JP3592690B2 - Shadow mask attachment / detachment equipment for manufacturing equipment for organic electroluminescent display devices - Google Patents

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a shadow mask attaching / detaching apparatus for manufacturing equipment for an organic light emitting display (OELD). More specifically, the present invention relates to a shadow mask holder unit that controls a magnetic force between permanent magnets to increase or decrease. BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a shadow mask attachment / detachment device of a manufacturing facility for a cluster type organic electroluminescent display device developed first in Japan, which can attach / detach a mask freely.
[0002]
[Prior art]
2. Description of the Related Art A conventional organic electroluminescent display is a self-luminous phenomenon in which electrons and holes injected between a cathode and an anode are combined in an organic material to emit light, or a phenomenon of the self-luminous phenomenon. Is a type of display device that uses organic light-emitting technology. Since 1950, the Bernanos research team in France has discovered the organic electroluminescence phenomenon for the first time, leading companies around the world, including the United Kingdom, the United States, Japan, Germany, and South Korea, have sustained interest. It is an electronic component for display that is under development for commercialization.
[0003]
More specifically, electroluminescence is a phenomenon in which a solid emits light when a strong electric field is applied thereto, and the cause is that a free electron accelerated by the electric field is a specific impurity which becomes a luminescence center existing in a luminescent material. An electroluminescent element is based on the energy emitted when electrons of an (activator) are excited and returns to their original state, and utilizes such a light emitting principle. Since it cannot emit light that can be used as illumination, it is mainly used for display devices and optical amplifiers, and is also used in the field of television and the like.
[0004]
Recently, a Japanese company has succeeded in commercializing a small product using the electroluminescence principle, but there are still many problems that need to be solved technically for realizing a large size. .
[0005]
The general structure of the electroluminescent device is such that a special phosphor is mixed with a dielectric to form a thin film of about several tens of μm. Usually, one electrode is made of a metal material, the other electrode is made of a transparent material capable of emitting light to the outside, and the light emitting layer solidifies a light emitting substance such as powdered zinc sulfide (ZnS). It is classified into plastic type and ceramic type.
[0006]
The organic light emitting display has advantages in that it can be driven at a low voltage of 15 V or less and can be designed to be ultra-thin. Therefore, current plasma display devices (PDPs) and thin film transistors are used. It is emerging as a next-generation flat panel display device that can replace a liquid crystal display device (TFT LCD: Thin Film Transistor Liquid Crystal Display) and the like.
[0007]
Here, each of the display devices will be described in detail in order to clarify differences in the structure, light emission principle, and the like from the organic light emitting display device.
[0008]
First, the plasma display device has a glow discharge in which electrodes are arranged in a grid inside a flat gas-filled panel, and arbitrary points on the grid electrode lines are selected to start an electrode current to emit light while the gas is ionized. It utilizes the principle, and displays characters and graphics by controlling digital signals for the presence or absence of voltage application at each light emitting point of the electrode line. Since neon gas is mainly used as the sealing gas, light is emitted in red copper color, and memory performance can be given by covering the electrode with an insulating film, so that it can be used for a terminal device of a computer.
[0009]
On the other hand, the thin film transistor liquid crystal display device is a type of a field effect transistor that controls a current flowing in a semiconductor on a thin film by applying an electric field perpendicular to the current, and is provided for each electrode of a cell constituting each dot of liquid crystal. It is configured by superimposing transistors, and can be said to be the only active element in a MOS IC (MOS IC) element. Since the thin film transistor liquid crystal display device is formed on a thin plate peculiar to the liquid crystal display device, it can be operated with low power consumption, and has an advantage that image quality equivalent to that of a cathode ray tube (CRT) can be obtained. Not only is there a problem that commercialization is difficult due to the need for very advanced semiconductor technology, but also the response speed is delayed, which has a fatal disadvantage that afterimages remain during fast moving image processing. There are limits to development for John applications.
[0010]
On the other hand, the organic light emitting display has a data response speed of 1 μs (microsecond: 1 / 1,000,000 second) which is 300,000 times or more faster than that of a thin film transistor liquid crystal display having an average of 30 ms (millisecond). The power consumption, which is very suitable for processing and can be regarded as a necessary condition for a next-generation flat panel display, has an advantage that the power consumption is extremely small as compared with existing thin film transistor liquid crystal displays and plasma displays.
[0011]
In order to manufacture the organic light emitting display device as described above, a multi-step process similar to a semiconductor device manufacturing process should be sequentially performed, that is, a substrate (glass) and a shadow by a series of vacuum manufacturing equipment. Mask alignment, transfer and loading process, pattern formation process, hole transport layer formation and heat treatment process, light emitting layer formation process, pixel electrode (ITO Electrode) formation and cleaning process, organic deposition process, inorganic deposition A process, a process of forming a protective layer, a packaging process, and the like should be performed in a combined manner.
[0012]
The present invention is limited to a configuration of an attaching / detaching device for smoothly transferring a shadow mask so that a predetermined pattern can be formed on glass in a manufacturing facility for an organic light emitting display device.
[0013]
Here, the shadow mask means a shielding mask used to deposit a pattern having a predetermined form on the surface of glass in a vacuum deposition process, and the material is a thin metal plate made of a magnetic material. The shadow mask is supported in a state in which the shadow mask is in close contact with the glass, and a circuit pattern is formed on the surface of the glass by vapor deposition.
[0014]
That is, when a shadow mask is adhered and fixed to the bottom surface of the shadow mask holder unit, and a deposition material is deposited toward the shadow mask, a predetermined pattern formed on the shadow mask is formed on the glass.
[0015]
The conventional method of closely attaching a shadow mask by a manufacturing facility is performed by an attaching / detaching device that moves the shadow mask up and down from the lower part of the glass. The entire central portion of the shadow mask should be allocated to form a circuit pattern. For this reason, the shadow mask attaching / detaching device is configured to closely fix the shadow mask to the bottom surface of the glass while supporting only the edge of the shadow mask.
[0016]
[Problems to be solved by the invention]
However, in such a conventional shadow mask attaching / detaching apparatus, there is a problem in that since the shadow mask is moved up and down while supporting only an edge portion thereof, a drooping phenomenon occurs at a central portion due to its own weight of the shadow mask.
[0017]
In particular, since the shadow mask is formed in a very thin thin plate shape, the larger the size of the shadow mask becomes, the more drooping of the central portion becomes, and the more it is separated from the glass surface. Therefore, there is an inconvenience that the defective rate of the product and the production unit price increase.
[0018]
The present invention has been made in view of such conventional problems, and by controlling the increase and decrease of the magnetic force between the permanent magnet and the electromagnet, the shadow mask can be freely attached to and detached from the shadow mask holder unit. An object of the present invention is to provide a shadow mask attaching / detaching apparatus for manufacturing equipment for an organic light emitting display.
[0019]
Another object of the present invention is to maintain uniform adhesion over the entire surface irrespective of the size of the shadow mask, thereby significantly reducing the defective rate of the product, improving the product reliability and improving the production cost. In addition to being able to cut down on the shadow mask, by selectively blocking the adhesive force acting on the shadow mask and freely attaching and detaching it, the shadow mask can be quickly replaced, improving productivity and increasing mass production. An object of the present invention is to provide a shadow mask attaching / detaching apparatus of a manufacturing facility for an organic light emitting display device that is suitable.
[0020]
Another object of the present invention is to stabilize the equipment by reducing the volume and weight of the shadow mask holder unit, and to adjust the magnetic force of the electromagnet on the shadow mask seating table, so that the shadow mask holder unit An object of the present invention is to provide a shadow mask attaching / detaching apparatus for manufacturing equipment for an organic light emitting display device, which can reduce heat generation of the apparatus.
[0021]
[Means for Solving the Problems]
In order to achieve such an object, in the shadow mask attaching / detaching apparatus of the manufacturing equipment for an organic light emitting display device according to the present invention, a plurality of permanent masks are provided at predetermined intervals over the entire surface of the glass in contact with the metal sheet shadow mask. A shadow mask holder unit in which magnets are arranged, and a plurality of shadow mask holder units, which are located at predetermined intervals below the shadow mask holder unit with the shadow mask interposed therebetween, and are located at positions corresponding to the respective permanent magnets of the shadow mask holder unit. A shadow mask in which permanent magnets are arranged, and a plurality of electromagnets are arranged adjacent to the lower part of the permanent magnets so as to be able to control the magnetic force of the permanent magnets so as to increase or decrease the magnetic force. And a seating table.
[0022]
Each of the permanent magnets provided in the shadow mask holder unit and the shadow mask seating table may be arranged to maintain opposite polarities between the corresponding permanent magnets.
[0023]
The shadow mask can be attached to and detached from the bottom surface of the glass by changing the magnitude of the magnetic force between the shadow mask holder unit and the shadow mask seating table.
[0024]
The electromagnet includes a core disposed adjacent to a lower portion of the permanent magnet, a roll fitted to the permanent magnet and the core, and a coil wound on an outer peripheral surface of the roll.
[0025]
The shadow mask holder unit includes an upper plate having magnet mounting grooves formed at predetermined intervals on a bottom surface side, a lower plate separated by a predetermined interval corresponding to the upper plate, and the upper plate. A plurality of permanent magnets vertically interposed between the lower plates, a separation frame installed between the upper plate and the lower plate to support the edges thereof, and coupled to both sides of a bottom surface of the lower plate. A glass holder for locking and fixing the glass.
[0026]
On the upper surface of the lower plate, there is provided a thin heating plate capable of controlling the temperature so that the temperature of the glass can be kept constant.
[0027]
In the shadow mask holder unit, a plurality of fastening holes that penetrate the upper plate, the lower plate, and both sides of the separation frame at the same time are formed, and screws are fastened through the through holes. The upper plate, the lower plate, and the remaining side edges of the separation frame to which the glass holder is coupled and the glass holder are each integrally formed with a plurality of elastic fastening holes penetrating them simultaneously. The glass is elastically supported by the glass holder by fastening a fastening screw elastically supported by a compression spring through the elastic fastening holes.
[0028]
The shadow mask seating table has an upper plate on which the shadow mask is attached and detached, and magnet seating grooves formed at predetermined intervals on a bottom surface, and a coil connected to the electromagnet flows into a central portion. A support plate having a coil inlet hole formed therein and disposed adjacent to a bottom surface of the upper plate, a lower plate separated from the support plate by a predetermined distance, and a vertical direction between the support plate and the lower plate. It is characterized by including a plurality of permanent magnets and a magnetic force adjusting unit including an electromagnet interposed therebetween.
[0029]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[0030]
In the shadow mask attaching / detaching apparatus of the manufacturing equipment for an organic light emitting display device according to the present invention, as shown in FIGS. 1 to 4, a predetermined interval is provided over the entire surface of the glass 42 with which the thin metal plate-shaped shadow mask 1 is in contact. And a shadow mask holder unit H having a plurality of permanent magnets 35 arranged therein and a shadow mask 1 interposed between the shadow mask holder unit H and a lower portion of the shadow mask holder unit H at a predetermined interval. A plurality of permanent magnets 85 are respectively arranged at positions corresponding to the permanent magnets 35, and are arranged adjacent to the lower portions of the permanent magnets 85 so as to wrap the permanent magnets 85 and control the magnetic force of the permanent magnets 85. And a shadow mask seating table T on which a plurality of electromagnets 81 whose polarity directions can be adjusted are arranged as described above.
[0031]
In the shadow mask holder unit H, the upper plate 10 made of a metal material such as nickel, in which the magnet mounting grooves 13 are formed at predetermined intervals on the bottom side, and corresponding to the upper plate 10. A lower plate 20 separated at a predetermined interval; a plurality of permanent magnets 35 vertically interposed between the upper plate 10 and the lower plate 20; and a plurality of permanent magnets 35 installed between the upper plate 10 and the lower plate 20. It is composed of a separation frame 30 that supports an edge, and a glass holder 40 that is coupled to both ends of the bottom surface of the lower plate 20 to lock and fix the glass 42.
[0032]
The upper plate 10, the lower plate 20, and the separation frame 30 are respectively formed with a plurality of fastening holes 12, 22, 32 penetrating both side edges thereof at the same time, and these through holes 12, 22, 32 are formed. By fastening a screw (not shown) through the intermediary, the permanent magnets 35 are integrally fixed with the built-in permanent magnets, and the upper plate 10, the lower plate 20, and the rest of the separation frame 30 to which the glass holder 40 is coupled. A plurality of elastic fastening holes 14, 24, 34, 44 penetrating the both side edges and the glass holder 40 at the same time are formed respectively, and compression springs are formed through the elastic fastening holes 14, 24, 34, 44. By fastening the fastening screw 91 elastically supported by 94, the glass 42 is elastically supported by the glass holder 40.
[0033]
At this time, in consideration of the fact that the upper end of each permanent magnet 35 is slightly inserted into each magnet mounting groove 13, the separation frame 30 is formed to be slightly thinner than the length of each permanent magnet 35 so that the permanent magnet 35 And the inside of each elastic fastening hole 34 of the separation frame 30 extends along the inner peripheral surface so as to function as a spring seat of a compression spring 94 inserted into the elastic fastening hole 34. In this case, the inner diameter of the elastic fastening hole 14 of the upper plate 10 is equal to the large diameter portion of the elastic fastening hole 34 of the separation frame 30. The inner diameter of each of the elastic fastening holes 14 and 44 of the lower plate 20 and the glass holder 40 is formed so as to correspond to the small diameter portion of the elastic fastening hole 34 of the separation frame 30.
[0034]
That is, the elastic coupling structure of the shadow mask holder unit H is achieved by the elastic adjustment unit 90 which is fastened through each of the elastic fastening holes 14, 34, 24, 44. Screw 91 inserted into the elastic fastening holes 14 and 34 from the upper portion of the upper plate 10 and screwed with the fastening screw 91; a head portion of the flowing nut 92 and the separation frame 30; And a compression spring 94 that elastically supports between the locking projections 34a and applies an upward force to the fastening screw 91.
[0035]
In the figure, reference numeral 93 denotes a screw fastening hole 93 that is screwed with the screw portion of the fastening screw 91.
[0036]
According to such a configuration, the glass 42 can be freely attached and detached after the glass holder 40 is pulled downward and separated therefrom. Conversely, when the glass holder 40 is released, the elasticity of the compression spring 94 causes the glass 42 to be detached. 42 can be fixed in a state of being in close contact with the bottom surface of the lower plate 20.
[0037]
According to the structure of the elasticity adjusting unit 90, the elastic force of the compression spring 94 can be adjusted to be constant while tightening or removing the fastening screw 91 according to the thickness of the glass 42, so that the pressure acting on the glass 42 can be reduced. It can be kept constant regardless of its thickness.
[0038]
On the upper surface of the lower plate 20, there is provided a thin heating plate 25 whose temperature can be adjusted so that the temperature of the glass 42 can be kept constant, and the lower end of the permanent magnet 35 is provided on the upper surface of the heating plate 25. Are kept in contact. Here, the heating plate 25 corresponds to a heat generating unit for supplying external electricity and providing heat required for pattern deposition of the glass 42, and is connected to a temperature sensor (not shown). The temperature can be sensed from outside.
[0039]
The glass holders 40 are formed in a substantially bar shape and are respectively located on both corresponding sides of the bottom surface of the lower plate 20, and have glass mounting projections 41 at both ends thereof so as to support the corners of the glass 42. Are formed respectively.
[0040]
On the other hand, the shadow mask seating table T has an upper plate 50 on which the shadow mask 1 is attached and detached, magnet seating grooves 73 formed at predetermined intervals on the bottom side, and a coil 83 connected to the electromagnet 81 at the center. A support plate 70 formed with a coil inlet hole 71 to be introduced and disposed adjacent to the bottom surface of the upper plate 50; a lower plate 60 spaced apart from the support plate 70 by a predetermined distance; The magnetic force adjusting unit 80 includes a plurality of permanent magnets 85 and electromagnets 81 vertically interposed between the lower plates 60.
[0041]
Here, the electromagnet 81 includes a core 84 of nickel material disposed adjacent to a lower portion of the permanent magnet 85, a roll 82 fitted on the outer peripheral surfaces of the permanent magnet 85 and the core 84, and an outer peripheral surface of the roll 82. And a coil 83 wound around the coil 83. Here, the coil 83 is configured to be bound by a bundle and pass through the coil inflow hole 71, that is, to draw out the coil 83 through the coil inflow hole 71. After that, a changeover switch (not shown) or the like is attached to both ends to change the direction of the current, so that the electrode direction of the electromagnet 81 can be adjusted.
[0042]
The permanent magnets 35 and 85 provided in the shadow mask holder unit H and the shadow mask seating table T, respectively, are arranged such that the corresponding permanent magnets 35 and 85 maintain opposite polarities, and the permanent magnets ( 35 or 85) are arranged such that the polarity of the permanent magnet (35 or 85) at any position thereof is opposite to the polarity of each adjacent permanent magnet (35 or 85).
[0043]
The reason why the polarities of the magnetic force generating portions are arranged to be different from each other is to provide a uniform magnetic force to the shadow mask 1 adhered to the bottom surface of the glass 42. Ferrite magnets are mainly used.
[0044]
Hereinafter, the operation principle of the shadow mask attaching / detaching apparatus according to the present invention will be described with reference to FIGS. 5A and 5B.
[0045]
FIGS. 5A and 5B illustrate the principle of operation of attaching and detaching the shadow mask by the shadow mask attaching / detaching apparatus according to the present invention. FIG. 5A illustrates that the magnetic force of the shadow mask seating table T is reduced and the shadow mask 1 is shadowed. FIG. 5B is an operation state diagram illustrating a state where the shadow mask 1 is attracted to the bottom surface of the mask holder unit H. FIG. At the same time, it is an operation state diagram showing a state where the shadow mask is seated on the surface of the seating table T.
[0046]
First, when the shadow mask 1 is to be adsorbed on the bottom surface of the glass 42, as shown in FIG. 5A, a positive current is applied to the electromagnet 81 in the shadow mask seating table T so that the adjacent permanent magnet 85, and the magnetic force of the permanent magnet 85 forms a weaker magnetic field than the permanent magnet 35 in the shadow mask holder unit H while colliding with the magnetic force of the electromagnet 81. The placed shadow mask 1 is pulled by the magnetic force of the permanent magnet 35 provided in the shadow mask holder unit H and is attracted to the bottom side of the glass 42.
[0047]
Conversely, when the shadow mask 1 is to be seated on the surface of the upper plate 50 of the shadow mask seating table T, the electromagnet 81 in the shadow mask seating table T is turned in the opposite direction as shown in FIG. Is applied to form a polarity opposite to the polarity of the adjacent permanent magnet 85. Therefore, the magnetic force of the permanent magnet 85 is combined with the magnetic force of the electromagnet 81 and is larger than that of the permanent magnet 35 in the shadow mask holder unit H. In order to form a strong magnetic field, the shadow mask 1 arranged between them is pulled by the magnetic force of the magnetic force adjusting unit 80 of the shadow mask seating table T and is attracted to the front side of the upper plate 50.
[0048]
The present invention is configured so that the shadow mask 1 can be easily attached to and detached from the bottom surface of the glass 42 by the change in the magnitude of the magnetic force between the shadow mask holder unit H and the shadow mask mounting table T.
[0049]
Although the present invention has been described in detail with reference to the specific embodiments, the present invention is not limited to the above-described embodiments, and various modifications may be made by those having ordinary knowledge within the scope of the technical idea. Can be.
[0050]
【The invention's effect】
As described above, in the shadow mask attaching / detaching apparatus according to the present invention, the magnetic force of the magnet acting over the entire surface of the glass is used to adhere and support the shadow mask to the glass. Is significantly improved, and the shadow mask can maintain a uniform support state without sagging at the center thereof, thereby enabling an accurate circuit pattern deposition process to be performed and an effect of minimizing a defective rate. is there.
[0051]
In addition, the magnetic force acting on the shadow mask can be selectively cut off by a current application method of the electromagnet, and a separate elastic adjustment unit is connected, so that the replacement operation of the used shadow mask can be performed quickly and easily. It can be applied to mass production of products.
[0052]
In addition, the structure of the present invention is dualized to reduce the size of the shadow mask holder unit, thereby stabilizing the equipment. In addition, since the magnetic force of the electromagnet is adjusted on the shadow mask seating table, the heat of the shadow mask holder unit is reduced. There is an effect that generation can be reduced.
[Brief description of the drawings]
FIG. 1 is an exploded perspective view showing a shadow mask attaching / detaching device of an organic light emitting display device manufacturing facility according to the present invention.
FIG. 2A is a plan view showing a shadow mask holder unit applied to the shadow mask attaching / detaching device of FIG. 1;
FIG. 2B is a plan view showing a shadow mask seating table applied to the shadow mask attaching / detaching apparatus of FIG. 1;
FIG. 3 is a sectional view taken along line AA of FIG. 1;
FIG. 4 is an enlarged view of a portion B of FIG. 3 showing an enlarged view of a coupling structure of a magnetic force adjusting unit provided inside the shadow mask seating table of FIG. 1;
FIG. 5a illustrates the principle of operation of attaching / detaching a shadow mask by the shadow mask attaching / detaching apparatus according to the present invention, in which the magnetic force of the shadow mask seating table is reduced and the shadow mask is attracted to the bottom surface of the shadow mask holder unit. FIG. 4 is an operation state diagram showing a state.
FIG. 5b illustrates the principle of operation of attaching and detaching the shadow mask by the shadow mask attaching and detaching apparatus according to the present invention, in which the magnetic force of the shadow mask mounting table increases, and the shadow mask detaches from the bottom surface of the shadow mask holder unit. FIG. 4 is an operation state diagram illustrating a state where the shadow mask is seated on the surface of the shadow mask seating table.
[Explanation of symbols]
H Shadow mask holder unit T Shadow mask seating table 1 Shadow mask 10, 50 Upper plates 12, 22, 32 Fastening holes 13, 73 Magnet seating grooves 14, 24, 34, 44 Elastic fastening holes 20, 60 Lower plate 25 Mounting plate 30 Separation frame 34a Locking ridge 35, 85 Permanent magnet 40 Glass holder 41 Glass mounting protrusion 42 Glass 70 Support plate

Claims (9)

A shadow mask holder unit in which a plurality of permanent magnets are arranged at predetermined intervals over the entire surface of the glass in contact with the thin metal plate shadow mask, and a predetermined interval between the shadow mask holder unit and the lower portion of the shadow mask holder unit with the shadow mask interposed therebetween A plurality of permanent magnets are respectively arranged at positions corresponding to the respective permanent magnets of the shadow mask holder unit, and wrap the permanent magnets and adjoin the lower portions thereof to reduce the magnetic force of the respective permanent magnets. A shadow mask attachment / detachment device for an organic light emitting display device manufacturing facility, comprising: a shadow mask seating table on which a plurality of electromagnets whose polarity directions can be adjusted so as to be able to control increase / decrease. 2. The organic device according to claim 1, wherein the permanent magnets provided in the shadow mask holder unit and the shadow mask seating table are arranged to maintain opposite polarities between the corresponding permanent magnets. A shadow mask attachment / detachment device for manufacturing equipment for electroluminescent display devices. 2. The manufacturing equipment for an organic light emitting display according to claim 1, wherein the shadow mask can be attached to and detached from the bottom surface of the glass by changing the magnitude of magnetic force between the shadow mask holder unit and the shadow mask mounting table. Shadow mask attachment / detachment device. The electromagnet includes:
A core disposed adjacent to a lower portion of the permanent magnet;
A roll fitted to the permanent magnet and the core,
2. The apparatus as claimed in claim 1, further comprising a coil wound around an outer peripheral surface of the roll. The shadow mask holder unit,
An upper plate in which magnet mounting grooves are formed at predetermined intervals on the bottom side,
A lower plate separated at a predetermined interval corresponding to the upper plate,
A plurality of permanent magnets vertically interposed between the upper plate and the lower plate,
A separation frame installed between the upper plate and the lower plate to support their edges,
2. The method of claim 1, further comprising: a glass holder coupled to both sides of a bottom surface of the lower plate to lock and fix the glass. apparatus. The organic light emitting display as claimed in claim 5, wherein a thin heating plate is provided on an upper surface of the lower plate to control a temperature of the glass to be constant. Mask removal equipment for manufacturing equipment. The organic electroluminescence according to claim 6, wherein the heating plate is a heat generating means for providing heat required for pattern deposition of the glass, and is connected to a temperature sensor to detect a temperature. Shadow mask attachment / detachment equipment for manufacturing equipment for display devices. In the shadow mask holder unit, a plurality of fastening holes that penetrate the upper plate, the lower plate, and the both side edges of the separation frame at the same time are formed respectively, and screws are fastened through the through holes to integrally form the shadow mask holder unit. The upper plate, the lower plate, and the remaining both side edges of the separation frame to which the glass holder is fixed and the glass holder are respectively formed with a plurality of elastic fastening holes that penetrate them simultaneously, 6. The organic light emitting display device according to claim 5, wherein the glass is elastically supported by the glass holder by fastening a fastening screw supported by a compression spring through the elastic fastening hole. Equipment for mounting and removing shadow masks. The shadow mask seating table,
An upper plate on which the shadow mask is detached,
A support plate disposed adjacent to a bottom surface of the upper plate, wherein a magnet seating groove is formed at a predetermined interval on a bottom surface side, and a coil inflow hole through which a coil connected to the electromagnet flows is formed in a center portion; ,
A lower plate separated from the support plate by a predetermined distance,
2. The manufacturing equipment for an organic light emitting display according to claim 1, further comprising a magnetic force adjusting unit including a plurality of permanent magnets and electromagnets vertically interposed between the support plate and the lower plate. Shadow mask attachment / detachment device.

Images