JP2001221753A - Wavelength dispersive type fluorescent x-ray analytical method and device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method or the like capable of selecting accurately the pulse of a voltage corresponding to the wavelength of a fluorescent X-ray to be measured among pulses generated from a detector and sent to a pulse height analyzer, and thereby executing accurate analysis, in a wavelength dispersive type and scanning type fluorescent X-ray analytical method or the like. SOLUTION: Deviation from a proportional relation between energy E of an incident secondary X-ray 7 and the voltage of a generated pulse at a detector 8 is obtained beforehand, for example, as a function of energy f (E), and correction is executed by applying the function f (E) when a prescribed amplification factor G of an amplifier 16 or the like is adjusted.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a so-called wavelength dispersive and scanning X-ray fluorescence analysis method and apparatus.

[0002]

2. Description of the Related Art Conventionally, for example, in a wavelength-dispersive X-ray fluorescence analysis, a sample is irradiated with primary X-rays, X-rays generated from the sample are separated by a spectroscopic element, and the separated fluorescent X-rays are used.
The line is detected by a detector to generate a pulse. The voltage of the pulse, that is, the peak value, depends on the energy of the fluorescent X-rays, and specifically, is considered to have a proportional relationship. The number of pulses per unit time depends on the intensity of fluorescent X-rays. Therefore, pulses having a predetermined voltage range among the pulses are selected by a pulse height analyzer, and the counting rate (the number of pulses per unit time) is obtained by a counting means such as a scaler. Since the pulse generated by the detector is weak, the pulse is amplified at a predetermined amplification factor by a preamplifier built in the detector and an external linear amplifier, and sent to the pulse height analyzer. A linear amplifier may be included in the pulse height analyzer.

Here, in a scanning (scan) type analysis, while the wavelength of the fluorescent X-rays separated by the spectroscopic element is changed by interlocking means such as a so-called goniometer, the separated fluorescent X-rays are sent to a detector. The spectroscopic element and the detector are scanned so as to be incident so as to be incident, and the intensity of the fluorescent X-ray is measured in a wide wavelength range. At this time, since the wavelength of the fluorescent X-rays incident on the detector changes, that is, the energy of the fluorescent X-rays changes, the voltage of the pulse generated from the detector and sent to the pulse height analyzer also changes. Then, in order to select the pulse of the voltage corresponding to the wavelength of the fluorescent X-ray to be measured, the predetermined voltage range in the pulse height analyzer, specifically, the upper limit and the lower limit of the voltage of the pulse to be passed, The setting must be reset following the change in the voltage of the transmitted pulse, which is complicated.

Therefore, conventionally, the interlocking means is used to set a predetermined amplification factor in the linear amplifier (hereinafter, referred to as an amplifier, for example) so as to be inversely proportional to the energy of the fluorescent X-ray incident on the detector. The diffraction angle θ of the spectroscopic element is continuously adjusted so as to be proportional to sin θ, so that the voltage of the pulse sent to the pulse height analyzer becomes constant, and it is unnecessary to change the setting of the predetermined voltage range. I have to. The reason for this adjustment is that, as described above, it is based on the premise that the energy of the fluorescent X-rays incident on the detector and the voltage of the generated pulse are in a proportional relationship.

[0005]

However, when the detector is, for example, a scintillation counter, there is a deviation from the above proportional relationship. Cannot be accurately selected, and thus cannot be analyzed accurately.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned conventional problems. In a wavelength-dispersive and scanning X-ray fluorescence analysis method and apparatus, there is provided a method for detecting a pulse generated from a detector and sent to a pulse height analyzer. It is an object of the present invention to provide a method and an apparatus capable of accurately selecting a pulse having a voltage corresponding to the wavelength of the fluorescent X-ray to be measured, and thus performing an accurate analysis.

[0007]

According to a first aspect of the present invention, there is provided a wavelength-dispersive X-ray fluorescence analysis method comprising: irradiating a sample with primary X-rays; While changing the wavelength of the secondary X-ray to be separated, the light is incident on a detector to which a predetermined voltage is applied, and a pulse of a voltage corresponding to the predetermined applied voltage and the energy of the secondary X-ray is generated. 2
It is generated by the number corresponding to the intensity of the next X-ray. Then, the voltage of the generated pulse is amplified at a predetermined amplification rate by an amplifier, and those in a predetermined voltage range among the amplified pulses are selected by a pulse height analyzer, and the voltage of the pulse sent to the pulse height analyzer is selected. Is adjusted to adjust the predetermined applied voltage or the predetermined amplification factor, and the counting rate of the selected pulse is obtained by the counting means. That is, it is a wavelength-dispersive and scanning X-ray fluorescence analysis method.

Further, in the method according to the first aspect, the deviation from the proportionality between the energy of the incident secondary X-rays and the voltage of the generated pulse in the detector is determined by a function of the energy or the grating of the spectroscopic element. It is obtained in advance as a function of the surface spacing and the diffraction angle, and is adjusted by applying the function when adjusting the predetermined applied voltage or the predetermined amplification factor.

According to the method of the first aspect, the deviation from the proportional relationship between the energy of the incident secondary X-ray and the voltage of the generated pulse in the detector is obtained in advance as a function of the energy and the like, and When adjusting the predetermined amplification factor or the like, the above-mentioned function is applied for correction, so that among the pulses generated from the detector and sent to the pulse height analyzer, secondary X-rays such as fluorescent X-rays to be measured are included. The pulse of the voltage corresponding to the wavelength can be accurately selected, and the accurate analysis can be performed.

According to a second aspect of the present invention, a voltage of a pulse generated from a detector is amplified, and a voltage within a predetermined voltage range is selected by a pulse height analyzer. The point at which the counting rate is determined by the counting means is the same as that of the method of claim 1, but the range of the predetermined voltage selected by the pulse height analyzer in order to follow a change in the voltage of the pulse sent to the pulse height analyzer. The point of adjusting is different. Correspondingly, the deviation from the proportionality between the energy of the incident secondary X-rays and the voltage of the generated pulse in the detector is calculated as a function of the energy or a function of the lattice spacing and diffraction angle of the spectral element. The point to be determined in advance is claim 1
The method is the same as that described above, except that the function is applied and corrected when the predetermined voltage range is adjusted.

According to the second aspect of the present invention, the deviation from the proportional relationship between the energy of the incident secondary X-ray and the voltage of the generated pulse in the detector is obtained in advance as a function of the energy or the like, and the wave height is determined. When adjusting the predetermined voltage range selected by the analyzer, correction is performed by applying the above-described function, so that the fluorescent X-ray to be measured is also included in the pulses generated from the detector and sent to the pulse height analyzer. And the like, and a pulse of a voltage corresponding to the wavelength of the secondary X-ray can be accurately selected, and thus accurate analysis can be performed.

According to a third aspect of the present invention, an X-ray source for irradiating a sample with primary X-rays, a spectroscopic element for dispersing secondary X-rays generated from the sample, A voltage is applied, secondary X-rays dispersed by the spectral element are incident, and a pulse of a voltage corresponding to the predetermined applied voltage and the energy of the secondary X-ray is generated according to the intensity of the secondary X-ray. And a pulse height analyzer that amplifies the voltage of the pulse generated by the detector at a predetermined amplification rate, and a pulse height analyzer that selects pulses within a predetermined voltage range among the pulses amplified by the amplifier. Counting means for determining the counting rate of the pulses selected by the wave height analyzer. Then, while changing the wavelength of the secondary X-ray incident on the detector,
There is provided interlocking means for adjusting the predetermined applied voltage or the predetermined amplification factor in order to keep the voltage of the pulse sent to the pulse height analyzer constant. That is, it is a wavelength-dispersive and scanning X-ray fluorescence analyzer.

Further, the apparatus according to the present invention is characterized in that the deviation from the proportionality between the energy of the incident secondary X-rays and the voltage of the generated pulse in the detector is determined by a function of the energy determined in advance or the deviation. Storage means for storing as a function of the grating plane spacing and diffraction angle of the spectral element, wherein the interlocking means applies the function stored in the storage means when adjusting the predetermined applied voltage or the predetermined amplification factor. To correct. According to the device of the third aspect, the same operation and effect as those of the method of the first aspect are obtained.

A wavelength dispersive X-ray fluorescence analyzer according to a fourth aspect is similar to the apparatus according to the third aspect in that it comprises an X-ray source, a spectroscopic element, a detector, an amplifier, a pulse height analyzer and a counting means. The interlocking means changes the wavelength of the secondary X-rays incident on the detector and adjusts the predetermined voltage range in order to follow the change in the voltage of the pulse sent to the pulse height analyzer. Are different. Correspondingly, the point that the storage means is provided is the same as that of the device of claim 3, except that the interlocking means corrects by applying the function when adjusting the predetermined voltage range. different. According to the device of the fourth aspect, the same operation and effect as those of the method of the second aspect are obtained.

[0015]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a method according to a first embodiment of the present invention will be described. First, an apparatus used in this method will be described with reference to FIG. This device uses sample 1
, A sample X-ray source 4 such as an X-ray tube for irradiating the sample 1 with primary X-rays 3 and a secondary X-ray 5 such as fluorescent X-rays generated from the sample 1. The spectroscopic element 6 is applied with a predetermined voltage, the secondary X-rays 7 separated by the spectroscopic element 6 are incident, and a pulse of a voltage corresponding to the predetermined applied voltage and the energy of the secondary X-ray 7 is generated. A detector 8 for generating a number corresponding to the intensity of the next X-ray 7, an amplifier 16 for amplifying a voltage of a pulse generated by the detector 8 at a predetermined amplification factor, and an amplifier 16
The pulse height analyzer 13 includes a pulse height analyzer 13 for selecting pulses within a predetermined voltage range among the pulses amplified by the pulse generator, and a counting unit 14 for determining a count rate of the pulses selected by the pulse height analyzer 13.
A plurality of spectroscopic elements may be exchanged (selected) for use.

Further, there is provided a linking means 10 for linking the spectroscopic element 6 and the detector 8, that is, a so-called goniometer, so that the wavelength of the secondary X-ray 7 incident on the detector 8 changes. When the secondary X-rays 5 enter the spectroscopic element 6 at a certain incident angle θ, the extension line 9 of the secondary X-rays 5 and the secondary X-rays 7 spectrally (diffracted) by the spectroscopic element 6 become incident angles (diffraction angles). ) 2 of θ
The interlocking means 10 has a spectral angle of 2θ.
The spectroscopic element 6 passes through the center of the surface of the spectroscopic element 6 so that the spectroscopic secondary X-ray 7 continues to be incident on the detector 8 while changing the wavelength of the secondary X-ray 7 that is spectroscopically changed. Rotate around the axis O perpendicular to the plane of the paper, and twice the rotation angle,
The detector 8 is rotated along the circle 12 about the axis O.

In the interlocking means 10, for example, the shaft O
By counting the number of pulses output to a pulse motor that drives a gear attached to the lens, an incident angle (diffraction angle) formed as a result of rotation of the spectroscopic element 6 and the detector 8
θ and the spectral angle 2θ are confirmed, and the lattice spacing d of the spectral element 6 is determined.
From the above, based on the Bragg condition of the following equation (1) and the relationship of the equation (2), the wavelength λ and energy E of the secondary X-ray being measured are
Can be requested. Note that n is the order of reflection, but since a primary line is usually measured, n = 1, h is Planck's constant, and c is the speed of light.

2d sin θ = nλ (1)

E = hc / λ (2)

The interlocking means 10 changes the wavelength of the secondary X-ray 7 incident on the detector 8 as described above,
In order to make the voltage of the pulse sent to the peak analyzer 13 constant, a predetermined amplification factor of the amplifier 16 is adjusted. As described above, this apparatus is a wavelength-dispersive and scanning X-ray fluorescence analyzer.

Now, adjustment of the predetermined gain G in the interlocking means 10 of this device will be described. First, assuming that the energy E of the secondary X-rays 7 incident on the detector 8 and the voltage of the generated pulse are in a proportional relationship as in the related art, the secondary X-rays 7 incident on the detector 8 are considered. energy E, the amplification factor of the amplifier 16 (gain) G, between the pulse of the voltage (peak value) P _H sent to the pulse height analyzer 13, the following equation (3) is satisfied, further equation (1) , (2), equation (4) holds. Note that k ₁ and k ₂ are constants.

P _H = k ₁ EG (3)

P _H = k ₂ G / 2d sin θ (4)

Based on this, conventionally, the wave height analyzer 13
In order that the range of the predetermined voltage to be selected does not need to be changed, that is, in order to keep the voltage P _H of the pulse sent to the pulse height analyzer 13 constant, the amplification factor G of the amplifier 16 is set as follows: As described in 5), it was calculated and adjusted by the computer attached to the device. Incidentally, k ₃ are constants.

G = k ₃ · 2d sin θ (5)

At this time, it should be constant at P _H = k ₂ k ₃ . However, as described above, when the detector 8 is, for example, a scintillation counter, the energy E of the incident secondary X-ray 7 and the voltage of the generated pulse are not exactly in a proportional relationship. , not the voltage P _H of pulses sent to the pulse height analyzer 13 is constant, can not be accurately sorted pulse voltage P _H corresponding to the wavelength λ of the fluorescent X-ray 7 to be measured.

Therefore, in this apparatus, the deviation from the proportional relationship between the energy E of the incident secondary X-ray 7 and the voltage of the generated pulse in the detector 8 is defined as a function f (E) of the energy E, for example. In advance, it is determined in advance by actual measurement and stored in the storage means 15 so that the interlocking means 1
0 is corrected by applying the function f (E) stored in the storage means 15 when adjusting the amplification factor G. That is, the interlocking means 10 adjusts the gain G of the amplifier 16 as in the following equation (6). Incidentally, k ₄ are constants.

[0028] _{G = k 4 · 2d sinθ ·} f (E) ... (6)

The function f (E) is stored as a table based on measured values, and is calculated by interpolation when a value not in the table is required. Further, since there is the relationship of the above formulas (1) and (2), the deviation from the proportional relationship may be obtained as a function f (2d sin θ) of the grating plane distance d of the spectral element 6 and the diffraction angle θ. .

Since the voltage of the pulse generated from the detector 8 changes exponentially with respect to the voltage V applied to the detector 8, the voltage P of the pulse sent to the pulse height analyzer 13 is changed.
_In order to keep _H constant, instead of adjusting the gain G of the amplifier 16, the voltage V applied to the detector 8 may be adjusted. In this case, in the interlocking means 10, the following equation (7) is used instead of the previous equation (6). V ₀ is a reference voltage and is a constant.

V = V ₀ + ln2d + ln sin θ + ln f (E) (7)

Next, a method of the first embodiment using this apparatus will be described. First, the sample 1 placed on the sample stage 2
Is irradiated with primary X-rays 3, the generated secondary X-rays 5 are separated by a spectroscopic element 6, and the wavelength of the secondary X-rays 7 to be split is linked to the interlocking means 1.
Detector 8 applying a predetermined voltage V while changing at 0
To generate pulses of a voltage corresponding to the predetermined applied voltage V and the energy E of the secondary X-rays 7 in a number corresponding to the intensity of the secondary X-rays 7. Then, the voltage of the generated pulse is amplified by the amplifier 16 at a predetermined amplification rate, and the amplified pulse having a predetermined voltage range is used as the pulse height analyzer 1.
In step 3, the predetermined applied voltage V or the predetermined amplification factor G is adjusted by the interlocking means 10 in order to keep the voltage P _H of the pulse sent to the pulse height analyzer constant. The counting rate is obtained by the counting means 14. That is, the method of the first embodiment is a wavelength-dispersive and scanning X-ray fluorescence analysis method.

Further, in this method, the deviation from the proportionality between the energy E of the incident secondary X-ray 7 in the detector 8 and the voltage of the generated pulse is determined by the function f (E) of the energy E or the spectroscopic element. 6 is obtained in advance as a function f (2d sin θ) of the lattice plane distance d and the diffraction angle θ and stored in the storage means 15, and when the interlocking means 10 adjusts the predetermined applied voltage V or the predetermined amplification factor G Then, the correction is performed by applying the function f (E) or f (2d sin θ).

According to the method of the first embodiment, the deviation from the proportionality between the energy E of the incident secondary X-ray 7 and the voltage of the generated pulse in the detector 8 is determined by, for example, the function f ( E) is obtained in advance, and when the predetermined gain G or the like of the amplifier 16 is adjusted, the function f (E) is corrected by applying the function f (E) according to the above equation (6). If the scintillation counter has a deviation from the proportional relationship, even if the wavelength of the secondary X-ray 7 incident on the detector 8 by scanning changes,
The voltage P _H of the pulse sent to the wave height analyzer 13 becomes exactly constant. Thereby, without changing the setting of the predetermined voltage range selected by the pulse height analyzer 13, two of the pulses generated from the detector 8 and sent to the pulse height analyzer 13, such as fluorescent X-rays to be measured, voltage P _H corresponding to the wavelength of the next X-ray 7
Can be accurately sorted out, and thus an accurate analysis can be performed.

Next, a method according to a second embodiment of the present invention will be described. First, an apparatus used in this method will be described with reference to FIG. This device is the same as the device used in the method of the first embodiment in that it has a sample stage 2, an X-ray source 4, a spectroscopic element 6, a detector 8, an amplifier 16, a pulse height analyzer 13, and a counting means 14. However, in order for the interlocking means 20 to change the wavelength of the secondary X-ray 7 incident on the detector 8 and to follow the change in the voltage of the pulse sent to the pulse height analyzer 13, the predetermined voltage range is changed. The point of adjustment is different. That is, the secondary X incident on the detector 8 by scanning
When the wavelength of the line 7 changes, the voltage of the pulse generated by the detector 8 changes. If neither the voltage applied to the detector 8 nor the amplification factor of the amplifier 16 is adjusted, the voltage of the pulse sent to the pulse height analyzer 13 is adjusted. Must be changed and the range of the predetermined voltage selected by the pulse height analyzer 13 must be changed. This is automatically adjusted by the interlocking means 20 to change the voltage of the pulse sent to the pulse height analyzer 13. Follows easily.

Here, in order to accurately follow the change in the voltage of the pulse sent to the pulse height analyzer 13, this apparatus is provided with a storage means 15 similar to the apparatus used in the method of the first embodiment. 20 adjusts by applying the function f (E) or f (2d sin θ) when adjusting the predetermined voltage range. For example, the upper limit or lower limit P _S of the predetermined voltage range is adjusted as in the following equation (8).
Note that P _S0 is, for example, 1 regardless of the wavelength of the secondary X-ray 7.
When 2.0 the peak value of the next line, 3.0 to the upper limit value, which sets the 1.0 to the lower limit value, k ₅ are constants.

P _S = P _S0 · k ₅ / (2d sin θ · f (E)) (8)

That is, in the method according to the second embodiment using this device, the voltage of the pulse generated from the detector 8 is amplified, and the voltage within a predetermined voltage range is selected by the wave height analyzer 13 and the selected voltage is selected. The point that the counting rate of the pulse is obtained by the counting means 14 is the same as that of the method of the first embodiment, but in order to follow the change in the voltage P _H of the pulse sent to the pulse height analyzer 13, the pulse height analyzer 13 The predetermined voltage range P to be selected
_The difference is that _S is adjusted. Correspondingly, the deviation from the proportionality between the energy E of the incident secondary X-ray 7 in the detector 8 and the voltage of the generated pulse is determined by the function f (E) of the energy or the lattice plane of the spectral element. the points determined in advance as the interval as a function of diffraction angle f (2d sin [theta), is similar to the method of the first embodiment, when adjusting the range P _S of the predetermined voltage, the function f (E )) Or f (2d sin θ).

According to the method of the second embodiment, the deviation from the proportionality between the energy E of the incident secondary X-rays 7 in the detector 8 and the voltage of the generated pulse is determined by, for example, the function f ( E) obtained in advance as, when the pulse height analyzer 13 to adjust the range P _S of a predetermined voltage to screen, is corrected by applying the function f (E) in accordance with equation (8), detecting When the detector 8 is, for example, a scintillation counter and there is a deviation from the proportional relationship, the wavelength of the secondary X-ray 7 incident on the detector 8 changes by scanning, and the voltage P of the pulse sent to the pulse height analyzer 13 is changed. _{Even if H} changes, the predetermined voltage range P _S selected by the pulse height analyzer 13 accurately follows. Thus, of the pulses generated from the detector 8 and sent to the pulse height analyzer 13, the voltage P _H corresponding to the wavelength of the secondary X-ray 7 such as the fluorescent X-ray to be measured.
Can be accurately sorted out, and thus an accurate analysis can be performed.

[0040]

As described above in detail, according to the present invention, in a wavelength-dispersive and scanning X-ray fluorescence analysis method and apparatus, a pulse generated from a detector and sent to a pulse height analyzer is provided. Among them, the pulse of the voltage corresponding to the wavelength of the fluorescent X-ray to be measured can be accurately selected, and thus the accurate analysis can be performed.

[Brief description of the drawings]

FIG. 1 is a schematic diagram showing a wavelength-dispersive X-ray fluorescence spectrometer used in the methods of the first and second embodiments of the present invention.

[Explanation of symbols]

Reference Signs List 1 ... sample, 3 ... primary X-ray, 4 ... X-ray source, 5 ... secondary X-ray generated from sample, 6 ... spectroscopic element, 7 ... secondary X-ray separated by spectroscopic element, 8 ... detector , 10, 20 ... interlocking means, 1
3 ... height analyzer, 14 ... counting means, 15 ... storage means, 1
6 ... Amplifier.

Continued on the front page (72) Inventor Etsuhisa Yamamoto 14-8 Akaoji-cho, Takatsuki-shi, Osaka F-term (reference) 2G001 AA01 BA04 CA01 DA01 EA01 EA03 EA08 FA03 FA06 FA24 GA09 JA06

Claims (4)

[Claims] 1. A detector which irradiates a sample with primary X-rays, splits the generated secondary X-rays with a spectroscopic element, and applies a predetermined voltage while changing the wavelength of the secondary X-rays to be split. And a pulse of a voltage corresponding to the predetermined applied voltage and the energy of the secondary X-ray is applied to the secondary X-ray.
The voltage of the generated pulse is amplified at a predetermined amplification rate by an amplifier, and the amplified pulse within a predetermined voltage range is selected by a pulse height analyzer, and In order to make the voltage of the pulse sent to the pulse height analyzer constant, the predetermined applied voltage or the predetermined amplification rate is adjusted, and the counting rate of the selected pulse is obtained by the counting means. In the method, a deviation from the proportionality between the energy of the incident secondary X-rays and the voltage of the generated pulse in the detector is previously determined as a function of the energy or a function of the lattice spacing and diffraction angle of the spectral element. A wavelength-dispersive X-ray fluorescence analysis method, wherein the function is applied and corrected when adjusting the predetermined applied voltage or the predetermined amplification factor. 2. A detector which irradiates a sample with primary X-rays, splits the generated secondary X-rays with a spectroscopic element, and applies a predetermined voltage while changing the wavelength of the secondary X-rays to be split. And a pulse of a voltage corresponding to the predetermined applied voltage and the energy of the secondary X-ray is applied to the secondary X-ray.
The voltage of the generated pulse is amplified at a predetermined amplification rate by an amplifier, and the amplified pulse within a predetermined voltage range is selected by a pulse height analyzer, and In order to follow the change in the voltage of the pulse sent to the pulse height analyzer, in the wavelength dispersion type fluorescent X-ray analysis method of adjusting the predetermined voltage range, the counting rate of the selected pulse is obtained by the counting means, A deviation from the proportional relationship between the energy of the incident secondary X-rays and the voltage of the generated pulse in the detector is determined in advance as a function of the energy or a function of the lattice spacing and diffraction angle of the spectral element. A wavelength dispersive X-ray fluorescence analysis method, wherein the function is applied and corrected when the predetermined voltage range is adjusted. 3. An X-ray source for irradiating a sample with primary X-rays, a spectroscopic element for dispersing secondary X-rays generated from the sample, and a secondary voltage separated by the spectroscopic element when a predetermined voltage is applied. A detector that receives X-rays and generates pulses of a voltage corresponding to the predetermined applied voltage and the energy of the secondary X-ray by a number corresponding to the intensity of the secondary X-ray; and a pulse generated by the detector. An amplifier that amplifies the voltage at a predetermined amplification rate, a pulse height analyzer that selects pulses within a predetermined voltage range among the pulses amplified by the amplifier, and a counting rate of the pulses selected by the pulse height analyzer Counting means for determining, while changing the wavelength of the secondary X-rays incident on the detector, and keeping the voltage of the pulse sent to the pulse height analyzer constant, the predetermined applied voltage or the predetermined amplification factor Wavelength dispersion type with interlocking means for adjusting In the X-ray fluorescence spectrometer, the deviation from the proportionality between the energy of the incident secondary X-rays and the voltage of the generated pulse in the detector is determined by a function of the energy determined in advance or the lattice plane of the spectroscopic element. Storage means for storing as a function of an interval and a diffraction angle, wherein the interlocking means adjusts by applying the function stored in the storage means when adjusting the predetermined applied voltage or the predetermined amplification factor. Characteristic wavelength-dispersive X-ray fluorescence spectrometer. 4. An X-ray source for irradiating a sample with primary X-rays, a spectroscopic element for dispersing secondary X-rays generated from the sample, a secondary voltage applied with a predetermined voltage, and separated by the spectroscopic element A detector that receives X-rays and generates pulses of a voltage corresponding to the predetermined applied voltage and the energy of the secondary X-ray by a number corresponding to the intensity of the secondary X-ray; and a pulse generated by the detector. An amplifier that amplifies the voltage at a predetermined amplification rate, a pulse height analyzer that selects pulses within a predetermined voltage range among the pulses amplified by the amplifier, and a counting rate of the pulses selected by the pulse height analyzer Counting means for determining, and interlocking, changing the wavelength of the secondary X-rays incident on the detector and adjusting the predetermined voltage range in order to follow the change in the voltage of the pulse sent to the pulse height analyzer Dispersive X-ray fluorescence analysis with means In the apparatus, the deviation from the proportional relationship between the energy of the incident secondary X-rays and the voltage of the generated pulse in the detector is determined by a previously determined function of the energy or the lattice spacing and diffraction angle of the spectral element. A wavelength-dispersive fluorescent light X, wherein the interlocking means corrects by applying the function stored in the memory when adjusting the predetermined voltage range. Line analyzer.