JP3530061B2 - Flow cell and particle measuring apparatus using the flow cell - Google Patents
Flow cell and particle measuring apparatus using the flow cellInfo
- Publication number
- JP3530061B2 JP3530061B2 JP07397999A JP7397999A JP3530061B2 JP 3530061 B2 JP3530061 B2 JP 3530061B2 JP 07397999 A JP07397999 A JP 07397999A JP 7397999 A JP7397999 A JP 7397999A JP 3530061 B2 JP3530061 B2 JP 3530061B2
- Authority
- JP
- Japan
- Prior art keywords
- flow cell
- wall surface
- sample fluid
- light
- laser light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000002245 particle Substances 0.000 title claims description 48
- 239000012530 fluid Substances 0.000 claims description 38
- 230000003287 optical effect Effects 0.000 claims description 15
- 238000001514 detection method Methods 0.000 claims description 7
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 238000006243 chemical reaction Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- NCGICGYLBXGBGN-UHFFFAOYSA-N 3-morpholin-4-yl-1-oxa-3-azonia-2-azanidacyclopent-3-en-5-imine;hydrochloride Chemical compound Cl.[N-]1OC(=N)C=[N+]1N1CCOCC1 NCGICGYLBXGBGN-UHFFFAOYSA-N 0.000 description 1
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
Landscapes
- Optical Measuring Cells (AREA)
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、粒子検出部として
の照射領域を内部に形成するフローセル及びこのフロー
セルを用いて照射領域を通過する試料流体に含まれる粒
子の粒径等の粒子情報を得る粒子測定装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention obtains particle information such as a particle diameter of particles contained in a sample fluid passing through an irradiation region, using a flow cell having an irradiation region as a particle detection unit formed therein, and the flow cell. The present invention relates to a particle measuring device.
【０００２】[0002]
【従来の技術】図６に示すように、従来のフローセル１
００は、透明部材から成り、断面形状を四角形状として
所定長さの直線流路を有して形成されている。そして、
レーザ光Ｌａが透過するフローセル１００を構成する壁
部１０１の外壁面１０１ａと内壁面１０１ｂは平行に形
成されている。2. Description of the Related Art As shown in FIG.
00 is made of a transparent member and has a rectangular cross section and a linear flow path of a predetermined length. And
The outer wall surface 101a and the inner wall surface 101b of the wall portion 101 that constitutes the flow cell 100 through which the laser light La is transmitted are formed in parallel.
【０００３】また、フローセル１００にレーザ光源から
レーザ光Ｌａを照射する場合には、図７に示すように、
レーザ光Ｌａを空気と外壁面１０１ａとの境界面に所定
の入射角θ11（θ11≠０°）で入射させ、屈折角θ12で
屈折させている。これは、レーザ光Ｌａを入射角θ11＝
０°としてフローセル１００の外壁面１０１ａに垂直に
入射させると、レーザ光Ｌａが外壁面１０１ａで反射し
て反射光の一部がレーザ光源に戻り、帰還ノイズとして
レーザ光Ｌａに重畳するのを防止するためである。When the flow cell 100 is irradiated with laser light La from a laser light source, as shown in FIG.
The laser light La is incident on the boundary surface between the air and the outer wall surface 101a at a predetermined incident angle θ 11 (θ 11 ≠ 0 °) and refracted at a refraction angle θ 12 . This is the incident angle θ 11 = of the laser light La.
When 0 ° is made to enter the outer wall surface 101a of the flow cell 100 vertically, it is prevented that the laser light La is reflected by the outer wall surface 101a and a part of the reflected light returns to the laser light source and is superimposed on the laser light La as feedback noise. This is because
【０００４】[0004]
【発明が解決しようとする課題】しかし、フローセル１
００中を流れる試料流体（試料の溶媒）１０２の屈折率
によって、内壁面１０１ｂと試料流体１０２との境界面
におけるレーザ光Ｌａの屈折角が異なるため、試料流体
１０２中を進むレーザ光はＬａ１（試料流体の屈折率が
ｎ2の場合）又はＬａ２（試料流体の屈折率がｎ3の場
合）となり、流路の中心に設けられる粒子検出部として
の照射領域Ｍが位置ずれを起こしてしまう。即ち、スネ
ルの法則により、内壁面１０１ｂと試料流体１０２との
境界面にレーザ光Ｌａが入射角θ13（外壁面１０１ａと
内壁面１０１ｂが平行に形成されているので、θ13＝θ
12となる。）で入射すると、試料流体１０２の屈折率が
ｎ2の場合には、屈折角θ14となり、試料流体１０２の
屈折率がｎ3の場合には、屈折角θ15となるからであ
る。However, the flow cell 1
Since the refraction angle of the laser light La at the boundary surface between the inner wall surface 101b and the sample fluid 102 is different depending on the refractive index of the sample fluid (solvent of the sample) 102 flowing in 00, the laser light traveling in the sample fluid 102 is La1 ( The refractive index of the sample fluid is n 2 ) or La 2 (when the refractive index of the sample fluid is n 3 ), and the irradiation region M as the particle detection unit provided at the center of the flow path is displaced. That is, according to Snell's law, the incident angle θ 13 of the laser beam La on the boundary surface between the inner wall surface 101b and the sample fluid 102 (since the outer wall surface 101a and the inner wall surface 101b are formed in parallel, θ 13 = θ
Twelve . ), The sample fluid 102 has a refraction angle θ 14 when the refractive index is n 2 , and the sample fluid 102 has a refraction angle θ 15 when the sample fluid 102 has a refractive index n 3 .
【０００５】すると、屈折率ｎ2の試料流体に対応した
照射領域Ｍの位置に合せて設定されている集光手段は、
屈折率ｎ3の試料流体の場合には照射領域Ｍが位置ずれ
し、照射領域Ｍを通過する粒子による散乱光などを検出
することができない。従って、試料流体の違いにより、
粒径等の粒子情報を正確に検出することができないとい
う問題がある。Then, the condensing means set in accordance with the position of the irradiation region M corresponding to the sample fluid having the refractive index n 2 is
In the case of the sample fluid having the refractive index n 3, the irradiation area M is displaced, and scattered light by particles passing through the irradiation area M cannot be detected. Therefore, due to the difference in sample fluid,
There is a problem that the particle information such as the particle diameter cannot be detected accurately.
【０００６】本発明は、従来の技術が有するこのような
問題点に鑑みてなされたものであり、その目的とすると
ころは、試料流体が相違しても照射領域が位置ずれを起
こさず、試料流体に含まれる粒子の粒径等の粒子情報を
得ることができるフローセル及びこのフローセルを用い
た粒子測定装置を提供しようとするものである。The present invention has been made in view of the above problems of the prior art. The object of the present invention is to prevent the irradiation region from being displaced even if the sample fluids are different from each other. An object of the present invention is to provide a flow cell capable of obtaining particle information such as the particle diameter of particles contained in a fluid, and a particle measuring device using this flow cell.
【０００７】[0007]
【課題を解決するための手段】上記課題を解決すべく請
求項１に係る発明は、光を照射して粒子検出部としての
照射領域を内部に形成し、この照射領域を通過する試料
流体に含まれる粒子の粒径等の粒子情報を得るためのフ
ローセルにおいて、前記光がフローセルの外壁面に所定
の入射角θ（θ≠０°）で入射すると共に、フローセル
の内壁面から屈折角が０°で前記試料流体に出射するよ
うに壁部の形状を形成したものである。In order to solve the above-mentioned problems, the invention according to claim 1 irradiates light to form an irradiation region as a particle detecting portion inside, and a sample fluid passing through this irradiation region is used. In a flow cell for obtaining particle information such as the particle size of particles contained, the light is incident on the outer wall surface of the flow cell at a predetermined incident angle θ (θ ≠ 0 °), and the refraction angle is 0 from the inner wall surface of the flow cell. The shape of the wall portion is formed so as to be emitted to the sample fluid at 0 °.
【０００８】請求項２に係る発明は、請求項１記載のフ
ローセルと、このフローセルの流路に光を照射して照射
領域を形成する光源と、前記照射領域の粒子の散乱光、
透過光又は回折光を検出処理する光学的検出処理手段を
備えるものである。According to a second aspect of the present invention, there is provided the flow cell according to the first aspect, a light source for irradiating the flow path of the flow cell with light to form an irradiation region, and scattered light of particles in the irradiation region.
An optical detection processing means for detecting transmitted light or diffracted light is provided.
【０００９】[0009]
【発明の実施の形態】以下に本発明の実施の形態を添付
図面に基づいて説明する。ここで、図１は本発明に係る
粒子測定装置の構成図、図２は本発明に係るフローセル
の断面図、図３はフローセルの壁部における光の透過経
路の説明図、図４及び図５はフローセルの他の実施の形
態の断面図である。BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the accompanying drawings. Here, FIG. 1 is a configuration diagram of a particle measuring apparatus according to the present invention, FIG. 2 is a cross-sectional view of a flow cell according to the present invention, FIG. 3 is an explanatory view of a light transmission path in a wall portion of the flow cell, and FIGS. FIG. 8 is a cross-sectional view of another embodiment of the flow cell.
【００１０】本発明に係る粒子測定装置は、図１に示す
ように、フローセル１、レーザ光源２、集光光学系３、
光電変換素子４などを備えて成る。フローセル１は、透
明部材から成り、所定長さの直線流路１ａを有し、全体
としてＬ型筒形状に屈曲している。直線流路１ａの中心
軸は、Ｘ方向と一致している。As shown in FIG. 1, the particle measuring apparatus according to the present invention comprises a flow cell 1, a laser light source 2, a condensing optical system 3,
The photoelectric conversion element 4 and the like are provided. The flow cell 1 is made of a transparent member, has a linear flow path 1a of a predetermined length, and is bent into an L-shaped tubular shape as a whole. The central axis of the straight flow path 1a coincides with the X direction.
【００１１】また、フローセル１は、図２に示すよう
に、断面形状が四角形状の壁部５からなり、内側の断面
形状は正方形であり、外側の断面形状は平行四辺形であ
る。従って、レーザ光Ｌａが入射する外壁面５ａとレー
ザ光Ｌａが出射する内壁面５ｂとは、平行ではなく、外
壁面５ａは内壁面５ｂに対して所定の角度（傾斜）を有
している。同様に、レーザ光Ｌａが入射する内壁面５ｃ
とレーザ光Ｌａが外部に出射する外壁面５ｄも平行では
なく、外壁面５ｄは内壁面５ｃに対して所定の角度（傾
斜）を有している。As shown in FIG. 2, the flow cell 1 has a wall 5 having a quadrangular cross section, an inner cross section having a square shape, and an outer cross section having a parallelogram shape. Therefore, the outer wall surface 5a on which the laser light La enters and the inner wall surface 5b on which the laser light La emits are not parallel, and the outer wall surface 5a has a predetermined angle (inclination) with respect to the inner wall surface 5b. Similarly, the inner wall surface 5c on which the laser light La is incident
The outer wall surface 5d from which the laser light La is emitted to the outside is also not parallel, and the outer wall surface 5d has a predetermined angle (inclination) with respect to the inner wall surface 5c.
【００１２】なお、所定長さの直線流路１ａを設けた理
由は、フローセル１に試料流体６を流したとき、試料流
体６の流れを層流にするためである。層流を得るための
条件としては、試料流体６の粘度、直線流路の長さ、流
路の断面形状及び流速などが挙げられ、直線流路１ａの
長さ及び流路の断面形状については、試料流体６の粘度
と流速を勘案して決定している。The reason why the linear flow path 1a having a predetermined length is provided is that the flow of the sample fluid 6 is laminar when the sample fluid 6 is passed through the flow cell 1. The conditions for obtaining the laminar flow include the viscosity of the sample fluid 6, the length of the linear flow channel, the cross-sectional shape of the flow channel and the flow velocity, and the length of the linear flow channel 1a and the cross-sectional shape of the flow channel are as follows. , And is determined in consideration of the viscosity and flow velocity of the sample fluid 6.
【００１３】レーザ光源２は、フローセル１の直線流路
１ａの所定箇所にレーザ光Ｌａを照射して照射領域Ｍを
形成する。ここで、レーザ光Ｌａの光軸は、直線流路１
ａ内において直線流路１ａの中心軸とほぼ直交してい
る。The laser light source 2 irradiates a predetermined portion of the linear flow path 1a of the flow cell 1 with the laser light La to form an irradiation area M. Here, the optical axis of the laser light La is the linear flow path 1
Within a, it is substantially orthogonal to the central axis of the linear flow path 1a.
【００１４】また、図２に示すように、レーザ光Ｌａ
は、外壁面５ａに対して入射角θ1で入射している。こ
れは、上述のようにレーザ光Ｌａがフローセル１の外壁
面５ａに反射して反射光の一部がレーザ光源２に戻るの
を防止するためである。反射光の一部がレーザ光源２に
戻ると、帰還ノイズがレーザ光Ｌａに重畳するので好ま
しくないからである。Further, as shown in FIG.
Is incident on the outer wall surface 5a at an incident angle θ 1 . This is to prevent the laser light La from being reflected by the outer wall surface 5a of the flow cell 1 and returning part of the reflected light to the laser light source 2 as described above. This is because, when a part of the reflected light returns to the laser light source 2, the feedback noise is superimposed on the laser light La, which is not preferable.
【００１５】集光光学系３は、フローセル１の直線流路
１ａの中心軸と一致する光軸を有し、照射領域Ｍにおい
てレーザ光Ｌａを受けた粒子が発する散乱光Ｌｓを集光
する機能を備える。なお、集光光学系３は、必ずしもフ
ローセル１の直線流路１ａの中心軸上に設ける必要はな
い。The condensing optical system 3 has an optical axis that coincides with the central axis of the linear flow path 1a of the flow cell 1, and has a function of condensing the scattered light Ls emitted by the particles that have received the laser light La in the irradiation region M. Equipped with. The condensing optical system 3 does not necessarily have to be provided on the central axis of the linear flow path 1a of the flow cell 1.
【００１６】光電変換素子４は、集光光学系３の光軸上
に設けられている。光電変換素子４は、粒子が照射領域
Ｍを通過する間に発する散乱光Ｌｓを電圧に変換する。
なお、集光光学系３以降の手段を光学的検出処理手段と
いう。The photoelectric conversion element 4 is provided on the optical axis of the condensing optical system 3. The photoelectric conversion element 4 converts the scattered light Ls emitted while the particles pass through the irradiation region M into a voltage.
In addition, the means after the condensing optical system 3 is referred to as an optical detection processing means.
【００１７】以上のように構成した本発明に係るフロー
セル及びこのフローセルを用いた粒子測定装置の作用に
ついて説明する。ここで、空気の屈折率をｎ0、フロー
セル１の壁部５の屈折率をｎ1、試料流体６の屈折率を
ｎ2又はｎ3とする。The operation of the flow cell according to the present invention configured as described above and the particle measuring apparatus using the flow cell will be described. Here, the refractive index of air is n 0 , the wall 5 of the flow cell 1 is n 1 , and the sample fluid 6 is n 2 or n 3 .
【００１８】図３に示すように、レーザ光源２から出射
されたレーザ光Ｌａが、空気と外壁面５ａとの境界面に
入射して屈折するときには、スネルの法則に従う。スネ
ルの法則によれば、入射角θ1と屈折角θ2との間に、以
下に示す数式（１）が成り立つ。As shown in FIG. 3, when the laser light La emitted from the laser light source 2 enters the interface between the air and the outer wall surface 5a and is refracted, it follows Snell's law. According to Snell's law, the following expression (1) is established between the incident angle θ 1 and the refraction angle θ 2 .
【００１９】 ｎ0・ｓｉｎθ1＝ｎ1・ｓｉｎθ2 （１）N 0 · sin θ 1 = n 1 · sin θ 2 (1)
【００２０】次いで、レーザ光Ｌａは、壁部５を直進す
る。そして、内壁面５ｂと試料流体６との境界面では、
同様にスネルの法則に従い、入射角θ3と屈折率ｎ2の試
料流体６の屈折角θ4、又は入射角θ3と屈折率ｎ3の試
料流体６の屈折角θ5との間に、以下に示す数式（２）
が成り立つ。Then, the laser light La goes straight on the wall portion 5. Then, at the boundary surface between the inner wall surface 5b and the sample fluid 6,
Similarly, according to Snell's law, between the incident angle θ 3 and the refraction angle θ 4 of the sample fluid 6 having the refractive index n 2 , or between the incident angle θ 3 and the refraction angle θ 5 of the sample fluid 6 having the refractive index n 3 , Formula (2) shown below
Holds.
【００２１】 ｎ1・ｓｉｎθ3＝ｎ2・ｓｉｎθ4＝ｎ3・ｓｉｎθ5 （２）N 1 · sin θ 3 = n 2 · sin θ 4 = n 3 · sin θ 5 (2)
【００２２】従って、試料流体６の屈折率の値（ｎ2又
はｎ3）に影響されずに照射領域Ｍの位置を一定にする
には、屈折角をほぼ等しくすればよい。数式（２）か
ら、その条件を満足させるには、ｓｉｎθ3＝ｓｉｎθ4
＝ｓｉｎθ5＝０、即ちレーザ光Ｌａを内壁面５ｂと試
料流体６との境界面に入射角θ3＝０°で入射させれば
よい。Therefore, in order to make the position of the irradiation region M constant without being affected by the value (n 2 or n 3 ) of the refractive index of the sample fluid 6, the refraction angles may be made substantially equal. From Expression (2), to satisfy the condition, sin θ 3 = sin θ 4
= Sin θ 5 = 0, that is, the laser beam La may be incident on the boundary surface between the inner wall surface 5b and the sample fluid 6 at an incident angle θ 3 = 0 °.
【００２３】すると、屈折角θ4＝屈折角θ5＝０°とな
り、常に等しい屈折角（０°）でレーザ光Ｌａは試料流
体６中を進むことになる。なお、θ3は厳密に０°であ
る必要はなく、照射領域Ｍの位置ずれが許容できる範囲
内であればよい。従って、θ3は、ほぼ０°であればよ
い。Then, the refraction angle θ 4 = refraction angle θ 5 = 0 °, and the laser beam La always travels in the sample fluid 6 at the same refraction angle (0 °). Note that θ 3 does not have to be exactly 0 °, and may be within a range in which the displacement of the irradiation region M can be tolerated. Therefore, θ 3 may be approximately 0 °.
【００２４】そこで、内壁面５ｂと試料流体６との境界
面に入射角θ3＝０°でレーザ光Ｌａを入射させるため
には、図３に示すように、外壁面５ａと内壁面５ｂとの
なす角をθ 6 とすると、空気と外壁面５ａとの境界面に
おける屈折角θ2がθ 6 に等しくなる（θ2＝θ 6 ）ように
すればよい。Therefore, in order to cause the laser beam La to enter the boundary surface between the inner wall surface 5b and the sample fluid 6 at the incident angle θ 3 = 0 °, as shown in FIG. 3, the outer wall surface 5a and the inner wall surface 5b are connected to each other. If the angle formed by is θ 6 , the refraction angle θ 2 at the boundary surface between the air and the outer wall surface 5a may be equal to θ 6 (θ 2 = θ 6 ).
【００２５】更に、数式（１）において、θ2＝θ 6 とし
て、どのくらいの入射角θ1で、レーザ光Ｌａを空気と
外壁面５ａとの境界面に入射させればよいかを求める。
入射角θ1は、空気の屈折率ｎ0、フローセル１の壁部５
の屈折率ｎ1、外壁面５ａと内壁面５ｂとのなす角θ6に
より決定され、以下に示す数式（３）になる。Further, in equation (1), θ 2 = θ 6 , and at what incident angle θ 1 the laser beam La should be incident on the boundary surface between the air and the outer wall surface 5 a.
The incident angle θ 1 is the refractive index n 0 of air and the wall portion 5 of the flow cell 1.
Is determined by the refractive index n 1 and the angle θ 6 formed by the outer wall surface 5a and the inner wall surface 5b, and the following mathematical expression (3) is obtained.
【００２６】 θ1＝ｓｉｎ-1｛（ｎ1／ｎ0）ｓｉｎθ6｝ （３）Θ 1 = sin −1 {(n 1 / n 0 ) sin θ 6 } (3)
【００２７】従って、数式（３）を満たす角度θ1で、
レーザ光Ｌａを空気と外壁面５ａとの境界面に入射させ
れば、試料流体６の屈折率の値に関係せずに照射領域Ｍ
の位置を一定に維持することができる。Therefore, at the angle θ 1 which satisfies the equation (3),
When the laser light La is incident on the boundary surface between the air and the outer wall surface 5a, the irradiation area M is irrelevant to the value of the refractive index of the sample fluid 6.
The position of can be maintained constant.
【００２８】このようなフローセル１に試料流体６を流
すと、照射領域Ｍを通過する粒子にレーザ光Ｌａが照射
され、レーザ光Ｌａを受けた粒子が発する散乱光Ｌｓが
集光光学系３により集光される。When the sample fluid 6 is flown through the flow cell 1 as described above, the laser light La is irradiated on the particles passing through the irradiation region M, and the scattered light Ls emitted by the particles receiving the laser light La is collected by the condensing optical system 3. Collected.
【００２９】次いで、集光光学系３により集光した散乱
光Ｌｓが、光電変換素子４により電圧に変換される。そ
して、光電変換素子４により変換された電圧のピークの
数により粒子の数が、電圧の値により粒子の粒径が測定
される。Next, the scattered light Ls condensed by the condensing optical system 3 is converted into a voltage by the photoelectric conversion element 4. Then, the number of particles is measured by the number of peaks of the voltage converted by the photoelectric conversion element 4, and the particle size of the particles is measured by the value of the voltage.
【００３０】また、本発明の実施の形態では、フローセ
ル１を一体で形成したが、図４に示すように、先ず外壁
面１５ａと内壁面１５ｂ及び内壁面１５ｃと外壁面１５
ｄを平行にした壁部１５からなるフローセル１０を形成
し、次いで同一の材質で形成した三角柱形状の部材２０
を各外壁面１５ａ，１５ｄに接着して、図２に示すフロ
ーセル１と同様な形状にすることができる。Further, in the embodiment of the present invention, the flow cell 1 is integrally formed, but as shown in FIG. 4, first, the outer wall surface 15a and the inner wall surface 15b and the inner wall surface 15c and the outer wall surface 15 are formed.
A triangular prism-shaped member 20 formed by forming a flow cell 10 including a wall portion 15 in which d is parallel and then formed of the same material.
Can be adhered to the outer wall surfaces 15a and 15d to have a shape similar to that of the flow cell 1 shown in FIG.
【００３１】また、図５に示すように、フローセル１０
の各外壁面１５ａ，１５ｄに同一の材質で形成した部材
２１を接着して、レーザ光Ｌａが通過する各外壁面１５
ａ，１５ｄの一部分のみを必要な形状に形成してもよ
い。Further, as shown in FIG. 5, the flow cell 10
A member 21 formed of the same material is adhered to each outer wall surface 15a, 15d of each outer wall surface 15 through which the laser light La passes.
You may form only a part of a and 15d in a required shape.
【００３２】また、本発明の実施の形態では、図２に示
すように、フローセル１の壁部５について、外壁面５ａ
と内壁面５ｂのなす角度と、外壁面５ｄと内壁面５ｃの
なす角度を等しくして対称に形成し、レーザ光Ｌａが外
壁面５ｄと空気との境界面で反射して光路を逆戻りしな
いようにした。Further, in the embodiment of the present invention, as shown in FIG. 2, with respect to the wall portion 5 of the flow cell 1, the outer wall surface 5a.
The angle formed by the inner wall surface 5b and the angle formed by the outer wall surface 5d and the inner wall surface 5c are made equal to each other and formed symmetrically so that the laser light La is not reflected by the boundary surface between the outer wall surface 5d and the air and does not return to the optical path. I chose
【００３３】ところで、レーザ光Ｌａがフローセル１か
ら出射する部位であるフローセル１の内壁面５ｃと外壁
面５ｄの角度等の形態は、本発明の実施の形態に限定さ
れるものではない。即ち、本発明はレーザ光Ｌａがフロ
ーセル１内を流れる試料流体６に左右されることなく、
フローセル１の照射領域Ｍを確実に通過すれば足りるも
のである。従って、内壁面５ｃと内壁面５ｂが平行でな
くてもよく、外壁面５ａと外壁面５ｄが平行でなくても
よい。By the way, the form such as the angle between the inner wall surface 5c and the outer wall surface 5d of the flow cell 1 which is the portion where the laser light La is emitted from the flow cell 1 is not limited to the embodiment of the present invention. That is, according to the present invention, the laser light La is not affected by the sample fluid 6 flowing in the flow cell 1,
It is sufficient if the irradiation area M of the flow cell 1 is reliably passed. Therefore, the inner wall surface 5c and the inner wall surface 5b may not be parallel, and the outer wall surface 5a and the outer wall surface 5d may not be parallel.
【００３４】なお、本発明の実施の形態においては、光
散乱式の粒子測定装置について説明したが、照射領域Ｍ
を通過する粒子の存在による透過光量の減少量を検出し
て粒子の数や粒径などを測定する光遮断式の粒子測定装
置、及び照射領域Ｍを通過する粒子の存在により生じる
回折光を検出する光回折式の粒子測定装置にも適用でき
る。In the embodiment of the present invention, the light scattering type particle measuring device has been described.
Light-blocking type particle measuring device for measuring the number of particles or the particle size by detecting the amount of reduction of the amount of transmitted light due to the presence of particles passing through, and detecting the diffracted light generated by the presence of particles passing through the irradiation area M. It can also be applied to a light diffraction type particle measuring device.
【００３５】[0035]
【発明の効果】以上説明したように本発明のフローセル
によれば、試料流体の屈折率の大きさに影響されずに、
粒子検出部としての照射領域の位置を一定にすることが
できる。As described above, according to the flow cell of the present invention, the flow cell is not affected by the magnitude of the refractive index of the sample fluid,
The position of the irradiation area as the particle detection unit can be made constant.
【００３６】本発明の粒子測定装置によれば、試料流体
の屈折率の大きさに影響されずに、試料流体に含まれる
粒子の数及び粒子の粒径を測定することができる。According to the particle measuring apparatus of the present invention, the number of particles contained in the sample fluid and the particle size of the particles can be measured without being affected by the magnitude of the refractive index of the sample fluid.
【図１】本発明に係る粒子測定装置の構成図FIG. 1 is a block diagram of a particle measuring apparatus according to the present invention.
【図２】本発明に係るフローセルの断面図FIG. 2 is a sectional view of a flow cell according to the present invention.
【図３】フローセルの壁部における光の透過経路の説明
図FIG. 3 is an explanatory diagram of a light transmission path in a wall portion of a flow cell.
【図４】フローセルの他の実施の形態の断面図FIG. 4 is a sectional view of another embodiment of the flow cell.
【図５】フローセルの他の実施の形態の断面図FIG. 5 is a sectional view of another embodiment of the flow cell.
【図６】従来のフローセルの断面図FIG. 6 is a sectional view of a conventional flow cell.
【図７】従来のフローセルの壁部における光の透過経路
の説明図FIG. 7 is an explanatory diagram of a light transmission path in a wall portion of a conventional flow cell.
１，１０…フローセル、２…レーザ光源、３…集光光学
系、４…光電変換素子、５…壁部、５ａ，５ｄ，１５
ａ，１５ｄ…外壁面、５ｂ，５ｃ，１５ｂ，１５ｃ…内
壁面、６…試料流体、Ｌａ…レーザ光、Ｍ…照射領域。1, 10 ... Flow cell, 2 ... Laser light source, 3 ... Condensing optical system, 4 ... Photoelectric conversion element, 5 ... Wall part, 5a, 5d, 15
a, 15d ... Outer wall surface, 5b, 5c, 15b, 15c ... Inner wall surface, 6 ... Sample fluid, La ... Laser light, M ... Irradiation area.
Claims (2)
域を内部に形成し、この照射領域を通過する試料流体に
含まれる粒子の粒径等の粒子情報を得るためのフローセ
ルにおいて、前記光がフローセルの外壁面に所定の入射
角θ（θ≠０°）で入射すると共に、フローセルの内壁
面から屈折角が０°で前記試料流体に出射するように壁
部の形状を形成したことを特徴とするフローセル。1. A flow cell for irradiating light to form an irradiation region as a particle detection unit therein and obtaining particle information such as a particle size of particles contained in a sample fluid passing through the irradiation region, The shape of the wall is formed so that light enters the outer wall surface of the flow cell at a predetermined incident angle θ (θ ≠ 0 °) and is emitted from the inner wall surface of the flow cell to the sample fluid with a refraction angle of 0 °. Flow cell characterized by.
ーセルの流路に光を照射して照射領域を形成する光源
と、前記照射領域の粒子の散乱光、透過光又は回折光を
検出処理する光学的検出処理手段を備えることを特徴と
する粒子測定装置。2. The flow cell according to claim 1, a light source that irradiates light to a flow path of the flow cell to form an irradiation region, and a scattered light, a transmitted light, or a diffracted light of particles in the irradiation region is detected. A particle measuring device comprising an optical detection processing means.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP07397999A JP3530061B2 (en) | 1999-03-18 | 1999-03-18 | Flow cell and particle measuring apparatus using the flow cell |
| US09/528,146 US6465802B1 (en) | 1999-03-18 | 2000-03-17 | Particle measurement apparatus flow cell useful for sample fluids having different refractive indexes |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP07397999A JP3530061B2 (en) | 1999-03-18 | 1999-03-18 | Flow cell and particle measuring apparatus using the flow cell |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2000266661A JP2000266661A (en) | 2000-09-29 |
| JP3530061B2 true JP3530061B2 (en) | 2004-05-24 |
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ID=13533739
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP07397999A Expired - Fee Related JP3530061B2 (en) | 1999-03-18 | 1999-03-18 | Flow cell and particle measuring apparatus using the flow cell |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6975392B2 (en) * | 2004-01-29 | 2005-12-13 | Wyatt Technology Corporation | Enhanced sensitivity differential refractometer measurement cell |
| EP2005141A2 (en) * | 2006-04-11 | 2008-12-24 | Guava Technologies, Inc. | Asymmetric capillary for capillary-flow cytometers |
| JP7097175B2 (en) * | 2017-12-04 | 2022-07-07 | 株式会社堀場製作所 | A cell for measuring particle physical properties and a particle physical property measuring device using the cell. |
| WO2021048962A1 (en) * | 2019-09-11 | 2021-03-18 | 株式会社島津製作所 | Light-scattering detection device |
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