JP3652795B2 - 電子ビーム真空容器 - Google Patents

電子ビーム真空容器 Download PDF

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Publication number
JP3652795B2
JP3652795B2 JP17648596A JP17648596A JP3652795B2 JP 3652795 B2 JP3652795 B2 JP 3652795B2 JP 17648596 A JP17648596 A JP 17648596A JP 17648596 A JP17648596 A JP 17648596A JP 3652795 B2 JP3652795 B2 JP 3652795B2
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JP
Japan
Prior art keywords
crosspiece
electron beam
frame
thin film
flange end
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP17648596A
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English (en)
Japanese (ja)
Other versions
JPH1021862A5 (enExample
JPH1021862A (ja
Inventor
郁夫 若元
一郎 山下
晋 浦野
朋弘 原田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP17648596A priority Critical patent/JP3652795B2/ja
Publication of JPH1021862A publication Critical patent/JPH1021862A/ja
Publication of JPH1021862A5 publication Critical patent/JPH1021862A5/ja
Application granted granted Critical
Publication of JP3652795B2 publication Critical patent/JP3652795B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP17648596A 1996-07-05 1996-07-05 電子ビーム真空容器 Expired - Fee Related JP3652795B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17648596A JP3652795B2 (ja) 1996-07-05 1996-07-05 電子ビーム真空容器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17648596A JP3652795B2 (ja) 1996-07-05 1996-07-05 電子ビーム真空容器

Publications (3)

Publication Number Publication Date
JPH1021862A JPH1021862A (ja) 1998-01-23
JPH1021862A5 JPH1021862A5 (enExample) 2004-07-15
JP3652795B2 true JP3652795B2 (ja) 2005-05-25

Family

ID=16014497

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17648596A Expired - Fee Related JP3652795B2 (ja) 1996-07-05 1996-07-05 電子ビーム真空容器

Country Status (1)

Country Link
JP (1) JP3652795B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4855170B2 (ja) * 2006-07-28 2012-01-18 株式会社日立ハイテクノロジーズ 電子顕微鏡装置

Also Published As

Publication number Publication date
JPH1021862A (ja) 1998-01-23

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