantially parallel to the reference surface of the reference base. The first and second warpage inspection units are arranged in a positional relationship in which strip-shaped light beams used in each unit extend substantially in parallel with a predetermined interval corresponding to the size of the plate material. The allowable range of warpage of the plate material is determined by the distance between the reference surface of the reference base and the strip-shaped light beam. The determination unit of the warp inspection device is configured to output a warp detection signal when a decrease in the amount of received light is detected in at least one of the first and second warp inspection units.
[0018]
In such a warp inspection apparatus for plate materials, the light emitting means and the light receiving means constituting the first and second warp inspection units are respectively provided on both sides of the reference surface so that a strip-shaped light beam extends substantially parallel to the reference surface of the reference base. Place and inspect the warpage of the plate placed on the reference surface of the reference base. That is, if the plate placed on the reference surface of the reference base is warped and blocks the strip-shaped light beam emitted by the light emitting means, the amount of light received by the light receiving means decreases, and the determination unit determines that there is warping. To output a warp detection signal. The direction of warping of board materials such as circuit boards is usually determined, and when inspecting the presence or absence of warpage, the board material is usually directed to the transport device in a direction in which the warpage is convex upward away from the reference surface. Since supply is performed, if there is a warp in the plate material, it can be easily detected by the warp inspection unit.
[0019]
Using the first and second warpage inspection units in which the light emitting means and the light receiving means are combined as in the present invention, the light emitting means and the light receiving means constituting the first and second warpage inspection units are respectively based on the reference base. Unlike the case of inspection with a capacitance sensor from above the plate material, the positioning accuracy of the plate material at the time of inspection is different when the inspection is performed by placing it on both sides of the reference surface so that the strip-shaped light beam extends almost parallel to the reference surface. It does not have to be so high, and inspection can be performed easily.
[0020]
Further, according to the first and second warp inspection units in which the light emitting means and the light receiving means are arranged on both sides of the reference surface and inspected, the plate material does not have to be individually inspected for warping at the four corners of the plate material to be inspected. The warpage inspection apparatus can be inspected, the inspection can be performed using a small number of inspection units, and the price of the warpage inspection apparatus is reduced. Further, the positioning and setting work of the inspection unit is facilitated by the small number of inspection units.
[0021]
In this apparatus, the light emitting means emits a belt-like light beam, and the light receiving means receives the belt-like light beam. Unlike the linear light beam, if the warped portion of the plate material is within the belt-like width of the light beam, The warpage of the plate material can be detected, and the warpage can be detected stably and easily.
[0022]
In the apparatus of the present invention, in particular, the warp inspecting unit includes first to third warpage inspection units in which a light emitting means for emitting a belt-like light beam and a light receiving means for receiving the belt-like light beam emitted from the light emitting means are combined. And a determination unit that outputs a warp detection signal when the amount of warpage from the reference surface of the plate material is not within the allowable range based on the outputs of the first to third warpage inspection units. The light-emitting means and the light-receiving means constituting the third warp inspection unit are arranged on both sides of the reference surface so that the strip-shaped light beam extends substantially parallel to the reference surface of the reference base, and the third warpage inspection unit is provided in the first and second warpage inspection units. It is arranged between the second warp inspection units, and a warp detection device outputs a warp detection signal when at least one of the first to third warpage inspection units detects a decrease in the amount of received light. Do In this case, not only the four corners of the plate material are warped upward, but also the plate material is accidentally supplied with the four corners warped downward, and in this case, the center side of the plate material protrudes upward. Therefore, the warpage can be detected by the third warpage inspection unit.
[0023]
The first and second warp inspection units used in the present invention are arranged so that the strip-shaped light beams used in each unit extend in a direction substantially perpendicular to the loading direction of the plate material. If the distance between the two sides of the plate material located on both sides of the carry-in direction is determined to be detected, the light emitting means and the light receiving means constituting the warp inspection unit are arranged on both sides in a direction substantially perpendicular to the plate material carrying-in direction. The warpage inspection unit can be easily installed.
[0024]
Further, when the first and second warpage inspection units are provided so that the distance between them can be adjusted, even if the plate materials have different sizes, the first and second warpage are matched to the size. By adjusting the interval between the inspection units, it is possible to inspect the warpage even if the plate materials have different sizes.
[0025]
Further, in the apparatus of the present invention, in particular, the warp inspector is configured to receive a strip-shaped light beam that emits a strip-shaped light beam substantially parallel to the reference surface in a direction parallel to the reference surface, and a strip-shaped light beam emitted from the light-emitting device. A warp inspection unit formed by combining the light receiving means, and a determination unit that outputs a warp detection signal when the warp amount from the reference surface of the plate material is not within an allowable range based on the output of the warp inspection unit. If the light emitting means and the light receiving means constituting the warpage inspection unit are arranged on both sides of the reference surface so that the strip-shaped light beam extends substantially parallel to the reference surface of the reference base, one warpage inspection unit Even such warping can be inspected.
[0026]
Further, in the apparatus of the present invention, when the reference base is supported by a support means having a position adjustment mechanism that enables adjustment of the position with respect to the warp inspection unit, warpage of plate materials having different thicknesses and materials (different warpage amounts) is caused. It is possible to easily adjust the allowable range of warpage when inspecting. When the warp inspection unit side is moved, it is necessary to redo the setting of the warp inspection unit. However, when the reference base is moved, such redoing of the setting becomes unnecessary.
[0027]
Further, the apparatus of the present invention is constituted by a belt conveyor provided with a rotating belt that contacts the plate surface of the plate material and conveys the plate material, and the thickness dimension of the rotating belt is provided on the surface portion on the reference surface side of the reference base. It is preferable to form a belt passage groove having a depth dimension longer than that of which the rotating belt passes. Furthermore, a plate material stopper mechanism for stopping the plate material conveyed on the rotating belt of the belt conveyor at a position corresponding to the reference surface of the reference base, and a belt for changing the vertical position of the rotating belt at least in the belt passage groove A position changing device, and the belt position changing device positions the contact surface that contacts the plate surface of the plate of the rotating belt above the opening surface of the belt passage groove until the plate material is stopped by the plate material stopper mechanism. It is preferable that the rotating belt contact surface is positioned below the opening surface of the belt passage groove when the warp inspection is executed by being stopped by the plate stopper mechanism.
[0028]
In this way, a belt passage groove that is longer than the thickness of the rotating belt and through which the rotating belt passes is formed on the surface portion of the reference base on the reference surface side, and the vertical position of the rotating belt in the belt passing groove is determined. If the belt position change device is used, the rotating belt can be lowered without raising the reference surface of the reference base, so that the plate can be lifted from the rotating belt and placed on the reference surface of the reference base. In addition, it is possible to provide a warpage inspection device for a plate material that does not require the reference surface to be moved up and down in order to lift the plate material from the transport device. Thus, if the inspection can be performed without changing the position of the reference surface of the reference base, an error due to a change in the position of the reference surface does not occur, and the inspection can be performed easily and accurately.
[0029]
Further, the plate material that has been carried on the rotating belt of the belt conveyor by the plate material stopper mechanism can be easily stopped at a position corresponding to the reference surface of the reference base.
[0030]
Further, in the apparatus of the present invention, the plate material stopper mechanism is constituted by a stopper member and a stopper member moving device that moves the stopper member to the plate material stop position or the retracted position, and the stopper member is at the plate material stop position. The plate material is preferably stopped so as to come into contact with the side of the plate material in the conveyance direction, but the rotation belt is allowed to pass. The stopper member moving device moves the stopper member to the transport direction side and retracts it to the retracted position when the contact surface of the rotating belt is positioned below the opening surface of the belt passage groove by the operation of the belt position changing device. It is preferable that the stopper member is moved to the plate material stop position after the warpage inspection is completed and the plate material is unloaded from the inspection station.
[0031]
In this way, when the contact surface of the rotating belt is positioned below the opening surface of the belt passage groove by the operation of the belt position changing device, the stopper member moving device moves the stopper member to the transport direction side and retracts it to the retracted position. And, when the stopper member that stopped the plate material at the inspection station is released from this plate material, unlike the type that releases the stopper member in the vertical direction, the plate material is not caused to vibrate up and down, thus detecting the warpage of the plate material. Inspection can be performed stably without degrading accuracy.
[0032]
DETAILED DESCRIPTION OF THE INVENTION
FIGS. 1A, 1B, and 4 show a first example of an embodiment of a plate warpage inspection apparatus according to the present invention. FIG. 1A is a plan view of a main part of the warpage inspection apparatus. FIG. 1B is a side view of FIG. 1A, FIG. 2 is a cross-sectional view taken along line XX of FIG. 1A, and FIG. 3 is a belt position changing mechanism and conveying device used in the first example. FIG. 4 is a longitudinal sectional side view showing the interrelationship of the rotating belt, the reference base, and the plate material when the rotating belt is lowered in the first example.
[0033]
In this warp inspection apparatus for plate material, a reference base 2 is installed in an inspection station 1 in a horizontal direction with its reference surface 2a facing upward. The reference base 2 is supported by support means 3 provided with a position adjustment mechanism 3a so as to enable position adjustment with respect to a warp inspection unit described later. As the position adjusting mechanism 3a, for example, a structure having a rack and a pinion, or a structure having a screw screw and a nut block which moves up and down by its rotation can be used. A plate material 4 such as a circuit board is carried into the inspection station 1 by the transfer device 5, placed on the reference surface 2a with the plate surface facing the reference surface 2a, and is unloaded from the inspection station 1 after the inspection. It is like that.
[0034]
As will be described in detail with reference to FIG. 3, the conveying device 5 includes two endless rotating belts 6 that are in contact with the plate surface of the plate material 4 and convey the plate material 4, and both ends of the rotating belt 6 in the longitudinal direction. It comprises a belt conveyor provided with a roller 7 that spans the rotating belt 6 and a motor 8 that rotates the roller 7. A belt passage groove 9 is formed on the surface portion of the reference base 2 on the side of the reference surface 2 a and has a depth dimension longer than the thickness dimension of the rotating belt 6 and is vertically cut so as to allow the rotating belt 6 to pass therethrough.
[0035]
In order to stop the plate material 4 carried on the rotating belt 6 of the conveying device 5 at a position corresponding to the reference surface 2 a of the reference base 2, the plate material stopper mechanism 10 is used as a reference with respect to the moving direction of the plate material 4. It is provided at a position downstream of the base 2. The plate material stopper mechanism 10 includes a stopper member 10a and a stopper member moving device 10b such as a hydraulic cylinder that moves the stopper member 10a to a plate material stop position or a retracted position. When the stopper member 10a is in the plate material stop position, the stopper member 10a is provided with a belt passage groove 10c on the upper surface so as to stop the plate material 4 by contacting the side of the plate material 4 in the conveyance direction but allow the rotation belt 6 to pass. Yes. The stopper member moving device 10b moves the stopper member 10a to the conveyance direction side when the contact surface of the rotating belt 6 is positioned below the opening surface of the belt passage groove 9 by the operation of the belt position changing device described later. The stopper member 10a is moved to the plate material stop position after being retracted to the retreat position and after the warpage inspection is completed and the plate material 4 is unloaded from the inspection station 1.
[0036]
As shown in FIG. 3, the warp inspection device for a plate material includes a belt position changing device 11 that changes the vertical position of the rotating belt 6 in at least the belt passage groove 9. The belt position changing device 11 is composed of hydraulic cylinders 11a and 11b that raise and lower the front and rear rollers 7 of the conveying device 5 simultaneously. Such a belt position changing device 11 is configured so that the contact surface 6a that contacts the plate surface of the plate 4 of the rotating belt 6 is formed in the belt passage groove 9 until the plate 4 is stopped by the plate stopper mechanism 10 as shown in FIG. When the warp inspection is being performed with the plate material 4 being stopped by the plate material stopper mechanism 10 and positioned above the opening surface 9a, the contact surface 6a of the rotating belt 6 is opened to the belt passage groove 9 as shown in FIG. The structure is controlled so as to be positioned below the surface 9a.
[0037]
The inspection station 1 is provided with a warpage inspection device 12 for inspecting whether or not the amount of warpage of the plate 4 placed on the reference surface 2a of the reference base 2 and stationary is within an allowable range. Yes. The warp inspector 12 is a combination of light emitting means 15a and 16a for emitting strip-shaped light beams 13 and 14 and light receiving means 15b and 16b for receiving the belt-shaped light beams 13 and 14 emitted from the light emitting means 15a and 16a. Warpage when the amount of warpage from the reference surface 2a of the plate member 4 is not within the allowable range based on the outputs of the first and second warpage inspection units 15, 16 and the first and second warpage inspection units 15, 16. It is comprised with the determination part 17 which outputs a detection signal. The allowable range of the amount of warpage of the plate material 4 from the reference surface 2a is determined by the distance between the reference surface 2a of the reference base 2 and the strip-shaped light beams 13 and 14.
[0038]
The light emitting means 15a and 16a and the light receiving means 15b and 16b constituting the first and second warp inspection units 15 and 16 are respectively configured such that the strip-shaped light beams 13 and 14 extend substantially parallel to the reference surface 2a of the reference base 2. Are arranged on both sides of the reference plane 2a. In this case, the first and second warp inspection units 15 and 16 are arranged so that the strip-shaped light beams 13 and 14 used in the respective units extend in a direction substantially perpendicular to the loading direction of the plate material 4. .
[0039]
The interval between the first and second warp inspection units 15 and 16 is arranged in a positional relationship extending substantially in parallel with a predetermined interval corresponding to the size of the plate member 4, and between the plate members 4 positioned on both sides in the loading direction. It is determined to detect warping of two sides. For this reason, the 1st and 2nd curvature test | inspection units 15 and 16 are provided so that the space | interval between both can be adjusted. The adjustment of the distance between the first and second warp inspection units 15 and 16 is performed by fixing the second warp inspection unit 16 existing on the downstream side with respect to the moving direction of the plate member 4 and the light emitting means 15a and the light receiving means 15b. It is preferable that the first warp inspection unit 15 made of, for example, is supported on a common base, and this base is translated in the direction of the second warp inspection unit 16 by unit moving means such as a screw screw (not shown).
[0040]
The determination unit 17 of the warp inspection device 12 is configured to output a warp detection signal when a decrease in the amount of received light is detected in at least one of the first and second warp inspection units 15 and 16. .
[0041]
Next, the operation of the warpage inspection apparatus having such a configuration will be described. In this warp inspection device for plate material, if any of the four corners of the plate material 4 to be inspected is warped, the plate material 4 is on each supply belt on the supply side with the surface side facing upward being warped. 6 is carried over to the inspection station 1. The warpage mainly appears at the four corners of the plate material 4, and the corner portions of the plate material 4 where the warpage appears thus warp upward.
[0042]
At this time, in the inspection station 1, as shown in FIG. 1B, the stopper member 10a is moved above the reference surface 2a of the reference base 2 by the operation of the stopper member moving device 10b at the downstream end position of the reference base 2. It is made to wait as a part of 10a exists. Further, at the position of the reference base 2, each rotating belt 6 passes above the reference surface 2a. As described above, the belt passage groove 10c is provided on the upper portion of the stopper member 10a so as not to obstruct the passage of the rotating belt 6.
[0043]
When the plate material 4 carried by each rotating belt 6 hits the stopper member 10a, a sensor (not shown) detects this and outputs a signal to the belt position changing device 11, whereby the hydraulic cylinders 11a and 11b are operated to convey the conveying device. The front and rear rollers 7 are lowered simultaneously. By this operation, each rotating belt 6 of the conveying device 5 descends and enters each belt passing groove 9 of the reference base 2 as shown in FIG. If it will be in this state, the board | plate material 4 will leave | separate from the state supported by each rotating belt 6, and will change to the state supported by the reference surface 2a of the reference | standard base 2. FIG. In this state, the stopper member 10a is moved to the transport direction side by the operation of the stopper member moving device 10b, and is retracted to the retracted position. When the stopper member 10a is retracted in the conveyance direction, the stopper member 10a generated when the stopper member 10a is retracted directly downward rubs the edge of the plate member 4 downward to cause vertical vibrations in the plate member 4. Can be avoided, and the plate 4 can be held stationary on the reference surface 2a.
[0044]
In such a state, the first and second warpage inspection units 15 and 16 of the warpage inspection device 12 inspect whether or not the plate material 4 on the reference surface 2a is warped. In this inspection, the strip-shaped light beams 13 and 14 from the light emitting means 15a and 16a of the first and second warp inspection units 15 and 16 can cover the positions of the front and rear ends in the conveying direction of the plate member 4 as shown in FIG. It is done by taking out in a proper positional relationship. The heights of the strip-shaped light beams 13 and 14 are determined in advance so that the strip-shaped light beams 13 and 14 are not shielded by the plate material 4 unless the plate material 4 is warped.
[0045]
For this reason, if the plate material 4 is not warped, the strip-like light beams 13 and 14 are not shielded by the plate material 4, and therefore no warp detection signal is output from the determination unit 17. Thus, the board | plate material 4 from which the curvature detection signal did not output is conveyed to the next process from the terminal of the conveyance apparatus 5 at the time of manufacture of a circuit board, and receives the next process for manufacturing a circuit board.
[0046]
If any of the four corners of the plate 4 is warped, in the case of FIG. 5, a part of the belt-like light beam 13 is shielded, so that the amount of light received by the light receiving means 15 b decreases, and a warp detection signal is output from the determination unit 17. Get out. The plate material 4 from which the warp detection signal is output is carried to the warp correction process from the end of the conveying device 5 and is subjected to warp correction. The warp inspection is again performed on the plate material 4 after the correction of the warp.
[0047]
When the inspection of the warpage of one plate member 4 is completed, the hydraulic cylinders 11a and 11b of the belt position changing device 11 are operated to simultaneously raise the front and rear rollers 7 of the conveying device 5. By this operation, each rotating belt 6 of the transport device 5 is lifted and returned to a state in which each rotating belt 6 travels above the reference surface 2a of the reference base 2 as shown in FIG.
[0048]
Such operations are repeated to sequentially inspect the warpage of a large number of plate members 4.
[0049]
6 (A) and 6 (B) show a second example of the embodiment of the warpage inspection apparatus for a plate material according to the present invention. (A) is a plan view of the main part of the warpage inspection apparatus. FIG. 2 is a side view of (A).
[0050]
In this warpage inspection apparatus, the warpage inspection device 12 of the inspection station 1 in addition to the first and second warpage inspection units 15 and 16 for inspecting warpage at both ends in the traveling direction of the plate member 4, This is different from the first example in that a third warpage inspection unit 18 is provided between the second warpage inspection units 15 and 16 and inspects an intermediate warpage in the traveling direction of the plate 4. The third warpage inspection unit 18 is configured by combining a light emitting means 18a for emitting a belt-like light beam 9 and a light receiving means 18b for receiving the belt-like light beam 19 emitted from the light emitting means 18a. The light emitting means 18a and the light receiving means 18b are also arranged on both sides of the reference surface 2a so that the strip-shaped light beam 19 extends substantially parallel to the reference surface 2a of the reference base 2. Also in this case, the third warpage inspection unit 18 is arranged so that the belt-like light beam 19 extends in a direction substantially orthogonal to the loading direction of the plate material 4. A detection signal from the light receiving unit 18b is input to the determination unit 17. The determination unit 17 outputs a warp detection signal when a dimming signal is input from the light receiving means 15b, 16b, 18b of any of the warp inspection units 15, 16, 18. Other configurations are the same as those in the first example.
[0051]
According to the warpage inspection apparatus for a plate material having such a configuration, the plate material 4 having the reverse warping direction is erroneously supplied and stopped by the stopper member 10a as described above. When 4 is placed on the reference surface 2a of the reference base 2, if a warp appears in any of the four corners of the plate member 4, the corner of the plate member 4 warps downward due to the warp, and is lifted by this warped portion. As a result, the center of the upper surface of the plate member 4 protrudes upward. For this reason, the plate 4 does not block the strip-shaped light beams 13 and 14 emitted from the light-emitting means 15a and 16a of the first and second warp inspection units 15 and 16, but the strip-shaped light emitted from the light-emitting means 18a of the third warpage inspection unit 18 , The amount of light received by the light receiving means 18b is reduced, and a dimming signal is input to the determination unit 17, so that the determination unit 17 outputs a warp detection signal. In this case, the determination unit 17 can output a signal indicating that the carry-in posture of the plate material 4 is incorrect.
[0052]
Therefore, the warp of the plate member 4 in which the warp direction is reversed can also be detected by the warp inspection apparatus of the second example. When the warp of the plate member 4 is as shown in FIG. 5, the warp can be detected by the first and second warp inspection units 15 and 16 as in the first example.
[0053]
8A and 8B show a third example of the embodiment of the board warpage inspection apparatus according to the present invention. FIG. 8A is a plan view of the main part of the warpage inspection apparatus, and FIG. FIG. 2 is a side view of (A).
[0054]
In this warpage inspection apparatus, the warpage inspection device 12 of the inspection station 1 is composed of one warpage inspection unit 20. The warp inspection unit 20 includes a light emitting means 20a that emits a belt-like light beam 21 that is substantially parallel to the reference surface 2a in a direction parallel to the reference surface 2a of the reference base 2, and a belt-like light beam emitted from the light emitting means 20a. 21 in combination with a light receiving means 20b for receiving light 21. The light emitting means 20a can obtain a strip-shaped light beam 21 having a predetermined width by using a plurality of light sources arranged in parallel or by expanding the width of light of one light source using an optical system. The light emitting means 20a and the light receiving means 20b are also arranged on both sides of the reference surface 2a so that the strip-shaped light beam 21 extends substantially parallel to the reference surface 2a of the reference base 2. Also in this case, the warp inspection unit 20 is arranged so that the belt-like light beam 21 extends in a direction substantially orthogonal to the loading direction of the plate material 4. A detection signal from the light receiving means 20b is input to the determination unit 17. The determination unit 17 outputs a warp detection signal when a dimming signal is input from the light receiving means 20b. Other configurations are the same as those in the first example.
[0055]
When the warp inspection unit 20 in which the width of one band-shaped light beam 21 can cover the whole plate member 4 is used, any warp of the plate member 4 can be inspected by one warp inspection unit 20. Can do.
[0056]
1A and 6A, the light-emitting means 15a and 16a and the light-receiving means 15b and 16b of the first and second warp inspection units 15 and 16 are respectively provided. It can also be arranged along the rotating belt 6 on both sides of the reference base 2 outside the rotating belt 6.
[0057]
Further, the belt position changing device 11 may be configured such that each roller 7 is supported by a bearing stand, the bearing stands are installed on a common base, and the base is moved up and down by a common lifting means.
[0058]
【The invention's effect】
In the apparatus for inspecting warpage of a plate material according to the present invention, the light emitting means and the light receiving means constituting the first and second warpage inspection units are arranged on both sides of a reference surface so that a strip-shaped light beam extends substantially parallel to the reference surface of the reference base. In order to inspect the warpage of the plate placed on the reference surface of the reference base, if the plate placed on the reference surface of the reference base is warped, the strip-shaped light emitted by the light emitting means is blocked. Accordingly, the amount of light received by the light receiving means is reduced, the determination unit determines that there is a warp, and outputs a warp detection signal, so that the warp of the plate material can be easily detected photoelectrically.
[0059]
Using the first and second warpage inspection units in which the light emitting means and the light receiving means are combined as in the present invention, the light emitting means and the light receiving means constituting the first and second warpage inspection units are respectively based on the reference base. Unlike the case of inspection with a capacitance sensor from above the plate material, the positioning accuracy of the plate material at the time of inspection is different when the inspection is performed by placing it on both sides of the reference surface so that the strip-shaped light beam extends almost parallel to the reference surface. It does not have to be so high, and inspection can be performed easily.
[0060]
Further, according to the first and second warp inspection units in which the light emitting means and the light receiving means are arranged on both sides of the reference surface and inspected, the plate material does not have to be individually inspected for warping at the four corners of the plate material to be inspected. The warpage can be inspected, the inspection can be performed using a small number of inspection units, and the cost of the warpage inspection apparatus can be reduced. Further, there is an advantage that the inspection unit positioning and setting work can be facilitated by the small number of inspection units.
[0061]
Further, in this apparatus, the light emitting means emits a belt-like light beam, and the light receiving means receives the belt-like light beam. Unlike the linear light beam, the warped portion of the plate material is included within the belt-like width of the light beam. Therefore, the warpage of the plate material can be detected, and the warpage can be detected stably and easily.
[Brief description of the drawings]
1A and 1B show a first example of an embodiment of a warpage inspection apparatus for a plate material according to the present invention, wherein FIG. 1A is a plan view of an essential part of the warpage inspection apparatus, and FIG. It is a side view.
2 is a cross-sectional view taken along line XX in FIG.
FIG. 3 is a partially longitudinal side view showing a relationship between a belt position changing mechanism and a conveying device used in the first example.
FIG. 4 is a longitudinal side view showing the interrelationship between the rotating belt, the reference base, and the plate material when the rotating belt is lowered in the first example.
FIG. 5 is an explanatory diagram showing a state in which the warpage of the plate material is detected in the first example.
6A and 6B show a second example of the embodiment of the plate warpage inspection apparatus according to the present invention. FIG. 6A is a plan view of the main part of the warpage inspection apparatus, and FIG. It is a side view.
FIG. 7 is an explanatory diagram showing a state in which warpage of a plate material is detected in the second example.
8A and 8B show a third example of the embodiment of the warpage inspection apparatus for a plate material according to the present invention. FIG. 8A is a plan view of the main part of the warpage inspection apparatus, and FIG. It is a side view.
[Explanation of symbols]
1 Inspection station
2 Standard basis
2a Reference plane
3 Support means
3a Position adjustment mechanism
4 Plate material
5 Transport device
6 Rotating belt
6a Contact surface
7 Laura
8 Motor
9 Belt passage groove
9a Open surface
10 Plate stopper mechanism
10a Stopper member
10b Stopper member moving device
10c Belt passage groove
11 Belt position changing device
11a, 11b Hydraulic cylinder
12 Warpage tester
13,14 Banded rays
15, 16 First and second warpage inspection units
15a, 16a Light emitting means
15b, 16b light receiving means
17 Judgment part
18 Third warpage inspection unit
19 Banded rays
20 Warpage inspection unit
20a Light emitting means
20b Light receiving means

Claims

A reference base having a reference surface arranged at the inspection station;
A transport device that carries the plate material into the inspection station, places the plate material on the reference surface in a state where the plate surface of the plate material faces the reference surface, and carries out the plate material from the inspection station after the inspection;
A warpage inspection apparatus for a plate material, comprising: a warpage inspection device for inspecting whether or not the amount of warpage of the plate material placed on the reference surface of the reference base and stationary from the reference surface is within an allowable range. hand,
The warpage inspection device includes first and second warpage inspection units each formed by combining a light emitting unit that emits a strip-shaped light beam and a light receiving unit that receives the belt-shaped light beam emitted from the light emitting device. And a determination unit that outputs a warp detection signal when the amount of warpage from the reference surface of the plate member is not within the allowable range based on the output of the warp inspection unit of 2.
The light emitting means and the light receiving means constituting the first and second warp inspection units are respectively arranged on both sides of the reference surface so that the strip-shaped light beam extends substantially parallel to the reference surface of the reference base. ,
The first and second warpage inspection units are arranged in a positional relationship in which the strip-shaped light beams used in each unit extend substantially in parallel with a predetermined interval according to the size of the plate material,
The tolerance is determined by the distance between the reference surface of the reference base and the strip-shaped light beam,
The determination unit of the warp inspection device is configured to output the warp detection signal when detecting a decrease in the amount of received light in at least one of the warp inspection units of the first and second warp inspection units. Warpage inspection device.

A reference base having a reference surface arranged at the inspection station;
A transport device that carries the plate material into the inspection station, places the plate material on the reference surface in a state where the plate surface of the plate material faces the reference surface, and carries out the plate material from the inspection station after the inspection;
A warpage inspection apparatus for a plate material, comprising: a warpage inspection device for inspecting whether or not the amount of warpage of the plate material placed on the reference surface of the reference base and stationary from the reference surface is within an allowable range. hand,
The warp inspection device includes first to third warpage inspection units each including a light emitting unit that emits a strip-shaped light beam and a light receiving unit that receives the belt-shaped light beam emitted from the light emitting device, and the first to third warp inspection units. And a determination unit that outputs a warp detection signal when the amount of warpage from the reference surface of the plate member is not within the allowable range based on the output of the warp inspection unit of 3;
The light emitting means and the light receiving means constituting the first to third warpage inspection units are respectively arranged on both sides of the reference surface so that the belt-like light beam extends substantially parallel to the reference surface of the reference base. ,
The first and second warpage inspection units are arranged in a positional relationship in which the strip-shaped light beams used in each unit extend substantially in parallel with a predetermined interval according to the size of the plate material,
The third warpage inspection unit is disposed between the first and second warpage inspection units;
The tolerance is determined by the distance between the reference surface of the reference base and the strip-shaped light beam,
The determination unit of the warpage inspection device is configured to output the warpage detection signal when detecting a decrease in the amount of received light in at least one of the first to third warpage inspection units. Warpage inspection device.

The first and second warpage inspection units are arranged so that the belt-shaped light beam used in each unit extends in a direction substantially perpendicular to the loading direction of the plate material,
The board | substrate curvature inspection apparatus of Claim 1 or 2 with which the space | interval of the said 1st and 2nd curvature inspection unit is defined so that the curvature of the two sides of the said board | plate material located in the said carrying-in direction both sides may be detected. .

The board | substrate warpage inspection apparatus of Claim 1 or 2 with which the said 1st and 2nd warpage inspection unit is provided so that the space | interval between both can be adjusted.

A reference base having a reference surface arranged at the inspection station;
A transport device that carries the plate material into the inspection station, places the plate material on the reference surface in a state where the plate surface of the plate material faces the reference surface, and carries out the plate material from the inspection station after the inspection;
A warpage inspection apparatus for a plate material comprising a warpage inspection device for inspecting whether or not the warpage amount of the plate material placed on the reference surface of the reference base is within an allowable range,
The warp inspector is a combination of light emitting means for emitting a strip-shaped light beam that is substantially parallel to the reference surface in a direction parallel to the reference surface, and a light receiving device for receiving the belt-shaped light beam emitted from the light emitting means. And a determination unit that outputs a warp detection signal when the amount of warp from the reference surface of the plate member is not within the allowable range based on the output of the warp inspection unit.
The light emitting means and the light receiving means constituting the warp inspection unit are arranged on both sides of the reference surface so that the strip-shaped light beam extends substantially parallel to the reference surface of the reference base,
The tolerance is determined by the distance between the reference surface of the reference base and the strip-shaped light beam,
The warpage inspection apparatus for a plate material, wherein the determination unit of the warpage inspection device is configured to output the warpage detection signal when the warpage inspection unit detects a decrease in the amount of received light.

6. The warpage inspection apparatus for a plate material according to claim 1, 2 or 5, wherein the reference base is supported by a support means having a position adjustment mechanism that enables adjustment of a position with respect to the warpage inspection unit.

The conveying device comprises a belt conveyor provided with a rotating belt that contacts the plate surface of the plate material and conveys the plate material,
A belt passing groove through which the depth dimension is longer than the thickness dimension of the rotating belt and the rotating belt passes is formed on the surface portion of the reference base on the reference surface side,
Furthermore, a plate material stopper mechanism for stopping the plate material carried on the rotating belt of the belt conveyor at a position corresponding to the reference surface of the reference base, and at least the rotating belt in the belt passage groove A belt position changing device for changing the vertical position of
The belt position changing device positions the contact surface of the rotating belt that contacts the plate surface of the plate material above the opening surface of the belt passage groove until the plate material is stopped by the plate material stopper mechanism. Is configured to position the contact surface of the rotating belt below the opening surface of the belt passage groove when the warp inspection is executed by being stopped by the plate material stopper mechanism. Or the board | substrate curvature inspection apparatus of 5.

The plate material stopper mechanism includes a stopper member and a stopper member moving device that moves the stopper member to a plate material stop position or a retracted position,
When the stopper member is at the plate material stop position, the stopper member is configured to contact the side of the plate material in the conveyance direction to stop the plate material but allow the rotation belt to pass,
The stopper member moving device moves the stopper member toward the transport direction side when the contact surface of the rotating belt is positioned below the opening surface of the belt passage groove by the operation of the belt position changing device. The member according to claim 7, wherein the stopper member is moved to the plate material stop position after the member is retracted to the retracted position and the inspection of the warp is completed and the plate material is unloaded from the inspection station. Board warpage inspection equipment.