JP3716068B2 - ターボ分子ポンプ及び同ターボ分子ポンプを有する真空容器 - Google Patents

ターボ分子ポンプ及び同ターボ分子ポンプを有する真空容器 Download PDF

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Publication number
JP3716068B2
JP3716068B2 JP10457997A JP10457997A JP3716068B2 JP 3716068 B2 JP3716068 B2 JP 3716068B2 JP 10457997 A JP10457997 A JP 10457997A JP 10457997 A JP10457997 A JP 10457997A JP 3716068 B2 JP3716068 B2 JP 3716068B2
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JP
Japan
Prior art keywords
rotor
temperature
molecular pump
blade
turbo molecular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP10457997A
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English (en)
Japanese (ja)
Other versions
JPH10299688A5 (OSRAM
JPH10299688A (ja
Inventor
勝久 外山
知明 岡村
雅晴 水津
淳一 荒見
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Mitsubishi Heavy Industries Ltd
Original Assignee
Tokyo Electron Ltd
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd, Mitsubishi Heavy Industries Ltd filed Critical Tokyo Electron Ltd
Priority to JP10457997A priority Critical patent/JP3716068B2/ja
Publication of JPH10299688A publication Critical patent/JPH10299688A/ja
Publication of JPH10299688A5 publication Critical patent/JPH10299688A5/ja
Application granted granted Critical
Publication of JP3716068B2 publication Critical patent/JP3716068B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Control Of Positive-Displacement Air Blowers (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP10457997A 1997-04-22 1997-04-22 ターボ分子ポンプ及び同ターボ分子ポンプを有する真空容器 Expired - Fee Related JP3716068B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10457997A JP3716068B2 (ja) 1997-04-22 1997-04-22 ターボ分子ポンプ及び同ターボ分子ポンプを有する真空容器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10457997A JP3716068B2 (ja) 1997-04-22 1997-04-22 ターボ分子ポンプ及び同ターボ分子ポンプを有する真空容器

Publications (3)

Publication Number Publication Date
JPH10299688A JPH10299688A (ja) 1998-11-10
JPH10299688A5 JPH10299688A5 (OSRAM) 2004-10-07
JP3716068B2 true JP3716068B2 (ja) 2005-11-16

Family

ID=14384355

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10457997A Expired - Fee Related JP3716068B2 (ja) 1997-04-22 1997-04-22 ターボ分子ポンプ及び同ターボ分子ポンプを有する真空容器

Country Status (1)

Country Link
JP (1) JP3716068B2 (OSRAM)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3825538B2 (ja) * 1997-08-29 2006-09-27 樫山工業株式会社 高真空ポンプ
JPH11281799A (ja) 1998-03-27 1999-10-15 Ebara Corp 電子線照射装置
JP3874993B2 (ja) * 2000-05-18 2007-01-31 アルプス電気株式会社 ターボ分子ポンプ
DE10056144A1 (de) * 2000-11-13 2002-05-23 Pfeiffer Vacuum Gmbh Gasreibungspumpe
JP2002202193A (ja) * 2000-12-28 2002-07-19 Ishikawajima Harima Heavy Ind Co Ltd 温度制御装置
JP4529552B2 (ja) * 2004-06-16 2010-08-25 株式会社島津製作所 磁気軸受式ターボ分子ポンプ
JP2017034811A (ja) * 2015-07-30 2017-02-09 ファナック株式会社 ロータの温度測定可能な電動機制御装置およびそれを備えた電動機
CN114233674B (zh) * 2021-12-31 2024-04-02 北京中科科仪股份有限公司 一种磁悬浮分子泵过载保护方法、装置及存储介质

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02204696A (ja) * 1989-01-31 1990-08-14 Shimadzu Corp ターボ分子ポンプ装置
JP2680883B2 (ja) * 1989-02-22 1997-11-19 株式会社島津製作所 磁気軸受ターボ分子ポンプ
JPH02252996A (ja) * 1989-03-24 1990-10-11 Shimadzu Corp 磁気軸受ターボ分子ポンプ
JP3069704B2 (ja) * 1989-12-08 2000-07-24 セイコー精機株式会社 ターボ分子ポンプの制動制御装置
JPH07238897A (ja) * 1994-02-25 1995-09-12 Shimadzu Corp ターボ分子ポンプ
JP3486000B2 (ja) * 1995-03-31 2004-01-13 日本原子力研究所 ねじ溝真空ポンプ
JP3510007B2 (ja) * 1995-06-13 2004-03-22 日本原子力研究所 分子ポンプ
JP3057486B2 (ja) * 1997-01-22 2000-06-26 セイコー精機株式会社 ターボ分子ポンプ

Also Published As

Publication number Publication date
JPH10299688A (ja) 1998-11-10

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