JP3418819B2 - Plate flatness measuring device - Google Patents
Plate flatness measuring deviceInfo
- Publication number
- JP3418819B2 JP3418819B2 JP01808198A JP1808198A JP3418819B2 JP 3418819 B2 JP3418819 B2 JP 3418819B2 JP 01808198 A JP01808198 A JP 01808198A JP 1808198 A JP1808198 A JP 1808198A JP 3418819 B2 JP3418819 B2 JP 3418819B2
- Authority
- JP
- Japan
- Prior art keywords
- plate
- measuring device
- flatness
- flatness measuring
- gravity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Description
【０００１】[0001]
【発明の属する技術分野】この発明は、半導体製造装置
などに使用されるセラミックプレートや液晶ガラスなど
のプレートの平坦度を測定する装置に関するものであ
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for measuring flatness of a plate such as a ceramic plate or a liquid crystal glass used in a semiconductor manufacturing apparatus or the like.
【０００２】[0002]
【従来の技術】従来、プレートの平坦度を測定する場
合、厚さが大のプレートは、重力の影響によるたわみが
少ないため、図４に示すようにプレート平坦度測定装置
１の上面でプレート支持ピン２によりプレート３を三点
支持で支え、プレート平坦度測定装置１上に設けたスラ
イドレール４を水平に移動するスライドヘッド５の正面
に設けた下向きのレーザー変位計６により前記プレート
３の平坦度を測定していた。また厚さが薄いプレート
や、高い測定精度が要求されるプレートは、図５に示す
ような重力の影響によるたわみδを避けるため、図６に
示すようにプレート平坦度測定装置１の上面で縦型測定
用プレートガイド７によりプレート３を縦に固定し、プ
レート平坦度測定装置１上に設けたスライドレール４を
水平に移動するスライドヘッド５の正面に設けた横向き
のレーザー変位計６′により前記プレート３の平坦度を
測定していた。2. Description of the Related Art Conventionally, when measuring the flatness of a plate, since a plate having a large thickness has less deflection due to the influence of gravity, the plate is supported on the upper surface of the plate flatness measuring device 1 as shown in FIG. The plate 3 is supported by the pin 2 at three points and the slide rail 4 provided on the plate flatness measuring device 1 is horizontally moved by a downward laser displacement meter 6 provided in front of a slide head 5. I was measuring the degree. Further, in order to avoid the deflection δ due to the influence of gravity as shown in FIG. 5, a plate having a small thickness or a plate that requires high measurement accuracy is vertically arranged on the upper surface of the plate flatness measuring device 1 as shown in FIG. The plate 3 is fixed vertically by the mold measuring plate guide 7, and the slide rail 4 provided on the plate flatness measuring device 1 is horizontally moved by a horizontal laser displacement gauge 6'provided on the front of a slide head 5. The flatness of the plate 3 was measured.
【０００３】ところで、上記従来の三点支持方式による
プレート平坦度測定装置は、薄いプレートや高精度を要
求されるプレートの測定には、前述のように重力の影響
が大きすぎて使用できなかった。また、縦型支持方式に
よるプレート平坦度測定装置は、プレートを直角に保つ
機構が複雑になる。しかも非常に薄いプレートの場合、
縦型支持方式のプレート平坦度測定装置でも重力の影響
を受けてしまい、プレートに曲がりが発生する。By the way, the conventional plate flatness measuring device using the three-point support system cannot be used for the measurement of a thin plate or a plate requiring high accuracy because the influence of gravity is too large as described above. . Further, in the plate flatness measuring device using the vertical support method, the mechanism for holding the plate at a right angle becomes complicated. And for very thin plates,
Even in the vertical support type plate flatness measuring device, the plate is bent due to the influence of gravity.
【０００４】[0004]
【発明が解決しようとする課題】そこで本発明は、無重
力に近い状態でプレートの平坦度を測定でき、真の測定
データを得ることのできるプレート平坦度測定装置を提
供しようとするものである。SUMMARY OF THE INVENTION Therefore, the present invention is to provide a plate flatness measuring device which can measure the flatness of a plate in a state close to zero gravity and can obtain true measurement data.
【０００５】[0005]
【課題を解決するための手段】上記課題を解決するため
の本発明のプレート平坦度測定装置は、装置上面に設け
たスライドレールを水平に移動するスライドヘッドに搭
載されプレート表面の平坦度を測定する下向きの測定器
と、装置上面でプレートを三点支持する３本のプレート
支持ピンと、この３本のプレート支持ピンで三点支持さ
れるプレートの重力によるたわみを除去する装置上面に
立設した複数の上下動可能なアクチュエータと、このア
クチュエータの押し上げ力を任意に調整する装置内部に
設けた圧力調整部とより成るものである。A plate flatness measuring device of the present invention for solving the above problems measures the flatness of a plate surface mounted on a slide head which horizontally moves a slide rail provided on the upper surface of the device. And a downward measuring device, three plate support pins that support the plate at three points on the upper surface of the device, and a plate that is supported by the three plate support pins at three points to remove the deflection due to gravity from the upper surface of the device It is composed of a plurality of vertically movable actuators and a pressure adjusting section provided inside the apparatus for arbitrarily adjusting the pushing force of the actuators.
【０００６】上記のプレート平坦度測定装置において、
プレート表面の平坦度を測定する下向きの測定器は、レ
ーザー変位計であることが好ましい。In the above plate flatness measuring device,
The downward measuring device for measuring the flatness of the plate surface is preferably a laser displacement meter.
【０００７】上記のプレート平坦度測定装置において、
上下動可能なアクチュエータは、空気圧駆動のシリンダ
であることが好ましい。In the above plate flatness measuring device,
The vertically movable actuator is preferably a pneumatically driven cylinder.
【０００８】上記のプレート平坦度測定装置において、
上下動可能なアクチュエータの先端に、押し上げ力を測
定できるひずみゲージ式変位計が備わっていることが好
ましい。In the above plate flatness measuring device,
It is preferable that the tip of the vertically movable actuator is equipped with a strain gauge type displacement gauge capable of measuring the pushing force.
【０００９】[0009]
【発明の実施の形態】本発明のプレート平坦度測定装置
の実施形態を図１によって説明する。１０はプレート平
坦度測定装置で、上面にプレート３を三点支持する３本
のプレート支持ピン２が左右両側に設けられ、その後側
で長手方向にスライドレール４が水平に架設され、この
スライドレール４にスライドヘッド５が水平移動可能に
設けられ、このスライドヘッド５の正面にプレート３の
表面の平坦度を測定する下向きの測定器、本例では下向
きのレーザー変位計６が搭載されている。プレート３を
三点支持する３本の左右両側のプレート支持ピン２間の
装置上面には、プレート３の重力によるたわみを除去す
る複数の、本例では１０本の上下動可能なアクチュエー
タとして、空気圧駆動のシリンダ１１がプレート３の荷
重を均一に受けられるように配列立設され、このシリン
ダ１１の押し上げ力を任意に調整する圧力調整部１２が
装置内部に設けられている。この圧力調整部１２は、図
２に示すように複数のシリンダ１１の配管１３に連なる
本管１４の途中に設けられたバルブ１５を開き、供給さ
れる空気中の水分や塵埃をエアーフィルター１６で除去
した後、レギュレータ１７によって任意に複数のシリン
ダ１１の空気圧力を同じ圧力に設定するものである。図
１中１８は、操作盤である。BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of a plate flatness measuring device of the present invention will be described with reference to FIG. Reference numeral 10 denotes a plate flatness measuring device, which has three plate support pins 2 for supporting the plate 3 at three points on the upper surface on both left and right sides, and a slide rail 4 is horizontally installed longitudinally on the rear side thereof. 4, a slide head 5 is provided so as to be horizontally movable, and a downward measuring device for measuring the flatness of the surface of the plate 3, a downward laser displacement meter 6 in this example, is mounted on the front surface of the slide head 5. On the upper surface of the device between the three plate support pins 2 on both left and right sides that support the plate 3 at three points, a plurality of, in this example, 10 vertically movable actuators for removing the deflection of the plate 3 due to gravity are used as pneumatic actuators. Driving cylinders 11 are arranged in an array upright so that the load of the plate 3 can be uniformly received, and a pressure adjusting portion 12 for arbitrarily adjusting the pushing force of the cylinders 11 is provided inside the apparatus. As shown in FIG. 2, the pressure adjusting unit 12 opens a valve 15 provided in the middle of a main pipe 14 connected to the pipes 13 of a plurality of cylinders 11 to remove water and dust in the supplied air by an air filter 16. After the removal, the air pressure of the plurality of cylinders 11 is arbitrarily set to the same pressure by the regulator 17. Reference numeral 18 in FIG. 1 denotes an operation panel.
【００１０】上記のように構成された実施形態のプレー
ト平坦度測定装置によりプレートの平坦度を測定するに
は、図１に示されるように３本のプレート支持ピン２の
正規の位置に長方形のプレート３を載せて支持した後、
１０本のシリンダ１１を空気圧駆動してピストンロッド
を上昇し、プレート３の重力を均一に受け、重力による
たわみをほぼ解消する。即ち、プレート支持ピン２が受
ける力を図３に示すようにＨ1 ，Ｈ2 とし、シリンダ１
１の押し上げ力をＲ0 とすると、プレート３の重量Ｍと
バランスした支持状態は、Ｍ＝２Ｈ1 ＋１０Ｒ0 ＋Ｈ2
となる。３本のプレート支持ピン２に加わる重さＨ0 と
すると、Ｈ0 ＝２Ｈ1 ＋Ｈ2 であり、Ｈ0 はＭより非常
に小さいＨ0 ＜＜Ｍとなるように圧力調整部１２におけ
るレギュレータ１５を操作し、シリンダ１１の押し上げ
力Ｒ0 の力を調整し、全てのシリンダ１１の合計力１０
Ｒ0 をプレート３の重量Ｍよりも僅かに小さな力に設定
する。従って、プレート３の残りの重量は非常に小さく
なるが、この小さな荷重が３本のプレート支持ピン２に
加わるので、重力によるたわみがほぼ除去されると共に
プレート３が動き出すことがない。このような状態で、
図１に示されるレーザー変位計６が搭載されたスライド
ヘッド５をスライドレール４に沿って水平移動させ、プ
レート３との距離を測定することにより、重力によるた
わみの無い状態でプレート３の正しい平面度を測定でき
る。In order to measure the flatness of the plate by the plate flatness measuring device of the embodiment configured as described above, as shown in FIG. After placing and supporting the plate 3,
The ten cylinders 11 are pneumatically driven to raise the piston rod, uniformly receive the gravity of the plate 3, and substantially eliminate the deflection due to the gravity. That is, the force received by the plate support pin 2 is set to H 1 and H 2 as shown in FIG.
Assuming that the pushing force of 1 is R 0 , the supporting state balanced with the weight M of the plate 3 is M = 2H 1 + 10R 0 + H 2
Becomes Assuming that the weight H 0 applied to the three plate support pins 2 is H 0 = 2H 1 + H 2 , H 0 is much smaller than M, and the regulator 15 in the pressure adjusting unit 12 is such that H 0 << M. Is operated to adjust the pushing force R 0 of the cylinders 11, and the total force 10 of all the cylinders 11 is adjusted.
R 0 is set to a force slightly smaller than the weight M of the plate 3. Therefore, the remaining weight of the plate 3 becomes very small, but since this small load is applied to the three plate support pins 2, the deflection due to gravity is almost removed and the plate 3 does not move. In this state,
By horizontally moving the slide head 5 equipped with the laser displacement meter 6 shown in FIG. 1 along the slide rail 4 and measuring the distance from the plate 3, the correct plane of the plate 3 is obtained without any deflection due to gravity. You can measure the degree.
【００１１】尚、上記実施形態では長方形のプレート３
の平坦度を測定したが、円形、正方形等のプレートでも
同じように測定できる。その場合、被測定プレートの形
状に合わせて、各シリンダ１１を、シリンダ１本が支え
る面積が均等になるように配置し、さらに各シリンダ１
１に均等な押し上げ力を発生させれば、上記実施形態と
同様に、重力によるたわみの無い状態でプレート３の正
しい平坦度を測定できる。In the above embodiment, the rectangular plate 3 is used.
The flatness was measured, but it can be measured in the same manner with a circular or square plate. In that case, according to the shape of the plate to be measured, each cylinder 11 is arranged so that the area supported by one cylinder is even, and each cylinder 1
If a uniform pushing-up force is generated in 1, the correct flatness of the plate 3 can be measured in a state where there is no bending due to gravity, as in the above embodiment.
【００１２】また、上記実施形態のプレート平坦度測定
装置において、空気圧駆動のシリンダ１１のピストンロ
ッドの先端に、押し上げ力を測定できるひずみゲージ式
変位計を備えれば、より正確にプレート３の重力を均一
に受けることが可能となり、重力によるプレート３のた
わみを解消できて、プレート３の正しい平坦度を測定す
ることが容易となる。Further, in the plate flatness measuring apparatus of the above embodiment, if a strain gauge type displacement gauge capable of measuring the pushing force is provided at the tip of the piston rod of the pneumatically driven cylinder 11, the gravity of the plate 3 can be more accurately measured. Can be uniformly received, the deflection of the plate 3 due to gravity can be eliminated, and the correct flatness of the plate 3 can be easily measured.
【００１３】[0013]
【発明の効果】以上の説明で判るように本発明のプレー
ト平坦度測定装置によれば、重力の影響を取り除いた無
重力に近い状態でプレートの平坦度を測定でき、真の測
定データを得ることができる。As can be seen from the above description, according to the plate flatness measuring apparatus of the present invention, the flatness of the plate can be measured in a state close to zero gravity in which the influence of gravity is removed, and true measurement data can be obtained. You can
【図１】本発明によるプレート平坦度測定装置の実施形
態を示す斜視図である。FIG. 1 is a perspective view showing an embodiment of a plate flatness measuring device according to the present invention.
【図２】本発明によるプレート平坦度測定装置におい
て、プレートのたわみを除去する空気圧駆動のシリンダ
の圧力調整部を示す図である。FIG. 2 is a view showing a pressure adjusting portion of a pneumatically driven cylinder for removing the deflection of the plate in the plate flatness measuring device according to the present invention.
【図３】プレートを三点支持するプレート支持ピンと空
気圧駆動のシリンダの配置を示す平面図である。FIG. 3 is a plan view showing an arrangement of plate support pins that support a plate at three points and pneumatically driven cylinders.
【図４】従来の三点支持方式によるプレート平坦度測定
装置の斜視図である。FIG. 4 is a perspective view of a conventional plate flatness measuring device using a three-point support system.
【図５】図４において重力の影響によるたわみを示す図
である。FIG. 5 is a diagram showing a deflection due to the influence of gravity in FIG.
【図６】従来の縦型支持方式によるプレート平坦度測定
装置の斜視図である。FIG. 6 is a perspective view of a conventional plate flatness measuring device using a vertical support method.
２ プレート支持ピン ３ プレート ４ スライドレール ５ スライドヘッド ６ レーザー変位計 １０ プレート平坦度測定装置 １１ 空気圧駆動のシリンダ １２ 圧力調整部 2 Plate support pin 3 plates 4 slide rails 5 slide head 6 Laser displacement meter 10 Plate flatness measuring device 11 Pneumatically driven cylinder 12 Pressure adjustment part
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7，ＤＢ名) G01B 5/00 - 7/34 G01B 11/00 - 11/30 G01B 21/00 - 21/32 ─────────────────────────────────────────────────── ─── Continuation of the front page (58) Fields surveyed (Int.Cl. 7 , DB name) G01B 5/00-7/34 G01B 11/00-11/30 G01B 21/00-21/32
Claims (4)
移動するスライドヘッドに搭載されプレート表面の平坦
度を測定する下向きの測定器と、装置上面でプレートを
三点支持する３本のプレート支持ピンと、この３本のプ
レート支持ピンで三点支持されるプレートの重力による
たわみを除去する装置上面に立設した複数の上下動可能
なアクチュエータと、このアクチュエータの押し上げ力
を任意に調整する装置内部に設けた圧力調整部とより成
るプレート平坦度測定装置。1. A downward-facing measuring device that is mounted on a slide head that horizontally moves a slide rail provided on the upper surface of the apparatus and that measures the flatness of the plate surface, and three plate support pins that support the plate at three points on the upper surface of the apparatus. , A plurality of vertically movable actuators installed upright on the upper surface of the device that removes the deflection of the plate supported by these three plate support pins at three points due to gravity, and inside the device that arbitrarily adjusts the pushing force of the actuators. A plate flatness measuring device comprising a pressure adjusting unit provided.
において、プレート表面の平坦度を測定する下向きの測
定器が、レーザー変位計であることを特徴とするプレー
ト平坦度測定装置。2. The plate flatness measuring device according to claim 1, wherein the downward measuring device for measuring the flatness of the plate surface is a laser displacement meter.
定装置において、上下動可能なアクチュエータが、空気
圧駆動のシリンダであることを特徴とするプレート平坦
度測定装置。3. The plate flatness measuring device according to claim 1 or 2, wherein the vertically movable actuator is a pneumatically driven cylinder.
定装置において、上下動可能なアクチュエータの先端
に、押し上げ力を測定できるひずみゲージ式変位計が備
えられていることを特徴とするプレート平坦度測定装
置。4. The plate flatness measuring apparatus according to claim 1 or 2, wherein a strain gauge type displacement gauge capable of measuring a pushing force is provided at a tip of an actuator that can move up and down. Degree measuring device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP01808198A JP3418819B2 (en) | 1998-01-13 | 1998-01-13 | Plate flatness measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP01808198A JP3418819B2 (en) | 1998-01-13 | 1998-01-13 | Plate flatness measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH11201748A JPH11201748A (en) | 1999-07-30 |
| JP3418819B2 true JP3418819B2 (en) | 2003-06-23 |
Family
ID=11961708
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP01808198A Expired - Fee Related JP3418819B2 (en) | 1998-01-13 | 1998-01-13 | Plate flatness measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3418819B2 (en) |
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-
1998
- 1998-01-13 JP JP01808198A patent/JP3418819B2/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006027885A1 (en) | 2004-09-03 | 2006-03-16 | Nippon Mining & Metals Co., Ltd. | Methods for determining and machining worked surface of plate-like material and apparatus for these methods |
| WO2007105417A1 (en) | 2006-03-06 | 2007-09-20 | Nippon Mining & Metals Co., Ltd. | Method for determining machining plane of planar material, machining method and device for determining machining plane and flat surface machining device |
| KR20200022128A (en) * | 2018-08-22 | 2020-03-03 | 삼성전자주식회사 | Measuring device for press equipment |
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