JP3394936B2 - Wavelength dispersive X-ray fluorescence analysis method and apparatus - Google Patents
Wavelength dispersive X-ray fluorescence analysis method and apparatusInfo
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- JP3394936B2 JP3394936B2 JP2000032878A JP2000032878A JP3394936B2 JP 3394936 B2 JP3394936 B2 JP 3394936B2 JP 2000032878 A JP2000032878 A JP 2000032878A JP 2000032878 A JP2000032878 A JP 2000032878A JP 3394936 B2 JP3394936 B2 JP 3394936B2
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Description
【０００１】[0001]
【発明の属する技術分野】本発明は、いわゆる波長分散
型であって走査型の蛍光Ｘ線分析方法および装置に関す
るものである。The present invention relates is related to <br/> shall in scanning X-ray fluorescence analyzing method and apparatus of a so-called wavelength dispersive.
【０００２】[0002]
【従来の技術】従来より、例えば波長分散型の蛍光Ｘ線
分析においては、試料に１次Ｘ線を照射し、試料から発
生する蛍光Ｘ線を分光素子で分光し、分光された蛍光Ｘ
線を検出器で検出してパルスを発生させる。このパルス
の電圧すなわち波高値は蛍光Ｘ線のエネルギーに応じた
ものであり、具体的には、比例関係にあると考えられて
いる。また、パルスの単位時間あたりの数は蛍光Ｘ線の
強度に応じたものである。そこで、パルスのうち所定の
電圧の範囲のものを波高分析器で選別して、その計数率
（単位時間あたりのパルス数）をスケーラ等の計数手段
で求めている。なお、検出器が発生するパルスは微弱で
あるので、検出器内蔵のプリアンプと、外部のリニアア
ンプによって、それぞれ所定の増幅率で増幅されて、波
高分析器へ送られる。リニアアンプを波高分析器に含め
ることもある。2. Description of the Related Art Conventionally, for example, in wavelength dispersive X-ray fluorescence analysis, a sample is irradiated with primary X-rays, the fluorescent X-rays generated from the sample are dispersed by a spectroscopic element, and the dispersed fluorescent X-rays are analyzed.
The line is detected by a detector and a pulse is generated. The voltage of this pulse, that is, the crest value depends on the energy of the fluorescent X-rays, and is considered to be in a proportional relationship. The number of pulses per unit time depends on the intensity of fluorescent X-rays. Therefore, pulses within a predetermined voltage range are selected by a wave height analyzer, and the counting rate (the number of pulses per unit time) is obtained by a counting means such as a scaler. Since the pulse generated by the detector is weak, it is amplified by a preamplifier with a built-in detector and an external linear amplifier at a predetermined amplification factor and sent to the wave height analyzer. A linear amplifier may be included in the wave height analyzer.
【０００３】ここで、走査（スキャン）型の分析におい
ては、いわゆるゴニオメータ等の連動手段により、分光
素子で分光される蛍光Ｘ線の波長を変えながら、その分
光された蛍光Ｘ線が検出器に入射するように、分光素子
と検出器を連動させて走査させ、広い波長範囲において
蛍光Ｘ線の強度を測定する。このとき、検出器に入射す
る蛍光Ｘ線の波長が変化し、すなわち蛍光Ｘ線のエネル
ギーが変化するから、このままでは、検出器から発生し
波高分析器へ送られるパルスの電圧も変化する。そうす
ると、測定すべき蛍光Ｘ線の波長に対応した電圧のパル
スを選別するには、波高分析器における前記所定の電圧
の範囲、具体的には通過させるパルスの電圧の上限値と
下限値を、送られてくるパルスの電圧の変化に追従させ
て設定し直さなければならず、煩雑である。Here, in the scanning type analysis, while changing the wavelength of the fluorescent X-rays dispersed by the spectroscopic element by the interlocking means such as a so-called goniometer, the dispersed fluorescent X-rays are transmitted to the detector. The spectroscopic element and the detector are interlocked with each other so that the light enters, and the fluorescent X-ray intensity is measured in a wide wavelength range. At this time, the wavelength of the fluorescent X-rays incident on the detector changes, that is, the energy of the fluorescent X-rays changes, and thus the voltage of the pulse generated from the detector and sent to the pulse height analyzer also changes. Then, in order to select the pulse of the voltage corresponding to the wavelength of the fluorescent X-ray to be measured, the range of the predetermined voltage in the wave height analyzer, specifically, the upper limit value and the lower limit value of the voltage of the pulse to be passed, This is complicated because it is necessary to set the voltage again following the change in the voltage of the pulse that is sent.
【０００４】そこで、従来は、連動手段により、例え
ば、前記リニアアンプ（以下、増幅器という）における
所定の増幅率を、検出器に入射する蛍光Ｘ線のエネルギ
ーに反比例するように、具体的には分光素子での回折角
θについてのsin θに比例するように連続的に調節し
て、波高分析器へ送られるパルスの電圧が一定になるよ
うにし、前記所定の電圧の範囲の設定変更を不要にして
いる。このように調節するのは、前述したように、検出
器において入射される蛍光Ｘ線のエネルギーと発生する
パルスの電圧とが比例関係にあるとの前提に立っている
からである。Therefore, conventionally, by means of the interlocking means, for example, a predetermined amplification factor in the linear amplifier (hereinafter referred to as an amplifier) is specifically, inversely proportional to the energy of the fluorescent X-rays incident on the detector. Continuously adjust the diffraction angle θ of the spectroscopic element so that it is proportional to sin θ so that the voltage of the pulse sent to the wave height analyzer is constant, and it is not necessary to change the setting of the specified voltage range. I have to. This adjustment is made on the assumption that the energy of the fluorescent X-rays incident on the detector is proportional to the voltage of the pulse generated, as described above.
【０００５】[0005]
【発明が解決しようとする課題】しかし、検出器が例え
ばシンチレーションカウンタである場合には、前記比例
関係からのずれがあるため、従来技術によっては、測定
すべき蛍光Ｘ線の波長に対応した電圧のパルスを正確に
選別できず、したがって正確な分析ができない。However, when the detector is, for example, a scintillation counter, there is a deviation from the proportional relationship, and therefore, depending on the prior art, a voltage corresponding to the wavelength of the fluorescent X-ray to be measured. Pulse cannot be accurately selected and therefore accurate analysis cannot be performed.
【０００６】本発明は前記従来の問題に鑑みてなされた
もので、波長分散型であって走査型の蛍光Ｘ線分析方法
および装置において、検出器から発生して波高分析器へ
送られるパルスのうち、測定すべき蛍光Ｘ線の波長に対
応した電圧のパルスを正確に選別でき、したがって正確
な分析ができる方法および装置を提供することを目的と
する。The present invention has been made in view of the above-mentioned conventional problems, and in a wavelength dispersive scanning X-ray fluorescence X-ray analysis method and apparatus, a pulse generated from a detector and sent to a pulse height analyzer is Among them, it is an object to provide a method and an apparatus capable of accurately selecting a pulse of a voltage corresponding to the wavelength of a fluorescent X-ray to be measured, and thus performing an accurate analysis.
【０００７】[0007]
【課題を解決するための手段】前記目的を達成するため
に、請求項１の波長分散型蛍光Ｘ線分析方法は、試料に
１次Ｘ線を照射し、発生した２次Ｘ線を、複数から選択
して使用する分光素子で分光し、分光される２次Ｘ線の
波長を変化させながら、所定の電圧を印加した検出器に
入射させて、前記所定の印加電圧と２次Ｘ線のエネルギ
ーに応じた電圧のパルスを２次Ｘ線の強度に応じた数だ
け発生させる。そして、発生したパルスの電圧を増幅器
により所定の増幅率で増幅し、増幅されたパルスのうち
所定の電圧の範囲のものを波高分析器で選別するととも
に、前記波高分析器へ送られるパルスの電圧を一定にす
るために、前記所定の印加電圧または所定の増幅率を調
節し、前記選別されたパルスの計数率を計数手段で求め
る。すなわち、波長分散型であって走査型の蛍光Ｘ線分
析方法である。In order to achieve the above object, the wavelength dispersive X-ray fluorescence analysis method according to claim 1 irradiates a sample with primary X-rays and generates a plurality of secondary X-rays . Select from
Then, the light is dispersed by the spectroscopic element to be used, and while changing the wavelength of the secondary X-ray to be dispersed, the light is incident on the detector to which a predetermined voltage is applied, and the predetermined applied voltage and the energy of the secondary X-ray are changed. The number of pulses of the corresponding voltage is generated according to the intensity of the secondary X-ray. Then, the voltage of the generated pulse is amplified by an amplifier with a predetermined amplification factor, and a pulse height analyzer selects one of the amplified pulses in a predetermined voltage range, and the voltage of the pulse sent to the wave height analyzer. In order to keep constant, the predetermined applied voltage or the predetermined amplification factor is adjusted, and the counting rate of the selected pulse is obtained by the counting means. That is, it is a wavelength-dispersive scanning X-ray fluorescence analysis method.
【０００８】さらに、請求項１の方法では、前記検出器
における入射される２次Ｘ線のエネルギーと発生するパ
ルスの電圧との比例関係からのずれを、前記エネルギー
の関数または前記分光素子の格子面間隔と回折角の関数
としてあらかじめ求めておき、前記所定の印加電圧また
は所定の増幅率を調節する際に、前記関数を適用して補
正する。Further, in the method of claim 1, the deviation from the proportional relationship between the energy of the incident secondary X-rays and the voltage of the generated pulse in the detector is calculated as a function of the energy or the grating of the spectroscopic element. It is obtained in advance as a function of the surface spacing and the diffraction angle, and when the predetermined applied voltage or the predetermined amplification factor is adjusted, the function is applied and corrected.
【０００９】請求項１の方法によれば、検出器における
入射される２次Ｘ線のエネルギーと発生するパルスの電
圧との比例関係からのずれを、エネルギー等の関数とし
てあらかじめ求めておき、増幅器の所定の増幅率等を調
節する際に、前記関数を適用して補正するので、検出器
から発生して波高分析器へ送られるパルスのうち、測定
すべき蛍光Ｘ線等の２次Ｘ線の波長に対応した電圧のパ
ルスを正確に選別でき、したがって正確な分析ができ
る。According to the method of claim 1, the deviation from the proportional relationship between the energy of the secondary X-rays incident on the detector and the voltage of the generated pulse is obtained in advance as a function of energy or the like, and the amplifier Since the above function is applied to make correction when adjusting a predetermined amplification factor of the secondary X-rays, the secondary X-rays such as fluorescent X-rays to be measured among the pulses generated from the detector and sent to the wave height analyzer. The pulse of the voltage corresponding to the wavelength of can be accurately selected, and thus accurate analysis can be performed.
【００１０】請求項２の波長分散型蛍光Ｘ線分析方法
は、検出器から発生したパルスの電圧を増幅して、所定
の電圧の範囲のものを波高分析器で選別し、選別された
パルスの計数率を計数手段で求める点は、請求項１の方
法と同様であるが、波高分析器へ送られるパルスの電圧
の変化に追従するために、波高分析器が選別する前記所
定の電圧の範囲を調節する点が異なる。それに対応し
て、検出器における入射される２次Ｘ線のエネルギーと
発生するパルスの電圧との比例関係からのずれを、前記
エネルギーの関数または前記分光素子の格子面間隔と回
折角の関数としてあらかじめ求めておく点は、請求項１
の方法と同様であるが、前記所定の電圧の範囲を調節す
る際に、前記関数を適用して補正する点が異なる。According to the wavelength dispersive X-ray fluorescence analysis method of the second aspect, the voltage of the pulse generated from the detector is amplified, and the pulse having a predetermined voltage range is selected by the pulse height analyzer. The point that the counting rate is obtained by the counting means is the same as in the method of claim 1, but in order to follow the change in the voltage of the pulse sent to the pulse height analyzer, the range of the predetermined voltage selected by the pulse height analyzer. The point of adjusting is different. Correspondingly, the deviation from the proportional relationship between the energy of the incident secondary X-ray and the voltage of the generated pulse in the detector is expressed as a function of the energy or a function of the lattice spacing of the spectroscopic element and the diffraction angle. The point to be obtained in advance is claim 1
The method is the same as that of the above method, except that the function is applied and corrected when adjusting the range of the predetermined voltage.
【００１１】請求項２の方法によれば、検出器における
入射される２次Ｘ線のエネルギーと発生するパルスの電
圧との比例関係からのずれを、エネルギー等の関数とし
てあらかじめ求めておき、波高分析器が選別する所定の
電圧の範囲を調節する際に、前記関数を適用して補正す
るので、やはり、検出器から発生して波高分析器へ送ら
れるパルスのうち、測定すべき蛍光Ｘ線等の２次Ｘ線の
波長に対応した電圧のパルスを正確に選別でき、したが
って正確な分析ができる。According to the method of claim 2, the deviation from the proportional relationship between the energy of the incident secondary X-rays and the voltage of the generated pulse in the detector is obtained in advance as a function of energy, and the wave height is calculated. Since the function is applied and corrected when adjusting the predetermined voltage range selected by the analyzer, the fluorescent X-rays to be measured among the pulses generated from the detector and sent to the pulse height analyzer are also corrected. It is possible to accurately select a pulse having a voltage corresponding to the wavelength of the secondary X-ray such as, and thus to perform accurate analysis.
【００１２】請求項３の波長分散型蛍光Ｘ線分析装置
は、まず、試料に１次Ｘ線を照射するＸ線源と、複数か
ら選択されて使用され、試料から発生した２次Ｘ線を分
光する分光素子と、所定の電圧が印加され、前記分光素
子で分光された２次Ｘ線が入射されて、前記所定の印加
電圧と２次Ｘ線のエネルギーに応じた電圧のパルスを２
次Ｘ線の強度に応じた数だけ発生させる検出器と、その
検出器で発生したパルスの電圧を所定の増幅率で増幅す
る増幅器と、その増幅器で増幅されたパルスのうち所定
の電圧の範囲のものを選別する波高分析器と、その波高
分析器で選別されたパルスの計数率を求める計数手段と
を備えている。そして、前記検出器に入射する２次Ｘ線
の波長を変化させるとともに、前記波高分析器へ送られ
るパルスの電圧を一定にするために、前記所定の印加電
圧または所定の増幅率を調節する連動手段を備えてい
る。すなわち、波長分散型であって走査型の蛍光Ｘ線分
析装置である。According to the wavelength dispersive X-ray fluorescence analyzer of claim 3, first, an X-ray source for irradiating a sample with primary X-rays and a plurality of X-ray sources are provided.
A predetermined voltage is applied to the spectroscopic element that is selected and used from the sample and disperses the secondary X-ray generated from the sample. And 2 pulses of voltage according to the energy of the secondary X-ray
A detector for generating a number corresponding to the intensity of the next X-ray, an amplifier for amplifying the voltage of the pulse generated by the detector with a predetermined amplification factor, and a predetermined voltage range of the pulse amplified by the amplifier It is provided with a wave height analyzer for selecting the ones and a counting means for obtaining the count rate of the pulses selected by the wave height analyzer. Then, the wavelength of the secondary X-ray incident on the detector is changed, and the predetermined applied voltage or the predetermined amplification factor is adjusted in order to make the voltage of the pulse sent to the wave height analyzer constant. Equipped with means. That is, it is a wavelength-dispersive scanning X-ray fluorescence analyzer.
【００１３】さらに、請求項３の装置は、前記検出器に
おける入射される２次Ｘ線のエネルギーと発生するパル
スの電圧との比例関係からのずれを、あらかじめ求めら
れた前記エネルギーの関数または前記分光素子の格子面
間隔と回折角の関数として記憶する記憶手段を備え、前
記連動手段が、前記所定の印加電圧または所定の増幅率
を調節する際に、前記記憶手段に記憶した関数を適用し
て補正する。請求項３の装置によれば、請求項１の方法
と同様の作用効果がある。Further, in the apparatus of claim 3, the deviation from the proportional relationship between the energy of the incident secondary X-ray and the voltage of the generated pulse in the detector is a function of the energy obtained in advance or the deviation. The interlocking means applies a function stored in the storage means when the interlocking means adjusts the predetermined applied voltage or the predetermined amplification factor. To correct. According to the apparatus of claim 3, there is the same effect as the method of claim 1.
【００１４】請求項４の波長分散型蛍光Ｘ線分析装置
は、Ｘ線源、複数から選択されて使用される分光素子、
検出器、増幅器、波高分析器および計数手段を備える点
は、請求項３の装置と同様であるが、連動手段が、前記
検出器に入射する２次Ｘ線の波長を変化させるととも
に、前記波高分析器へ送られるパルスの電圧の変化に追
従するために、前記所定の電圧の範囲を調節する点が異
なる。それに対応して、記憶手段を備える点は、請求項
３の装置と同様であるが、前記連動手段が、前記所定の
電圧の範囲を調節する際に、前記関数を適用して補正す
る点が異なる。請求項４の装置によれば、請求項２の方
法と同様の作用効果がある。The wavelength dispersive X-ray fluorescence analyzer according to claim 4 is an X-ray source, a spectroscopic element selected and used from a plurality of X-ray sources,
The point that a detector, an amplifier, a wave height analyzer, and a counting means are provided is the same as that of the apparatus of claim 3, but the interlocking means changes the wavelength of the secondary X-ray incident on the detector, and the wave height. The difference is that the range of the predetermined voltage is adjusted in order to follow the change in the voltage of the pulse sent to the analyzer. Correspondingly, the storage means is provided in the same way as the apparatus of claim 3, but the adjustment means applies the correction when adjusting the range of the predetermined voltage. different. According to the apparatus of claim 4, there is the same effect as the method of claim 2.
【００１５】[0015]
【発明の実施の形態】以下、本発明の第１実施形態の方
法について説明する。まず、この方法に用いる装置につ
いて、図１にしたがって説明する。この装置は、試料１
が載置される試料台２と、試料１に１次Ｘ線３を照射す
るＸ線管等のＸ線源４と、試料１から発生した蛍光Ｘ線
等の２次Ｘ線５を分光する分光素子６と、所定の電圧が
印加され、分光素子６で分光された２次Ｘ線７が入射さ
れて、前記所定の印加電圧と２次Ｘ線７のエネルギーに
応じた電圧のパルスを２次Ｘ線７の強度に応じた数だけ
発生させる検出器８と、検出器８で発生したパルスの電
圧を所定の増幅率で増幅する増幅器１６と、増幅器１６
で増幅されたパルスのうち所定の電圧の範囲のものを選
別する波高分析器１３と、波高分析器１３で選別された
パルスの計数率を求める計数手段１４とを備えている。
分光素子は、複数を交換（選択）して使用する。DETAILED DESCRIPTION OF THE INVENTION The method of the first embodiment of the present invention will be described below. First, the apparatus used in this method will be described with reference to FIG. This device is used for sample 1
A sample table 2 on which the X-ray is mounted, an X-ray source 4 such as an X-ray tube for irradiating the sample 1 with primary X-rays 3, and a secondary X-ray 5 such as a fluorescent X-ray generated from the sample 1 A predetermined voltage is applied to the spectroscopic element 6, and the secondary X-ray 7 dispersed by the spectroscopic element 6 is incident, and a pulse of a voltage corresponding to the predetermined applied voltage and the energy of the secondary X-ray 7 is applied. A detector 8 for generating a number corresponding to the intensity of the next X-ray 7, an amplifier 16 for amplifying the voltage of the pulse generated by the detector 8 with a predetermined amplification factor, and an amplifier 16
The pulse height analyzer 13 is provided for selecting a pulse having a predetermined voltage range among the pulses amplified in step 1, and the counting means 14 for obtaining the count rate of the pulse selected by the pulse height analyzer 13.
Spectroscopic element, replacing multiple (selected) to be used.
【００１６】そして、検出器８に入射する２次Ｘ線７の
波長が変化するように、分光素子６と検出器８を連動さ
せる連動手段１０、すなわちいわゆるゴニオメータを備
えている。２次Ｘ線５がある入射角θで分光素子６へ入
射すると、その２次Ｘ線５の延長線９と分光素子６で分
光（回折）された２次Ｘ線７は入射角（回折角）θの２
倍の分光角２θをなすが、連動手段１０は、分光角２θ
を変化させて分光される２次Ｘ線７の波長を変化させつ
つ、その分光された２次Ｘ線７が検出器８に入射し続け
るように、分光素子６を、その表面の中心を通る紙面に
垂直な軸Ｏを中心に回転させ、その回転角の２倍だけ、
検出器８を、軸Ｏを中心に円１２に沿って回転させる。Further, interlocking means 10 for interlocking the spectroscopic element 6 and the detector 8 with each other, that is, a so-called goniometer, is provided so that the wavelength of the secondary X-ray 7 incident on the detector 8 changes. When the secondary X-ray 5 is incident on the spectroscopic element 6 at an incident angle θ, the extension line 9 of the secondary X-ray 5 and the secondary X-ray 7 spectrally (diffracted) by the spectroscopic element 6 are incident angles (diffraction angle). ) 2 of θ
Although the double spectral angle 2θ is formed, the interlocking means 10 uses the spectral angle 2θ.
Is changed to change the wavelength of the secondary X-ray 7 to be dispersed, and the spectroscopic element 6 passes through the center of its surface so that the spectrally separated secondary X-ray 7 continues to enter the detector 8. Rotate about an axis O perpendicular to the paper surface, and double the rotation angle,
The detector 8 is rotated about the axis O along a circle 12.
【００１７】連動手段１０において、例えば、前記軸Ｏ
に取り付けられたギアを駆動するパルスモータに出力し
たパルス数をカウントすることにより、分光素子６およ
び検出器８が回転した結果形成される入射角（回折角）
θ、分光角２θが確認され、分光素子６の格子面間隔ｄ
とから、次式（１）のブラッグの条件、式（２）の関係
に基づいて、測定中の２次Ｘ線の波長λ、エネルギーＥ
を求めることができる。なお、ｎは反射の次数である
が、通常は１次線を測定するのでｎ＝１であり、ｈはプ
ランク定数、ｃは光速である。In the interlocking means 10, for example, the axis O
The incident angle (diffraction angle) formed as a result of the rotation of the spectroscopic element 6 and the detector 8 by counting the number of pulses output to the pulse motor that drives the gear attached to the
θ and the spectral angle 2θ are confirmed, and the lattice spacing d of the spectroscopic element 6 is d.
Therefore, based on the Bragg condition of the following expression (1) and the relationship of the expression (2), the wavelength λ of the secondary X-ray being measured and the energy E
Can be asked. It should be noted that n is the order of reflection, but usually n = 1 because the primary line is measured, h is Planck's constant, and c is the speed of light.
【００１８】２ｄ sinθ＝ｎλ …（１）2d sin θ = nλ (1)
【００１９】Ｅ＝ｈｃ／λ …（２）E = hc / λ (2)
【００２０】この連動手段１０は、前述のように検出器
８に入射する２次Ｘ線７の波長を変化させるとともに、
波高分析器１３へ送られるパルスの電圧を一定にするた
めに、前記増幅器１６の所定の増幅率を調節する。以上
のように、この装置は、波長分散型であって走査型の蛍
光Ｘ線分析装置である。The interlocking means 10 changes the wavelength of the secondary X-ray 7 incident on the detector 8 as described above, and
In order to make the voltage of the pulse sent to the pulse height analyzer 13 constant, the predetermined amplification factor of the amplifier 16 is adjusted. As described above, this device is a wavelength dispersive scanning X-ray fluorescence analyzer.
【００２１】さて、この装置の連動手段１０における前
記所定の増幅率Ｇの調節について、説明する。まず、従
来のように、検出器８において入射される２次Ｘ線７の
エネルギーＥと発生するパルスの電圧とが比例関係にあ
ると考えると、検出器８に入射される２次Ｘ線７のエネ
ルギーＥ、増幅器１６の増幅率（ゲイン）Ｇ、波高分析
器１３へ送られるパルスの電圧（波高値）ＰH の間に
は、次式（３）が成立し、さらに前式（１）、（２）を
代入すれば、式（４）が成立する。なお、ｋ1 ，ｋ2 は
定数である。Now, the adjustment of the predetermined amplification factor G in the interlocking means 10 of this apparatus will be described. First, assuming that the energy E of the secondary X-ray 7 incident on the detector 8 and the voltage of the generated pulse are in a proportional relationship as in the conventional case, the secondary X-ray 7 incident on the detector 8 is considered. energy E, the amplification factor of the amplifier 16 (gain) G, between the pulse of the voltage (peak value) P H sent to the pulse height analyzer 13, the following equation (3) is satisfied, further equation (1) , (2), the equation (4) is established. Note that k 1 and k 2 are constants.
【００２２】ＰH ＝ｋ1 ＥＧ …（３）P H = k 1 EG (3)
【００２３】ＰH ＝ｋ2 Ｇ／２ｄ sinθ …（４）P H = k 2 G / 2d sin θ (4)
【００２４】これに基づいて、従来は、波高分析器１３
が選別する前記所定の電圧の範囲を設定変更せずに済む
ように、すなわち、波高分析器１３へ送られるパルスの
電圧ＰH を一定にすべく、増幅器１６の増幅率Ｇを、次
式（５）のように装置付属のコンピュータで計算して調
節していた。なお、ｋ3 は定数である。Based on this, conventionally, the wave height analyzer 13
In order not to change the setting of the range of the predetermined voltage to be selected by, that is, in order to keep the voltage P H of the pulse sent to the wave height analyzer 13 constant, the amplification factor G of the amplifier 16 is calculated by the following equation ( As in 5), it was calculated and adjusted by the computer attached to the device. Note that k 3 is a constant.
【００２５】Ｇ＝ｋ3 ・２ｄ sinθ …（５）G = k 3 · 2d sin θ (5)
【００２６】このとき、ＰH ＝ｋ2 ｋ3 で一定となるは
ずである。しかし、前述したように、検出器８が例えば
シンチレーションカウンタである場合には、入射される
２次Ｘ線７のエネルギーＥと発生するパルスの電圧とが
正確には比例関係にないため、このままでは、波高分析
器１３へ送られるパルスの電圧ＰH が一定にならず、測
定すべき蛍光Ｘ線７の波長λに対応した電圧ＰH のパル
スを正確に選別できない。At this time, it should be constant at P H = k 2 k 3 . However, as described above, when the detector 8 is, for example, a scintillation counter, the energy E of the incident secondary X-ray 7 and the voltage of the generated pulse are not in direct proportion to each other, so that the state is left as it is. , not the voltage P H of pulses sent to the pulse height analyzer 13 is constant, can not be accurately sorted pulse voltage P H corresponding to the wavelength λ of the fluorescent X-ray 7 to be measured.
【００２７】そこで、この装置においては、検出器８に
おける入射される２次Ｘ線７のエネルギーＥと発生する
パルスの電圧との比例関係からのずれを、例えばエネル
ギーＥの関数ｆ（Ｅ）として、実際の測定によりあらか
じめ求めて記憶手段１５に記憶させておき、連動手段１
０は、増幅率Ｇを調節する際に、記憶手段１５に記憶し
た関数ｆ（Ｅ）を適用して補正する。すなわち、連動手
段１０は、増幅器１６の増幅率Ｇを、次式（６）のよう
に調節する。なお、ｋ4 は定数である。Therefore, in this apparatus, the deviation from the proportional relationship between the energy E of the secondary X-ray 7 incident on the detector 8 and the voltage of the generated pulse is expressed as a function f (E) of the energy E, for example. , Is obtained in advance by actual measurement and is stored in the storage means 15, and the interlocking means 1
When 0 is adjusted, the gain f is adjusted by applying the function f (E) stored in the storage unit 15 when adjusting the amplification factor G. That is, the interlocking means 10 adjusts the amplification factor G of the amplifier 16 according to the following equation (6). Note that k 4 is a constant.
【００２８】 Ｇ＝ｋ4 ・２ｄ sinθ・ｆ（Ｅ） …（６）G = k 4 · 2d sin θ · f (E) (6)
【００２９】関数ｆ（Ｅ）は、実測値に基づく表として
記憶され、表にない値が必要になった場合には、補間計
算により算出される。また、前式（１）、（２）の関係
があることから、前記比例関係からのずれは、分光素子
６の格子面間隔ｄと回折角θの関数ｆ（２ｄ sinθ）と
して求めてもよい。The function f (E) is stored as a table based on measured values, and when a value not in the table is required, it is calculated by interpolation calculation. Further, because of the relations of the above equations (1) and (2), the deviation from the proportional relation may be obtained as a function f (2d sin θ) of the lattice spacing d of the spectroscopic element 6 and the diffraction angle θ. .
【００３０】また、検出器８から発生するパルスの電圧
は検出器８に印加される電圧Ｖに対して指数関数的に変
化するので、波高分析器１３へ送られるパルスの電圧Ｐ
H を一定にするためには、増幅器１６の増幅率Ｇを調節
する代わりに、検出器８への印加電圧Ｖを調節してもよ
い。この場合、連動手段１０では、前式（６）に代えて
次式（７）が用いられる。なお、Ｖ0 は基準となる電圧
で定数である。Further, since the voltage of the pulse generated from the detector 8 changes exponentially with respect to the voltage V applied to the detector 8, the voltage P of the pulse sent to the wave height analyzer 13
In order to keep H constant, the applied voltage V to the detector 8 may be adjusted instead of adjusting the amplification factor G of the amplifier 16. In this case, the interlocking means 10 uses the following equation (7) instead of the equation (6). V 0 is a reference voltage and is a constant.
【００３１】 Ｖ＝Ｖ0 ＋ln２ｄ＋ln sinθ＋ ln ｆ（Ｅ） …（７）V = V 0 + ln2d + ln sin θ + ln f (E) (7)
【００３２】次に、この装置を用いる第１実施形態の方
法について説明する。まず、試料台２に載置した試料１
に１次Ｘ線３を照射し、発生した２次Ｘ線５を分光素子
６で分光し、分光される２次Ｘ線７の波長を連動手段１
０で変化させながら、所定の電圧Ｖを印加した検出器８
に入射させて、前記所定の印加電圧Ｖと２次Ｘ線７のエ
ネルギーＥに応じた電圧のパルスを２次Ｘ線７の強度に
応じた数だけ発生させる。そして、発生したパルスの電
圧を増幅器１６により所定の増幅率で増幅し、増幅され
たパルスのうち所定の電圧の範囲のものを波高分析器１
３で選別するとともに、波高分析器へ送られるパルスの
電圧ＰH を一定にするために、連動手段１０で前記所定
の印加電圧Ｖまたは所定の増幅率Ｇを調節し、前記選別
されたパルスの計数率を計数手段１４で求める。すなわ
ち、第１実施形態の方法は、波長分散型であって走査型
の蛍光Ｘ線分析方法である。Next, the method of the first embodiment using this apparatus will be described. First, the sample 1 placed on the sample table 2
Is irradiated with the primary X-rays 3, the generated secondary X-rays 5 are dispersed by the spectroscopic element 6, and the wavelength of the secondary X-rays 7 to be dispersed is determined by the interlocking means 1
A detector 8 to which a predetermined voltage V is applied while changing at 0
To generate a pulse having a voltage corresponding to the predetermined applied voltage V and the energy E of the secondary X-ray 7 by a number corresponding to the intensity of the secondary X-ray 7. Then, the voltage of the generated pulse is amplified by the amplifier 16 at a predetermined amplification factor, and the pulse width of the amplified pulse in the predetermined voltage range is analyzed by the pulse height analyzer 1
With screened at 3, to a voltage P H of pulses sent to the pulse height analyzer constant, to adjust the predetermined applied voltage V or a predetermined amplification factor G in interlocking means 10, of the screened pulse The counting rate is obtained by the counting means 14. That is, the method of the first embodiment is a wavelength-dispersive scanning X-ray fluorescence analysis method.
【００３３】さらに、この方法では、検出器８における
入射される２次Ｘ線７のエネルギーＥと発生するパルス
の電圧との比例関係からのずれを、エネルギーＥの関数
ｆ（Ｅ）または分光素子６の格子面間隔ｄと回折角θの
関数ｆ（２ｄ sinθ）としてあらかじめ求めて記憶手段
１５に記憶させておき、連動手段１０で前記所定の印加
電圧Ｖまたは所定の増幅率Ｇを調節する際に、前記関数
ｆ（Ｅ）またはｆ（２ｄ sinθ）を適用して補正する。Further, in this method, the deviation from the proportional relationship between the energy E of the secondary X-ray 7 incident on the detector 8 and the voltage of the generated pulse is calculated as a function f (E) of the energy E or the spectroscopic element. When the predetermined applied voltage V or the predetermined amplification factor G is adjusted by the interlocking means 10, it is obtained in advance as a function f (2d sin θ) of the lattice spacing d of 6 and the diffraction angle θ and stored in the storage means 15. Is corrected by applying the function f (E) or f (2d sin θ).
【００３４】第１実施形態の方法によれば、検出器８に
おける入射される２次Ｘ線７のエネルギーＥと発生する
パルスの電圧との比例関係からのずれを、例えばエネル
ギーＥの関数ｆ（Ｅ）としてあらかじめ求めておき、増
幅器１６の所定の増幅率Ｇ等を調節する際に、前式
（６）等にしたがい前記関数ｆ（Ｅ）を適用して補正す
るので、検出器８が例えばシンチレーションカウンタで
あって前記比例関係からのずれがある場合に、走査によ
り検出器８に入射する２次Ｘ線７の波長が変化しても、
波高分析器１３へ送られるパルスの電圧ＰH は正確に一
定になる。これにより、波高分析器１３が選別する前記
所定の電圧の範囲を設定変更せずとも、検出器８から発
生して波高分析器１３へ送られるパルスのうち、測定す
べき蛍光Ｘ線等の２次Ｘ線７の波長に対応した電圧ＰH
のパルスを正確に選別でき、したがって正確な分析がで
きる。According to the method of the first embodiment, the deviation from the proportional relationship between the energy E of the incident secondary X-ray 7 and the voltage of the generated pulse in the detector 8 is calculated by, for example, a function f () of the energy E. E) is obtained in advance, and when the predetermined amplification factor G or the like of the amplifier 16 is adjusted, the function f (E) is applied and corrected in accordance with the equation (6) or the like. When the scintillation counter has a deviation from the proportional relationship, even if the wavelength of the secondary X-ray 7 incident on the detector 8 changes due to scanning,
The voltage P H of the pulse sent to the pulse height analyzer 13 becomes exactly constant. As a result, even if the setting of the predetermined voltage range selected by the pulse height analyzer 13 is not changed, among the pulses generated from the detector 8 and sent to the pulse height analyzer 13, 2 such as fluorescent X-rays to be measured. voltage P H corresponding to the wavelength of the next X-ray 7
Pulse can be accurately selected, and thus accurate analysis can be performed.
【００３５】次に、本発明の第２実施形態の方法につい
て説明する。まず、この方法に用いる装置について、図
１にしたがって説明する。この装置は、試料台２、Ｘ線
源４、複数から選択されて使用される分光素子６、検出
器８、増幅器１６、波高分析器１３および計数手段１４
を備える点は、第１実施形態の方法に用いる装置と同様
であるが、連動手段２０が、検出器８に入射する２次Ｘ
線７の波長を変化させるとともに、波高分析器１３へ送
られるパルスの電圧の変化に追従するために、前記所定
の電圧の範囲を調節する点が異なる。すなわち、走査に
より検出器８に入射する２次Ｘ線７の波長が変化する
と、検出器８が発生するパルスの電圧が変化し、検出器
８への印加電圧も増幅器１６の増幅率も調節しなけれ
ば、波高分析器１３へ送られるパルスの電圧が変化し、
波高分析器１３が選別する前記所定の電圧の範囲を設定
変更しなければならないが、これを連動手段２０により
自動的に調節し、波高分析器１３へ送られるパルスの電
圧の変化に容易に追従する。Next, the method of the second embodiment of the present invention will be described. First, the apparatus used in this method will be described with reference to FIG. This apparatus includes a sample stage 2, an X-ray source 4, a spectroscopic element 6 selected from a plurality of units, a detector 8, an amplifier 16, a wave height analyzer 13, and a counting means 14.
Is similar to the apparatus used in the method of the first embodiment, but the interlocking means 20 makes the secondary X incident on the detector 8.
The difference is that the range of the predetermined voltage is adjusted in order to change the wavelength of the line 7 and to follow the change in the voltage of the pulse sent to the pulse height analyzer 13. That is, when the wavelength of the secondary X-ray 7 incident on the detector 8 changes due to scanning, the voltage of the pulse generated by the detector 8 changes, and the voltage applied to the detector 8 and the amplification factor of the amplifier 16 are adjusted. If not, the voltage of the pulse sent to the pulse height analyzer 13 changes,
The range of the predetermined voltage selected by the wave height analyzer 13 has to be changed, but this is automatically adjusted by the interlocking means 20 to easily follow the change in the voltage of the pulse sent to the wave height analyzer 13. To do.
【００３６】ここで、波高分析器１３へ送られるパルス
の電圧の変化に正確に追従するために、この装置は、第
１実施形態の方法に用いる装置と同様の記憶手段１５を
備え、連動手段２０が、前記所定の電圧の範囲を調節す
る際に、前記関数ｆ（Ｅ）またはｆ（２ｄ sinθ）を適
用して補正する。例えば、前記所定の電圧の範囲の上限
値または下限値ＰS を、次式（８）のように調節する。
なお、ＰS0は、２次Ｘ線７の波長によらず、例えば、１
次線の波高値を２．０としたとき、上限値に３．０、下
限値に１．０を設定するものであり、ｋ5 は定数であ
る。Here, in order to accurately follow the change in the voltage of the pulse sent to the wave height analyzer 13, this device is provided with the storage means 15 similar to the device used in the method of the first embodiment, and the interlocking means. 20 adjusts the predetermined voltage range by applying the function f (E) or f (2d sin θ). For example, the upper limit value or the lower limit value P S of the predetermined voltage range is adjusted according to the following expression (8).
Note that P S0 is, for example, 1 regardless of the wavelength of the secondary X-ray 7.
When the crest value of the next line is 2.0, the upper limit value is set to 3.0 and the lower limit value is set to 1.0, and k 5 is a constant.
【００３７】 ＰS ＝ＰS0・ｋ5 ／（２ｄ sinθ・ｆ（Ｅ）） …（８）P S = P S0 · k 5 / (2d sin θ · f (E)) (8)
【００３８】すなわち、この装置を用いる第２実施形態
の方法は、検出器８から発生したパルスの電圧を増幅し
て、所定の電圧の範囲のものを波高分析器１３で選別
し、選別されたパルスの計数率を計数手段１４で求める
点は、第１実施形態の方法と同様であるが、波高分析器
１３へ送られるパルスの電圧ＰH の変化に追従するため
に、波高分析器１３が選別する前記所定の電圧の範囲Ｐ
S を調節する点が異なる。それに対応して、検出器８に
おける入射される２次Ｘ線７のエネルギーＥと発生する
パルスの電圧との比例関係からのずれを、前記エネルギ
ーの関数ｆ（Ｅ）または前記分光素子の格子面間隔と回
折角の関数ｆ（２ｄ sinθ）としてあらかじめ求めてお
く点は、第１実施形態の方法と同様であるが、前記所定
の電圧の範囲ＰS を調節する際に、前記関数ｆ（Ｅ）ま
たはｆ（２ｄ sinθ）を適用して補正する点が異なる。That is, in the method of the second embodiment using this apparatus, the voltage of the pulse generated from the detector 8 is amplified, and the pulse in the predetermined voltage range is selected by the pulse height analyzer 13 and selected. The point that the counting rate of the pulse is obtained by the counting means 14 is the same as that of the method of the first embodiment, but in order to follow the change of the voltage P H of the pulse sent to the pulse height analyzer 13, the pulse height analyzer 13 Range P of the predetermined voltage to be selected
The difference is that S is adjusted. Correspondingly, the deviation from the proportional relationship between the energy E of the incident secondary X-ray 7 in the detector 8 and the voltage of the generated pulse is calculated by the function f (E) of the energy or the lattice plane of the spectroscopic element. The point obtained in advance as the function f (2d sin θ) of the distance and the diffraction angle is the same as in the method of the first embodiment, but when the range P S of the predetermined voltage is adjusted, the function f (E ) Or f (2d sin θ) is applied for correction.
【００３９】第２実施形態の方法によれば、検出器８に
おける入射される２次Ｘ線７のエネルギーＥと発生する
パルスの電圧との比例関係からのずれを、例えばエネル
ギーＥの関数ｆ（Ｅ）としてあらかじめ求めておき、波
高分析器１３が選別する所定の電圧の範囲ＰS を調節す
る際に、前式（８）にしたがい前記関数ｆ（Ｅ）を適用
して補正するので、検出器８が例えばシンチレーション
カウンタであって前記比例関係からのずれがある場合
に、走査により検出器８に入射する２次Ｘ線７の波長が
変化し、波高分析器１３へ送られるパルスの電圧ＰH が
変化しても、波高分析器１３が選別する所定の電圧の範
囲ＰS は正確に追従する。これにより、検出器８から発
生して波高分析器１３へ送られるパルスのうち、測定す
べき蛍光Ｘ線等の２次Ｘ線７の波長に対応した電圧ＰH
のパルスを正確に選別でき、したがって正確な分析がで
きる。According to the method of the second embodiment, the deviation from the proportional relationship between the energy E of the incident secondary X-rays 7 and the voltage of the pulse generated in the detector 8 can be calculated, for example, as a function f () of the energy E. E) is obtained in advance, and when the predetermined voltage range P S selected by the wave height analyzer 13 is adjusted, the function f (E) is applied and corrected in accordance with the above equation (8). When the detector 8 is, for example, a scintillation counter and there is a deviation from the proportional relationship, the wavelength of the secondary X-ray 7 incident on the detector 8 is changed by scanning, and the voltage P of the pulse sent to the pulse height analyzer 13 is changed. Even if H changes, the predetermined voltage range P S selected by the wave height analyzer 13 accurately follows. As a result, among the pulses generated from the detector 8 and sent to the wave height analyzer 13, the voltage P H corresponding to the wavelength of the secondary X-ray 7 such as the fluorescent X-ray to be measured.
Pulse can be accurately selected, and thus accurate analysis can be performed.
【００４０】[0040]
【発明の効果】以上詳細に説明したように、本発明によ
れば、波長分散型であって走査型の蛍光Ｘ線分析方法お
よび装置において、検出器から発生して波高分析器へ送
られるパルスのうち、測定すべき蛍光Ｘ線の波長に対応
した電圧のパルスを正確に選別でき、したがって正確な
分析ができる。As described in detail above, according to the present invention, in a wavelength dispersive scanning X-ray fluorescence analysis method and apparatus, a pulse generated from a detector and sent to a pulse height analyzer. Among them, the pulse of the voltage corresponding to the wavelength of the fluorescent X-ray to be measured can be accurately selected, and thus the accurate analysis can be performed.
【図１】本発明の第１、第２実施形態の方法に用いる波
長分散型蛍光Ｘ線分析装置を示す概略図である。FIG. 1 is a schematic diagram showing a wavelength dispersive X-ray fluorescence analyzer used in the methods of the first and second embodiments of the present invention.
１…試料、３…１次Ｘ線、４…Ｘ線源、５…試料から発
生した２次Ｘ線、６…分光素子、７…分光素子で分光さ
れた２次Ｘ線、８…検出器、１０，２０…連動手段、１
３…波高分析器、１４…計数手段、１５…記憶手段、１
６…増幅器。1 ... Sample, 3 ... Primary X-ray, 4 ... X-ray source, 5 ... Secondary X-ray generated from sample, 6 ... Spectroscopic element, 7 ... Secondary X-ray dispersed by spectroscopic element, 8 ... Detector 10, 20, ... interlocking means, 1
3 ... Wave height analyzer, 14 ... Counting means, 15 ... Storage means, 1
6 ... Amplifier.
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭48−34587（ＪＰ，Ａ) 特公 昭36−4692（ＪＰ，Ｂ１) 実公 昭48−4528（ＪＰ，Ｙ１) (58)調査した分野(Int.Cl.7，ＤＢ名) G01N 23/223 ─────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-48-34587 (JP, A) JP-B-36-4692 (JP, B1) JP-B-48-4528 (JP, Y1) (58) Field (Int.Cl. 7 , DB name) G01N 23/223
Claims (4)
子で分光し、 分光される２次Ｘ線の波長を変化させながら、所定の電
圧を印加した検出器に入射させて、前記所定の印加電圧
と２次Ｘ線のエネルギーに応じた電圧のパルスを２次Ｘ
線の強度に応じた数だけ発生させ、 発生したパルスの電圧を増幅器により所定の増幅率で増
幅し、 増幅されたパルスのうち所定の電圧の範囲のものを波高
分析器で選別するとともに、 前記波高分析器へ送られるパルスの電圧を一定にするた
めに、前記所定の印加電圧または所定の増幅率を調節
し、 前記選別されたパルスの計数率を計数手段で求める波長
分散型蛍光Ｘ線分析方法において、 前記検出器における入射される２次Ｘ線のエネルギーと
発生するパルスの電圧との比例関係からのずれを、前記
エネルギーの関数または前記分光素子の格子面間隔と回
折角の関数としてあらかじめ求めておき、 前記所定の印加電圧または所定の増幅率を調節する際
に、前記関数を適用して補正することを特徴とする波長
分散型蛍光Ｘ線分析方法。1. A sample is irradiated with primary X-rays, the generated secondary X-rays are separated by a spectroscopic element to be used by selecting from a plurality , and while changing the wavelength of the secondary X-rays to be separated, A pulse of a voltage corresponding to the predetermined applied voltage and the energy of the secondary X-ray is incident on the detector applied with the predetermined voltage, and the secondary X-ray is applied.
The number of generated pulses is generated according to the intensity of the line, the voltage of the generated pulses is amplified by an amplifier with a predetermined amplification factor, and the pulse in the predetermined voltage range among the amplified pulses is selected with a pulse height analyzer. In order to make the voltage of the pulse sent to the pulse height analyzer constant, the predetermined applied voltage or the predetermined amplification factor is adjusted, and the counting rate of the selected pulse is obtained by a counting means. In the method, the deviation from the proportional relationship between the energy of the incident secondary X-ray and the voltage of the generated pulse in the detector is previously calculated as a function of the energy or a function of the lattice spacing and the diffraction angle of the spectroscopic element. A wavelength dispersive X-ray fluorescence analysis method, characterized in that the function is applied and corrected when the predetermined applied voltage or the predetermined amplification factor is adjusted.
子で分光し、 分光される２次Ｘ線の波長を変化させながら、所定の電
圧を印加した検出器に入射させて、前記所定の印加電圧
と２次Ｘ線のエネルギーに応じた電圧のパルスを２次Ｘ
線の強度に応じた数だけ発生させ、 発生したパルスの電圧を増幅器により所定の増幅率で増
幅し、 増幅されたパルスのうち所定の電圧の範囲のものを波高
分析器で選別するとともに、 前記波高分析器へ送られるパルスの電圧の変化に追従す
るために、前記所定の電圧の範囲を調節し、 前記選別されたパルスの計数率を計数手段で求める波長
分散型蛍光Ｘ線分析方法において、 前記検出器における入射される２次Ｘ線のエネルギーと
発生するパルスの電圧との比例関係からのずれを、前記
エネルギーの関数または前記分光素子の格子面間隔と回
折角の関数としてあらかじめ求めておき、 前記所定の電圧の範囲を調節する際に、前記関数を適用
して補正することを特徴とする波長分散型蛍光Ｘ線分析
方法。2. A sample is irradiated with primary X-rays, the generated secondary X-rays are separated by a spectroscopic element to be used by selecting from a plurality , and while changing the wavelength of the secondary X-rays to be separated, A pulse of a voltage corresponding to the predetermined applied voltage and the energy of the secondary X-ray is incident on the detector applied with the predetermined voltage, and the secondary X-ray is applied.
The number of generated pulses is generated according to the intensity of the line, the voltage of the generated pulses is amplified by an amplifier with a predetermined amplification factor, and the pulse in the predetermined voltage range among the amplified pulses is selected with a pulse height analyzer. In order to follow the change in the voltage of the pulse sent to the pulse height analyzer, the range of the predetermined voltage is adjusted, and in the wavelength dispersive X-ray fluorescence analysis method, the counting rate of the selected pulse is obtained by a counting means. The deviation from the proportional relationship between the energy of the incident secondary X-rays and the voltage of the generated pulse in the detector is obtained in advance as a function of the energy or a function of the lattice spacing of the spectroscopic element and the diffraction angle. A wavelength-dispersive X-ray fluorescence analysis method, wherein the function is applied to make a correction when the range of the predetermined voltage is adjusted.
線を分光する分光素子と、 所定の電圧が印加され、前記分光素子で分光された２次
Ｘ線が入射されて、前記所定の印加電圧と２次Ｘ線のエ
ネルギーに応じた電圧のパルスを２次Ｘ線の強度に応じ
た数だけ発生させる検出器と、 その検出器で発生したパルスの電圧を所定の増幅率で増
幅する増幅器と、 その増幅器で増幅されたパルスのうち所定の電圧の範囲
のものを選別する波高分析器と、 その波高分析器で選別されたパルスの計数率を求める計
数手段と、 前記検出器に入射する２次Ｘ線の波長を変化させるとと
もに、前記波高分析器へ送られるパルスの電圧を一定に
するために、前記所定の印加電圧または所定の増幅率を
調節する連動手段とを備えた波長分散型蛍光Ｘ線分析装
置において、 前記検出器における入射される２次Ｘ線のエネルギーと
発生するパルスの電圧との比例関係からのずれを、あら
かじめ求められた前記エネルギーの関数または前記分光
素子の格子面間隔と回折角の関数として記憶する記憶手
段を備え、 前記連動手段が、前記所定の印加電圧または所定の増幅
率を調節する際に、前記記憶手段に記憶した関数を適用
して補正することを特徴とする波長分散型蛍光Ｘ線分析
装置。3. An X-ray source for irradiating a sample with primary X-rays, and a secondary X generated from the sample , which is used by selecting from a plurality of sources.
A spectroscopic element that disperses a ray, a predetermined voltage is applied, and a secondary X-ray that is spectroscopically dispersed by the spectroscopic element is incident to generate a pulse of a voltage that corresponds to the predetermined applied voltage and the energy of the secondary X-ray. A detector that generates a number corresponding to the intensity of the secondary X-rays, an amplifier that amplifies the voltage of the pulse generated by the detector with a predetermined amplification factor, and a predetermined voltage of the pulse amplified by the amplifier. A wave height analyzer for selecting a range of frequencies, a counting means for obtaining the count rate of the pulses selected by the wave height analyzer, and a wave height analyzer for changing the wavelength of the secondary X-ray incident on the detector. In the wavelength dispersive X-ray fluorescence analyzer provided with interlocking means for adjusting the predetermined applied voltage or the predetermined amplification factor in order to make the voltage of the pulse sent to the detector constant, Next X-ray energy The deviation from the proportional relationship between the voltage of the pulse and the pulse generated, storage means for storing as a function of the energy previously obtained or the lattice spacing of the spectroscopic element and a function of the diffraction angle, the interlocking means, A wavelength dispersive X-ray fluorescence analyzer, characterized in that, when adjusting the predetermined applied voltage or the predetermined amplification factor, correction is performed by applying a function stored in the storage means.
線を分光する分光素子と、 所定の電圧が印加され、前記分光素子で分光された２次
Ｘ線が入射されて、前記所定の印加電圧と２次Ｘ線のエ
ネルギーに応じた電圧のパルスを２次Ｘ線の強度に応じ
た数だけ発生させる検出器と、 その検出器で発生したパルスの電圧を所定の増幅率で増
幅する増幅器と、 その増幅器で増幅されたパルスのうち所定の電圧の範囲
のものを選別する波高分析器と、 その波高分析器で選別されたパルスの計数率を求める計
数手段と、 前記検出器に入射する２次Ｘ線の波長を変化させるとと
もに、前記波高分析器へ送られるパルスの電圧の変化に
追従するために、前記所定の電圧の範囲を調節する連動
手段とを備えた波長分散型蛍光Ｘ線分析装置において、 前記検出器における入射される２次Ｘ線のエネルギーと
発生するパルスの電圧との比例関係からのずれを、あら
かじめ求められた前記エネルギーの関数または前記分光
素子の格子面間隔と回折角の関数として記憶する記憶手
段を備え、 前記連動手段が、前記所定の電圧の範囲を調節する際
に、前記記憶手段に記憶した関数を適用して補正するこ
とを特徴とする波長分散型蛍光Ｘ線分析装置。4. An X-ray source for irradiating a sample with primary X-rays and a secondary X-ray generated from the sample , which is used by selecting from a plurality of sources.
A spectroscopic element that disperses a ray, a predetermined voltage is applied, and a secondary X-ray that is spectroscopically dispersed by the spectroscopic element is incident to generate a pulse of a voltage that corresponds to the predetermined applied voltage and the energy of the secondary X-ray. A detector that generates a number corresponding to the intensity of the secondary X-rays, an amplifier that amplifies the voltage of the pulse generated by the detector with a predetermined amplification factor, and a predetermined voltage of the pulse amplified by the amplifier. A wave height analyzer for selecting a range of frequencies, a counting means for obtaining the count rate of the pulses selected by the wave height analyzer, and a wave height analyzer for changing the wavelength of the secondary X-ray incident on the detector. In a wavelength dispersive X-ray fluorescence analyzer equipped with interlocking means for adjusting the range of the predetermined voltage in order to follow the change in the voltage of the pulse sent to the detector. Energy and generation The deviation from the proportional relationship with the voltage of the pulse is stored as a function of the energy obtained in advance or as a function of the lattice spacing of the spectroscopic element and the diffraction angle, the interlocking means, the predetermined A wavelength dispersive X-ray fluorescence analyzer, characterized in that when a voltage range is adjusted, a function stored in the storage means is applied for correction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000032878A JP3394936B2 (en) | 2000-02-10 | 2000-02-10 | Wavelength dispersive X-ray fluorescence analysis method and apparatus |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000032878A JP3394936B2 (en) | 2000-02-10 | 2000-02-10 | Wavelength dispersive X-ray fluorescence analysis method and apparatus |
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| Publication Number | Publication Date |
|---|---|
| JP2001221753A JP2001221753A (en) | 2001-08-17 |
| JP3394936B2 true JP3394936B2 (en) | 2003-04-07 |
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ID=18557432
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|---|---|---|---|
| JP2000032878A Expired - Fee Related JP3394936B2 (en) | 2000-02-10 | 2000-02-10 | Wavelength dispersive X-ray fluorescence analysis method and apparatus |
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| Country | Link |
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| JP (1) | JP3394936B2 (en) |
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| JP2001221753A (en) | 2001-08-17 |
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