JP3386270B2 - Magnetic head and magnetic recording device - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a microcrystalline precipitation type soft magnetic thin film, a magnetic head manufactured using the same, and a magnetic recording apparatus.

[0002]

2. Description of the Related Art With the progress of the advanced information society in recent years, there is an increasing need for a compact and high-density information storage device. Among them, studies on high-density recording and downsizing of magnetic recording devices are being rapidly advanced. In order to realize high-density magnetic recording, a magnetic recording medium having a high coercive force so that the recorded fine magnetic domains are stably present,
A high-performance magnetic head having a large magnetomotive force capable of stably recording information on the medium is required. In order to obtain a magnetic head capable of recording a signal by sufficiently magnetizing a high coercive force medium, a magnetic head material having a high saturation magnetic flux density and capable of generating a strong magnetic field is required.

As a magnetic material having a high saturation magnetic flux density, Fe--C type and Fe--N type materials are known. In order to develop soft magnetic properties, these materials were heat-treated at a constant temperature in an inert gas stream such as argon or nitrogen while applying a magnetic field of about 3 to 10 kOe as needed. . When the magnetic head is a metal-in-gap (MIG) type head, a glass bonding step is included in the head manufacturing step, and the heat treatment temperature is determined by this bonding temperature (bonding temperature is higher than soft magnetic characteristic expression temperature). Therefore, it is necessary to secure thermal stability at least to withstand this. In particular, since the soft magnetic characteristics of the magnetic film depend on the size of the fine crystal particles precipitated by heat treatment, the crystal particle size must be controlled in order to obtain a magnetic film having good soft magnetic characteristics. I have to.

Further, since these materials are mainly composed of Fe, they react with oxygen and water in the atmosphere to form hydroxides and oxides, and their magnetic properties, especially coercive force and saturation magnetic flux density Due to the fluctuation, the performance of the magnetic head may be deteriorated. Therefore, in practical application of a magnetic head using this material, while suppressing the variation of the magnetic characteristics due to corrosion when the magnetic film is left in the environment of use, the magnetic characteristics should not change even after the glass bonding process. As one of the methods, it has been proposed to add an element for improving corrosion resistance in addition to the magnetic element, but it has been difficult to achieve both soft magnetic characteristics and corrosion resistance. As an example of studying these points, Japanese Patent Laid-Open No. 3-20444 can be cited.

[0005]

According to the experiments by the present inventors, in the above method, even if the composition of the magnetic film is adjusted, the saturation magnetic flux density and the soft magnetic characteristics, especially the coercive force and the corrosion resistance are well balanced. It was not always possible to obtain a magnetic film having sufficient characteristics. For example, if corrosion resistance is secured, the magnetic properties, especially the saturation magnetic flux density and the coercive force will deteriorate, and
Since the performance of the -C and Fe-N magnetic materials cannot be obtained and the performance of the magnetic head is deteriorated, it may cause an error or noise when recording, and high density recording cannot be performed. There were cases. On the contrary, if importance is attached to the magnetic characteristics, sufficient corrosion resistance cannot be ensured, and the reliability of the magnetic head may decrease.

Further, due to the decrease of the saturation magnetic flux density and the increase of the magnetostriction constant due to the addition of an element other than the magnetic element, good recording cannot be performed or the output waveform is distorted during reproduction,
There may be a problem in recording / reproducing characteristics. An object of the present invention is to obtain a soft magnetic thin film having high performance and high reliability by improving corrosion resistance while maintaining magnetic characteristics in a magnetic thin film mainly composed of Fe or Co having a high saturation magnetic flux density, Another object of the present invention is to provide a magnetic head and a magnetic recording device using the soft magnetic thin film, which have high performance and high reliability.

[0007]

In the soft magnetic thin film according to the present invention, X is at least one element selected from the group of Nb, Ta, Hf and Zr, and Y is Cr, Ru, Al, Si and T.
i, one or two elements selected from the group of Rh, Z
_Is represented by Fe _100-abc X _a Y _b Z _c , where 5 ≦ a ≦
20, 0.5 ≦ b ≦ 15, 1 ≦ c ≦ 20, and 0.5 ≦
It is characterized in that a / c ≦ 0.7.

The soft magnetic thin film according to the present invention also has X as N.
b, Ta, Hf, at least one element selected from the group of Zr, Y is one or two elements selected from the group of Cr, Ru, Al, Si, Ti, Rh, Z is C, N When at least one element selected from the group is C,
o _100-abc X _a Y _b Z _c , and 5 ≦ a ≦ 20, 0.
5 ≦ b ≦ 15, 1 ≦ c ≦ 20, and 0.5 ≦ a / c ≦
It is characterized by being 0.7.

The soft magnetic thin film according to the present invention also has X as N.
b, Ta, Hf, at least one element selected from the group of Zr, Y is one or two elements selected from the group of Cr, Ru, Al, Si, Ti, Rh, Z is C, N When at least one element selected from the group is F,
e _100-abc X _a Y _b Z _c , and 5 ≦ a ≦ 20, 0.
5 ≦ b ≦ 15, 1 ≦ c ≦ 20, and 0.5 ≦ a / c ≦
It is 0.7, and the average crystal grain size of the carbide or nitride of the element X is 3 nm or less.

The soft magnetic thin film according to the present invention also has X as N.
b, Ta, Hf, at least one element selected from the group of Zr, Y is one or two elements selected from the group of Cr, Ru, Al, Si, Ti, Rh, Z is C, N When at least one element selected from the group is C,
o _100-abc X _a Y _b Z _c , and 5 ≦ a ≦ 20, 0.
5 ≦ b ≦ 15, 1 ≦ c ≦ 20, and 0.5 ≦ a / c ≦
It is 0.7, and the average crystal grain size of the carbide or nitride of the element X is 3 nm or less.

In any of the above soft magnetic thin films, the element Y is preferably Al--Si, Al, Cr--Ru, Cr--.
Rh or Ti-Cr. The ratio of a and c is 0.53 ≦
It is more preferable that a / c ≦ 0.70. Precipitation of microcrystals can be performed by applying heat energy to the thin film during or after film formation. For example, the heat treatment condition after film formation may be 550 ° C. to 600 ° C. for 20 minutes to 1 hour.

Here, the element X is set in the range of 5 to 20 at% when the content of the element X is less than 5 at%.
Rapidly grows, the coercive force increases beyond 1 Oe, and is unsuitable as a head characteristic. When it exceeds 20 at%, on the contrary, it becomes non-magnetic and is not suitable as a magnetic head material.
When the range is 5 to 15 at%, the coercive force is 1 Oe.
The following is obtained, and the magnetic permeability μ ≧ 1000 is more preferable. In the magnetic film according to the present invention, Nb, Ta, Hf,
Zr has the same effect in terms of magnetic properties and corrosion resistance.

The reason why the content of the element Y is in the range of 0.5 to 15 at% is that the corrosion resistance and heat resistance cannot be ensured unless the element Y is contained, and if the element Y is added in excess of 15 at%, the element Y is added to Fe. As a solid solution, the saturation magnetic flux density deteriorates,
Furthermore, it becomes non-magnetic. Further, the element Z is set in the range of 1 to 20 at% because when it is less than 1 at%, α-Fe or α-Co rapidly grows and the coercive force is 10 or less.
This is because it exceeds e, and when it exceeds 20 at%, it becomes nonmagnetic and is unsuitable as a magnetic head material. It is more preferable to set it in the range of 5 to 15 at% because the coercive force becomes 1 Oe or less and μ ≧ 1000. In the magnetic film according to the present invention, C and N have the same effect in terms of magnetic characteristics and corrosion resistance.

The soft magnetic thin film according to the present invention can be used in at least a part of the magnetic head core to form a magnetic head. A metal-in-gap (MIG) type magnetic head is particularly suitable as the magnetic head. By using this magnetic head, it is possible to configure a magnetic recording device that records information on a moving information recording medium by using magnetic properties. The information to be recorded can be image information and / or audio information, and the moving information recording medium can be a magnetic tape or a magnetic disk having a magnetic recording medium layer formed on a disc.

[0015]

In order to improve the corrosion resistance of the microcrystalline precipitation type magnetic thin film, it is important to control the crystal grain size of Fe or Co which is the main element and the crystal grain size of carbide or nitride. The crystal grain size of Fe or Co is Cr, R
It can be controlled by dissolving one or two elements selected from the group of u, Al, Si, Ti, and Rh in Fe or Co as a solid solution, and it can be controlled by Nb, Ta, Hf, Zr carbides or nitrides. Crystal grain size is Nb, Ta, H
This can be realized by controlling the ratio between the f and Zr concentrations and the C and N concentrations.

By controlling the ratio between the element X and the element Z, the average crystal grain size of the carbide or nitride of the element X precipitated by the heat treatment during film formation or after the film formation is set to 3 nm or less. Therefore, the corrosion resistance of the magnetic film can be made sufficient. At the same time, the main element Fe or Co exists as α-Fe or α-Co, and the (110) plane of the crystal plane is preferentially oriented. As a result, when the head is manufactured, the current required for erasing the recorded information with a constant erasing ratio is small, the erasing characteristics are good, and the boundary region of the magnetic domain shape formed during recording is clearly defined. Become.

[0017]

The present invention will be described in detail below with reference to examples. [Example 1] Fe-Ta-C-Cr-R as a magnetic thin film
A magnetic recording medium was produced using the u alloy film.

The magnetic film was formed by a sputtering method using Ar as a discharge gas. The target of spatter is
The powder of each element of Fe, Ta, C, Cr and Ru was molded by the hot isostatic pressing method (HIP method). The composition of the target is [Fe ₈₅ (Ta _x C _y ) ₁₅ ] _0.9 Cr ₈
Ru ₂ and the ratio x / y is 0.48, 0.53, 0.68, 0.70, 0.74 under the condition of x + y = 1.
It was changed to 0.87. When the target formed by this HIP method is used, the composition of the obtained film is almost the same as the target composition even if the target is thinned. As a sample for measuring the magnetic characteristics, a magnetic film prepared on a crystallized glass substrate whose surface was optically polished was used. The sputtering conditions change depending on the sputtering apparatus and the like, but in this embodiment, the discharge gas pressure was 5 mTorr and the input RF power was 400 W /
It was set to 150 mmφ. The thickness of the formed magnetic film is 5 μm. After the film formation, heat treatment was performed at 590 ° C. for 30 minutes in an Ar atmosphere. The heat treatment atmosphere is not limited to Ar,
Another atmosphere may be used as long as it is chemically inert to the material used.

First, x / y = 0.48, 0.53, 0.
The magnetic characteristics of the magnetic film were examined when the values were changed to 68, 0.70, 0.74, 0.87. The results are shown together in FIG. The saturation magnetic flux density Bs increased as the x / y value increased, and reached the maximum around x / y = 0.68. When the x / y value was further increased, Bs was decreased. Thus, Bs changes depending on the x / y value, and it is preferable to set the x / y value to 0.50 or more in order to obtain a large Bs. Also, 100 MH when used for a magnetic head
In order to set the coercive force to 0.5 Oe or less in consideration of the switching characteristics in the high frequency region of z or more, the x / y value should be 0.
It should be 50 or more. The value of the magnetic permeability μ increased with the increase of the x / y value, but x / y =
The value is 0.48, which is 2500 (1 MHz), and there is no particular problem as to the soft magnetic characteristics regardless of the x / y value. The magnetostriction constant λs does not depend on the x / y value, and has a substantially constant value (2 × 1
It was 0 ^-6). The value of the specific resistance ρ decreases gradually with the increase of x / y value, from 98 × 10 ⁻⁸ Ω · m to 80 × 1.
It changed to 0 ^-8 Ω · m.

The crystal structure of the magnetic film was examined by the X-ray diffraction method. The result is shown in FIG. x / y = 0.48-0.7
In the magnetic film of No. 4, the obtained peak is (110) of Fe.
Planes, the (211) plane of Fe and the (111) plane of TaC, and the (110) plane of Fe was preferentially oriented. On the other hand, in the magnetic film of x / y = 0.87, unlike the above-mentioned magnetic film, the (110) plane of Fe and the (211) plane of Fe
Plane, Fe (220) plane, TaC (111) plane, Ta
Many planes such as the (200) plane of C and the (220) plane of TaC are observed, and the peak intensity is increased and the peak is sharp, so that the crystal grains of the magnetic film are growing. I understand.

When the crystal grain size of these magnetic films was measured by a transmission electron microscope, x / y = 0.48-
Between 0.70, the crystal grain size of the (110) plane of Fe is 4 nm to 10 nm, and the average thereof is 8 nm.
Looking at the (111) plane of aC, the crystal grain size was 2 nm to 5 nm, and the average thereof was 3 nm. x / y
In the magnetic film of 0.87, unlike the above-mentioned magnetic film, Fe
The crystal grain size of the (110) plane is 5 nm to 11 nm
And its average is 8.5 nm, which is (111) of TaC.
Looking at the surface, the crystal grain size is 4 nm to 7 nm
The average is 5.5 nm, and this result is in agreement with the previous measurement result of X-ray diffraction.

Corrosion resistance of each magnetic film was evaluated by immersing the above-mentioned magnetic films having different x / y ratios in a 0.5N sodium chloride aqueous solution (26 ° C.) and measuring the change with time of the saturation magnetic flux density Bs. did. The result is shown in FIG. As can be seen from FIG. 3, Bs decreased slightly with the passage of time when x / y = 0.48. x / y = 0.53,0.
At 68,0.70, no change in Bs was observed even when left in this environment for 2000 hours or longer. Further, when x / y = 0.74, 0.87 where the ratio of x / y is large, the deterioration of Bs was large. Also, x / y = 0.53,0.6
8,0.70 magnetic film 60 ℃ -95% RH and 80 ℃
Even when left in a high temperature and high humidity environment such as −95% RH, no change in magnetic characteristics or pitting corrosion was observed.

From the above examination, good magnetic properties were obtained.
In addition, as a composition that can obtain a film having high corrosion resistance,
x / y = 0.50-0.70 is suitable, and among them x /
y = 0.68 was the most suitable from the viewpoint of Bs. next,
The MIG type whose schematic structure is shown in FIG.
A head was produced. When making a magnetic head,
On the single crystal ferrite substrate 2 whose surface is grooved with unevenness
The soft magnetic thin film 1 is formed by sputtering using Ar as a discharge gas.
It was formed to a thickness of 5 μm. The composition of the magnetic film used is (F
e₇₈Ta₈C₁₄)_0.9(Cr₆₀Ru ₄₀)_0.1Is. Magnetism
Prior to forming the film, Cr, SiO₂, Al, Cr₂O₃etc
You may provide the base film of 5-20 nm. The base film is
If it is thinner than this, there is no effect, and if it is thicker, the magnetic gap
Will be. The gap 3 is on the ferrite substrate 2.
On the soft magnetic thin film 1 of₂Formed to a film thickness of 200 nm
Then, Cr is formed thereon to a film thickness of 10 nm.
I got it. This is heat-treated in a nitrogen stream at 600 ° C for 30 minutes
Then, the head substrate of the same shape is bonded with the low melting point glass 4.
To make a magnetic head. The heat treatment temperature is
It is controlled by the temperature in the lath bonding process. substrate
The base film provided between the magnetic film and the magnetic film improves the adhesion between the two.
It is mainly used to control the crystal orientation of the magnetic film that is formed.
It As a result, the recording / reproducing characteristics when the head is formed are
Of course, when erasing, to obtain a constant erasing ratio
It is also effective in reducing the required erase current.

A VTR device was produced using this magnetic head, and a tape was run to record image information. High-definition digital information recorded, S / N is 4
A value of 0 dB or more was obtained. Here, the relative speed is 36m /
s, the data transfer rate is 46.1 Mbps, and the track width is 40 μm. The corrosion resistance of this head was evaluated by the immersion test method in a 0.5N sodium chloride aqueous solution and the dew condensation test method in a high temperature and high humidity environment (60 ° C., relative humidity 95%). First, the MIG type head chip was immersed in a 0.5N sodium chloride aqueous solution for 500 hours. Then, the head was set again in the apparatus and the recording / reproducing characteristics were measured. As a result, no difference was seen in the recording / reproducing characteristics before immersion. In the evaluation by the dew condensation test method in a high temperature and high humidity environment, the MIG head was fixed on a Peltier device and kept at 10 ° C., and the whole was left in an environment of a temperature of 60 ° C. and a relative humidity of 95%. As a result, dew condensation occurred on the entire head. When left in this environment for more than 2000 hours in this state, neither corrosion nor deterioration of recording characteristics or reproduction signal was observed.

Up to now, the magnetic head for the VTR has been described as an example, but the present invention can be applied to a magnetic disk or a magnetic tape device using a helical scan system, and the same effect can be expected. . The above is Fe-Ta
This is the case where the -C-Cr-Ru alloy film is used as the magnetic film, but even if Ta is changed to Nb, Hf, and Zr, Cr-Ru is changed to Al-Si, Al, Cr-Rh, Ti-Cr, or the like. Even if it changed, the same effect was obtained.

Typical magnetic thin films having different compositions formed by using a target formed by the HIP method and using Ar as a sputtering gas to form a film having a thickness of 5 μm, the magnetic properties and the corrosion resistance are the same as those described above. Was evaluated. The measurement results are shown in Table 1. In the table, the unit of saturation magnetic flux density Bs is T, the unit of coercive force Hc is Oe, the permeability μ is a value at 1 MHz, the unit of magnetostriction constant λs is 10 ⁻⁶ , the unit of specific resistance ρ is 10 ⁻⁸ Ω · m. Is. Bs (0) is the value of the saturation magnetic flux density of the magnetic film after film formation, and Bs (t) is the value of the saturation magnetic flux density after the magnetic film is immersed in a 0.5N sodium chloride aqueous solution for 200 hours. . Therefore, the numerical value (%) in the Bs (t) / Bs (0) column represents the corrosion resistance of the magnetic film, and the larger the value, the higher the corrosion resistance.

Table 1 Bs Hc μ λ ρ Bs (t) / Bs (0) (Fe ₇₈ Nb ₉ C ₁₃ ) _0.9 (Cr ₇₀ Ru ₃₀ ) _0.1 1.45 <0.1 2500 1 98 100 (Fe ₇₈ Hf ₉ C ₁₃ ) _0.9 (Cr ₇₀ Ru ₃₀ ) _0.1 1.49 <0.1 3000 0.9 85 100 (Fe ₇₈ Zr ₉ C ₁₃ ) _0.9 (Cr ₇₀ Ru ₃₀ ) _0.1 1.45 <0.1 3000 2 93 100 (Fe ₇₈ Ta ₈ C ₁₄ ) _0.9 (Cr ₇₀ Rh ₃₀ ) _0.1 1.40 <0.1 2000 2 88 100 (Fe ₇₈ Nb ₈ C ₁₄ ) _0.91 (Cr ₇₀ Rh ₃₀ ) _0.09 1.42 <0.1 2000 1 89 100 (Fe ₇₉ Hf ₇ C ₁₄ ) _0.9 (Cr ₇₀ Rh ₃₀ ) _0.1 1.52 <0.1 3000 0.9 98 100 (Fe ₇₈ Zr ₈ C ₁₄ ) _0.9 (Cr ₇₀ Rh ₃₀ ) _0.1 1.43 <0.1 2500 1 93 100 (Fe ₇₈ Ta ₈ C ₁₄ ) _0.9 Al ₁₀ 1.43 <0.1 3500 0.8 98 100 (Fe ₇₈ Nb ₈ C ₁₄ ) _0.9 Al ₁₀ 1.40 <0.1 3000 0.9 95 100 (Fe ₇₉ Hf ₇ C ₁₄ ) _0.9 Al ₁₀ 1.50 <0.1 3000 1 95 100 (Fe ₇₈ Zr ₉ C ₁₃ ) _0.9 Al ₁₀ 1.40 <0.1 2300 1 89 100 (Fe ₇₈ Ta ₉ C ₁₃ ) _0.9 (Al ₆₅ Si ₃₅ ) _0.1 1.51 <0.1 3800 0.6 103 100 (Fe ₇₈ Nb ₉ C ₁₃ ) _0.9 (Al ₆₅ Si ₃₅ ) _0.1 1.43 <0.1 2900 0.7 98 100 (Fe ₈₀ Hf ₇ C ₁₃ ) _0.9 (Al ₆₅ Si ₃₅ ) _0.1 1.50 <0.1 3000 0.5 108 100 (Fe ₇₈ Zr ₉ C ₁₃ ) _0.9 (Al ₆₅ Si ₃₅ ) _0.1 1.40 <0 .1 3000 0.8 95 100 (Fe ₇₈ Ta ₉ C ₁₃ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.35 <0.1 2000 1 95 100 (Fe ₇₈ Nb ₉ C ₁₃ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.36 <0.1 2100 1 96 100 (Fe ₈₀ Hf ₇ C ₁₃ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.45 <0.1 2800 0.9 97 100 (Fe ₇₈ Zr ₉ C ₁₃ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.40 <0.1 3000 1 95 100 (Fe ₇₈ Ta ₄ Nb ₅ C ₁₃ ) _0.9 (Cr ₈₀ Ru ₂₀ ) _0.1 1.40 <0.1 2300 1 95 100 (Fe ₈₀ Ta ₂ Hf ₅ C ₁₃ ) _0.9 (Cr ₈₀ Rh ₂₀ ) _0.1 1.50 <0.1 2800 0.8 95 100 (Fe ₇₈ Ta ₅ Zr ₄ C ₁₃ ) _0.9 Al ₁₀ 1.45 <0.1 2800 1 98 100 (Fe ₈₀ Nb ₂ Hf ₅ C ₁₃ ) _0.9 (Al ₇₀ Si ₃₀ ) _0.1 1.51 <0.1 3000 0.7 98 100 (Fe ₈₀ Hf ₅ Zr ₂ C ₁₃ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.50 <0.1 2300 2 93 100

The coercive force of these magnetic thin films did not depend on the composition, and all showed a value smaller than 0.1 Oe. The additive element forms a solid solution with Fe to form an alloy such as an intermetallic compound. Therefore, it is considered that the crystal growth of Fe is suppressed during the heat treatment, and as a result, not only the corrosion resistance is improved without deteriorating the magnetic properties, but also the heat resistance is further improved.

However, Fe_100-abcX_aY_bC_c(However
X is a small number selected from the group of Nb, Ta, Hf and Zr.
At least one element, Y is Cr, Ru, Al, Si, T
i, one or two elements selected from the group of Rh)
The composition of the magnetic thin film represented is 5 ≦ a ≦ 20, 0.5 ≦ b
≦ 15, 1 ≦ c ≦ 20, and 0.5 ≦ a / c ≦ 0.7
If out of range, as shown in Table 2 below, for example,
Cannot satisfy the soft magnetic properties and corrosion resistance of
It was The unit of the saturation magnetic flux density Bs in the table is T and the holding force Hc
Unit is Oe, permeability μ is value at 1MHz, magnetostriction constant
The unit of λs is 10 ^-6, The unit of resistivity ρ is 10^-8In Ω · m
is there. Bs (0) is the saturation magnetic flux density of the magnetic film after film formation.
Value, Bs (t) is 0.5 N sodium chloride water for the magnetic film.
The value of the saturation magnetic flux density after being immersed in the solution for 200 hours.
It

Table 2 Bs Hc μ λ ρ Bs (t) / Bs (0) (Fe ₇₂ Ta ₁₄ C ₁₄ ) _0.9 (Cr ₈₀ Ru ₂₀ ) _0.1 1.28 0.3 3000 1 95 60 (Fe ₇₂ Nb ₁₄ C ₁₄ ) _0.9 (Cr ₈₀ Ru ₂₀ ) _0.1 1.28 0.3 2800 2 93 60 (Fe ₇₄ Hf ₁₂ C ₁₄ ) _0.9 (Cr ₈₀ Ru ₂₀ ) _0.1 1.33 0.25 2900 1 97 60 (Fe ₇₂ Zr ₁₄ C ₁₄ ) _0.9 (Cr ₈₀ Ru ₂₀ ) _0.1 1.28 0.3 2500 2 90 60 (Fe ₇₂ Ta ₁₄ C ₁₄ ) _0.9 (Cr ₈₀ Rh ₂₀ ) _0.1 1.28 0.3 3100 2 95 60 (Fe ₇₂ Nb ₁₄ C ₁₄ ) _0.9 (Cr ₈₀ Rh ₂₀ ) _0.1 1.28 0.3 3000 2.5 93 60 (Fe ₇₄ Hf ₁₂ C ₁₄ ) _0.9 (Cr ₈₀ Rh ₂₀ ) _0.1 1.32 0.25 3000 1 97 60 (Fe ₇₂ Zr ₁₄ C ₁₄ ) _0.9 (Cr ₈₀ Rh ₂₀ ) _0.1 1.28 0.3 2900 2 91 60 (Fe ₇₂ Ta ₁₄ C ₁₄ ) _0.9 Al ₁₀ 1.35 0.2 3000 1 99 80 (Fe ₇₂ Nb ₁₄ C ₁₄ ) _0.9 Al ₁₀ 1.30 0.2 3000 2 95 70 (Fe ₇₄ Hf ₁₂ C ₁₄ ) _0.9 Al ₁₀ 1.38 0.2 3500 1 98 80 (Fe ₇₂ Zr ₁₄ C ₁₄ ) _0.9 Al ₁₀ 1.29 0.2 3000 1 97 70 (Fe ₇₈ Ta ₁₁ C ₁₁ ) _0.9 (Al ₆₀ Si ₄₀ ) _0.1 1.45 <0.1 3500 0.7 95 85 (Fe ₇₈ Nb ₁₁ C ₁₁ ) _0.9 (Al ₆₀ Si ₄₀ ) _0.1 1.43 <0.1 3500 0.8 95 78 (Fe ₇₈ Hf ₁₁ C ₁₁ ) _0.9 (Al ₆₀ Si ₄₀ ) _0.1 1.50 <0.1 3800 0.7 98 85 (Fe ₇₈ Zr ₁₁ C ₁₁ ) _0.9 (Al ₆₀ Si ₄₀ ) _0.1 1.45 <0.1 3300 0.8 95 78 (Fe ₇₈ Ta ₁₁ C ₁₁ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.35 <0.1 3000 1 90 55 (Fe ₇₈ Nb ₁₁ C ₁₁ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.32 <0.1 3500 2 89 55 (Fe ₇₈ Hf ₁₁ C ₁₁ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.33 <0.1 3000 1 92 55 (Fe ₇₈ Zr ₁₁ C ₁₁ ) _0.9 ( Ti ₃₀ Cr ₇₀ ) _0.1 1.32 <0.1 3200 2 92 55 (Fe ₇₈ Ta ₆ Nb ₅ C ₁₁ ) _0.9 (Cr ₈₀ Ru ₂₀ ) _0.1 1.32 <0.1 2800 1 90 60 (Fe ₇₈ Ta ₆ Hf ₅ C ₁₁ ) _0.9 ( Cr ₈₀ Rh ₂₀ ) _0.1 1.35 <0.1 2700 2 89 60 (Fe ₇₈ Ta ₆ Zr ₅ C ₁₁ ) _0.9 Al ₁₀ 1.30 <0.1 2600 2 92 55 (Fe ₇₈ Nb ₆ Hf ₅ C ₁₁ ) _0.9 (Al ₆₀ Si ₄₀ ) _0.1 1.35 <0.1 2700 1 91 60 (Fe ₇₈ Hf ₅ Zr ₆ C ₁₁ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.32 <0.1 2800 1 90 60

Even if Fe is changed to Co, as shown below, a soft magnetic thin film having similar characteristics in other respects can be obtained by only decreasing the saturation magnetic flux density Bs by about 0.1T as compared with the case of Fe. Was given. A target formed by the HIP method was used in the same manner as described above, and Ar was used as a sputtering gas to obtain a thickness of 5 μm.
Magnetic properties and corrosion resistance were evaluated in the same manner as described above with respect to typical magnetic thin films having different compositions formed in the same thickness. The measurement results are shown in Table 3. Saturation magnetic flux density Bs in the table
Is T, the coercive force Hc is Oe, and the magnetic permeability μ is 1M.
The value in Hz, the unit of the magnetostriction constant λs is 10 ⁻⁶ , and the unit of the specific resistance ρ is 10 ⁻⁸ Ω · m. Bs (0) is the value of the saturation magnetic flux density of the magnetic film after film formation, and Bs (t) is the value of the saturation magnetic flux density after the magnetic film is immersed in a 0.5N sodium chloride aqueous solution for 200 hours. .

Table 3 Bs Hc μ λ ρ Bs (t) / Bs (0) (Co ₇₈ Ta ₉ C ₁₃ ) _0.9 (Cr ₇₀ Ru ₃₀ ) _0.1 1.35 <0.1 2000 1 90 100 (Co ₇₈ Nb ₉ C ₁₃ ) _0.9 (Cr ₇₀ Ru ₃₀ ) _0.1 1.35 <0.1 2000 1 90 100 (Co ₇₈ Hf ₉ C ₁₃ ) _0.9 (Cr ₇₀ Ru ₃₀ ) _0.1 1.39 <0.1 2300 0.9 93 100 (Co ₇₈ Zr ₉ C ₁₃ ) _0.9 (Cr ₇₀ Ru ₃₀ ) _0.1 1.35 <0.1 2100 1 83 100 (Co ₇₈ Ta ₈ C ₁₄ ) _0.9 (Cr ₇₀ Rh ₃₀ ) _0.1 1.30 <0.1 2000 1 88 100 (Co ₇₈ Nb ₈ C ₁₄ ) _0.91 (Cr ₇₀ Rh ₃₀ ) _0.09 1.32 <0.1 2000 1 83 100 (Co ₇₉ Hf ₇ C ₁₄ ) _0.9 (Cr ₇₀ Rh ₃₀ ) _0.1 1.40 <0.1 2300 0.9 85 100 (Co ₇₈ Zr ₈ C ₁₄ ) _0.9 (Cr ₇₀ Rh ₃₀ ) _0.1 1.33 <0.1 2000 1 80 100 (Co ₇₈ Ta ₈ C ₁₄ ) _0.9 Al ₁₀ 1.33 <0.1 2 100 1 98 100 (Co ₇₈ Nb ₈ C ₁₄ ) _0.9 Al ₁₀ 1.30 <0.1 2000 1 99 100 (Co ₇₉ Hf ₇ C ₁₄ ) _0.9 Al ₁₀ 1.40 <0.1 2400 1 103 100 (Co ₇₈ Zr ₉ C ₁₃ ) _0.9 Al ₁₀ 1.30 <0.1 2000 2 97 100 (Co ₇₈ Ta ₉ C ₁₃ ) _0.9 (Al ₆₅ Si ₃₅ ) _0.1 1.41 <0.1 2800 0.6 98 100 (Co ₇₈ Nb ₉ C ₁₃ ) _0.9 (Al ₆₅ Si ₃₅ ) _0.1 1.33 <0.1 2600 0.8 93 100 (Co ₈₀ Hf ₇ C ₁₃ ) _0.9 (Al ₆₅ Si ₃₅ ) _0.1 1.40 <0.1 3000 0.4 105 100 (Co ₇₈ Zr ₉ C ₁₃ ) _0.9 (Al ₆₅ Si ₃₅ ) _0.1 1.30 <0.1 2700 0.8 97 100 (Co ₇₈ Ta ₉ C ₁₃ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.25 <0.1 2100 1 90 100 ( Co ₇₈ Nb ₉ C ₁₃ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.26 <0.1 2300 1 88 100 (Co ₈₀ Hf ₇ C ₁₃ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.35 <0.1 2800 1 85 100 (Co ₇₈ Zr ₉ C ₁₃ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.30 <0.1 1900 1 88 100 (Co ₇₈ Ta ₄ Nb ₅ C ₁₃ ) _0.9 (Cr ₈₀ Ru ₂₀ ) _0.1 1.30 <0.1 1900 1 90 100 (Co ₈₀ Ta ₂ Hf ₅ C ₁₃ ) _0.9 (Cr ₈₀ Rh ₂₀ ) _0.1 1.40 <0.1 1800 1 88 100 (Co ₇₈ Ta ₅ Zr ₄ C ₁₃ ) _0.9 Al ₁₀ 1.35 <0.1 1800 1 85 100 (Co ₈₀ Nb ₂ Hf ₅ C ₁₃ ) _0.9 ( Al ₇₀ Si ₃₀ ) _0.1 1.41 <0.1 2000 0.8 83 100 (Co ₈₀ Hf ₅ Zr ₂ C ₁₃ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.40 <0.1 1900 1 90 100

The coercive force Hc of these magnetic thin films did not depend on the composition, and all showed values smaller than 0.1 Oe.
The additive element forms a solid solution with Co to form an alloy such as an intermetallic compound. Therefore, it is considered that the crystal growth of Co is suppressed during the heat treatment and, as a result, not only the corrosion resistance is improved without deteriorating the magnetic properties but also the heat resistance is further improved.

However, Co_100-abcX_aY_bC_c(However
X is a small number selected from the group of Nb, Ta, Hf and Zr.
At least one element, Y is Cr, Ru, Al, Si, T
i, one or two elements selected from the group of Rh)
The composition of the magnetic thin film represented is 5 ≦ a ≦ 20, 0.5 ≦ b
≦ 15, 1 ≦ c ≦ 20, and 0.5 ≦ a / c ≦ 0.7
If out of range, as shown in Table 4 below, for example,
Cannot satisfy the soft magnetic properties and corrosion resistance of
It was The unit of the saturation magnetic flux density Bs in the table is T and the holding force Hc
Unit is Oe, permeability μ is value at 1MHz, magnetostriction constant
The unit of λs is 10 ^-6, The unit of resistivity ρ is 10^-8In Ω · m
is there. Bs (0) is the saturation magnetic flux density of the magnetic film after film formation.
Value, Bs (t) is 0.5 N sodium chloride water for the magnetic film.
The value of the saturation magnetic flux density after being immersed in the solution for 200 hours.
It

Table 4 Bs Hc μ λ ρ Bs (t) / Bs (0) (Co ₇₂ Ta ₁₄ C ₁₄ ) _0.9 (Cr ₈₀ Ru ₂₀ ) _0.1 1.18 0.4 2000 1 78 65 (Co ₇₂ Nb ₁₄ C ₁₄ ) _0.9 (Cr ₈₀ Ru ₂₀ ) _0.1 1.18 0.4 2500 1 88 65 (Co ₇₄ Hf ₁₂ C ₁₄ ) _0.9 (Cr ₈₀ Ru ₂₀ ) _0.1 1.23 0.2 2600 1 80 65 (Co ₇₂ Zr ₁₄ C ₁₄ ) _0.9 (Cr ₈₀ Ru ₂₀ ) _0.1 1.38 0.4 2800 1 83 65 (Co ₇₂ Ta ₁₄ C ₁₄ ) _0.9 (Cr ₈₀ Rh ₂₀ ) _0.1 1.18 0.4 2500 1 90 65 (Co ₇₂ Nb ₁₄ C ₁₄ ) _0.9 (Cr ₈₀ Rh ₂₀ ) _0.1 1.18 0.4 2000 1 93 65 (Co ₇₄ Hf ₁₂ C ₁₄ ) _0.9 (Cr ₈₀ Rh ₂₀ ) _0.1 1.22 0.4 2500 1 97 65 (Co ₇₂ Zr ₁₄ C ₁₄ ) _0.9 (Cr ₈₀ Rh ₂₀ ) _0.1 1.18 0.4 1800 1 91 65 (Co ₇₂ Ta ₁₄ C ₁₄ ) _0.9 Al ₁₀ 1.25 0.2 3300 1 98 85 (Co ₇₂ Nb ₁₄ C ₁₄ ) _0.9 Al ₁₀ 1.20 0.2 3200 1 96 75 (Co ₇₄ Hf ₁₂ C ₁₄ ) _0.9 Al ₁₀ 1.28 0.2 3200 1 99 85 (Co ₇₂ Zr ₁₄ C ₁₄ ) _0.9 Al ₁₀ 1.19 0.2 3100 1 95 80 (Co ₇₈ Ta ₁₁ C ₁₁ ) _0.9 (Al ₆₀ Si ₄₀ ) _0.1 1.35 <0.1 3100 0.7 95 85 (Co ₇₈ Nb ₁₁ C ₁₁ ) _0.9 (Al ₆₀ Si ₄₀ ) _0.1 1.33 <0.1 2900 0.9 90 85 (Co ₇₈ Hf ₁₁ C ₁₁ ) _0.9 (Al ₆₀ Si ₄₀ ) _0.1 1.40 <0.1 2800 0.5 98 85 (Co ₇₈ Zr ₁₁ C ₁₁ ) _0.9 (Al ₆₀ Si ₄₀ ) _0.1 1.35 <0.1 2500 0.9 90 85 (Co ₇₈ Ta ₁₁ C ₁₁ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.25 <0.1 3000 1 93 65 (Co ₇₈ Nb ₁₁ C ₁₁ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.22 <0.1 2800 1 90 65 (Co ₇₈ Hf ₁₁ C ₁₁ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.23 <0.1 3100 1 98 65 (Co ₇₈ Zr ₁₁ C ₁₁ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.22 <0.1 2800 1 90 65 (Co ₇₈ Ta ₆ Nb ₅ C ₁₁ ) _0.9 (Cr ₈₀ Ru ₂₀ ) _0.1 1.22 <0.1 2000 1 90 70 (Co ₇₈ Ta ₆ Hf ₅ C ₁₁ ) _0.9 (Cr ₈₀ Rh ₂₀ ) _0.1 1.25 <0.1 2100 1 92 70 (Co ₇₈ Ta ₆ Zr ₅ C ₁₁ ) _0.9 Al ₁₀ 1.20 <0.1 2000 1 89 60 (Co ₇₈ Nb ₆ Hf ₅ C ₁₁ ) _0.9 (Al ₆₀ Si ₄₀ ) _0.1 1.25 <0.1 2300 0.6 95 65 (Co ₇₈ Hf ₅ Zr ₆ C ₁₁ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.22 <0.1 2200 0.6 95 65

Example 2 Fe-Ta-as a magnetic thin film
A magnetic recording medium was produced using the N-Cr-Ru alloy film. The magnetic film was formed by a sputtering method using Ar / N ₂ mixed gas as the sputtering gas. As a target for sputtering, a powder of each element of Fe, Ta, Cr, Ru and its nitride was molded by a hot isostatic pressing method (HIP method). Adjust the partial pressure of N ₂ gas to
And N concentration ratio x / y = 0.48, 0.55, 0.68,
The composition of the magnetic thin film was changed to 0.70, 0.75, 0.88. As a sample for measuring the magnetic characteristics, a magnetic film prepared on a crystallized glass substrate whose surface was optically polished was used. Although the sputtering conditions vary depending on the sputtering apparatus and the like, in the present embodiment, the discharge gas pressure is 5 mTorr,
The input RF power was 400 W / 150 mmφ. The thickness of the formed magnetic film is 5 μm. After the film formation, heat treatment was performed at 590 ° C. for 30 minutes in an Ar atmosphere.

[0037] have a _{(Fe 100-xy Ta x N} y) 0.9 Cr 8 Ru 2 having a composition, in x + y = 20 to 30, and, x / y =
0.48, 0.55, 0.68, 0.70, 0.75
The change of the saturation magnetic flux density Bs of the magnetic film of 0.88 was investigated. The result is shown in FIG. Saturation magnetic flux density Bs is x / y
It increased as the value increased and reached a maximum at x / y = 0.68, and Bs at that time was 1.5T. When the x / y value was further increased, Bs was decreased. Thus, it can be seen that Bs changes depending on the x / y value. From FIG.
To obtain a large Bs, x / y is 0.50 to 0.9
It can be seen that the range of 0 is effective. x / y
= 0.68, the coercive force Hc is 0.15 Oe, the magnetic permeability μ is 2300 (1 MHz), and the magnetostriction constant λs is 1.5 × 1.
0 ⁻⁶ , specific resistance ρ was 95 × 10 ⁻⁸ Ω · m.

The crystal grain size of the magnetic film was examined by a transmission electron microscope. When x / y = 0.48 to 0.70, the crystal grain size of the (110) plane of Fe is 4 nm to 1
At 0 nm, the average is 8 nm, and (11 of TaN
1) Looking at the plane, the crystal grain size is 2 nm to 5 n
m, and the average was 3 nm. x / y = 0.8
In the magnetic film of No. 8, unlike the above-mentioned magnetic film, Fe (11
The crystal grain size of the (0) plane is 5 nm to 11 nm, and the average thereof is 8.5 nm. Looking at the (111) plane of TaN, the crystal grain size is 4 nm to 7 nm, and the average thereof is 5.5 nm. It was

Saturation magnetic flux density B was obtained by immersing the above-mentioned magnetic films having different x / y ratios in 0.5N sodium chloride aqueous solution.
The corrosion resistance of the magnetic film was evaluated by measuring the change with time of s. As a result, in the case of x / y = 0.48, Bs decreased 5% of the initial value in 200 hours with the passage of time. When x / y = 0.55 to 0.70, no change in Bs was observed even when left in this environment for 2000 hours or longer. Furthermore, the ratio of x / y is large, x / y = 0.75.
At 0.88, the deterioration of Bs increased, and the ratio of deterioration increased as the ratio of x / y increased. Also, x /
The magnetic film of y = 0.55, 0.68, 0.70 is formed at 60.degree.
Even when the above-mentioned magnetic film was allowed to stand in a high temperature and high humidity environment such as 95% RH and 80 ° C.-95% RH, changes in magnetic properties and pitting corrosion were not observed. From the above examination, it was found that the composition range in which a film having good soft magnetic characteristics and high corrosion resistance can be obtained is x / y = 0.50 to 0.70, and among them, x / y = 0. It can be seen that the vicinity of 68 is most suitable from the viewpoint of Bs.

Next, using the above-mentioned magnetic film, a MIG type head whose schematic structure is shown in FIG. 4 was produced. In manufacturing a magnetic head, first, a soft magnetic thin film 1 was formed on a single crystal ferrite substrate 2 having a grooved surface, by sputtering using an Ar / N ₂ mixed gas as a discharge gas. The composition of the magnetic film used, in _{(Fe 78 Ta 9 N 13)} 0.9 Cr 8 Ru 2,
This corresponds to x / y = 0.69. The gap portion 3 is formed by coating the soft magnetic thin film 1 on the ferrite substrate 2 with SiO ₂ 200
It was formed by forming a film having a thickness of 100 nm and Cr having a film thickness of 100 nm thereon. 600 in a nitrogen stream
A heat treatment was performed at 1 ° C. for 1 hour, and a head substrate having the same shape was bonded with a low melting point glass 4 to form a magnetic head. The heat treatment temperature is controlled by the temperature in this glass bonding process. A bonding layer for improving the adhesiveness between the substrate and the magnetic film, such as Cr or A having a thickness of about 5 nm to 20 nm.
A metal layer such as 1 or an inorganic compound layer such as SiO ₂ or Cr ₂ O ₃ may be provided.

A VTR device was produced using this magnetic head, and a tape was run to record image information. High-definition digital information recorded, S / N is 4
A value of 0 dB or more was obtained. Here, the relative speed is 36m /
s, data rate 46.1 Mbps, track width 4
It is 0 μm. The corrosion resistance of this head was evaluated by the immersion test method in a 0.5N sodium chloride aqueous solution and the dew condensation test method in a high temperature and high humidity environment (60 ° C., 95% relative humidity). First, the MIG type head chip was immersed in a 0.5N sodium chloride aqueous solution for 500 hours. Then, the head was set again in the apparatus and the recording / reproducing characteristics were measured. As a result, no difference was seen in the recording / reproducing characteristics before immersion. Further, the evaluation by the dew condensation test method in a high temperature and high humidity environment was carried out by fixing the MIG head on the Peltier element and keeping it at 10 ° C, and the whole at 60 ° C and a relative humidity of 95%.
It was left in the environment. As a result, dew condensation occurred on the entire head. When left in this environment for more than 2000 hours in this state, neither corrosion nor deterioration of recording and reproducing signals was observed.

The above is the case where the Fe-Ta-N-Cr-Ru alloy film is used as the magnetic film. As shown below,
Even if Ta is changed to Nb, Hf, and Zr, Cr-Ru is changed to Al.
Similar effects were obtained even if the material was changed to -Si, Al, Cr-Rh, Ti-Cr, or the like. A typical magnetic thin film having a different composition was formed by using a target formed by the HIP method in the same manner as described above and using Ar / N ₂ mixed gas as a sputtering gas to form a film having a different composition. The magnetic properties and corrosion resistance were evaluated by the method. The measurement results are shown in Table 5. In the table, the unit of saturation magnetic flux density Bs is T, the unit of coercive force Hc is Oe, the permeability μ is a value at 1 MHz, the unit of magnetostriction constant λs is 10 ⁻⁶ , the unit of specific resistance ρ is 10 ⁻⁸ Ω · m. Is. Bs (0) is the value of the saturation magnetic flux density of the magnetic film after film formation, and Bs (t) is the value of the saturation magnetic flux density after the magnetic film is immersed in a 0.5N sodium chloride aqueous solution for 200 hours. .

Table 5 Bs Hc μ λ ρ Bs (t) / Bs (0) (Fe ₇₈ Nb ₉ N ₁₃ ) _0.9 (Cr ₇₀ Ru ₃₀ ) _0.1 1.45 <0.1 2500 1 98 100 (Fe ₇₈ Hf ₉ N ₁₃ ) _0.9 (Cr ₇₀ Ru ₃₀ ) _0.1 1.49 <0.1 3000 0.9 85 100 (Fe ₇₈ Zr ₉ N ₁₃ ) _0.9 (Cr ₇₀ Ru ₃₀ ) _0.1 1.45 <0.1 3000 2 93 100 (Fe ₇₈ Ta ₈ N ₁₄ ) _0.9 (Cr ₇₀ Rh ₃₀ ) _0.1 1.40 <0.1 2000 2 88 100 (Fe ₇₈ Nb ₈ N ₁₄ ) _0.91 (Cr ₇₀ Rh ₃₀ ) _0.09 1.42 <0.1 2000 1 89 100 (Fe ₇₉ Hf ₇ N ₁₄ ) _0.9 (Cr ₇₀ Rh ₃₀ ) _0.1 1.52 <0.1 3000 0.9 98 100 (Fe ₇₈ Zr ₈ N ₁₄ ) _0.9 (Cr ₇₀ Rh ₃₀ ) _0.1 1.43 <0.1 2500 1 93 100 (Fe ₇₈ Ta ₈ N ₁₄ ) _0.9 Al ₁₀ 1.43 <0.1 3500 0.8 98 100 (Fe ₇₈ Nb ₈ N ₁₄ ) _0.9 Al ₁₀ 1.40 <0.1 3000 0.9 95 100 (Fe ₇₉ Hf ₇ N ₁₄ ) _0.9 Al ₁₀ 1.50 <0.1 3000 1 95 100 (Fe ₇₈ Zr ₉ N ₁₃ ) _0.9 Al ₁₀ 1.40 <0.1 2300 1 89 100 (Fe ₇₈ Ta ₉ N ₁₃ ) _0.9 (Al ₆₅ Si ₃₅ ) _0.1 1.51 <0.1 3800 0.6 103 100 (Fe ₇₈ Nb ₉ N ₁₃ ) _0.9 (Al ₆₅ Si ₃₅ ) _0.1 1.43 <0.1 2900 0.7 98 100 (Fe ₈₀ Hf ₇ N ₁₃ ) _0.9 (Al ₆₅ Si ₃₅ ) _0.1 1.50 <0.1 3000 0.5 108 100 (Fe ₇₈ Zr ₉ N ₁₃ ) _0.9 (Al ₆₅ Si ₃₅ ) _0.1 1.40 <0 .1 3000 0.8 95 100 (Fe ₇₈ Ta ₉ N ₁₃ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.35 <0.1 2000 1 95 100 (Fe ₇₈ Nb ₉ N ₁₃ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.36 <0.1 2100 1 96 100 (Fe ₈₀ Hf ₇ N ₁₃ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.45 <0.1 2800 0.9 97 100 (Fe ₇₈ Zr ₉ N ₁₃ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.40 <0.1 3000 1 95 100 (Fe ₇₈ Ta ₄ Nb ₅ N ₁₃ ) _0.9 (Cr ₈₀ Ru ₂₀ ) _0.1 1.40 <0.1 2300 1 95 100 (Fe ₈₀ Ta ₂ Hf ₅ N ₁₃ ) _0.9 (Cr ₈₀ Rh ₂₀ ) _0.1 1.50 <0.1 2800 0.8 95 100 (Fe ₇₈ Ta ₅ Zr ₄ N ₁₃ ) _0.9 Al ₁₀ 1.45 <0.1 2800 1 98 100 (Fe ₈₀ Nb ₂ Hf ₅ N ₁₃ ) _0.9 (Al ₇₀ Si ₃₀ ) _0.1 1.51 <0.1 3000 0.7 98 100 (Fe ₈₀ Hf ₅ Zr ₂ N ₁₃ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.50 <0.1 2300 2 93 100

As can be seen from Table 5, even if C was changed to N, there was almost no change in the magnetic characteristics of the magnetic film. Also in these magnetic films, the additional element forms a solid solution with Fe to form an alloy such as an intermetallic compound. Therefore, Fe crystal growth is suppressed during heat treatment, and as a result,
In addition to improving the corrosion resistance without deteriorating the magnetic properties, it is considered that the heat resistance can be further improved.

However, even in this Fe--N type magnetic film, Fe _100-abc X _a Y _b N _c (where X is Nb, T
composition of the magnetic thin film represented by at least one element selected from the group of a, Hf and Zr, Y is one or two elements selected from the group of Cr, Ru, Al, Si, Ti and Rh) 5 ≦ a ≦ 20, 0.5 ≦ b ≦ 15, 1 ≦ c ≦
20 and outside the range of 0.5 ≦ a / c ≦ 0.7,
For example, as shown in Table 6 below, desired soft magnetic properties and corrosion resistance could not be simultaneously satisfied. In the table, the unit of saturation magnetic flux density Bs is T, the unit of coercive force Hc is Oe, the permeability μ is a value at 1 MHz, and the unit of magnetostriction constant λs is 10.
^-6 , the unit of the specific resistance ρ is 10 ^-8 Ω · m. Also, Bs
(0) is the value of the saturation magnetic flux density of the magnetic film after film formation, and Bs (t) is the value of the saturation magnetic flux density after the magnetic film was immersed in a 0.5N sodium chloride aqueous solution for 200 hours.

Table 6 Bs Hc μ λ ρ Bs (t) / Bs (0) (Fe ₇₂ Ta ₁₄ N ₁₄ ) _0.9 (Cr ₈₀ Ru ₂₀ ) _0.1 1.28 0.3 3000 1 95 60 (Fe ₇₂ Nb ₁₄ N ₁₄ ) _0.9 (Cr ₈₀ Ru ₂₀ ) _0.1 1.28 0.3 2800 2 93 60 (Fe ₇₄ Hf ₁₂ N ₁₄ ) _0.9 (Cr ₈₀ Ru ₂₀ ) _0.1 1.33 0.25 2900 1 97 60 (Fe ₇₂ Zr ₁₄ N ₁₄ ) _0.9 (Cr ₈₀ Ru ₂₀ ) _0.1 1.28 0.3 2500 2 90 60 (Fe ₇₂ Ta ₁₄ N ₁₄ ) _0.9 (Cr ₈₀ Rh ₂₀ ) _0.1 1.28 0.3 3100 2 95 60 (Fe ₇₂ Nb ₁₄ N ₁₄ ) _0.9 (Cr ₈₀ Rh ₂₀ ) _0.1 1.28 0.3 3000 2.5 93 60 (Fe ₇₄ Hf ₁₂ N ₁₄ ) _0.9 (Cr ₈₀ Rh ₂₀ ) _0.1 1.32 0.25 3000 1 97 60 (Fe ₇₂ Zr ₁₄ N ₁₄ ) _0.9 (Cr ₈₀ Rh ₂₀ ) _0.1 1.28 0.3 2900 2 91 60 (Fe ₇₂ Ta ₁₄ N ₁₄ ) _0.9 Al ₁₀ 1.35 0.2 3000 1 99 80 (Fe ₇₂ Nb ₁₄ N ₁₄ ) _0.9 Al ₁₀ 1.30 0.2 3000 2 95 70 (Fe ₇₄ Hf ₁₂ N ₁₄ ) _0.9 Al ₁₀ 1.38 0.2 3500 1 98 80 (Fe ₇₂ Zr ₁₄ N ₁₄ ) _0.9 Al ₁₀ 1.29 0.2 3000 1 97 70 (Fe ₇₈ Ta ₁₁ N ₁₁ ) _0.9 (Al ₆₀ Si ₄₀ ) _0.1 1.45 <0.1 3500 0.7 95 85 (Fe ₇₈ Nb ₁₁ N ₁₁ ) _0.9 (Al ₆₀ Si ₄₀ ) _0.1 1.43 <0.1 3500 0.8 95 78 (Fe ₇₈ Hf ₁₁ N ₁₁ ) _0.9 (Al ₆₀ Si ₄₀ ) _0.1 1.50 <0.1 3800 0.7 98 85 (Fe ₇₈ Zr ₁₁ N ₁₁ ) _0.9 (Al ₆₀ Si ₄₀ ) _0.1 1.45 <0.1 3300 0.8 95 78 (Fe ₇₈ Ta ₁₁ N ₁₁ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.35 <0.1 3000 1 90 55 (Fe ₇₈ Nb ₁₁ N ₁₁ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.32 <0.1 3500 2 89 55 (Fe ₇₈ Hf ₁₁ N ₁₁ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.33 <0.1 3000 1 92 55 (Fe ₇₈ Zr ₁₁ N ₁₁ ) _0.9 ( Ti ₃₀ Cr ₇₀ ) _0.1 1.32 <0.1 3200 2 92 55 (Fe ₇₈ Ta ₆ Nb ₅ N ₁₁ ) _0.9 (Cr ₈₀ Ru ₂₀ ) _0.1 1.32 <0.1 2800 1 90 60 (Fe ₇₈ Ta ₆ Hf ₅ N ₁₁ ) _0.9 ( Cr ₈₀ Rh ₂₀ ) _0.1 1.35 <0.1 2700 2 89 60 (Fe ₇₈ Ta ₆ Zr ₅ N ₁₁ ) _0.9 Al ₁₀ 1.30 <0.1 2600 2 92 55 (Fe ₇₈ Nb ₆ Hf ₅ N ₁₁ ) _0.9 (Al ₆₀ Si ₄₀ ) _0.1 1.35 <0.1 2700 1 91 60 (Fe ₇₈ Hf ₅ Zr ₆ N ₁₁ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.32 <0.1 2800 1 90 60

Also in the Co--N type magnetic film in which Fe is changed to Co, the saturation magnetic flux density Bs is as shown below.
A soft magnetic thin film having the same characteristics as those of the Fe-N system was obtained except that it was about 0.1 T smaller than that of Fe. A target formed by the HIP method was used in the same manner as described above, and an Ar / N ₂ mixed gas was used as a sputtering gas at
Magnetic properties and corrosion resistance were evaluated in the same manner as described above for typical magnetic thin films having different compositions formed to have a film thickness of m. The measurement results are shown in Table 7. Saturation magnetic flux density B in the table
The unit of s is T, the unit of coercive force Hc is Oe, and the magnetic permeability μ is 1.
The value in MHz, the unit of magnetostriction constant λs is 10 ⁻⁶ , and the unit of specific resistance ρ is 10 ⁻⁸ Ω · m. Bs (0) is the value of the saturation magnetic flux density of the magnetic film after film formation, and Bs (t) is the value of the saturation magnetic flux density after the magnetic film is immersed in a 0.5N sodium chloride aqueous solution for 200 hours. .

Table 7 Bs Hc μ λ ρ Bs (t) / Bs (0) (Co ₇₈ Ta ₉ N ₁₃ ) _0.9 (Cr ₇₀ Ru ₃₀ ) _0.1 1.35 <0.1 2000 1 90 100 (Co ₇₈ Nb ₉ N ₁₃ ) _0.9 (Cr ₇₀ Ru ₃₀ ) _0.1 1.35 <0.1 2000 1 90 100 (Co ₇₈ Hf ₉ N ₁₃ ) _0.9 (Cr ₇₀ Ru ₃₀ ) _0.1 1.39 <0.1 2300 0.9 93 100 (Co ₇₈ Zr ₉ N ₁₃ ) _0.9 (Cr ₇₀ Ru ₃₀ ) _0.1 1.35 <0.1 2100 1 83 100 (Co ₇₈ Ta ₈ N ₁₄ ) _0.9 (Cr ₇₀ Rh ₃₀ ) _0.1 1.30 <0.1 2000 1 88 100 (Co ₇₈ Nb ₈ N ₁₄ ) _0.91 (Cr ₇₀ Rh ₃₀ ) _0.09 1.32 <0.1 2000 1 83 100 (Co ₇₉ Hf ₇ N ₁₄ ) _0.9 (Cr ₇₀ Rh ₃₀ ) _0.1 1.40 <0.1 2300 0.9 85 100 (Co ₇₈ Zr ₈ N ₁₄ ) _0.9 (Cr ₇₀ Rh ₃₀ ) _0.1 1.35 <0.1 2000 1 80 100 (Co ₇₈ Ta ₈ N ₁₄ ) _0.9 Al ₁₀ 1.33 <0.1 2 100 1 98 100 (Co ₇₈ Nb ₈ N ₁₄ ) _0.9 Al ₁₀ 1.30 <0.1 2000 1 99 100 (Co ₇₉ Hf ₇ N ₁₄ ) _0.9 Al ₁₀ 1.40 <0.1 2400 1 103 100 (Co ₇₈ Zr ₉ N ₁₃ ) _0.9 Al ₁₀ 1.30 <0.1 2000 2 97 100 (Co ₇₈ Ta ₉ N ₁₃ ) _0.9 (Al ₆₅ Si ₃₅ ) _0.1 1.41 <0.1 2800 0.6 98 100 (Co ₇₈ Nb ₉ N ₁₃ ) _0.9 (Al ₆₅ Si ₃₅ ) _0.1 1.33 <0.1 2600 0.8 93 100 (Co ₈₀ Hf ₇ N ₁₃ ) _0.9 (Al ₆₅ Si ₃₅ ) _0.1 1.40 <0.1 3000 0.4 105 100 (Co ₇₈ Zr ₉ N ₁₃ ) _0.9 (Al ₆₅ Si ₃₅ ) _0.1 1.30 <0.1 2700 0.8 97 100 (Co ₇₈ Ta ₉ N ₁₃ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.25 <0.1 2100 1 90 100 ( Co ₇₈ Nb ₉ N ₁₃ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.26 <0.1 2300 1 88 100 (Co ₈₀ Hf ₇ N ₁₃ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.35 <0.1 2800 1 85 100 (Co ₇₈ Zr ₉ N ₁₃ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.30 <0.1 1900 1 88 100 (Co ₇₈ Ta ₄ Nb ₅ N ₁₃ ) _0.9 (Cr ₈₀ Ru ₂₀ ) _0.1 1.30 <0.1 1900 1 90 100 (Co ₈₀ Ta ₂ Hf ₅ N ₁₃ ) _0.9 (Cr ₈₀ Rh ₂₀ ) _0.1 1.40 <0.1 1800 1 88 100 (Co ₇₈ Ta ₅ Zr ₄ N ₁₃ ) _0.9 Al ₁₀ 1.35 <0.1 1800 1 85 100 (Co ₈₀ Nb ₂ Hf ₅ N ₁₃ ) _0.9 ( Al ₇₀ Si ₃₀ ) _0.1 1.41 <0.1 2000 0.8 83 100 (Co ₈₀ Hf ₅ Zr ₂ N ₁₃ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.40 <0.1 1900 1 90 100

The coercive force Hc of these magnetic thin films did not depend on the composition, and all showed values smaller than 0.1 Oe.
The additive element forms a solid solution with Co to form an alloy such as an intermetallic compound. Therefore, it is considered that the crystal growth of Co is suppressed during the heat treatment and, as a result, not only the corrosion resistance is improved without deteriorating the magnetic properties but also the heat resistance is further improved.

However, Co_100-abcX_aY_bN_c(However
X is a small number selected from the group of Nb, Ta, Hf and Zr.
At least one element, Y is Cr, Ru, Al, Si, T
i, one or two elements selected from the group of Rh)
The composition of the magnetic thin film represented is 5 ≦ a ≦ 20, 0.5 ≦ b
≦ 15, 1 ≦ c ≦ 20, and 0.5 ≦ a / c ≦ 0.7
If out of range, as shown in Table 8 below, for example,
Cannot satisfy the soft magnetic properties and corrosion resistance of
It was The unit of the saturation magnetic flux density Bs in the table is T and the holding force Hc
Unit is Oe, permeability μ is value at 1MHz, magnetostriction constant
The unit of λs is 10 ^-6, The unit of resistivity ρ is 10^-8In Ω · m
is there. Bs (0) is the saturation magnetic flux density of the magnetic film after film formation.
Value, Bs (t) is 0.5 N sodium chloride water for the magnetic film.
The value of the saturation magnetic flux density after being immersed in the solution for 200 hours.
It

Table 8 Bs Hc μ λ ρ Bs (t) / Bs (0) (Co ₇₂ Ta ₁₄ N ₁₄ ) _0.9 (Cr ₈₀ Ru ₂₀ ) _0.1 1.18 0.4 2000 1 78 65 (Co ₇₂ Nb ₁₄ N ₁₄ ) _0.9 (Cr ₈₀ Ru ₂₀ ) _0.1 1.18 0.4 2500 1 88 65 (Co ₇₄ Hf ₁₂ N ₁₄ ) _0.9 (Cr ₈₀ Ru ₂₀ ) _0.1 1.23 0.2 2600 1 80 65 (Co ₇₂ Zr ₁₄ N ₁₄ ) _0.9 (Cr ₈₀ Ru ₂₀ ) _0.1 1.38 0.4 2800 1 83 65 (Co ₇₂ Ta ₁₄ N ₁₄ ) _0.9 (Cr ₈₀ Rh ₂₀ ) _0.1 1.18 0.4 2500 1 90 65 (Co ₇₂ Nb ₁₄ N ₁₄ ) _0.9 (Cr ₈₀ Rh ₂₀ ) _0.1 1.18 0.4 2000 1 93 65 (Co ₇₄ Hf ₁₂ N ₁₄ ) _0.9 (Cr ₈₀ Rh ₂₀ ) _0.1 1.22 0.4 2500 1 97 65 (Co ₇₂ Zr ₁₄ N ₁₄ ) _0.9 (Cr ₈₀ Rh ₂₀ ) _0.1 1.18 0.4 1800 1 91 65 (Co ₇₂ Ta ₁₄ N ₁₄ ) _0.9 Al ₁₀ 1.25 0.2 3300 1 98 85 (Co ₇₂ Nb ₁₄ N ₁₄ ) _0.9 Al ₁₀ 1.20 0.2 3200 1 96 75 (Co ₇₄ Hf ₁₂ N ₁₄ ) _0.9 Al ₁₀ 1.28 0.2 3200 1 99 85 (Co ₇₂ Zr ₁₄ N ₁₄ ) _0.9 Al ₁₀ 1.19 0.2 3100 1 95 80 (Co ₇₈ Ta ₁₁ N ₁₁ ) _0.9 (Al ₆₀ Si ₄₀ ) _0.1 1.35 <0.1 3100 0.7 95 85 (Co ₇₈ Nb ₁₁ N ₁₁ ) _0.9 (Al ₆₀ Si ₄₀ ) _0.1 1.33 <0.1 2900 0.9 90 85 (Co ₇₈ Hf ₁₁ N ₁₁ ) _0.9 (Al ₆₀ Si ₄₀ ) _0.1 1.40 <0.1 2800 0.5 98 85 (Co ₇₈ Zr ₁₁ N ₁₁ ) _0.9 (Al ₆₀ Si ₄₀ ) _0.1 1.35 <0.1 2500 0.9 90 85 (Co ₇₈ Ta ₁₁ N ₁₁ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.25 <0.1 3000 1 93 65 (Co ₇₈ Nb ₁₁ N ₁₁ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.22 <0.1 2800 1 90 65 (Co ₇₈ Hf ₁₁ N ₁₁ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.23 <0.1 3100 1 98 65 (Co ₇₈ Zr ₁₁ N ₁₁ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.22 <0.1 2800 1 90 65 (Co ₇₈ Ta ₆ Nb ₅ N ₁₁ ) _0.9 (Cr ₈₀ Ru ₂₀ ) _0.1 1.22 <0.1 2000 1 90 70 (Co ₇₈ Ta ₆ Hf ₅ N ₁₁ ) _0.9 (Cr ₈₀ Rh ₂₀ ) _0.1 1.25 <0.1 2100 1 92 70 (Co ₇₈ Ta ₆ Zr ₅ N ₁₁ ) _0.9 Al ₁₀ 1.20 <0.1 2000 1 89 60 (Co ₇₈ Nb ₆ Hf ₅ N ₁₁ ) _0.9 (Al ₆₀ Si ₄₀ ) _0.1 1.25 <0.1 2300 0.6 95 65 (Co ₇₈ Hf ₅ Zr ₆ N ₁₁ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.22 <0.1 2200 0.6 95 65

Further, Fe-containing C and N at the same time
Similar characteristics were obtained in the C—N type or Co—C—N type magnetic film. The magnetic film was formed by the sputtering method using Ar / N ₂ mixed gas as the sputtering gas. As the sputtering target, a powder obtained by molding a powder of the same element as the composition of the desired magnetic film and its nitride by the hot isostatic pressing method was used. Table 9 shows the results of evaluating the magnetic properties and corrosion resistance of each magnetic film by the same method as described above.
Shown in. The unit of saturation magnetic flux density Bs in the table is T, coercive force H
The unit of c is Oe, the permeability μ is a value at 1 MHz, the unit of magnetostriction constant λs is 10 ⁻⁶ , and the unit of specific resistance ρ is 10 ⁻⁸ Ω.
m. Bs (0) is the value of the saturation magnetic flux density of the magnetic film after film formation, and Bs (t) is the value of the saturation magnetic flux density after the magnetic film is immersed in a 0.5N sodium chloride aqueous solution for 200 hours. .

Table 9 Bs Hc μ λ ρ Bs (t) / Bs (0) (Fe ₇₈ Ta ₉ C ₈ N ₅ ) _0.9 (Cr ₇₀ Ru ₃₀ ) _0.1 1.45 <0.1 2500 1 98 100 (Fe ₇₈ Nb ₉ C ₈ N ₅ ) _0.9 (Cr ₇₀ Ru ₃₀ ) _0.1 1.45 <0.1 2500 1 98 100 (Fe ₇₈ Hf ₉ C ₈ N ₅ ) _0.9 (Cr ₇₀ Ru ₃₀ ) _0.1 1.49 <0.1 3000 0.9 85 100 (Fe ₇₈ Zr ₉ C ₈ N ₅ ) _0.9 (Cr ₇₀ Ru ₃₀ ) _0.1 1.45 <0.1 3000 2 93 100 (Fe ₇₈ Ta ₈ C ₈ N ₆ ) _0.9 (Cr ₇₀ Rh ₃₀ ) _0.1 1.40 <0.1 2000 2 88 100 (Fe ₇₈ Nb ₈ C ₈ N ₆ ) _0.91 (Cr ₇₀ Rh ₃₀ ) _0.09 1.42 <0.1 2000 1 89 100 (Fe ₇₉ Hf ₇ C ₈ N ₆ ) _0.9 (Cr ₇₀ Rh ₃₀ ) _0.1 1.52 <0.1 3000 0.9 98 100 (Fe ₇₈ Zr ₈ C ₈ N ₆ ) _0.9 (Cr ₇₀ Rh ₃₀ ) _0.1 1.43 <0.1 2500 1 93 100 (Fe ₇₈ Ta ₈ C ₈ N ₆ ) _0.9 Al ₁₀ 1.43 <0.1 3500 0.8 98 100 (Fe ₇₈ Nb ₈ C ₈ N ₆ ) _0.9 Al ₁₀ 1.40 <0.1 3000 0.9 95 100 (Fe ₇₉ Hf ₇ C ₈ N ₆ ) _0.9 Al ₁₀ 1.50 <0.1 3000 1 95 100 (Fe ₇₈ Zr ₉ C ₈ N ₅ ) _0.9 Al ₁₀ 1.40 <0.1 2300 1 89 100 ( Fe ₇₈ Ta ₉ C ₈ N ₅ ) _0.9 (Al ₆₅ Si ₃₅ ) _0.1 1.51 <0.1 3800 0.6 103 100 (Fe ₇₈ Nb ₉ C ₈ N ₅ ) _0.9 (Al ₆₅ Si ₃₅ ) _0.1 1.43 <0.1 2900 0.7 98 100 ( Fe ₈₀ Hf ₇ C ₈ N ₅ ) _0.9 (Al ₆₅ Si ₃₅ ) _0.1 1.50 <0.1 3000 0.5 108 100 (Fe ₇₈ Zr ₉ C ₈ N ₅ ) _0.9 (Al ₆₅ Si ₃₅ ) _0.1 1.40 <0.1 3000 0.8 95 100 (Fe ₇₈ Ta ₉ C ₈ N ₅ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.35 <0.1 2000 1 95 100 (Fe ₇₈ Nb ₉ C ₈ N ₅ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.36 <0.1 2100 1 96 100 (Fe ₈₀ Hf ₇ C ₈ N ₅ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.45 <0.1 2800 0.9 97 100 (Fe ₇₈ Zr ₉ C ₈ N ₅ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.40 <0.1 3000 1 95 100 (Fe ₇₈ Ta ₄ Nb ₅ C ₈ N ₅ ) _0.9 (Cr ₈₀ Ru ₂₀ ) _0.1 1.40 <0.1 2300 1 95 100 (Fe ₈₀ Ta ₂ Hf ₅ C ₈ N ₅ ) _0.9 (Cr ₈₀ Rh ₂₀ ) _0.1 1.50 <0.1 2800 0.8 95 100 (Fe ₇₈ Ta ₅ Zr ₄ C ₈ N ₅ ) _0.9 Al ₁₀ 1.45 <0.1 2800 1 98 100 (Fe ₈₀ Nb ₂ Hf ₅ C ₈ N ₅ ) _0.9 (Al ₇₀ Si ₃₀ ) _0.1 1.51 <0.1 3000 0.7 98 100 ( Fe ₈₀ Hf ₅ Zr ₂ C ₈ N ₅ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.50 <0.1 2300 2 93 100 (Co ₇₈ Ta ₉ C ₈ N ₅ ) _0.9 (Cr ₇₀ Ru ₃₀ ) _0.1 1.35 <0.1 2000 1 90 100 (Co ₇₈ Nb ₉ C ₈ N ₅ ) _0.9 (Cr ₇₀ Ru ₃₀ ) _0.1 1.35 <0.1 2000 1 90 100 (Co ₇₈ Hf ₉ C ₈ N ₅ ) _0.9 (Cr ₇₀ Ru ₃₀ ) _0.1 1.39 <0.1 2300 0.9 93 100 (Co ₇₈ Zr ₉ C ₈ N ₅ ) _0.9 (Cr ₇₀ Ru ₃₀ ) _0.1 1.35 <0.1 2100 1 83 100 (Co ₇₈ Ta ₈ C ₈ N ₆ ) _0.9 (Cr ₇₀ Rh ₃₀ ) _0.1 1.30 <0.1 2000 1 88 100 (Co ₇₈ Nb ₈ C ₈ N ₆ ) _0.91 (Cr ₇₀ Rh ₃₀ ) _0.09 1.32 <0.1 2000 1 83 100 (Co ₇₉ Hf ₇ C ₈ N ₆ ) _0.9 (Cr ₇₀ Rh ₃₀ ) _0.1 1.40 <0.1 2300 0.9 85 100 (Co ₇₈ Zr ₈ C ₈ N ₆ ) _0.9 (Cr ₇₀ Rh ₃₀ ) _0.1 1.35 <0.1 2000 1 80 100 (Co ₇₈ Ta ₈ C ₈ N ₆ ) _0.9 Al ₁₀ 1.33 <0.1 2100 1 98 100 (Co ₇₈ Nb ₈ C ₈ N ₆ ) _0.9 Al ₁₀ 1.30 <0.1 2000 1 99 100 (Co ₇₉ Hf ₇ C ₈ N ₆ ) _0.9 Al ₁₀ 1.40 <0.1 2400 1 103 100 (Co ₇₈ Zr ₉ C ₈ N ₅ ) _0.9 Al ₁₀ 1.30 <0.1 2000 2 97 100 (Co ₇₈ Ta ₉ C ₈ N ₅ ) _0.9 (Al ₆₅ Si ₃₅ ) _0.1 1.41 <0.1 2800 0.6 98 100 (Co ₇₈ Nb ₉ C ₈ N ₅ ) _0.9 (Al ₆₅ Si ₃₅ ) _0.1 1.33 <0.1 2600 0.8 93 100 (Co ₈₀ Hf ₇ C ₈ N ₅ ) _0.9 (Al ₆₅ Si ₃₅ ) _0.1 1.40 <0.1 3000 0.4 105 100 (Co ₇₈ Zr ₉ C ₈ N ₅ ) _0.9 (Al ₆₅ Si ₃₅ ) _0.1 1.30 <0.1 2700 0.8 97 100 (Co ₇₈ Ta ₉ C ₈ N ₅ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.25 <0.1 2100 1 90 100 (Co ₇₈ Nb ₉ C ₈ N ₅ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.26 <0.1 2300 1 88 100 (Co ₈₀ Hf ₇ C ₈ N ₅ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.35 <0.1 2800 1 85 100 (Co ₇₈ Zr ₉ C ₈ N ₅ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.30 <0.1 1900 1 88 100 (Co ₇₈ Ta ₄ Nb ₅ C ₈ N ₅ ) _0.9 (Cr ₈₀ Ru ₂₀ ) _0.1 1.30 <0.1 1900 1 90 100 (Co ₈₀ Ta ₂ Hf ₅ C ₈ N ₅ ) _0.9 (Cr ₈₀ Rh ₂₀ ) _0.1 1.40 <0.1 1800 1 88 100 (Co ₇₈ Ta ₅ Zr ₄ C ₈ N ₅ ) _0.9 Al ₁₀ 1.35 <0.1 1800 1 85 100 (Co ₈₀ Nb ₂ Hf ₅ C ₈ N ₅ ) _0.9 (Al ₇₀ Si ₃₀ ) _0.1 1.41 <0.1 2000 0.8 83 100 (Co ₈₀ Hf ₅ Zr ₂ C ₈ N ₅ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.40 <0.1 1900 1 90 100

However, even in these magnetic films, Fe
_100-abcX_aY_b(C-N)_c, Or Co_100-abcX_aY
_b(C-N)_c(However, X is Nb, Ta, Hf, Zr
At least one element selected from the group, Y is Cr, R
one kind selected from the group of u, Al, Si, Ti, Rh or
Is a two-element type), the composition of the magnetic thin film is 5 ≦ a
≤ 20, 0.5 ≤ b ≤ 15, 1 ≤ c ≤ 20, and 0.5
When out of the range of ≦ a / c ≦ 0.7, for example, the following Table 1
As shown in 0, the desired soft magnetic properties and corrosion resistance are simultaneously satisfied.
I couldn't do it. Saturation magnetic flux density Bs in the table
The unit is T, the coercive force Hc is Oe, and the magnetic permeability μ is 1 MHz.
And the unit of the magnetostriction constant λs is 10 ^-6, Resistivity ρ
Unit is 10^-8Ω · m. In addition, Bs (0) is
The value of the saturation magnetic flux density of the magnetic film, Bs (t) is 0.5 for the magnetic film.
After immersing in normal sodium chloride solution for 200 hours
It is the value of the saturation magnetic flux density.

Table 10 Bs Hc μ λ ρ Bs (t) / Bs (0) (Fe ₇₂ Ta ₁₄ C ₈ N ₆ ) _0.9 (Cr ₈₀ Ru ₂₀ ) _0.1 1.28 0.3 3000 1 95 60 (Fe ₇₂ Nb ₁₄ C ₈₎ N ₆ ) _0.9 (Cr ₈₀ Ru ₂₀ ) _0.1 1.28 0.3 2800 2 93 60 (Fe ₇₄ Hf ₁₂ C ₈ N ₆ ) _0.9 (Cr ₈₀ Ru ₂₀ ) _0.1 1.33 0.25 2900 1 97 60 (Fe ₇₂ Zr ₁₄ C ₈ N ₆ ) _0.9 (Cr ₈₀ Ru ₂₀ ) _0.1 1.28 0.3 2500 2 90 60 (Fe ₇₂ Ta ₁₄ C ₈ N ₆ ) _0.9 (Cr ₈₀ Rh ₂₀ ) _0.1 1.28 0.3 3100 2 95 60 (Fe ₇₂ Nb ₁₄ C ₈ N ₆ ) _0.9 (Cr ₈₀ Rh ₂₀ ) _0.1 1.28 0.3 3000 2.5 93 60 (Fe ₇₄ Hf ₁₂ C ₈ N ₆ ) _0.9 (Cr ₈₀ Rh ₂₀ ) _0.1 1.32 0.25 3000 1 97 60 (Fe ₇₂ Zr ₁₄ C ₈ N ₆ ) _0.9 (Cr ₈₀ Rh ₂₀ ) _0.1 1.28 0.3 2900 2 91 60 (Fe ₇₂ Ta ₁₄ C ₈ N ₆ ) _0.9 Al ₁₀ 1.35 0.2 3000 1 99 80 (Fe ₇₂ Nb ₁₄ C ₈ N ₆ ) _0.9 Al ₁₀ 1.30 0.2 3000 2 95 70 ( Fe ₇₄ Hf ₁₂ C ₈ N ₆ ) _0.9 Al ₁₀ 1.38 0.2 3500 1 98 80 (Fe ₇₂ Zr ₁₄ C ₈ N ₆ ) _0.9 Al ₁₀ 1.29 0.2 3000 1 97 70 (Fe ₇₈ Ta ₁₁ C ₇ N ₄ ) _0.9 (Al ₆₀ Si ₄₀ ) _0.1 1.45 <0.1 3500 0.7 95 85 (Fe ₇₈ Nb ₁₁ C ₇ N ₄ ) _0.9 (Al ₆₀ Si ₄₀ ) _0.1 1.43 <0.1 3500 0.8 95 78 (Fe ₇₈ Hf ₁₁ C ₇ N ₄ ) _0.9 (Al ₆₀ Si ₄₀ ) _0.1 1.50 <0.1 3800 0.7 98 85 (Fe ₇₈ Zr ₁₁ C ₇ N ₄ ) _0.9 (Al ₆₀ Si ₄₀ ) _0.1 1.45 <0.1 3300 0.8 95 78 (Fe ₇₈ Ta ₁₁ C ₇ N ₄ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.35 <0.1 3000 1 90 55 (Fe ₇₈ Nb ₁₁ C ₇ N ₄ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.32 <0.1 3500 2 89 55 (Fe ₇₈ Hf ₁₁ C ₇ N ₄ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.33 <0.1 3000 1 92 55 (Fe ₇₈ Zr ₁₁ C ₇ N ₄ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.32 <0.1 3200 2 92 55 (Fe ₇₈ Ta ₆ Nb ₅ C ₇ N ₄ ) _0.9 (Cr ₈₀ Ru ₂₀ ) _0.1 1.32 <0.1 2800 1 90 60 (Fe ₇₈ Ta ₆ Hf ₅ C ₇ N ₄ ) _0.9 (Cr ₈₀ Rh ₂₀ ) _0.1 1.35 <0.1 2700 2 89 60 (Fe ₇₈ Ta ₆ Zr ₅ C ₇ N ₄ ) _0.9 Al ₁₀ 1.30 <0.1 2600 2 92 55 (Fe ₇₈ Nb ₆ Hf ₅ C ₇ N ₄ ) _0.9 (Al ₆₀ Si ₄₀ ) _0.1 1.35 <0.1 2700 1 91 60 (Fe ₉₈ Hf ₅ Zr ₆ C ₇ N ₄ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.32 <0.1 2800 1 90 60 (Co ₇₂ Ta ₁₄ C ₈ N ₆ ) _0.9 (Cr ₈₀ Ru ₂₀ ) _0.1 1.18 0.4 2000 1 78 65 (Co ₇₂ Nb ₁₄ C ₈ N ₆ ) _0.9 (Cr ₈₀ Ru ₂₀ ) _0.1 1.18 0.4 2500 1 88 65 (Co ₇₄ Hf ₁₂ C ₈ N ₆ ) _0.9 (Cr ₈₀ Ru ₂₀ ) _0.1 1.23 0.2 2600 1 80 65 (Co ₇₂ Zr ₁₄ C ₈ N ₆ ) _0.9 (Cr ₈₀ Ru ₂₀ ) _0.1 1.38 0 .4 2800 1 83 65 (Co ₇₂ Ta ₁₄ C ₈ N ₆ ) _0.9 (Cr ₈₀ Rh ₂₀ ) _0.1 1.18 0.4 2500 1 90 65 (Co ₇₂ Nb ₁₄ C ₈ N ₆ ) _0.9 (Cr ₈₀ Rh ₂₀ ) _0.1 1.18 0.4 2000 1 93 65 (Co ₇₄ Hf ₁₂ C ₈ N ₆ ) _0.9 (Cr ₈₀ Rh ₂₀ ) _0.1 1.22 0.4 2500 1 97 65 (Co ₇₂ Zr ₁₄ C ₈ N ₆ ) _0.9 (Cr ₈₀ Rh ₂₀ ) _0.1 1.18 0.4 1800 1 91 65 (Co ₇₂ Ta ₁₄ C ₈ N ₆ ) _0.9 Al ₁₀ 1.25 0.2 3300 1 98 85 (Co ₇₂ Nb ₁₄ C ₈ N ₆ ) _0.9 Al ₁₀ 1.20 0.2 3200 1 96 75 (Co ₇₄ Hf ₁₂ C ₈ N ₆ ) _0.9 Al ₁₀ 1.28 0.2 3200 1 99 85 (Co ₇₂ Zr ₁₄ C ₈ N ₆ ) _0.9 Al ₁₀ 1.19 0.2 3100 1 95 80 (Co ₇₈ Ta ₁₁ C ₇ N ₄ ) _0.9 (Al ₆₀ Si ₄₀ ) _0.1 1.35 <0.1 3100 0.7 95 85 (Co ₇₈ Nb ₁₁ C ₇ N ₄ ) _0.9 (Al ₆₀ Si ₄₀ ) _0.1 1.33 <0.1 2900 0.9 90 85 (Co ₇₈ Hf ₁₁ C ₇ N ₄ ) _0.9 (Al ₆₀ Si ₄₀ ) _0.1 1.40 <0.1 2800 0.5 98 85 (Co ₇₈ Zr ₁₁ C ₇ N ₄ ) _0.9 (Al ₆₀ Si ₄₀ ) _0.1 1.35 <0.1 2500 0.9 90 85 (Co ₇₈ Ta ₁₁ C ₇ N ₄ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.25 <0.1 3000 1 93 65 (Co ₇₈ Nb ₁₁ C ₇ N ₄ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.22 <0.1 2800 1 90 65 (Co ₇₈ Hf ₁₁ C ₇ N ₄ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.23 <0.1 3100 1 98 65 ( Co ₇₈ Zr ₁₁ C ₇ N ₄ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.22 <0.1 2800 1 90 65 (Co ₇₈ Ta ₆ Nb ₅ C ₇ N ₄ ) _0.9 (Cr ₈₀ Ru ₂₀ ) _0.1 1.22 <0.1 2000 1 90 70 (Co ₇₈ Ta ₆ Hf ₅ C ₇ N ₄ ) _0.9 (Cr ₈₀ Rh ₂₀ ) _0.1 1.25 <0.1 2100 1 92 70 (Co ₇₈ Ta ₆ Zr ₅ C ₇ N ₄ ) _0.9 Al ₁₀ 1.20 <0.1 2000 1 89 60 (Co ₇₈ Nb ₆ Hf ₅ C ₇ N ₄ ) _0.9 (Al ₆₀ Si ₄₀ ) _0.1 1.25 <0.1 2300 0.6 95 65 (Co ₉₈ Hf ₅ Zr ₆ C ₇ N ₄ ) _0.9 (Ti ₃₀ Cr ₇₀ ) _0.1 1.22 <0.1 2200 0.6 95 65

[0056]

According to the present invention, in a microcrystalline precipitation type magnetic film mainly composed of Fe or Co, magnetic characteristics are secured by controlling the crystal grain size of Fe, Co and carbide or nitride. At the same time, the corrosion resistance of the soft magnetic thin film can be improved. This effect can be achieved by controlling the crystal grain size of Fe or Co by dissolving the element in the Fe or Co layer and controlling the ratio of the elements Nb, Ta, Hf, Zr and the elements C, N. It is considered that the crystal grain size of carbide or nitride can be controlled.

[Brief description of drawings]

FIG. 1 is a diagram showing the Ta / C ratio dependence of the magnetic characteristics of a soft magnetic thin film.

FIG. 2 is a diagram showing X-ray diffraction spectra of magnetic films having various compositions.

FIG. 3 is a diagram showing changes with time in saturation magnetic flux density when magnetic films having various compositions are immersed in a 0.5 N sodium chloride aqueous solution.

FIG. 4 is a diagram showing a structure of an MIG type magnetic head.

FIG. 5 is a diagram showing the Ta / N ratio dependence of the saturation magnetic flux density of a soft magnetic thin film.

[Explanation of symbols]

1 ... Soft magnetic thin film, 2 ... Ferrite substrate, 3 ... Gap part, 4 ... Low melting point glass

─────────────────────────────────────────────────── ─── Continuation of front page (56) References JP-A-4-12508 (JP, A) JP-A-3-265104 (JP, A) JP-A-5-135989 (JP, A) JP-A-4- 305807 (JP, A) (58) Fields investigated (Int.Cl. ⁷ , DB name) H01F 10/12-10/16 G11B 5/127 G11B 5/31

Claims (11)

(57) [Claims] 1. X is at least one element selected from the group of Nb, Ta, Hf and Zr, and Y is Cr, Ru and A.
When one or two kinds of elements selected from the group of l, Si, Ti, and Rh and Z is at least one kind of element selected from the group of C and N, Co _100-abc X _a Y _b Z _c 5 ≦ a ≦ 20, 0.5 ≦ b ≦ 15, 1 ≦ c
A magnetic head including a soft magnetic thin film satisfying ≦ 20 and 0.5 ≦ a / c ≦ 0.7. 2. Y is Al-Si, Al, Cr-Ru, C
The magnetic head according to claim 1, wherein the magnetic head is r-Rh or Ti-Cr. 3. The magnetic head according to claim 2, wherein 0.53 ≦ a / c ≦ 0.70. 4. X is at least one element selected from the group of Nb, Ta, Hf and Zr, and Y is Cr, Ru and A.
When one or two kinds of elements selected from the group of l, Si, Ti, and Rh and Z is at least one kind of element selected from the group of C and N, Fe _100-abc X _a Y _b Z _c 5 ≦ a ≦ 20, 0.5 ≦ b ≦ 15, 1 ≦ c
A magnetic head comprising: a soft magnetic thin film having ≦ 20 and 0.5 ≦ a / c ≦ 0.7, and an average crystal grain size of a carbide or a nitride of the element X is 3 nm or less. 5. Y is Al-Si, Al, Cr-Ru, C
The magnetic head according to claim 4, wherein the magnetic head is r-Rh or Ti-Cr. 6. The magnetic head according to claim 5, wherein 0.53 ≦ a / c ≦ 0.70. 7. X is at least one element selected from the group of Nb, Ta, Hf and Zr, and Y is Cr, Ru and A.
When one or two kinds of elements selected from the group of l, Si, Ti, and Rh and Z is at least one kind of element selected from the group of C and N, Co _100-abc X _a Y _b Z _c 5 ≦ a ≦ 20, 0.5 ≦ b ≦ 15, 1 ≦ c
A magnetic head comprising: a soft magnetic thin film having ≦ 20 and 0.5 ≦ a / c ≦ 0.7, and an average crystal grain size of a carbide or a nitride of the element X is 3 nm or less. 8. Y is Al-Si, Al, Cr-Ru, C
8. The magnetic head according to claim 7, which is r-Rh or Ti-Cr. 9. The magnetic head according to claim 8, wherein 0.53 ≦ a / c ≦ 0.70. 10. A magnetic head according to any one of claims 1 to 9, characterized in that a metal-in-gap type. 11. A magnetic recording apparatus comprising the magnetic head according to claim 1 and a magnetic recording medium having a magnetic layer.