JP3582248B2 - Gas discharge display panel and method of manufacturing the same - Google Patents

Gas discharge display panel and method of manufacturing the same Download PDF

Info

Publication number
JP3582248B2
JP3582248B2 JP24335996A JP24335996A JP3582248B2 JP 3582248 B2 JP3582248 B2 JP 3582248B2 JP 24335996 A JP24335996 A JP 24335996A JP 24335996 A JP24335996 A JP 24335996A JP 3582248 B2 JP3582248 B2 JP 3582248B2
Authority
JP
Japan
Prior art keywords
display
electrode
transparent electrode
auxiliary electrode
gas discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP24335996A
Other languages
Japanese (ja)
Other versions
JPH1092325A (en
Inventor
直仁 坂元
利之 南都
新一 黒木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP24335996A priority Critical patent/JP3582248B2/en
Publication of JPH1092325A publication Critical patent/JPH1092325A/en
Application granted granted Critical
Publication of JP3582248B2 publication Critical patent/JP3582248B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Description

【0001】
【発明の属する技術分野】
本発明はコンピュータの表示端末や表示装置等に用いられるガス放電表示パネル及びその製造方法に関するものである。
【0002】
ガス放電表示パネルとして知られるプラズマディスプレイパネル(PDP)は、一般に表示の輝度及びコントラストの点で優れていることから、OA機器の表示手段として広く用いられ、近年ではカラー表示化に伴ってテレビジョン表示が可能な大型フルカラーフラットパネルディスプレイとして注目されている。そのため、前記フラットパネルとしては更にコントラストの良い鮮明な高表示品質の画面の実現と、製造工程での工数削減と歩留りの向上により、低コスト化を図ることが要望されている。
【0003】
【従来の技術】
従来の例えばAC駆動型のガス放電表示パネルとして、カラー表示用面放電型のプラズマディスプレイパネル(PDP)の基本的な構造としては、図4の要部分解斜視図に示すようにマトリクス表示の単位発光領域EUに一対のX, Yからなる表示電極12とアドレス電極Aとが対応する3電極構造を有している。
【0004】
この表示ラインを形成する面放電のための一対のX, Yからなる表示電極12は、放電空間24に対して表示面H側のガラス基板11上に設けられており、表示光の遮光を最小限にするためにネサ膜やITO(Indium Tin Oxide)膜などの透明導電膜からなる透明電極12a とその導電性を補う (低抵抗化) ための金属膜からなる金属補助電極12b とを積層した構成からなっている。
【0005】
またその表示電極12上は壁電荷を利用してガス放電を維持するAC駆動のための誘電体層13によって放電空間24に対して絶縁状態に被覆されており、該誘電体層13の表面には更に数千Å程度の厚さのMgO膜からなる保護膜14が設けられている。
【0006】
一方、単位発光領域EUを選択的に発光させるためのアドレス電極Aは、背面側のガラス基板21上に、前記一対のX, Yからなる表示電極12と直交するように一定のピッチで配列され、各アドレス電極Aの間には 100〜150 μm程度の高さを有するストライプ状の隔壁22が設けられ、これによって放電空間24がライン方向 (表示電極12の延長方向) に単位発光領域EU毎に区画され、かつ放電空間24の間隔寸法が規定されている。
【0007】
更に、前記ガラス基板21には、アドレス電極Aの上面及び隔壁22の側面を含めた背面側の内面を被覆するように、R(赤),G(緑),B(青)の3原色の蛍光体23が設けられている。そしてこのような構成のPDP1では各色の蛍光体23は面放電時に放電空間24内のガス放電より放射される紫外線により励起されて発光し、R,G,Bの組合せによるフルカラー表示が可能であり、その表示に際して隔壁22により単位発光領域EU間のクロストークが防止されている。
【0008】
以上の構成のPDP1は、上述のように各ガラス基板11と21に対して個別に所定の構成要素を設けた後、該ガラス基板11と21とを対向配置してその間隙の周囲を気密に封止して内部を一旦真空に排気すると共に、放電ガスを封入する一連の工程によって製造されている。
【0009】
なお、上記した表示面H側のガラス基板11上に配列されている複数の表示電極12間の非放電部(非表示ライン)には、背面側のガラス基板21に設けた前記蛍光体23での外部からの光の反射によりコントラストが低下する不都合を防止するために図5の要部断面図に示すように遮光膜15が配設されている。
【0010】
【発明が解決しようとする課題】
ところで、上記した従来のPDP1における一対のX, Yからなる表示電極12としては、図5に示すように透明導電膜からなる透明電極12a 上にその導電性を補う (低抵抗化) ための金属補助電極12b として電気的特性及びガラス基板11や誘電体層などと密着性に優れたクロム(Cr)−銅(Cu)−クロム(Cr)の三層構造の金属膜をスパッタ工程、或いは真空蒸着工程等により重ねて形成しているが、その金属補助電極12b の電気抵抗値が未だに高い (20〜30 mΩ/□程度) 傾向にあり、これを更に10 mΩ/□程度に低抵抗化する必要があることと、そのようなPDP1の大型化に対応して前記金属補助電極12b の形成装置 (スパッタ装置等) の大型化が困難であるといった問題が生じていた。
【0011】
そこで、そのような問題を解決する方法として、金属補助電極に銀(Ag)膜を適用して低抵抗化を図ることが周知であることから、金属補助電極を銀(Ag)ペーストを用いて塗布工程とフォトリソグラフィ工程等により形成したところ、銀(Ag)膜からなる金属補助電極は焼成後は白色となり、この白色面での外部からの光の反射が強いためにコントラストが低下して表示画像が見難いという問題が発生し、表示品質を悪くする欠点があった。
【0012】
本発明は上記した従来の問題点に鑑み表示電極間の非放電部での光反射防止用の遮光膜の配設は勿論のこと、透明電極に積層する金属補助電極の低抵抗化と光反射率の低下を図って表示画面のコントラストの低下を防止し、表示品質を向上させた新規なガス放電表示パネル及びその製造方法を提供することを目的とするものである。
【0013】
【課題を解決するための手段】
本発明は上記した目的を達成するため、対向する一対の基板間に放電空間を形成し、表示面側の一方の基板の内面に複数の表示ラインを形成する面放電用の複数対の表示電極を配列し、各表示電極を帯状の透明電極と該透明電極に重ねた幅の狭い金属補助電極とから構成してなるガス放電表示パネルであって、上記表示ライン間の非表示ラインである表示電極対の間および各表示電極における透明電極と金属補助電極との間に、同じ材料でかつ同一工程による導電性暗色遮光層をそれぞれ設けた構成とする。
【0014】
また、前記ガス放電表示パネルの製造方法としては、放電用の複数対の透明電極を形成した基板上に金属材料と黒色顔料とを含んでなる導電性の暗色遮光層を形成し、該暗色遮光層を前記透明電極上に該透明電極幅よりも狭い帯状に残すとともに、前記透明電極対の間に間隙を設けて残す工程と、前記透明電極、前記暗色遮光層が形成された基板上に補助電極用の金属膜を形成し、前記透明電極上に形成された帯状の該暗色遮光層上を覆っている該金属膜を選択的に残して金属補助電極とする工程とを含んでなることを特徴とする。
【0015】
そして、本発明では表示電極を構成する透明電極と銀膜等の金属補助電極との間と、隣り合う一対の透明電極間の非放電部とに、該金属補助電極よりも光の反射率が低い、例えばマンガン(Mn)−鉄(Fe)−銅(Cu)系の酸化物及びクロム(Cr)−Cu系の酸化物からなる黒色顔料とCu,Ni 及びAgからなる金属微粒子を含む導電性の暗色遮光層を同時に設けた構成とすることにより、前記非放電部での光反射の防止は勿論のこと、金属補助電極の低抵抗化と光反射率を低下させることができるので、表示画面のコントラストが全面にわたって改善されて見やすくなり、工数短縮による低コストで表示品質を向上させることが可能となる。
【0016】
【発明の実施の形態】
以下図面を用いて本発明の実施例について詳細に説明する。
図1は本発明のガス放電表示パネルの一実施例を示す要部断面図であり、図5と同等の機能を有する部分には同一符号を付している。
【0017】
本実施例では図示のように表示面側のガラス基板11上にストライプ状に設けられた一対のX, Yからなる表示電極38における、ネサ膜やITO(Indium Tin Oxide)膜などの透明導電膜からなる透明電極12a と、それにそれぞれ重ねて設けた導電性を補う (低抵抗化) ための銀(Ag)膜からなる金属補助電極37との間と、配列された複数対の透明電極12a において隣り合う一対の透明電極12a 間の非放電部とに、該金属補助電極37よりも光の反射率が低い、例えばマンガン(Mn)−鉄(Fe)−銅(Cu)系の酸化物及びクロム(Cr)−Cu系の酸化物からなる黒色顔料とCu,Ni 及びAgからなる金属微粒子を含む導電性の第1暗色遮光層33と第2暗色遮光層34とを同時に設けた構成とされている。
【0018】
なお、前記第2暗色遮光層34は図に示すように表示電極38とは電気的に非導通とするため、該表示電極38との間に隙間を設けている。
また、このような構成の一対のX, Yからなる表示電極38が配列された表示面側のガラス基板11上には、30〜40μm程度の厚さの誘電体層13によって前記表示電極を放電空間に対して絶縁状態となるように被覆され、該誘電体層13の表面には更に数千Å程度の厚さのMgO膜からなる保護膜14が設けられている。
【0019】
そして、このような構成の表示面側のガラス基板11と、別途に従来例で説明したと同様なアドレス電極及びアドレス電極上に設けた複数の隔壁の各隔壁間に蛍光体を設けてなる構成の背面側のガラス基板とを放電間隙を介して重ね合わせると共に、その対向間隙の周囲を気密封止し、内部の排気と放電ガスを封入してパネルを完成させる。
【0020】
このように構成したパネルでは、透明電極12a の導電性を補うための金属補助電極37に従来よりも低抵抗で、外光の反射率の大きい銀(Ag)膜を用いても、該透明電極12a と金属補助電極37との間に該金属補助電極37よりも光の反射率の低い前記導電性の第1暗色遮光層33と、隣り合う一対の透明電極12a 間の非放電部にも同様な材質の前記導電性の第2暗色遮光層34を設けているので、前記金属補助電極37の光の反射率が低下され、その非放電部での第2暗色遮光層34による光の反射率の低下と相俟って、表示画面のコントラストが全面にわたって容易に改善され、見やすくなる。
【0021】
次に前記ガス放電表示パネルの製造方法ついて説明する。
図2及び図3は本発明のガス放電表示パネルの製造方法の一実施例を順に説明する要部断面図である。
【0022】
先ず、図2(a) に示すように、表示面側のガラス基板11の全表面に真空蒸着法、或いはスパッタリング法等によりSnO、またはITO(Indium Tin Oxide) 等の透明導電膜を形成し、該透明導電膜をフォトリソグラフィ工程でストライプ状にパターニングして平行に隣接するX,Yからなる一対の透明電極12a を所定間隔をもって複数列に形成する。
【0023】
また、その各一対の透明電極12a を含むガラス基板11上には、例えばMn−Fe−Cu系の酸化物及びCr−Cu系の酸化物からなる黒色顔料とCu,Ni 及びAgからなる金属微粒子とを感光性のバインダと混合したペーストをスクリーン印刷法等によって一様に塗布し、80〜120 ℃程度の温度で乾燥させて感光性の黒色膜31を形成する。
【0024】
次に、その感光性の黒色膜31を図2(b) に示すように、所定の露光用マスク32を通して光照射し、現像するフォトリソグラフィ工程によりパターニングして図2(c) に示すように、前記各透明電極12a 上に第1暗色遮光層33と、隣り合う一対の透明電極12a との間の非放電部に第2暗色遮光層34とを同時に形成し、引続きその第1暗色遮光層33と第2暗色遮光層34を100 〜150 ℃程度の温度で熱硬化処理、或いは光硬化処理を行う。
【0025】
次に、前記各透明電極12a 上に第1暗色遮光層33が形成され、隣り合う一対の透明電極12a 間の非放電部にも第2暗色遮光層34がそれぞれ形成されたガラス基板11の全表面に、図3(a) に示すように銀(Ag)微粉末を感光性のバインダと混合した銀ペーストをスクリーン印刷法等によって一様に塗布し、80〜120 ℃程度の温度で乾燥させて感光性の金属膜35を形成する。
【0026】
次に、図3(b) に示すように前記感光性の金属膜35を、所定の露光用マスク36を通して光照射し、現像するフォトリソグラフィ工程によりパターニングして図3(c) に示すように、前記各透明電極12a 上に第1暗色遮光層33を介して銀(Ag)膜からなる金属補助電極37を形成した後、前記第1暗色遮光層33、第2暗色遮光層34及び金属補助電極37を同時に 500〜600 ℃程度の温度で焼成処理を行う。
【0027】
引き続き図1に示されるように、上記した構成の一対のX, Yからなる表示電極38と第2暗色遮光層34が配列された表示面側のガラス基板11上に、低融点ガラス等の絶縁ペーストをスクリーン印刷法等によって一様に塗布し、 100〜150 ℃程度の温度で乾燥させた後、その低融点ガラス等からなる絶縁膜を 500〜600 ℃程度の温度で焼成処理を行うことにより、前記透明電極12a 上に1〜3μmの厚さの第1暗色遮光層33と、1〜5μmの厚さの金属補助電極37、また1〜3μmの厚さの第2暗色遮光層34及び30〜40μm程度の厚さの低融点ガラス等の絶縁膜からなる誘電体層13と、その全表面に更に数千Å程度の厚さのMgO膜からなる保護膜14を設けた表示面側のガラス基板11が得られる。
【0028】
従って、このような構成の表示面側のガラス基板11と、別途に従来例と同様なアドレス電極及びアドレス電極上に設けた複数の隔壁の各隔壁間に蛍光体を設けてなる構成の背面側のガラス基板とを前記隔壁によって形成される放電間隙を介して重ね合わせ、その対向間隙の周囲を気密封止し、内部を排気し、放電ガスを封入してパネルを完成させる。
【0029】
上述のような実施例によれば、第1暗色遮光層33と第2暗色遮光層34とを同じ金属ペーストを用い、塗布工程から硬化処理までを同時に平行して行って形成しているので、該第1暗色遮光層33と第2暗色遮光層34とを個別に形成する工程が不要となり、更に前記第1暗色遮光層33、第2暗色遮光層34及び金属補助電極37の焼成処理による形成も同時に行っているので当該ガス放電表示パネルを効率的に低コストで製造することができる。
【0030】
なお、前記各暗色遮光層、電極層のパターニングに用いるエッチングの手法としては、必要に応じてウエットエッチングとドライエッチングのどちらかを選択して用いればよい。
【0031】
また、本実施例ではカラー表示用面放電型のプラズマディスプレイを対象としたガス放電表示パネルについて説明しているが、本発明はそのようなカラー表示用面放電型のプラズマディスプレイに限定されるものではなく、例えばモノクロ表示用の面放電型のプラズマディスプレイ等、この種のガス放電表示パネルにも適用することができる。
【0032】
【発明の効果】
以上の説明から明らかなように、本発明のガス放電表示パネル及びその製造方法によれば、表示電極を構成する透明電極と銀膜等の低抵抗な金属補助電極との間と、配列された複数対の透明電極において隣り合う一対の透明電極間(表示電極間)の非放電部とに、該金属補助電極よりも光の反射率が低い、例えばMn−Fe−Cu系の酸化物及びCr−Cu系の酸化物からなる黒色顔料とCu,Ni 及びAgからなる金属微粒子とを含んでなる導電性の暗色遮光層を同時に形成し、設けた構成としているので、前記非放電部での光反射の防止は勿論のこと、金属補助電極の低抵抗化と光反射率を著しく低下させることができるので、表示画面のコントラストが全面にわたって改善されて見やすくなり、表示品質が良好で、しかも工数短縮により低コストなガス放電表示パネルを容易に得ることが可能となり、実用上優れた効果を奏する。
【図面の簡単な説明】
【図1】本発明のガス放電表示パネルの一実施例を示す要部断面図である。
【図2】本発明のガス放電表示パネルの製造方法の一実施例を順に説明する要部断面図である。
【図3】本発明のガス放電表示パネルの製造方法の一実施例を図2に引き続いて順に説明する要部断面図である。
【図4】ガス放電表示パネルの一例を示す要部分解斜視図である。
図である。
【図5】従来のガス放電表示パネルを説明する要部断面図である。
【符号の説明】
1 PDP
11 ガラス基板
12,38 表示電極
12a 透明電極
12b,37 金属補助電極
13 誘電体層
14 保護膜
31 黒色膜
32,36 露光用マスク
33 第1暗色遮光層
34 第2暗色遮光層
35 金属膜
[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a gas discharge display panel used for a display terminal or a display device of a computer, and a method for manufacturing the same.
[0002]
2. Description of the Related Art Plasma display panels (PDPs), which are known as gas discharge display panels, are generally widely used as display means for OA equipment because of their excellent display brightness and contrast. It has attracted attention as a large full-color flat panel display capable of displaying. For this reason, there is a demand for the flat panel to realize a clear, high-contrast screen with good contrast and to reduce the cost by reducing the number of steps in the manufacturing process and improving the yield.
[0003]
[Prior art]
As a conventional gas discharge display panel of, for example, an AC drive type, a basic structure of a surface discharge type plasma display panel (PDP) for color display has a matrix display unit as shown in an exploded perspective view of a main part in FIG. The light emitting region EU has a three-electrode structure in which the display electrode 12 composed of a pair of X and Y and the address electrode A correspond to each other.
[0004]
The display electrode 12 composed of a pair of X and Y for surface discharge forming the display line is provided on the glass substrate 11 on the display surface H side with respect to the discharge space 24, and minimizes shielding of display light. In order to minimize the thickness, a transparent electrode 12a made of a transparent conductive film such as a Nesa film or an ITO (Indium Tin Oxide) film and a metal auxiliary electrode 12b made of a metal film for supplementing the conductivity (lowering resistance) are laminated. It consists of a configuration.
[0005]
The display electrode 12 is covered with a dielectric layer 13 for AC driving for maintaining gas discharge using wall charges in an insulating state with respect to the discharge space 24. Is further provided with a protective film 14 made of an MgO film having a thickness of about several thousand mm.
[0006]
On the other hand, the address electrodes A for selectively emitting light in the unit light emitting region EU are arranged on the rear glass substrate 21 at a constant pitch so as to be orthogonal to the pair of X and Y display electrodes 12. A stripe-shaped partition wall 22 having a height of about 100 to 150 μm is provided between each address electrode A, so that the discharge space 24 is formed in the line direction (extending direction of the display electrode 12) for each unit light emitting region EU. And the distance between the discharge spaces 24 is defined.
[0007]
Further, the three primary colors of R (red), G (green) and B (blue) are coated on the glass substrate 21 so as to cover the inner surface on the back side including the upper surface of the address electrode A and the side surfaces of the partition walls 22. A phosphor 23 is provided. In the PDP 1 having such a configuration, the phosphors 23 of respective colors are excited by ultraviolet rays radiated from the gas discharge in the discharge space 24 at the time of surface discharge to emit light, and a full-color display by a combination of R, G, and B is possible. In the display, the partition 22 prevents crosstalk between the unit light emitting areas EU.
[0008]
In the PDP 1 having the above-described configuration, predetermined components are individually provided for each of the glass substrates 11 and 21 as described above, and then the glass substrates 11 and 21 are arranged to face each other and the periphery of the gap is hermetically sealed. It is manufactured by a series of steps of sealing and evacuating the inside once and filling a discharge gas.
[0009]
In addition, the non-discharge portion (non-display line) between the plurality of display electrodes 12 arranged on the glass substrate 11 on the display surface H side is formed by the phosphor 23 provided on the glass substrate 21 on the back side. In order to prevent the disadvantage that the contrast is reduced due to the reflection of light from the outside, a light-shielding film 15 is provided as shown in the sectional view of the main part of FIG.
[0010]
[Problems to be solved by the invention]
By the way, as shown in FIG. 5, a display electrode 12 made of a pair of X and Y in the above-mentioned conventional PDP 1 has a metal on a transparent electrode 12a made of a transparent conductive film to supplement the conductivity (to reduce the resistance). A metal film having a three-layer structure of chromium (Cr) -copper (Cu) -chromium (Cr) having excellent electrical characteristics and excellent adhesion to the glass substrate 11 and the dielectric layer is used as the auxiliary electrode 12b in a sputtering process or vacuum deposition. Although the metal auxiliary electrode 12b is formed in an overlapping manner by a process or the like, the electric resistance of the metal auxiliary electrode 12b still tends to be high (about 20 to 30 mΩ / □), and it is necessary to further reduce the resistance to about 10 mΩ / □. In addition, there has been a problem that it is difficult to increase the size of an apparatus (such as a sputtering apparatus) for forming the metal auxiliary electrode 12b in response to such an increase in the size of the PDP 1.
[0011]
Therefore, as a method for solving such a problem, it is well known that a silver (Ag) film is applied to the metal auxiliary electrode to reduce the resistance. Therefore, a silver (Ag) paste is used for the metal auxiliary electrode. When formed by a coating process and a photolithography process, the metal auxiliary electrode made of a silver (Ag) film becomes white after baking, and the contrast is reduced due to strong reflection of external light on the white surface, thereby causing a display to be performed. There is a problem that an image is difficult to see, and the display quality is deteriorated.
[0012]
In view of the above-mentioned conventional problems, the present invention not only provides a light-shielding film for preventing light reflection at a non-discharge portion between display electrodes, but also reduces the resistance of a metal auxiliary electrode laminated on a transparent electrode and reduces light reflection. It is an object of the present invention to provide a novel gas discharge display panel in which the display quality is improved by preventing a decrease in the contrast of the display screen by reducing the rate, and a method for manufacturing the same.
[0013]
[Means for Solving the Problems]
In order to achieve the above object, the present invention forms a discharge space between a pair of opposed substrates and forms a plurality of pairs of display electrodes for surface discharge forming a plurality of display lines on the inner surface of one of the substrates on the display surface side. A gas discharge display panel in which each display electrode is composed of a strip-shaped transparent electrode and a narrow metal auxiliary electrode superimposed on the transparent electrode, wherein the display is a non-display line between the display lines. between the between the electrode pairs and the transparent electrode and a metal auxiliary electrode in each of the display electrodes, a dark shielding layer of conductive by the same material and the same process and their respective settings only configuration.
[0014]
Further, as a method for producing the gas discharge display panel forms a dark shading layer pairs transparent electrode formed was board on a conductive comprising and a black pigment metallic materials for surface discharge, with leaving a narrow band than the transparent electrode width the dark shading layer on the transparent electrode, a step of leaving be a clearance between the transparent electrode pairs, the transparent electrode, substrate with the dark shading layer is formed the metal film for auxiliary electrode is formed on, and a step to the metal film selectively leaving the metal auxiliary electrode covering the dark color light-shielding layer on the strip formed on the transparent electrode Is characterized by the following.
[0015]
In the present invention, between the transparent electrode constituting the display electrode and the metal auxiliary electrode such as a silver film, and the non-discharge portion between the pair of adjacent transparent electrodes, the light reflectance is higher than that of the metal auxiliary electrode. Low conductivity, for example, including a black pigment composed of manganese (Mn) -iron (Fe) -copper (Cu) -based oxide and chromium (Cr) -Cu-based oxide and metal fine particles composed of Cu, Ni and Ag. By providing a dark light-shielding layer at the same time, it is possible not only to prevent light reflection at the non-discharge portion, but also to lower the resistance of the metal auxiliary electrode and reduce the light reflectance, so that the display screen Is improved over the entire surface to make it easier to see, and it is possible to improve display quality at low cost by reducing man-hours.
[0016]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1 is a sectional view of a main part showing an embodiment of a gas discharge display panel according to the present invention, and portions having the same functions as those in FIG. 5 are denoted by the same reference numerals.
[0017]
In this embodiment, a transparent conductive film such as a Nesa film or an ITO (Indium Tin Oxide) film is used in a pair of X and Y display electrodes 38 provided in stripes on a glass substrate 11 on the display surface side as shown in the figure. Between the transparent electrode 12a made of and a metal auxiliary electrode 37 made of a silver (Ag) film for supplementing conductivity (lowering resistance) provided on each of the transparent electrodes 12a, A non-discharge portion between a pair of adjacent transparent electrodes 12a has a light reflectance lower than that of the metal auxiliary electrode 37, such as a manganese (Mn) -iron (Fe) -copper (Cu) -based oxide and chromium. A structure is provided in which a black pigment made of a (Cr) -Cu-based oxide and a conductive first dark light-shielding layer 33 and a second dark light-shielding layer 34 containing metal fine particles made of Cu, Ni and Ag are simultaneously provided. There.
[0018]
The second dark light-shielding layer 34 is electrically disconnected from the display electrode 38 as shown in FIG.
The display electrodes are discharged by the dielectric layer 13 having a thickness of about 30 to 40 μm on the glass substrate 11 on the display surface side on which the pair of X and Y display electrodes 38 having such a configuration are arranged. The dielectric layer 13 is covered so as to be insulated from the space, and a protective film 14 made of an MgO film having a thickness of about several thousand degrees is further provided on the surface of the dielectric layer 13.
[0019]
A structure in which a phosphor is provided between the glass substrate 11 on the display surface side having such a configuration and each of a plurality of partition walls provided on the address electrodes and the same address electrodes as described in the related art separately. And a glass substrate on the rear side of the substrate is overlapped with a discharge gap therebetween, the periphery of the opposed gap is hermetically sealed, and the inside exhaust gas and discharge gas are sealed to complete the panel.
[0020]
In the panel configured as described above, even if a silver (Ag) film having a lower resistance and a higher external light reflectance than the conventional one is used for the metal auxiliary electrode 37 for supplementing the conductivity of the transparent electrode 12a, the transparent electrode can be used. The same applies to the conductive first dark light-shielding layer 33 having a lower light reflectance than the metal auxiliary electrode 37 between the metal auxiliary electrode 37 and the non-discharge portion between the pair of adjacent transparent electrodes 12a. Since the conductive second dark-colored light-shielding layer 34 made of a suitable material is provided, the light reflectance of the metal auxiliary electrode 37 is reduced, and the light reflectance of the second dark-colored light-shielding layer 34 in the non-discharge portion is reduced. In combination with the decrease in the contrast, the contrast of the display screen is easily improved over the entire surface, and the display screen is easy to see.
[0021]
Next, a method for manufacturing the gas discharge display panel will be described.
2 and 3 are cross-sectional views of a main part for sequentially explaining one embodiment of a method of manufacturing a gas discharge display panel according to the present invention.
[0022]
First, as shown in FIG. 2A, a transparent conductive film such as SnO 2 or ITO (Indium Tin Oxide) is formed on the entire surface of the glass substrate 11 on the display surface side by a vacuum evaporation method, a sputtering method, or the like. The transparent conductive film is patterned in a stripe shape by a photolithography process, and a pair of transparent electrodes 12a of X and Y adjacent to each other are formed in a plurality of rows at predetermined intervals.
[0023]
Further, on the glass substrate 11 including the pair of transparent electrodes 12a, for example, a black pigment composed of an Mn-Fe-Cu-based oxide and a Cr-Cu-based oxide and metal fine particles composed of Cu, Ni, and Ag are provided. Is uniformly applied by a screen printing method or the like, and dried at a temperature of about 80 to 120 ° C. to form a photosensitive black film 31.
[0024]
Next, as shown in FIG. 2B, the photosensitive black film 31 is irradiated with light through a predetermined exposure mask 32 and patterned by a photolithography step of developing, as shown in FIG. 2C. Forming a first dark-colored light-shielding layer 33 on each transparent electrode 12a and a second dark-colored light-shielding layer 34 in a non-discharge portion between a pair of adjacent transparent electrodes 12a; 33 and the second dark-colored light-shielding layer 34 are subjected to a heat curing treatment or a light curing treatment at a temperature of about 100 to 150 ° C.
[0025]
Next, a first dark-colored light-shielding layer 33 is formed on each of the transparent electrodes 12a, and a second dark-colored light-shielding layer 34 is also formed on a non-discharge portion between a pair of adjacent transparent electrodes 12a. As shown in FIG. 3A, a silver paste obtained by mixing silver (Ag) fine powder with a photosensitive binder is uniformly applied to the surface by a screen printing method or the like, and dried at a temperature of about 80 to 120 ° C. Thus, a photosensitive metal film 35 is formed.
[0026]
Next, as shown in FIG. 3B, the photosensitive metal film 35 is patterned by a photolithography process of irradiating light through a predetermined exposure mask 36 and developing, as shown in FIG. 3C. After forming a metal auxiliary electrode 37 made of a silver (Ag) film on each of the transparent electrodes 12a via a first dark light shielding layer 33, the first dark light shielding layer 33, the second dark light shielding layer 34, and the metal auxiliary electrode 37 are formed. The electrode 37 is simultaneously baked at a temperature of about 500 to 600 ° C.
[0027]
As shown in FIG. 1, an insulating material such as a low-melting glass is provided on the glass substrate 11 on the display surface side on which the pair of X and Y display electrodes 38 and the second dark light-shielding layer 34 having the above-described configuration are arranged. The paste is uniformly applied by a screen printing method or the like, dried at a temperature of about 100 to 150 ° C., and then subjected to a baking treatment at a temperature of about 500 to 600 ° C. for the insulating film made of the low melting point glass or the like. A first dark shielding layer 33 having a thickness of 1 to 3 μm, a metal auxiliary electrode 37 having a thickness of 1 to 5 μm, and second dark shielding layers 34 and 30 having a thickness of 1 to 3 μm on the transparent electrode 12a. A glass on the display surface side in which a dielectric layer 13 made of an insulating film such as a low melting point glass having a thickness of about 40 μm and a protective film 14 made of an MgO film having a thickness of about several thousand mm are further provided on the entire surface. The substrate 11 is obtained.
[0028]
Therefore, the rear surface side of the structure in which the phosphor is provided between the glass substrate 11 on the display surface side having such a configuration and the plurality of partition walls provided on the address electrodes and the address electrodes separately similar to the conventional example. The glass substrate is overlapped with a discharge gap formed by the partition walls, the periphery of the opposing gap is hermetically sealed, the inside is evacuated, and a discharge gas is sealed to complete the panel.
[0029]
According to the above-described embodiment, the first dark-color light-shielding layer 33 and the second dark-color light-shielding layer 34 are formed by using the same metal paste and performing the steps from the application process to the curing process simultaneously in parallel. It is not necessary to separately form the first dark light shielding layer 33 and the second dark light shielding layer 34, and the first dark light shielding layer 33, the second dark light shielding layer 34, and the metal auxiliary electrode 37 are formed by firing. The gas discharge display panel can be manufactured efficiently and at low cost.
[0030]
In addition, as an etching technique used for patterning each of the dark light shielding layers and the electrode layers, either wet etching or dry etching may be selected and used as necessary.
[0031]
Further, in this embodiment, a gas discharge display panel for a surface discharge type plasma display for color display is described, but the present invention is limited to such a surface discharge type plasma display for color display. Instead, the present invention can be applied to a gas discharge display panel of this type such as a surface discharge type plasma display for monochrome display.
[0032]
【The invention's effect】
As is clear from the above description, according to the gas discharge display panel and the method of manufacturing the same of the present invention, the transparent electrode constituting the display electrode and the low-resistance metal auxiliary electrode such as a silver film are arranged. In a plurality of pairs of transparent electrodes, a non-discharge portion between a pair of adjacent transparent electrodes (between display electrodes) has a light reflectance lower than that of the metal auxiliary electrode, for example, an Mn-Fe-Cu-based oxide and Cr. A conductive dark-colored light-shielding layer containing a black pigment made of a Cu-based oxide and metal fine particles made of Cu, Ni and Ag is simultaneously formed and provided; As well as preventing reflection, the resistance of the metal auxiliary electrode can be reduced and the light reflectance can be significantly reduced, so that the contrast of the display screen has been improved over the entire surface, making it easier to see, resulting in good display quality and reduced man-hours. By This makes it possible to easily obtain a low-cost gas discharge display panel, and has a practically excellent effect.
[Brief description of the drawings]
FIG. 1 is a sectional view showing a main part of an embodiment of a gas discharge display panel according to the present invention.
FIG. 2 is a sectional view of a main part for sequentially explaining one embodiment of a method for manufacturing a gas discharge display panel of the present invention.
FIG. 3 is a cross-sectional view of a main part, in which one embodiment of a method for manufacturing a gas discharge display panel according to the present invention will be described in succession to FIG. 2;
FIG. 4 is an exploded perspective view of an essential part showing an example of a gas discharge display panel.
FIG.
FIG. 5 is a cross-sectional view of a main part illustrating a conventional gas discharge display panel.
[Explanation of symbols]
1 PDP
11 Glass substrate 12, 38 Display electrode 12a Transparent electrode 12b, 37 Metal auxiliary electrode 13 Dielectric layer 14 Protective film 31 Black film 32, 36 Exposure mask 33 First dark light shielding layer 34 Second dark light shielding layer 35 Metal film

Claims (2)

対向する一対の基板間に放電空間を形成し、表示面側の一方の基板の内面に複数の表示ラインを形成する面放電用の複数対の表示電極を配列し、各表示電極を透明電極と該透明電極に重ねた幅の狭い金属補助電極とから構成してなるガス放電表示パネルであって、
上記表示ライン間の非表示ラインである表示電極対の間および各表示電極における透明電極と金属補助電極との間に、同じ材料でかつ同一工程による導電性暗色遮光層を各々設けたことを特徴とするガス放電表示パネル。
The discharge space formed between a pair of substrates facing, arranging a plurality of pairs of display electrodes for forming a surface discharge a plurality of display lines on the inner surface of one substrate of display surface side, the respective display electrodes transparency electrode And a gas discharge display panel comprising a narrow metal auxiliary electrode overlapped with the transparent electrode,
Between the non-display between the display electrode pair is a line and a transparent electrode and a metal auxiliary electrode in each of the display electrodes between the display lines, each provided with it a dark shading layer of conductive by the same material and the same process Characteristic gas discharge display panel.
放電用の複数対の透明電極を形成した基板上に金属材料と黒色顔料とを含んでなる導電性の暗色遮光層を形成し、該暗色遮光層を前記透明電極上に該透明電極幅よりも狭い帯状に残すとともに、前記透明電極対の間に間隙を設けて残す工程と、
前記透明電極、前記暗色遮光層が形成された基板上に補助電極用の金属膜を形成し、前記透明電極上に形成された帯状の該暗色遮光層上を覆っている該金属膜を選択的に残して金属補助電極とする工程とを含んでなることを特徴とする請求項1記載のガス放電表示パネルの製造方法。
Forming a metal material and a black pigment and comprising a conductive dark shading layer pairs of transparent electrodes formed was based board for surface discharge, the transparent electrode the dark shading layer on the transparent electrode Leaving in a band narrower than the width, leaving a gap between the transparent electrode pair,
The transparent electrode, selecting the dark shading layer a metal film for auxiliary electrode formed on a substrate formed, the metal film covering the dark color light-shielding layer on the strip formed on the transparent electrode 2. A method for manufacturing a gas discharge display panel according to claim 1, further comprising the step of forming a metal auxiliary electrode by leaving the metal auxiliary electrode.
JP24335996A 1996-09-13 1996-09-13 Gas discharge display panel and method of manufacturing the same Expired - Fee Related JP3582248B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24335996A JP3582248B2 (en) 1996-09-13 1996-09-13 Gas discharge display panel and method of manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24335996A JP3582248B2 (en) 1996-09-13 1996-09-13 Gas discharge display panel and method of manufacturing the same

Publications (2)

Publication Number Publication Date
JPH1092325A JPH1092325A (en) 1998-04-10
JP3582248B2 true JP3582248B2 (en) 2004-10-27

Family

ID=17102673

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24335996A Expired - Fee Related JP3582248B2 (en) 1996-09-13 1996-09-13 Gas discharge display panel and method of manufacturing the same

Country Status (1)

Country Link
JP (1) JP3582248B2 (en)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19990086903A (en) * 1998-05-30 1999-12-15 김영남 Manufacturing Method of Plasma Display Device
KR20000034682A (en) * 1998-11-30 2000-06-26 김영남 Plasma display panel
KR100399787B1 (en) * 2001-05-04 2003-09-29 삼성에스디아이 주식회사 Plate and preparing method the same, plasma display panel having the plate
JP4691834B2 (en) * 2001-06-12 2011-06-01 パナソニック株式会社 Electrode and manufacturing method thereof
JP2003031134A (en) * 2001-07-18 2003-01-31 Nec Kagoshima Ltd Color plasma display panel and manufacturing method of the same
US6838828B2 (en) 2001-11-05 2005-01-04 Lg Electronics Inc. Plasma display panel and manufacturing method thereof
US7378793B2 (en) 2001-11-13 2008-05-27 Lg Electronics Inc. Plasma display panel having multiple shielding layers
KR100947955B1 (en) 2003-10-01 2010-03-15 오리온피디피주식회사 Method for Forming Pattern of Plasma Display Panel
KR100551767B1 (en) 2003-10-02 2006-02-10 엘지전자 주식회사 Plasma display panel and fabrication method thereof
CN100362614C (en) * 2004-07-13 2008-01-16 四川世纪双虹显示器件有限公司 A method for making gas discharge display screen
WO2006070648A1 (en) * 2004-12-27 2006-07-06 Asahi Glass Co., Ltd. Pattern forming method and electronic circuit
WO2006070649A1 (en) * 2004-12-27 2006-07-06 Asahi Glass Co., Ltd. Pattern forming method and electronic circuit
JP2006278221A (en) * 2005-03-30 2006-10-12 Taiyo Ink Mfg Ltd Photosensitive black paste for all together calcination, and manufacturing method of pdp front substrate using this paste
EP1860677B1 (en) * 2006-05-22 2012-12-12 LG Electronics Inc. Plasma display apparatus
KR100762248B1 (en) 2006-05-22 2007-10-01 엘지전자 주식회사 Plasma display panel
KR100817559B1 (en) * 2006-05-22 2008-03-27 엘지전자 주식회사 Plasma Display Panel
KR102141082B1 (en) * 2014-05-02 2020-08-05 엘지디스플레이 주식회사 Organic light emitting diode display device and method of fabricating the same
KR102068870B1 (en) * 2016-06-17 2020-01-21 주식회사 엘지화학 Electrode structure, electronic device comprising the same and manufacturing method thereof

Also Published As

Publication number Publication date
JPH1092325A (en) 1998-04-10

Similar Documents

Publication Publication Date Title
JP3582248B2 (en) Gas discharge display panel and method of manufacturing the same
EP1041600B1 (en) Method for Manufacturing a surface discharge plasma display panel
JP3039437B2 (en) Color plasma display panel
KR100726648B1 (en) Plasma display panel and method for manufacturing the same
JPH0950767A (en) Thin flat-panel display device
JPH0963488A (en) Plasma display panel
JPH117893A (en) Gas discharge display panel
JP3979450B2 (en) Display panel electrode forming method
JP3966372B2 (en) Display panel electrode structure
JP3757334B2 (en) Manufacturing method of surface discharge type plasma display panel
JPH0817337A (en) Manufacture of gas electric discharge display panel
JP3757333B2 (en) Manufacturing method of surface discharge type plasma display panel
JP3394219B2 (en) Method of manufacturing surface discharge type plasma display panel
JPH11329256A (en) Back substrate for ac-type color plasma display panel
KR100681037B1 (en) Plasma display panel
JP4427884B2 (en) Plasma display device
US6737806B2 (en) Plasma display panel including transparent electrode layer
JP3090079B2 (en) Color plasma display panel
JP3366297B2 (en) Surface discharge type plasma display panel
JP3085213B2 (en) Color plasma display panel and method of manufacturing the same
JP2001210242A (en) Plasma display panel and method for manufacturing the same
JPH09251842A (en) Gas electric discharge display panel and manufacture thereof
JP2003031134A (en) Color plasma display panel and manufacturing method of the same
JP3366296B2 (en) Surface discharge type plasma display panel
JP3119208B2 (en) Color plasma display panel and method of manufacturing the same

Legal Events

Date Code Title Description
TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20040706

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20040719

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313113

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

S131 Request for trust registration of transfer of right

Free format text: JAPANESE INTERMEDIATE CODE: R313131

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20080806

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20080806

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090806

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100806

Year of fee payment: 6

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100806

Year of fee payment: 6

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110806

Year of fee payment: 7

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120806

Year of fee payment: 8

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130806

Year of fee payment: 9

S131 Request for trust registration of transfer of right

Free format text: JAPANESE INTERMEDIATE CODE: R313135

SZ03 Written request for cancellation of trust registration

Free format text: JAPANESE INTERMEDIATE CODE: R313Z03

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313113

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130806

Year of fee payment: 9

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313111

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

LAPS Cancellation because of no payment of annual fees