JP3524540B2 - ガラス基板の化学加工方法・化学加工装置及びガラス基板 - Google Patents
ガラス基板の化学加工方法・化学加工装置及びガラス基板Info
- Publication number
- JP3524540B2 JP3524540B2 JP2002110829A JP2002110829A JP3524540B2 JP 3524540 B2 JP3524540 B2 JP 3524540B2 JP 2002110829 A JP2002110829 A JP 2002110829A JP 2002110829 A JP2002110829 A JP 2002110829A JP 3524540 B2 JP3524540 B2 JP 3524540B2
- Authority
- JP
- Japan
- Prior art keywords
- chemical processing
- glass substrate
- chemical
- processing liquid
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000012993 chemical processing Methods 0.000 title claims description 129
- 239000011521 glass Substances 0.000 title claims description 127
- 239000000758 substrate Substances 0.000 title claims description 123
- 238000000034 method Methods 0.000 title claims description 23
- 239000007788 liquid Substances 0.000 claims description 111
- 238000012545 processing Methods 0.000 claims description 49
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 18
- 239000000126 substance Substances 0.000 claims description 15
- 238000007599 discharging Methods 0.000 claims description 9
- 238000003754 machining Methods 0.000 claims description 8
- 238000003756 stirring Methods 0.000 claims description 7
- 239000012530 fluid Substances 0.000 claims description 6
- 239000011148 porous material Substances 0.000 claims description 6
- 230000002093 peripheral effect Effects 0.000 claims description 4
- 239000004973 liquid crystal related substance Substances 0.000 description 16
- 239000007795 chemical reaction product Substances 0.000 description 13
- 238000005259 measurement Methods 0.000 description 10
- 239000007789 gas Substances 0.000 description 9
- 238000005530 etching Methods 0.000 description 8
- 238000007689 inspection Methods 0.000 description 8
- 230000000630 rising effect Effects 0.000 description 7
- 238000005498 polishing Methods 0.000 description 6
- 230000001174 ascending effect Effects 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 4
- 238000001039 wet etching Methods 0.000 description 4
- 239000000203 mixture Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 150000002222 fluorine compounds Chemical class 0.000 description 2
- 239000005340 laminated glass Substances 0.000 description 2
- 238000000053 physical method Methods 0.000 description 2
- 230000036632 reaction speed Effects 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 230000008961 swelling Effects 0.000 description 2
- 238000011179 visual inspection Methods 0.000 description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 102220491117 Putative postmeiotic segregation increased 2-like protein 1_C23F_mutation Human genes 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Liquid Crystal (AREA)
- Surface Treatment Of Glass (AREA)
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
- Gas-Filled Discharge Tubes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002110829A JP3524540B2 (ja) | 2001-04-12 | 2002-04-12 | ガラス基板の化学加工方法・化学加工装置及びガラス基板 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001-114498 | 2001-04-12 | ||
| JP2001114498 | 2001-04-12 | ||
| JP2002110829A JP3524540B2 (ja) | 2001-04-12 | 2002-04-12 | ガラス基板の化学加工方法・化学加工装置及びガラス基板 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003322353A Division JP2004099437A (ja) | 2001-04-12 | 2003-09-16 | ガラス基板の化学加工方法及び化学加工装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2003040649A JP2003040649A (ja) | 2003-02-13 |
| JP3524540B2 true JP3524540B2 (ja) | 2004-05-10 |
| JP2003040649A5 JP2003040649A5 (enExample) | 2004-07-08 |
Family
ID=26613523
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002110829A Expired - Fee Related JP3524540B2 (ja) | 2001-04-12 | 2002-04-12 | ガラス基板の化学加工方法・化学加工装置及びガラス基板 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3524540B2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8009248B2 (en) | 2005-09-30 | 2011-08-30 | Sharp Kabushiki Kaisha | Liquid crystal display and television receiver |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005008423A (ja) * | 2003-04-24 | 2005-01-13 | Nishiyama Stainless Chem Kk | ガラスの化学加工方法及びその装置。 |
| US7045072B2 (en) * | 2003-07-24 | 2006-05-16 | Tan Samantha S H | Cleaning process and apparatus for silicate materials |
| JP2007284345A (ja) * | 2004-03-17 | 2007-11-01 | Nishiyama Stainless Chem Kk | フラットパネルディスプレイ用ガラス板の製造方法及びその装置 |
| US8451201B2 (en) | 2005-09-30 | 2013-05-28 | Sharp Kabushiki Kaisha | Liquid crystal display device drive method, liquid crystal display device, and television receiver |
| US8294736B2 (en) | 2006-11-20 | 2012-10-23 | Sharp Kabushiki Kaisha | Display device driving method, driving circuit, liquid crystal display device, and television receiver |
| CN101627334B (zh) | 2007-04-16 | 2011-07-20 | 夏普株式会社 | 显示装置、显示装置的驱动装置、及电子设备 |
| JP5153383B2 (ja) | 2008-02-26 | 2013-02-27 | 株式会社ジャパンディスプレイイースト | 液晶表示装置の製造方法 |
| JP2013155057A (ja) * | 2012-01-26 | 2013-08-15 | Sanwa Frost Industry Co Ltd | Ｌｃｄガラス基板のエッチング方法およびその装置 |
| JP2016179913A (ja) * | 2015-03-23 | 2016-10-13 | 三和フロスト工業株式会社 | ガラス基板のエッチング方法およびその装置 |
| CN114868233B (zh) | 2019-12-26 | 2025-02-25 | 株式会社斯库林集团 | 基板处理装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000147474A (ja) | 1998-11-02 | 2000-05-26 | System Technology Inc | 薄膜トランジスタ液晶ディスプレイ用ガラスの自動エッチング装置 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0730685Y2 (ja) * | 1984-08-01 | 1995-07-12 | 三洋電機株式会社 | エツチング装置 |
| JPH0758078A (ja) * | 1993-08-19 | 1995-03-03 | Matsushita Electron Corp | ウエットエッチング処理装置 |
| JPH09260344A (ja) * | 1996-03-25 | 1997-10-03 | Mitsubishi Electric Corp | フィルトレーションシステム |
| JPH09260345A (ja) * | 1996-03-25 | 1997-10-03 | Mitsubishi Electric Corp | フィルトレーションシステム |
-
2002
- 2002-04-12 JP JP2002110829A patent/JP3524540B2/ja not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000147474A (ja) | 1998-11-02 | 2000-05-26 | System Technology Inc | 薄膜トランジスタ液晶ディスプレイ用ガラスの自動エッチング装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8009248B2 (en) | 2005-09-30 | 2011-08-30 | Sharp Kabushiki Kaisha | Liquid crystal display and television receiver |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2003040649A (ja) | 2003-02-13 |
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