JP3527382B2 - Heat equalizer - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heat equalizer capable of uniformly heating or cooling an object to be molded or processed on a surface plate, such as a synthetic resin molded product or a semiconductor wafer. .

[0002]

2. Description of the Related Art As a conventional heat equalizer, for example, there is one disclosed in JP-A-6-278139. Further, as an improved version thereof, Japanese Patent Application Laid-Open No. 8-89508
17 and 18, the outlines of which are shown in FIGS. 17 and 18. In each of these figures, reference numeral 1 denotes a distribution formed of concentric annular grooves on which a molded product such as a synthetic resin molded product or a semiconductor wafer is placed. A platen 3 having a plurality of passages 2 formed therein is a plate-like member joined to the platen 1 so as to cover the flow passage 2 formed in the platen 1, 4 is a part of the plate-like member 3 A liquid reservoir body formed so as to project toward one side and communicating with the inside of the flow passage 2 to store the working fluid 5 which is sealed after vacuum decompression inside thereof, 6 penetrates through the liquid reservoir body 4 and is contained in the working fluid 5. It is a housing body that is immersed in the inside of which the heater 7 is housed.

Next, the operation will be described. When the product to be molded needs to be heat-molded, the product to be molded is placed on the surface plate 1 and the heater 7 inside the container 6 immersed in the working liquid 5 through the liquid reservoir 4 is energized. . When the heater 7 is energized, the hydraulic fluid 5 is heated via the container 6. The heated hydraulic fluid 5 evaporates and evaporates, spreads throughout the surface plate 1 through the flow passage 2 of the surface plate 1, and the latent heat is transferred to the surface plate 1 part through the wall surface of the flow path 2 to heat-form the molded product. . The vapor of the working fluid 5 deprived of the latent heat is condensed and liquefied on the wall surface of the flow passage 2 and recirculates to the liquid reservoir 4. By performing these series of operations, the product to be molded is uniformly heated on the surface of the surface plate 1.

[0004]

However, in the above-mentioned conventional apparatus, the heat generated from the heater 7 is transferred to the surface of the surface plate 1 by the latent heat of the working fluid 5 sealed in the liquid reservoir 4 after the vacuum decompression. Although it has a structure to heat, since a gap is formed between the heater 7 and the housing 6 that houses the heater 7, heat resistance increases and heat transfer efficiency decreases, so that the surface of the surface plate 1 is made uniform. There is a problem that heating cannot be performed efficiently.

The present invention has been made to solve the above problems, and an object of the present invention is to provide a soaking apparatus that can uniformly and efficiently heat the surface of a surface plate.

[0006]

According to a first aspect of the present invention, a surface plate on which a product to be molded is placed and a flow path is formed, and a surface plate so as to cover the flow path formed on the surface plate are provided. The plate-like member joined to the plate-like member, a part of the plate-like member protruding outward, a liquid reservoir that communicates with the inside of the flow passage and stores the working fluid, and an operation that penetrates the liquid reservoir A housing body, which is immersed in a liquid and houses a heat source therein, and a surface-treated construction body that promotes boiling are provided on the outer peripheral portion of the housing body.

According to the second aspect of the present invention, the surface plate on which the product to be molded is placed and the flow passage is formed, and the surface plate is joined to the surface plate so as to cover the flow passage. A plate-shaped member, a liquid reservoir formed by projecting a part of the plate-shaped member outward, and communicating with the inside of the flow passage to store the working fluid, and penetrating the liquid reservoir to be immersed in the working fluid In addition, a housing body in which a heat source is housed and a high thermal conductive material filled between the housing body and the heat source are provided.

According to a third aspect of the present invention, the surface plate on which the product to be molded is placed and the flow passage is formed, and the surface plate are joined to cover the flow passage formed on the surface plate. A plate-shaped member, a liquid reservoir formed by projecting a part of the plate-shaped member outward, and communicating with the inside of the flow passage to store the working fluid, and penetrating the liquid reservoir to be immersed in the working fluid And a heat source having a size equal to or larger than the inner size of the storage body and press-fitted into the storage body.

According to the fourth aspect of the present invention, the surface plate on which the product to be molded is placed and the flow passage is formed, and the surface plate are joined to the surface plate so as to cover the flow passage. The plate-shaped member, a liquid reservoir formed by projecting a part of the plate-shaped member outward, and communicating with the inside of the flow passage to store the working fluid, and arranged in contact with the outer peripheral surface of the liquid reservoir. And a heat source.

[0010]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiment 1. Hereinafter, a first embodiment of the present invention will be described with reference to FIGS. In each of these figures, 1 is a surface plate, 2 is a flow passage, 3 is a plate-like member, 4 is a liquid reservoir, 5 is a working fluid, and 6 is a heat source consisting of, for example, a heater. Reference numeral 8 denotes a boiling accelerator that is arranged on the outer peripheral portion of the container 6 and that promotes boiling of the hydraulic fluid 5, and is composed of a porous body such as a wick or a wire net.

Next, the operation will be described. When the product to be molded needs to be heat-molded, the product to be molded is placed on the surface plate 1 and the heat source 7 inside the storage body 6 penetrated through the liquid reservoir 4 and immersed in the working liquid 5 is energized. . When the heat source 7 is energized, the hydraulic fluid 5 is heated via the container 6. The heated hydraulic fluid 5 evaporates and evaporates, spreads throughout the surface plate 1 through the flow passage 2 of the surface plate 1, and the latent heat is transferred to the surface plate 1 part through the wall surface of the flow path 2 to heat-form the molded product. . The vapor of the working fluid 5 deprived of the latent heat is condensed and liquefied on the wall surface of the flow passage 2, and is again stored in the liquid reservoir 4.
Return to. By performing these series of operations, the product to be molded is uniformly heated on the surface of the surface plate 1. In this case, the amount of heat of the heat source 7 is diffused from the vapor of the hydraulic fluid 5 into the inside of the closed container including the flow passage 2 and the liquid reservoir 4, and heat is transferred by condensation on the wall surface of the flow passage 2, so that the surface plate 1 The surface can be heated uniformly.

Further, in the first embodiment, the boiling promoting body 8 composed of, for example, a wick or a wire net is arranged on the outer peripheral portion of the housing body 6, so that the boiling of the working fluid 5 is promoted and the heat transfer area is increased. Can be increased, and the thermal resistance in boiling vaporization can be reduced, so that a soaking device having excellent thermal efficiency can be obtained.

Embodiment 2. Embodiment 2 of the present invention will be described with reference to FIG. In FIG. 2, reference numeral 9 denotes a surface-treated construction body which is formed on the outer peripheral portion of the storage body 6 and promotes boiling of the hydraulic fluid 5, and is constructed on the porous body by surface treatment such as spraying.

The second embodiment has the same effects as those of the first embodiment described above, and further, the surface-treated construction body 9 is formed on the outer peripheral portion of the housing body 6 by the surface treatment. Since it is not necessary to fix the boiling promoting body 8 to the storage body 6 as in the first embodiment described above,
Assembling is also improved.

Embodiment 3. The third embodiment of the present invention will be described with reference to FIG. In FIG. 3, 10 is a high thermal conductive material such as heat transfer grease filled in the gap between the housing 6 and the heat source 7.

In the third embodiment, the high thermal conductive material 10 made of, for example, heat transfer grease or the like is used for the housing 6 and the heat source 7.
By filling the gap between the housing 6 and the heat source 7,
It is possible to reduce the thermal resistance between and, and it is possible to obtain a heat equalizer having further excellent thermal efficiency. Further, when the high thermal conductive material 10 to be filled is a material having high fluidity, the lid 11 may be installed at the end portion of the storage body 6, whereby the high thermal conductive material 10 having high fluidity can be filled. It can be done easily.

Embodiment 4. A fourth embodiment of the present invention will be described based on FIG. In FIG. 4, 12 is a container penetrating the liquid reservoir 4 and immersed in the hydraulic fluid 5, 13 is the same as the inner size of the container 12 or larger than the inner size of the container 12, The heat source is, for example, a heater, which is press-fitted into the housing 12. That is, the inner size of the container 12 is the same as the outer size of the heat source 13 or smaller than the outer size of the heat source 13.

In the fourth embodiment, the container 12
Since the heat source 13 is press-fitted into the container, the gap between the housing 12 and the heat source 13 is eliminated, so that the thermal resistance can be reduced without filling the high thermal conductive material 10 as in the third embodiment described above, and the thermal efficiency can be further improved. And workability can be improved.
Further, since the heat source 13 is firmly fixed to the housing body 12 by press fitting, it is not necessary to consider a fixing method of the heat source 13.

Embodiment 5. The fifth embodiment of the present invention will be described with reference to FIG. In FIG. 5, reference numeral 14 is a planar heat source arranged in contact with the outer peripheral surface of the liquid reservoir 4, for example, the outer peripheral wall of the bottom of the liquid reservoir 4.

In the fifth embodiment, since the planar heat source 14 is arranged in contact with the outer peripheral wall of the liquid reservoir 4,
It is possible to easily improve the thermal resistance due to the gap between the heat source and the housing as in the above-described embodiments, and to easily attach or replace the heat source 14 and improve the maintainability. Further, the heat source 14 is the liquid reservoir 4
Even if it is placed in contact with the outer peripheral wall of the side portion, the same effect can be obtained.

Sixth Embodiment The sixth embodiment of the present invention will be described with reference to FIG. In FIG. 6, 15 is a liquid reservoir formed by projecting a part of the plate-like member 3 to the outside, and communicating with the inside of the flow passage 2 to store the working fluid 5, and 16 is an outside of the liquid reservoir 15. A heat source 17 composed of, for example, a heater and the like is disposed at the bottom of the liquid reservoir 15 and is formed by denting the bottom of the liquid reservoir 15 inward of the liquid reservoir 15.
6 is a heat source installation part, and 18 is a holding plate for attaching the heat source 16 installed in the heat source installation part 17 to the liquid reservoir 15.

In the sixth embodiment, the liquid reservoir 1
Heat source installation part 1 formed by denting the bottom part of 5 inward
Since the heat source 16 is installed in 7 and fixed by the holding plate 18, the heat source 16 can be easily fixed, and by holding down the heat source 16 by the holding plate 18, the liquid reservoir 15 and the heat source 16 can be fixed. Since the adhesiveness with is further improved, the thermal resistance due to contact can be reduced. Furthermore, since it is possible to assemble by screwing or the like, the assembling property can be improved. In addition, the heat source installation unit 17 is the liquid reservoir 1
Even if it is arranged on the side portion of 5, the same effect can be obtained.

Embodiment 7. The seventh embodiment of the present invention will be described with reference to FIG. In FIG. 7, 19 is a hole formed in a part of the liquid reservoir 4,
Reference numeral 20 denotes a flange which closes the hole 19 and is detachably attached to the liquid reservoir 4, 21 denotes a flange which penetrates the flange 20 and is immersed in the working fluid 5 enclosed in the liquid reservoir 4 through the hole 19, for example. A heat source composed of a heater and the like.

In the seventh embodiment, since the heat source 21 is immersed in the hydraulic fluid 5, it is not necessary to consider the gap between the heat source and the container as in the first to fourth embodiments. Since the heat generated from the heat source 21 is directly transmitted to the hydraulic fluid 5, the thermal resistance can be remarkably reduced and the thermal efficiency can be greatly improved. Further, since the heat source 21 is provided with the flange 20 and is detachably attached to the liquid reservoir 4 by screwing or the like,
The heat source 21 can be easily attached and replaced.

Embodiment 8. The eighth embodiment of the present invention will be described with reference to FIG. In FIG. 8, reference numeral 22 denotes a heat source that is mounted in the housing 4 and is composed of an insulator 22a filled in the housing 4 and a heating element 22b made of a heating wire or the like arranged in the insulator 22a. .

In the eighth embodiment, the heat source 22 is integrated with the storage body 4 by filling the insulator 22a into the storage body 4, so that the clearance between the heat source and the storage body is taken into consideration. The need is eliminated and the assemblability can be improved.

Ninth Embodiment The ninth embodiment of the present invention will be described with reference to FIG. In FIG. 9, 23 is mounted in the storage body 4, and both ends 23
It is a heat source composed of, for example, a heater and the like, which is arranged at a position of a on the central portion side from the end surface of the housing body 4 with a distance of L dimension. That is, the heat source 23 is made shorter than that of the above-described embodiment, and the entire heat source 23 is stored inside the storage body 4.

In the ninth embodiment, since the end portions 23a of the heat source 23 are located on the central portion side by being separated from the end surface of the housing 4 by the L dimension, the end surfaces of the heat source 23 and the housing 4 are located. It is possible to increase the heat resistance between the storage unit 4 and the end face wall of the storage unit 4, thereby reducing the heat that is directly transmitted to the surface of the surface plate 1 from the end face wall of the storage unit 4. The soaking property of the surface of the surface plate 1 can be further improved.

Embodiment 10. The tenth embodiment of the present invention will be described with reference to FIG. In FIG. 10, reference numeral 24 penetrates the liquid reservoir 4 and is immersed in the hydraulic fluid 5, and the dimensions of both end portions 24a are the central portion 24b.
The storage body formed larger than the size of
The central part 25a is mounted inside the central part 25a of the housing 24.
b, and both ends 25b are located at both ends 24a of the housing 24 and are a heat source such as a heater. Both ends 25b of the heat source 25 and both ends 24 of the housing 24 are located.
A gap is formed between a and a.

In the tenth embodiment, the heat source 25
The gap formed between both ends 25b of the container 24 and both ends 24a of the container 24 reduces the heat transmitted from the walls 24a of the container 24 through the liquid reservoir 4 wall and directly to the surface of the surface plate 1. Therefore, the same effect as that of the ninth embodiment can be obtained. In addition, both ends 25b of the heat source 25 and the housing 24
By providing a gap between both end portions 24a of the heat source 25, the size of the heat source 25 can be made large, so that the heat generation amount per unit area becomes small and the life of the heat source 25 can be maintained relatively long. it can.

Eleventh Embodiment The eleventh embodiment of the present invention will be described with reference to FIG. In FIG. 11, reference numeral 26 is a container that is immersed in the hydraulic fluid 5 in the liquid reservoir 4, and 27 and 28 are the containers 26.
It is a connection body that is made of a material having a lower thermal conductivity and that attaches the storage body 26 to the liquid reservoir body 4.
It shows a case where the storage body 26 is located on the inner side of the connection bodies 27 and 28, and is fixed by welding, for example.
Reference numeral 29 is a heat source that is mounted in the housing 26 and includes, for example, a heater.

In the eleventh embodiment, the connecting body 2
Since the storage body 26 is located inward of 7, 28,
A gap is created between both ends of the heat source 29 and the connectors 27 and 28, and the same effect as that of the tenth embodiment described above is achieved. Further, since the connecting bodies 27 and 28 located between the storage body 26 and the liquid reservoir 4 are made of a material having a lower thermal conductivity than the storage body 26, they are transmitted from the heat source 29 through the storage body 26 to store the liquid. Heat transfer to the wall of the body 4 can be significantly reduced, and the soaking characteristics can be improved as compared with the tenth embodiment described above.

By the way, in the above-mentioned FIG.
Although the case where the Nos. 7 and 28 and the housing 26 are fixed to each other by welding has been described, as shown in FIG.

Twelfth Embodiment A twelfth embodiment of the present invention will be described with reference to FIGS. In each of these drawings, 1 is a surface plate, 2 is a flow passage, 3 is a plate-like member, and 30 is provided on an outer peripheral portion of the surface plate 1,
Liquid phase portion 30a for storing hydraulic fluid 31 and its liquid phase portion 30a
Is a liquid reservoir having a vapor phase portion 30b above, and 32 is a heat source which is arranged around the liquid phase portion 30a of the liquid reservoir 30 and is composed of, for example, a heater. As shown in FIG. Although the case where it is provided on the outer peripheral wall of the liquid phase portion 30a of the body 30 is shown, it may be provided on the bottom peripheral wall of the liquid phase portion 30a or the inner peripheral wall of the liquid phase portion 30a as indicated by the broken line.
Reference numeral 33 is a heat insulating material attached to the plate-like member 3 below the surface plate 1.

In the twelfth embodiment, the liquid phase portion 3 of the liquid reservoir 30 is also heated by the heat source 32 from the outer peripheral portion of the surface plate 1.
The hydraulic fluid 31 in 0a is heated. Heated hydraulic fluid 3
1 evaporates and vaporizes, and a liquid reservoir 3 located on the outer periphery of the platen 1
0 spreads over the entire vapor phase portion 30b and transfers the latent heat to the outer peripheral portion of the surface plate 1. The vapor of the working fluid 31 deprived of latent heat is condensed and liquefied, and recirculates into the liquid phase portion 30a of the liquid reservoir 30 again. By performing these series of operations, heat can be transported also from the outer peripheral portion of the surface plate 1, heat radiation from the outer peripheral portion of the surface plate 1 can be prevented, and the outer peripheral portion of the surface temperature distribution of the surface plate 1 can be prevented. It is possible to prevent a temperature decrease and obtain stable soaking characteristics. Further, the heat insulating material 33 can prevent heat radiation from below the surface plate 1, and can improve the surface temperature distribution of the surface plate 1 and reduce heat dissipation loss.

By the way, in FIGS. 13 and 14 described above,
Although the case where the liquid phase portion 30a of the liquid reservoir 30 has a single layer structure has been described, as shown in FIG. 15, the liquid phase portion 30a of the liquid reservoir 30 has a two-layer structure of an outer layer portion and an inner layer portion, and By disposing the heat source 32 on the peripheral wall between the outer layer portion and the inner layer portion, the phase portion 30a can be used as an area in which the entire heat radiating surface of the heat source 32 is in thermal contact with the working fluid 31, so that the vapor of the working fluid 31 The generated amount can be increased, the thermal resistance can be reduced, and the thermal efficiency can be further improved.

Thirteenth Embodiment The thirteenth embodiment of the present invention will be described with reference to FIG. In FIG. 16, 34 is provided on the outer peripheral portion of the surface plate 1, and stores a liquid phase portion 34 a for storing the working fluid 35 and the liquid phase portion 3 thereof.
4a is a liquid reservoir having a vapor phase portion 34b, 36 covers the flow passage 2 formed in the platen 1, and the flow passage 2 communicates with the liquid reservoir 34 and the flow passage 2 for the working liquid 35 is provided.
A plate-shaped member that is inclined and attached to the liquid reservoir 34 to promote recirculation from the liquid, and 37 denotes a liquid phase portion 34a of the liquid reservoir 34.
The heat source is composed of, for example, a heater or the like arranged around the periphery.

In the thirteenth embodiment, the heat source 37
Thereby, the hydraulic fluid 35 in the liquid phase portion 34a of the liquid reservoir 34 is heated. The heated hydraulic fluid 35 evaporates and vaporizes, and the surface plate 1
It spreads over the entire vapor phase portion 34b of the liquid reservoir 34 located on the outer peripheral portion of, and spreads over the entire flow passage 2 of the surface plate 1. Surface plate 1
The vapor of the working fluid 35 spread over the entire flow passage 2 is transferred to the surface plate 1 by the latent heat of the flow passage 2 wall surface to heat-mold the product to be molded, and the vapor of the working fluid 35 deprived of the latent heat flows. It condenses and liquefies on the wall surface of the passage 2 and recirculates into the liquid phase portion 34a of the liquid reservoir 34 along the inclined surface of the plate member 36. On the other hand, the vapor of the working fluid 35 spread over the entire vapor phase portion 34b of the liquid reservoir 34 transfers its latent heat to the outer peripheral portion of the surface plate 1, and the vapor of the working fluid 35 deprived of the latent heat is condensed and liquefied. , Liquid reservoir 3 again
It recirculates into the liquid phase part 34a of No. 4 of FIG. By performing a series of these operations, heat can be transported from both the inner and outer peripheries of the surface plate 1, and heat dissipation from the outer peripheral portion of the surface plate 1 can be prevented,
It is possible to prevent the temperature drop in the outer peripheral part of the surface temperature distribution of the surface plate 1,
It is possible to obtain stable soaking characteristics. Further, since the plate-shaped member 36 is provided with the inclination, the working liquid 35 condensed and liquefied in the flow passage 2 of the surface plate 1 can be smoothly recirculated into the liquid phase portion 34a of the liquid reservoir 34, so that the evaporation portion can be used. Some liquid reservoir 34
The phenomenon that the hydraulic fluid 35 does not smoothly return to the liquid phase portion 34a and withers can be prevented, and stable operation can be performed.

[0039]

The first aspect of the present invention has been described above.
As described above, the surface plate on which the molded product is placed and the flow passage is formed, the plate-like member joined to the surface plate so as to cover the flow passage formed on the surface plate, and a part of the plate-like member A liquid reservoir formed so as to project outwardly and communicating with the inside of the flow passage to store the working fluid; a housing body that penetrates the fluid reservoir and is immersed in the working fluid to accommodate a heat source therein; By providing the outer peripheral portion of the storage body with the surface-treated construction body that promotes boiling, it is not necessary to fix the boiling promotion body to the storage body as in the second aspect of the present invention, so that the assembling property is also improved.

According to the second aspect of the present invention, the surface plate on which the product to be molded is placed and the flow passage is formed, and the surface plate are joined to the surface plate so as to cover the flow passage. A plate-shaped member, a liquid reservoir formed by projecting a part of the plate-shaped member outward, and communicating with the inside of the flow passage to store the working fluid, and penetrating the liquid reservoir to be immersed in the working fluid By providing the housing body in which the heat source is housed and the high thermal conductive material filled between the housing body and the heat source, the thermal resistance between the housing body and the heat source can be reduced. It is possible to obtain a heat equalizer having further excellent thermal efficiency.

According to the third aspect of the present invention, the surface plate on which the product to be molded is placed and the flow passage is formed, and the surface plate are joined to the surface plate so as to cover the flow passage. A plate-shaped member, a liquid reservoir formed by projecting a part of the plate-shaped member outward, and communicating with the inside of the flow passage to store the working fluid, and penetrating the liquid reservoir to be immersed in the working fluid The heat-conducting material according to claim 3, wherein the stored container and a heat source having the same inner dimension as the container or a dimension larger than the inner dimension of the container and press-fitted into the container are provided. It is possible to reduce the thermal resistance without filling in, and further improve the thermal efficiency and workability.

According to a fourth aspect of the present invention, the surface plate on which the product to be molded is placed and the flow passage is formed, and the surface plate is joined to the surface plate so as to cover the flow passage. The plate-shaped member, a liquid reservoir formed by projecting a part of the plate-shaped member outward, and communicating with the inside of the flow passage to store the working fluid, and arranged in contact with the outer peripheral surface of the liquid reservoir. By providing the heat source, the heat resistance due to the gap between the heat source and the housing can be easily improved, and the heat source can be easily attached and replaced to improve the maintainability.

[Brief description of drawings]

FIG. 1 is a transverse sectional view showing a heat equalizer according to Embodiment 1 of the present invention.

FIG. 2 is a cross-sectional view showing a heat equalizer according to Embodiment 2 of the present invention.

FIG. 3 is a cross-sectional view showing a heat equalizer according to Embodiment 3 of the present invention.

FIG. 4 is a transverse sectional view showing a heat equalizer according to Embodiment 4 of the present invention.

FIG. 5 is a cross-sectional view showing a heat equalizer according to Embodiment 5 of the present invention.

FIG. 6 is a cross-sectional view showing a heat equalizer according to Embodiment 6 of the present invention.

FIG. 7 is a cross-sectional view showing a heat equalizer according to Embodiment 7 of the present invention.

FIG. 8 is a transverse sectional view showing a heat equalizer according to Embodiment 8 of the present invention.

FIG. 9 is a transverse sectional view showing a heat equalizer according to Embodiment 9 of the present invention.

FIG. 10 is a transverse sectional view showing a heat equalizer according to Embodiment 10 of the present invention.

FIG. 11 is a cross-sectional view showing a heat equalizer according to Embodiment 11 of the present invention.

FIG. 12 is a cross-sectional view showing a heat equalizer according to Embodiment 11 of the present invention.

FIG. 13 is a plan view showing a heat equalizer according to Embodiment 12 of the present invention.

FIG. 14 is a transverse sectional view showing a heat equalizer according to Embodiment 12 of the present invention.

FIG. 15 is a cross-sectional view showing a heat equalizer according to Embodiment 12 of the present invention.

FIG. 16 is a transverse sectional view showing a heat equalizer according to Embodiment 13 of the present invention.

FIG. 17 is a plan view showing a conventional heat equalizer.

FIG. 18 is a cross-sectional view showing a conventional heat equalizer.

[Explanation of symbols]

1 surface plate, 2 flow passages, 3,36 plate-shaped members, 4, 1
5,30,34 liquid reservoir, 5,31,35 hydraulic fluid,
6,12,24,26 container, 7,13,14,1
6, 21, 22, 23, 25, 29, 32, 37 Heat source, 8 Boiling accelerator, 9 Surface treatment body, 10 High thermal conductive material, 17 Heat source installation part, 18 Holding plate, 19 holes,
20 flange, 22a insulator, 22b heating element, 2
3a both end portions, 24a end portion, 24b central portion, 27,
28 connection body, 30a, 34a liquid phase part, 30b, 34
b Gas phase part.

Continuation of the front page (56) Reference JP-A-9-327827 (JP, A) JP-A-8-187760 (JP, A) JP-A-8-156027 (JP, A) JP-A-60-2322 (JP , A) (58) Fields investigated (Int.Cl. ⁷ , DB name) B29C 33/02-33/04 B29C 35/02-35/04 F28D 15/02 H01L 21/30

Claims (4)

(57) [Claims] 1. A product to be molded is placed and a flow passage is formed.
Cover the surface plate and the flow passage formed on the surface plate.
And a plate-like member joined to the surface plate,
It is formed by protruding a part to the outside and communicates with the inside of the flow passage.
Through the liquid reservoir that stores the working fluid and the above liquid reservoir.
Then, it is immersed in the hydraulic fluid and the heat source is stored inside.
A surface treatment for promoting boiling on the container and the outer periphery of the container.
A heat equalizing device, which is equipped with a physical construction body. 2. A molded product is placed and a flow passage is formed.
Cover the surface plate and the flow passage formed on the surface plate.
And a plate-like member joined to the surface plate,
It is formed by protruding a part to the outside and communicates with the inside of the flow passage.
Through the liquid reservoir that stores the working fluid and the above liquid reservoir.
Then, it is immersed in the hydraulic fluid and the heat source is stored inside.
High heat filled between the container and the container and the heat source
A heat equalizing device comprising a conductive material. 3. A product to be molded is placed and a flow passage is formed.
Cover the surface plate and the flow passage formed on the surface plate.
And a plate-like member joined to the surface plate,
It is formed by protruding a part to the outside and communicates with the inside of the flow passage.
Through the liquid reservoir that stores the working fluid and the above liquid reservoir.
And the container immersed in the working fluid,
The same as the internal dimensions or larger than the internal dimensions of the above-mentioned storage
And having a heat source press-fitted into the container.
Soaking device characterized by. 4. A product to be molded is placed and a flow passage is formed.
Cover the surface plate and the flow passage formed on the surface plate.
And a plate-like member joined to the surface plate,
It is formed by protruding a part to the outside and communicates with the inside of the flow passage.
And the outer circumference of the above-mentioned liquid reservoir
And a heat source arranged in contact with the surface.
Soaking device.