TW578183B - Shadow-mask holding device in organic electro-luminescent display manufacturing equipment - Google Patents

Abstract

There is provided a shadow-mask holding device in organic electro-luminescent display manufacturing equipment, capable of enabling the control of increasing or decreasing the magnetic field intensity between a permanent magnet and a magnet, and capable of arbitrarily mounting and dismounting the shadow-mask on the shadow-mask clip. The structure of the shadow-mask holding device in organic electro-luminescent display manufacturing equipment is composed of a shadow-mask clip H and a shadow-mask placement stage T. The shadow-mask clip H arranged plural permanent magnets 35 spaced by a predetermined gap on the whole surface of a glass 45 connected to the metal-film shaped shadow-mask 1. The shadow-mask 1 is provided at the middle portion below the shadow-mask placement stage T and the shadow-mask clip H. Plural permanent magnets 85 are respectively arranged at positions corresponding to each permanent magnet 35 of the shadow-mask clip H and separated by a predetermined distance from the lower portion of the shadow-mask clip H. Plural electromagnets 81 are arranged on the circumference of the permanent magnets 85 and the lower portion close to the permanent magnets 85, thereby controlling the increasing or decreasing of the magnetic field intensity of the permanent magnets 85.

Description

578183 V. Invention "一" Technical Field The present invention relates to the invention of a * shadow mashing device for manufacturing an electro-excitation light display device, and more specifically, to control the distance between the magnet and the magnet. The change in the magnitude of the magnetic field strength (magnet 丨 cf 〇r c㊀) 'can make the shadow mask plate arbitrarily mounted on the shadow mask plate fixture, is the earliest developed Cluster Type on the manufacture of electro-excitation light display devices (0ELD) The invention of a device for mounting and removing a shadow mask of a device. BACKGROUND OF THE INVENTION The prior art organic electro-luminescence display (0ELD) device is a phenomenon in which electrons and holes injected between an anode and a cathode are combined in an organic substance to generate self-luminescence, or a kind of utilizing this phenomenon Device, since the Bernanos research group in France in 1950 discovered the phenomenon of electrical excitation light, Britain, the United States, Japan, Germany and South Korea, and many other companies around the world have been paying attention to it. product. More specifically, 'E 1 ectr ο 1 uminescence' refers to the phenomenon of emitting light when a strong electric field is applied to a solid. The reason is that free electrons that are accelerated by an electric field are excited by a light-emitting substance as The electrons of the specific impurities (active agents) in the luminous center, which are caused by the release of energy when they return to their original state. The electro-excitation light element using such a light-emission principle cannot reach the brightness for general lighting, and is mainly used in display devices and optical amplifiers, and is also used in televisions and other fields.

578183

After mixing the above-mentioned electro-optical element, it becomes a film with a thickness of tens of ΐ1, a light body and a complex water μ ^^, and is made into a plate-shaped light-emitting layer. And become a capacitor. It is generally composed of: the electrode is a metal material 1 and the electrode is a transparent 1 透明 that can emit light outward. The light-emitting layer is a cured powdery sulfide (ZnS) and the like. White and light-emitting substances are classified into a plastic type and a ceramic type. ^ The aforementioned electroluminescent display device can be driven even at low voltages below 15V. 'It has the advantage of making the product ultra-thin, so it appears as a next-generation flat-panel display device that can replace the current plasma display wave. (PDP: P1 asma D isp 1 ay Pane 1) and thin film transistor liquid crystal display (TFTLCD: Thin F i 1 m Transistor L iquid Crysta 1 Diplay). In order to clarify the differences between the various display devices and the electro-luminescent display device in terms of the structure and light emission principle, the various display devices are described in detail.

578183 V. Description of the invention (3) Principle: The gas is uniformly enclosed in the panel so that the electrodes are arranged in a lattice shape. Select any point on these lattice-shaped electrode lines to pass the electrode current, the gas is ionized and emit light at the same time. Characters and graphics are displayed by controlling whether there is a digital signal at each light emitting point of the electrode line with an additional voltage. The enclosed gas mainly uses neon gas, so it emits copper-colored light, and the electrode covered with an insulating film can also have a memory function, so it can be used as a terminal device of a computer. The thin-film transistor liquid crystal display device is a type of electric crystal that controls the action of an electric field. The electric field formed by controlling the current flowing through the semiconductor on the thin film is perpendicular to the current. Each of the early element (C e e 1) electrodes constituting each point of the liquid crystal is provided with a transistor, which can also be said to be the only active element in the management operating system IC (MOS 1C) element. The thin film transistor liquid crystal display device has a thin plate shape peculiar to a liquid crystal display device. The thin film transistor liquid crystal display device has the advantages of low power consumption and the same quality as a cathode ray tube (CTR: Cathode-Ray Tube). High semiconductor technology not only has the problem of difficulty in producing products, but also has a slow response speed, so there is a fatal disadvantage of rapid image processing and residual images, which limits the development of televisions. In contrast, the above-mentioned electroluminescent display device has a data response speed of 1 // s (microseconds: 1 part per million), which is 30 times faster than a thin-film transistor liquid crystal display device with an average data response speed of 30ms (milliseconds). More than 10,000 times, it is very suitable for high-speed image processing. It can also be said that the power consumption as a necessary condition for the next generation of flat-panel display devices, and the existing thin-film transistor liquid crystal display devices and

578183 V. Description of the invention (4) Compared with the plasma display device, it has the advantage of very small power consumption. As described above, in order to manufacture an electroluminescent display device, many processes similar to those for manufacturing a semiconductor element are sequentially performed, that is, a series of vacuum manufacturing equipment is used to arrange a substrate (glass) and a shadow mask plate, and transfer the same. And loading process, patterning process, hole transport layer and heat treatment process, light emitting layer process, ITO Electrode and cleaning process, organic substance deposition process, inorganic substance deposition process, protective film production process, and Packaging process. In the device for manufacturing an electroluminescence display device, the present invention limits the structure of a mounting and unloading device for smoothly transferring a shadow mask plate so that a predetermined pattern can be obtained on glass. The shadow mask is a mask used in a vacuum evaporation process to vapor-deposit a predetermined shape on a glass surface. The mask is made of a thin metal plate. It is placed on the glass in a close state, and a circuit pattern is formed on the surface of the glass by vapor deposition of a vapor deposition material. That is to say, after the shadow mask plate is closely fixed to the bottom surface of the shadow mask fixture and vapor-deposited on the shadow mask plate, a predetermined pattern of the shadow mask plate is formed on the glass. The method for making the shadow mask close and fixed with the existing manufacturing equipment is to use

Plate cover on page 10. The support of the shadow support can only be lowered to the branch, and the cover of the shadow board with the heavy plate self-covering installed in the middle of the production and unloading will have the present cause, the edge 578183 V. Description of the invention (5) -The mounting and unloading device for raising the shadow mask plate under the glass is carried out, 仞 Η 山 & ^ ^ # However, since the shadow mask plate has a pattern on the entire middle surface, the mouth of the shadow mask plate loading and unloading device & In the state of the edge of the concealed cover plate, the concealed cover plate is closely attached to the broken glass; fixed. In particular, since the shadow mask plate is very thin, the larger the size of the shadow mask plate, the more serious the sagging phenomenon in the middle part. Due to the door barrier with the glass surface, the correct pattern cannot be obtained by evaporation, so there are two products. [B] The problem of high valley rate and high unit price of products. SUMMARY OF THE INVENTION The present invention is directed to an existing problem. The purpose is to provide a shadow mask plate mounting and dismounting device for manufacturing an electro-excitation light display device. The present invention is to control the intensity of a magnetic field between a water magnet and an electromagnet. Loading and unloading of the hood plate and central gear.乂 卩 通 思 & 备 t: The outer s is to provide a single surface for the manufacture of the electro-excitation light display device; close, detachable, regardless of the size of the shadow mask plate, can be integrated, reducing The product? In order to reduce the failure rate of products, the tightness of the high-quality products, the early price ’can also selectively cover the shadow masks, perform random loading and unloading, and quickly replace the shadow masks.

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The shadow mask plate mounting and dismounting device of the other device of the present invention is used for manufacturing the electro-excitation light display device to stabilize the equipment, and at the same time, the lightning = reduces the volume of the shadow mask plate fixture and performed on a heavy workbench. The adjustment of the magnetic field of iron places the heat generated by v on the shadow mask. To achieve this, wood

The installation and disassembly of the shadow mask plate of the installed equipment are provided for manufacturing the electro-excitation light display mask plate fixture, and the shadow mask plate is placed 2 = characteristically that its structure includes: the amount of the glass panel 2 that the shadow mask plate contacts; The mask plate is lost on a plurality of permanent magnets with a thin metal plate; the shadow mask plate is provided at a predetermined interval with the shadow mask plate in the middle. Permanent magnets are provided at a predetermined distance from the lower part of the shadow mask plate clamp ^ ^, and the positions corresponding to φ f permanent magnets are provided above the positions corresponding to φ f permanent magnets. Near them, the magnetic field of each of the permanent magnets is reduced, and a plurality of electromagnets are used to control the increase or

It is characterized by the opposite polarity of each permanent magnet in the stage. The feature that the shadow mask is placed on the glass is that the shadow mask is changed by changing the size of the field between the shadow mask fixture and the worktable.

578183 578183 V. Description of the invention (8) Furthermore, the shadow mask plate mounting table is characterized in that its structure includes an upper plate, a support plate, a lower plate, and a magnetic field adjustment component. The upper plate is used for attaching and detaching the shadow mask plate; the supporting plate is provided adjacent to the bottom surface of the upper plate, and magnets have mounting slots at regular intervals on one side of the bottom surface, and there is a winding for connecting with the electromagnet A winding access hole of the winding; a predetermined interval between the lower plate and the support plate; and a magnetic field adjustment component composed of a plurality of permanent magnets and electromagnets placed vertically between the support plate and the lower plate. detailed description

Embodiments of the present invention will be described below with reference to the drawings.

As shown in Figs. 1 to 4, in the shadow mask panel mounting and dismounting device for manufacturing an electroluminescent display device according to the present invention, its structure is composed of a shadow mask panel holder Η and a shadow mask mounting table T. The shadow mask holder is a plurality of permanent magnets 3 5 provided on the entire surface of the glass 4 2 in contact with the metal sheet-shaped shadow mask 1 at a predetermined interval; the shadow mask mounting table T and the shadow The lower part of the mask holder Η is provided with the shadow mask 1 at a predetermined distance from the lower part of the mask holder Η, and is provided at a position corresponding to each of the permanent magnets 35 of the mask holder Η. There are a plurality of permanent magnets 8 5. A plurality of electromagnets 8 1 that can adjust the polarity direction are provided around the permanent magnets 8 5 and the lower part of the permanent magnets 8 5 to control the increase or decrease of the permanent magnets 8 5. Magnetic field strength. The shadow mask plate holder Η includes: an upper plate 10, a lower plate 20, a plurality of permanent magnets 35, an isolation frame 30, and a glass bracket 40. 10 on the top plate with nickel, etc.

Page 14 578183 V. Description of the invention (9) The hotel and the metal = made of 'magnet mounting grooves at a specified distance from the bottom surface to the side ^ m〇 corresponding to the upper plate 10' at a specified interval; multiple permanent: two ΐη is placed between the upper plate 10 and the lower plate 20; the isolation frame 30 is provided between = 10 and the lower plate 20 to support their edges; the glass frame 40 is connected to the bottom surface of the lower plate 20 and the side ends, and Bit and fix the glass 42. On the lower plate 20 and the isolation frame 30, two connection holes 12, 22, and 32 that pass through several components at the same time are used in two of them. The two are described as follows: 22, 32 with bolts (pictured) (Not shown) The connection is fixed in a state in which each of the water-sustaining magnets 35 are incorporated therein, and the upper plate 10 and the lower yoke of the glass frame 40 are connected in succession. 〇The edge of the example and the glass frame rod 40 are: Γ, the other two or two of the frame 30 are connected by bolts 91 of these elastic connection holes ", 24, 34, and two branches, and the glass frame is used. 4: The glass 42 is supported with a τ fork. Said i]: i = η :: the upper end of iron 35 must have some phases

Γίΐ = "Slightly smaller, so that each" "can be inserted into the elastic connection holes 34 of the isolation frame 30, and the protrusion 3" has a double inner diameter in the form of a double inner diameter. Inner #, the second diameter and each of the lower frame 20 and the glass frame 4 of the isolation frame 30

578183 V. Description of the invention (JO) The inner diameter of the connection hole 1 4 '4 4 and the small inner diameter of the elastic connection hole 34 of the isolation frame 30 are substantially the same. That is, the elastic connection structure of the shadow mask plate holder Η is achieved through the elastic adjustment member 90 connected through each of the elastic connection holes 14, 3 4, 2 4, 4 4. The structure of the elastic adjustment member 90 is composed of a connecting bolt 9 and a movable nut 9 2 and a compression spring 9 4. The connection bolt 91 is inserted from below the glass frame 40; the movable nut 92 is inserted into the connection holes 14, 34 from the upper part of the upper plate 10, and is connected with the connection bolt 91; the compression spring 94 It is an elastic branch between the head of the movable nut 9 2 and the limiting element protrusion 3 4 a of the isolation frame 30, and an upward force is applied to the connecting bolt 91. Numeral 93, which is not illustrated in the figure, indicates the screw connection hole 93 connected to the screw inspection 91 described above. With such a structure, after the glass frame 40 is pulled down and left, the glass 42 can be freely attached and detached; otherwise, the glass frame 40 is released, due to the elasticity of the compression spring 94. The glass 42 is brought into close contact with the bottom surface of the lower plate 20 and fixed. By adopting the structure of the elastic adjustment member 90, according to the thickness of the glass 42, tightening or loosening the connecting bolt 91, the elastic force of the compression spring 94 can be adjusted to a certain degree, so regardless of the thickness The size can keep the waste force acting on the glass 42 constant.

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On the upper surface of the lower plate 20, there is a thin plate-shaped heating plate 25 capable of temperature adjustment. The upper surface of the heating plate 25 is kept in contact with the lower end of the permanent magnet π. The heating plate 25 is a heating device for supplying heat necessary for vaporizing the pattern of the glass 42 by external power supply. Connect a temperature $ sensor (not shown in the figure) to observe the temperature from the outside. X The glass frame 40 is substantially rod-shaped and is located on two sides corresponding to the bottom surface of the slab 20, and has glass mounting protrusions 41 at both ends thereof to support the corners of the glass 42. On the other hand, the shadow mask board mounting table T is composed of an upper board 50, a supporting board 70, a lower board 60, a plurality of permanent magnets 85, and an electromagnet 81. The upper plate 50 is for attaching and detaching the shadow mask plate 1; the supporting plate 70 is provided adjacent to the bottom surface of the upper plate 50. At the bottom surface side, there are mounting grooves 73 for magnets at regular intervals. The winding access hole 71 of the winding 8 3 to which the electromagnet 81 is connected; the lower plate 60 is spaced from the support plate 70 by a prescribed distance; and the magnetic field adjustment member 80 is placed vertically on the support plate 70 and the lower plate 6 〇 is composed of a plurality of permanent magnets 85 and electromagnets 81. The electromagnet 81 is composed of a core 84 made of nickel, which is arranged near the lower part of the permanent magnet 85, and a cylinder 82 matching the outer circumference of the permanent magnet 85 and the core 84, and is wound around the cylinder 82. The winding 83 is formed. The winding 83 is bundled into a bundle through a winding access hole 71, which means that

Page 17 578183 V. Description of the invention (12) The winding 83 passes through a changeover switch (not shown), etc., after a f ', the direction of the electrodes of the magnet 81 is mounted on both ends thereof. , Electricity * universal, you can adjust the electricity

The shadow mask plate clamps the permanent magnets 3, 5 and 5 phases ^ opposite to the respective reverse polarities in the shadow mask plate mounting table T. These permanent magnets 35 and 85 of the permanent circuit 2 are set to maintain the phase (35 or 85) pure and permanent magnets adjacent to any position of m or 85) are set to opposite polarities. Describe the polarity of each Shuijiu magnet (35 or 85) ❿ The polarity of the magnetic field is closely adhered to the household / t glass W & j for the same reason, it is to the permanent m? The cover plate 1 provides a uniform magnetic field. Magnetism = Shuijiu magnets 35 and 85 mainly use ferrite (Wme) series of plates =====. This invention has this structure. Figure 5 (A) (B) shows the shadow mask of the present invention Board loading and unloading action-4 expandable vocal pedestal τ magnetic I Figure 5 (A) is a working state diagram showing the reduction of the knee visor placement, Figure '5fBt / and attached to the visor board 11 The bottom of the action-like plate 1 from A 疋 indicates that the magnetic field of the shadow mask plate mounting table T is increased, and the shadow mask working table τί ί 2 and 11 are detached from the bottom surface, and placed on the surface of the food mask plate Action state diagram.

III. Page 18 578183 V. Description of the invention (13) First, when the shadow mask 1 is adsorbed on the bottom surface of the glass 4 2, as shown in FIG. 5 (A), the electromagnet 8 in the table T is placed on the seat mask 1 A forward current is applied to form the same polarity as the adjacent permanent magnet 85, so the magnetic field of the permanent magnet 85 conflicts with the magnetic field of the electromagnet 81 to form a permanent magnet in the Billon hood clamp 板. The magnet 35 requires a weak magnetic field, and the shadow mask 1 placed between them is attracted to the bottom side of the glass 42 by the pulling force of the magnetic field of the permanent magnet 35 held by the shadow mask clamp.

Conversely, when the shadow mask plate 1 is placed on the surface of the upper plate 50 of the shadow mask plate mounting table T, as shown in FIG. 5 (B), the electromagnetic field in the shadow mask plate is placed in the table T A reverse current is applied to the iron 8 1 to form a polarity opposite to the polarity of the adjacent permanent magnet 85. Therefore, the magnetic field of the permanent magnet 85 and the magnetic field of the electromagnet 81 are superposed to form a magnetic field that is larger than the shade. The permanent magnets 35 in the mask holder η require a strong magnetic field, and the shadow mask 1 placed between them is attracted to the magnetic field of the magnetic field adjustment member 80 of the shadow mask mounting table T and is attracted to the The surface of the upper plate 50. According to the present invention, by changing the magnitude of the magnetic field between the mask plate holder Η and the mask plate mounting table T, the mask handle double 1 is simply attached to and detached from the glass 42. The foregoing has been described in detail with specific embodiments of the present invention. The present invention is not limited to the embodiments within the scope of their technical ideas.

Page 19 578183 V. Description of the invention (14) A person with certain knowledge can make many changes. [Effects of the Invention] As described above, in order to closely attach the shadow mask plate to the glass in the shadow mask plate attaching and detaching device of the present invention, a magnetic field (magnetic force) acting along the entire surface of the glass can be used to significantly improve the glass mask. Improving the adsorption of the shadow mask plate, the shadow mask plate does not sag in the middle, can maintain a uniform support state, can accurately perform the evaporation process of the circuit pattern, and has the effect of minimizing the failure rate. By changing the additional method of the electromagnet current, the magnetic field acting on the shadow mask can be selectively masked. At the same time, the elastic adjustment member connected to another path can quickly and easily perform the operation of replacing the shadow mask, which is very effective. Adapt to the effect of mass production of products. The structure of the present invention is two-dimensionalized, and the purpose is to stabilize the shadow mask fixture by computer control.1 At the same time, the magnetic field of the electromagnet is adjusted on the side mask mounting table, so it has the effect of reducing the heat generated by the shadow mask fixture. .

Page 578 183

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Claims (1)

578183 VI. The barrel covered by the patent and the windings wound around the barrel 5. The hood cover loading and unloading device for the device for manufacturing the electro-excitation light display device described in item 丨 of the scope of the patent application, characterized in that: The shadow mask plate fixture is composed of an upper plate, a lower plate, a plurality of permanent magnets, an isolation frame, and a glass bracket; the upper plate is a groove on which a magnetic block is placed at regular intervals on the bottom side; the lower plate is opposite to the above The upper plate is separated from the prescribed space; a plurality of permanent magnets are placed between the upper plate and the lower plate in a vertical direction; an isolation frame is provided between the upper plate and the lower plate to support its edge; a glass bracket and the The two sides of the bottom surface of the lower plate are connected to limit and fix the glass. :), as described in item 5 of the patent scope of Shenyan, the hood cover loading and unloading device for manufacturing equipment for electroluminescent display devices is characterized in that a thin plate-like heating capable of temperature adjustment is provided on the lower plate. A plate for keeping the glass at a certain temperature. 7. The shadow mask plate loading and unloading device provided in item 5 of the scope of the patent application, the sides of the special frame have a plurality of simultaneous through-holes bolted to one of the upper plate, the lower plate, and the isolation frame. There are a plurality of bullet holes that pass through at the same time, and the glass is supported by a screw elastically supported by a compression spring. The manufacturing characteristics of the electro-excitation light display device are as follows: its upper plate, lower plate, connection holes which isolate and penetrate several parts, and the other sides of the glass frame and the glass frame are connected through the body. The flexible connecting holes are connected through these elastic connecting bolts, and the glass frame is elastically used. Page 578 183 6. Scope of patent application 8 " Manufacturing electric excitation light display jealous plate mounting and dismounting device as described in item 1 of the scope of patent application, which is characterized by: ㈣ cover plate loading and unloading :: structure includes upper plate, support plate, lower plate The magnetic field adjusting component group ^ is used for loading and unloading the knee cover; the supporting floor is arranged on the surface of the plate adjacent to the upper plate. On the side of the concrete surface, there are mounting grooves with magnets at regular intervals. The windings connected by the electromagnet 1 The specified interval of the branch floor ... The field adjustment component is placed vertically: Multiple permanent magnet and electromagnet sets between flap and lower plate: placed Country Page 25