JP3412497B2 - Apparatus and method for mounting conductive ball - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a conductive ball mounting apparatus and method for mounting a conductive ball on a work.

[0002]

2. Description of the Related Art As a method of manufacturing an electronic component having a bump such as a flip chip, a method using a conductive ball such as a solder ball is known. Further, a method of using a suction tool is known as a method of mounting the conductive ball on a work such as a chip or a substrate. In this method, the conductive balls stored in a container or the like are vacuum sucked and picked up by a large number of suction holes formed on the lower surface of the suction tool, and the suction tool is moved above the work to move these conductive balls to the work. It is mounted on the electrode.

By the way, in general, the type and arrangement of the conductive balls differ depending on the type of electronic parts. When these different types of electronic parts are targeted by the same mounting apparatus,
It is necessary to perform a setup change operation to replace the suction tool corresponding to each type every time the type is changed. In this setup change operation, the worker conventionally supported the suction tool by hand and released the fixing means such as bolts to remove the existing suction tool, and then align and fix the new suction tool to the lifting block. I was working on it.

[0004]

However, with the advent of large-sized electronic components and the increase in size of the suction tool due to simultaneous processing of a plurality of workpieces, the weight of the suction tool increases and it is difficult to perform this setup change operation. Has become. In the case of a large suction tool, if the worker carries out the attachment / detachment while supporting the suction tool with his / her hand, the weight may place an excessive burden on the worker and the fall of the suction tool may pose a danger to the worker. Because.

Further, the suction tool is very expensive because it requires precise microfabrication, and if it is accidentally dropped during desorption work, it may become unusable due to damage, so it is necessary to pay close attention to the desorption work. There is. As described above, the conventional conductive ball mounting device has problems in work safety and operability, such as the burden of handling a heavy load during setup work and the heavy burden of caution during work. It was

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a conductive ball mounting apparatus and mounting method which are excellent in work safety and operability during setup change.

[0007]

According to a first aspect of the present invention, there is provided a conductive ball mounting apparatus, wherein a conductive ball supply section, a workpiece positioning section, and a suction hole for vacuum-sucking the conductive ball are formed on the lower surface. A suction head, a vertical movement means for moving the suction head up and down, a moving means for moving the suction head between the supply portion and the positioning portion, and a detachable mount on the lifting block of the suction head. Suction tool, a fixing means for mechanically fixing the suction tool to the lifting block, a vacuum suction means for vacuum suctioning the inside of the suction tool, a control section for controlling the vacuum suction means, and a control section. The vacuum suction means has a suction force capable of sucking and holding the suction tool on the lifting block only by its suction force. And to perform desorption to said lifting block of suction tool performs fixed-unlocking of the suction tool by the fixing means while sucking and holding the suction tool.

According to a second aspect of the present invention, there is provided a method of mounting a conductive ball, wherein the suction head is moved down and up with respect to the conductive ball stored in the supply section so that the suction hole formed on the lower surface of the suction head is electrically conductive. A conductive ball mounting method in which a conductive ball is mounted on a work by vacuum-sucking and picking up the conductive ball, then moving this suction head to the upper part of the work and lowering and raising it again. , By means of fixing means to the lifting block of the suction head
Vacuum aspirate the detachably loaded suction tool I
By vacuum suction by means of this suction tool
Vacuum suction of conductive balls to the suction holes formed on the bottom surface ,
Upon desorption of the said lifting block of the suction tool during breeds work switching, and so as to be attracted and held on the lifting block with vacuum suction by the vacuum suction means inside the suction tool.

According to a third aspect of the present invention, there is provided a conductive ball mounting apparatus including a conductive ball supply section, a work positioning section, and a work positioning section.
A suction head having suction holes for vacuum-sucking the conductive balls formed on the lower surface, a vertical movement means for moving the suction head up and down, and a moving means for moving the suction head between the supply portion and the positioning portion. A suction tool removably attached to the lifting block of the suction head; fixing means for mechanically fixing the suction tool to the lifting block; and vacuum suction means for vacuum suctioning the inside of the suction tool. A detection unit that detects the degree of vacuum inside the suction tool, and a notification unit that notifies an abnormality in the degree of vacuum inside the suction tool based on the detection result are provided.

According to a fourth aspect of the present invention, there is provided a method of mounting a conductive ball, wherein the suction head is moved down and up with respect to the conductive ball stored in the supply section so that the suction hole formed on the lower surface of the suction head is electrically conductive. A conductive ball mounting method in which a conductive ball is mounted on a work by vacuum-sucking and picking up the conductive ball, then moving this suction head to the upper part of the work and lowering and raising it again. The suction tool is detachably attached to the lifting block of the suction head, and the degree of vacuum inside the suction tool is detected by the detection means when the suction tool is detached when the workpiece type is switched, and the detected vacuum degree is detected. If is less than or equal to a predetermined value, an abnormality in the vacuum degree inside the suction tool is notified, so that a mounting abnormality of the suction tool is notified.

According to the invention described in each claim, while the suction tool detachably mounted on the elevating block of the suction head is suction-held on the elevating block by the vacuum suction means, the suction tool is fixed by the fixing means. By releasing the fixing, it is possible to prevent the danger to the operator and the damage of the suction tool due to the fall of the suction tool when changing the suction tool for changing the product type. It is possible to detect a mounting abnormality due to the presence of foreign matter on the mounting surface by detecting the.

[0012]

BEST MODE FOR CARRYING OUT THE INVENTION Next, an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a front view of a conductive ball mounting apparatus according to an embodiment of the present invention, FIG. 2 is an exploded perspective view of the suction head, and FIG. 3 is a sectional view of the suction head.

First, the overall structure of the conductive ball mounting apparatus will be described with reference to FIG. The conductive balls 1 are housed inside a container 10 provided on the base 9 as a conductive ball supply unit. A positioning portion 13 for the work 11 is arranged on the base 9. A large number of pads 12 are formed on the upper surface of the work 11 positioned by the positioning portion 13. The positioning unit 13 is a movable table,
The position of the work 11 can be adjusted by horizontally moving the work 11 in the X and Y directions. A moving table 14 is provided above the container 10 and the positioning unit 13. A case 15 is held on the moving table 14, and the case 15
The suction head 21 is held by the. Moving table 1
When 4 is driven, the case 15 and the suction head 21 move between the container 10 and the work 11 along the moving table 14. A motor 16 is provided above the case 15. When the motor 16 is driven, the vertical movement mechanism provided inside the case 15 operates, and the suction head 21 moves up and down along a vertical guide rail 17 provided on the front surface of the case 15.

Next, the structure of the suction head 21 will be described with reference to FIGS. 2 and 3. The suction head 21 is configured by connecting a lifting block 22 and a suction tool 23. The lower edge of the elevating block 22 is provided with a flange 24, and the upper edge of the suction tool 23 is provided with a collar 25. As shown in FIG. 3, the lifting block 22 and the suction tool 23 are joined by joining the flange portions 24 and 25.

A tube 26 for vacuum suction is connected to the upper surface of the elevating block 22, and the tube 26 is connected to vacuum suction means. A large number of suction holes 27 are formed on the lower surface of the suction tool 23. Vacuum suction means 3
The conductive balls 28 are vacuum-sucked to the suction holes 27 by driving the vacuum pump 4 to suction the insides of the lifting block 22 and the suction tool 23 through the tube 26.

The vacuum suction means 34 is controlled by the control unit 40, and the operation unit 41 is connected to the control unit 40.
By manually operating the operation unit 41, the vacuum suction means 34 can be controlled via the control unit 40, and vacuum suction / vacuum suction release inside the suction tool 23 can be performed. Further, the tube 26 is connected with a pressure sensor 42 as a detection means for detecting the degree of vacuum inside the suction tool 23, and the detection result is sent to the control unit 40. When the detected degree of vacuum becomes equal to or lower than the predetermined value, the control unit 40 notifies the abnormality of the degree of vacuum by the notification unit 43.

A plurality of hinges 36 are provided on the upper surface of the collar portion 24. An arm-shaped clamper 37 is rotatably attached to the hinge 36. As shown in FIG.
By rotating the clamper 37 downward and pressing it against the lower surface of the brim portion 25, the suction tool 23 is moved up and down the lifting block 22.
Separated from and fixed so as not to fall. Clamper 3
7 is a fixing means for mechanically fixing the suction tool 23 to the elevating block 22. In FIG. 2, reference numeral 38 denotes a positioning pin projectingly provided on the upper surface of the brim portion 25, which is fitted into a hole (not shown) formed on the lower surface of the brim portion 24 of the elevating block 22 so that the elevating block 22 and the suction tool 23 are positioned.

The device for mounting the conductive balls is constructed as described above. Next, the work for mounting the conductive balls on the pad of the work will be described. In FIG. 1, the suction head 21 moves above the container 10 and moves up and down there to pick up the conductive balls 28 by vacuum suction in the suction holes 27.

Next, the suction head 21 moves above the work 11 and descends there (see the arrow in FIG. 3) to land the conductive balls 28 on the pads 12 of the work 11. Therefore, while releasing the vacuum suction state,
By applying air blow and raising the suction head 21,
The conductive balls 28 are mounted on the pads 12. Then, the suction head 21 moves above the container 10 and the above operation is repeated. The work 11 on which the conductive balls 28 are mounted is sent to the next step such as a heating furnace.

By the way, when the target work is changed and the type and arrangement of the conductive balls are changed due to the type change, the setup change operation for replacing the suction tool is performed correspondingly. Hereinafter, the replacement work of the suction tool 23 will be described. First, prior to exchanging the suction tool, the manual switch of the operation unit 41 is operated to drive the vacuum suction means 34. As a result, the inside of the suction tool 23 is vacuum-sucked, and a pressure difference is generated between the suction tool 23 and the outside. Next, the operation of removing the clamper 37 is performed. At this time, since the vacuum suction means 34 has a suction force capable of suction-holding the suction tool 23, the suction tool 23
Does not fall even if it is not supported by the operator, and the operator does not have to worry about the fall and the clamper 37
Can be released and the suction tool 23 can be removed. As described above, there is no occurrence of a situation in which the suction tool 23 is dropped during the setup change, which poses a danger to the operator, or a trouble in which the expensive suction tool 23 is damaged.

Next, when the clamper 37 is removed, the operation portion 41 is operated to release the vacuum suction inside the suction tool 23. At this time, since the clamper 37 has already been removed, the operator does not have to perform any other operation, and the suction tool 23 can be supported and removed by hand while paying sufficient attention. After that, when attaching the suction tool 23 corresponding to a new type, the new suction tool 23 is attached in the reverse order of the above-described work. That is, first, the inside of the suction tool 23 is vacuum sucked while the suction tool 23 is supported by hand, and when the suction tool 23 is sucked by the elevating block 22, the clamper 37 is fixed and the replacement of the suction tool 23 is completed. .

Next, the mounting check of the suction tool 23, which is performed every replacement work, will be described. When the operator inputs the completion of the replacement work, the vacuum degree of the pressure sensor 42 is read by a command from the control unit 40. If the degree of vacuum does not reach the predetermined value, an abnormality in the degree of vacuum, that is, a mounting abnormality is notified. This is because it is determined that there is a vacuum leak on the mounting surface of the suction tool 23.

In response to this notification, the worker again removes the suction tool 23, checks whether or not foreign matter is caught on the mounting surface of the suction tool 23, and if any foreign matter is found, removes it and reattaches it. In this way, the mounting check of the suction tool 23 is performed because there is always foreign matter such as solder balls and other fine dust in the work place where the solder balls are mounted, and the suction tool 23 easily enters the mounting surface. Because. If such foreign matter intervenes on the mounting surface of the suction tool 23, the suction force from the suction hole is weakened due to leakage during vacuum suction, and the parallelism between the lower surface of the suction tool 23 and the work 11 is disturbed. Will cause a mounting error. Therefore, by performing a mounting check when the suction tool 23 is mounted, it is possible to prevent foreign matter from being left on the mounting surface with the foreign material interposed, and reduce solder ball mounting mistakes.

[0024]

According to the present invention, while the suction tool detachably mounted on the lifting block of the suction head is suction-held on the lifting block by the vacuum suction means, the suction tool is fixed and released by the fixing means. By performing the above, it is possible to prevent the danger to the operator and the damage of the suction tool due to the fall of the suction tool. Further, since the mounting check is performed after the suction tool is exchanged, it is possible to prevent foreign matter from interposing on the mounting surface and reduce mounting mistakes.

[Brief description of drawings]

FIG. 1 is a front view of a conductive ball mounting device according to an embodiment of the present invention.

FIG. 2 is an exploded perspective view of a suction head of a conductive ball mounting device according to an embodiment of the present invention.

FIG. 3 is a sectional view of a suction head of a conductive ball mounting device according to an embodiment of the present invention.

[Explanation of symbols]

10 containers 11 work 13 Positioning part 14 Moving table 21 Suction head 22 Lifting block 23 Suction tool 27 Adsorption hole 28 conductive balls 37 clamper 40 control unit 41 Operation part 42 Pressure sensor 43 Notification section

─────────────────────────────────────────────────── ─── Continuation of the front page (58) Fields surveyed (Int.Cl. ⁷ , DB name) H01L 21/60 B23K 3/06 H05K 3/34 505

Claims (4)

(57) [Claims] 1. A supply part for conductive balls, a positioning part for a work, a suction head having suction holes for vacuum-sucking the conductive balls formed on the lower surface of the suction tool, and the suction head performing vertical movement. Vertical movement means, moving means for moving the suction head between the supply portion and the positioning portion, the suction tool detachably attached to the lifting block of the suction head, and the suction tool on the lifting block. Fixing means for mechanically fixing, vacuum suction means for vacuum sucking the inside of the suction tool, a control section for controlling the vacuum suction means, and an operation section for manually performing control operation of the control section, The vacuum suction means has a suction force capable of sucking and holding the suction tool on the elevating block only by the suction force, and the vacuum suction means holds the suction tool while holding the suction tool by suction. Mounting apparatus of the conductive balls and performs desorption to said lifting block of suction tool performs fixed-unlocking of the suction tool by means. 2. A conductive ball is vacuum-sucked and picked up by a suction hole formed on the lower surface of the suction head by lowering and raising the suction head with respect to the conductive ball stored in the supply section. This is a method for mounting conductive balls on a work by moving this suction head to above the work and lowering and raising it again, and fixing it to the lifting block of the suction head.
The inside of the suction tool that is detachably attached by means of
This suction is obtained by vacuum suction by the vacuum suction means.
Vacuum the conductive ball into the suction hole formed on the bottom surface of the tool.
Adsorbed, upon desorption of the said <br/> lifting block of the suction tool during breeds work switching, the suction tool them
Method of mounting a conductive ball, characterized in that part by vacuum suction by the vacuum suction means is attracted and held on the lifting block. 3. A conductive ball supply section, a work positioning section, a suction head having a suction hole for vacuum-sucking the conductive ball formed on the lower surface, and a vertical movement means for causing the suction head to move up and down. A moving means for moving the suction head between the supply portion and the positioning portion, and a suction tool detachably attached to a lifting block of the suction head.
Fixing means for mechanically fixing the suction tool to the lifting block, vacuum suction means for vacuum sucking the inside of the suction tool, detection means for detecting the degree of vacuum inside the suction tool, and based on the detection result. And a notifying unit for notifying a vacuum degree abnormality inside the suction tool. 4. A conductive ball is vacuum-sucked and picked up by a suction hole formed in the lower surface of the suction head by lowering and raising the suction head with respect to the conductive ball stored in the supply section. A method of mounting a conductive ball on a work by moving the suction head above the work and then descending and raising it again, wherein a suction tool is mounted on a lifting block of the suction head. The suction tool is detachably mounted, and the vacuum degree inside the suction tool is detected by a detection means when the suction tool is detached when the work type is changed, and if the detected vacuum degree is less than a predetermined value, the suction tool. A method of mounting a conductive ball, wherein a mounting abnormality of the suction tool is notified by notifying an internal vacuum degree abnormality.