JP3200787B2 - Manufacturing method of magnetic recording medium - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a magnetic recording medium, and more particularly, to a magnetic disk, a flexible disk,
The present invention relates to a method for manufacturing a metal thin film medium for magnetic recording such as a still camera or a video.

[0002]

2. Description of the Related Art In general, as an alloy for a magnetic recording medium, Co having a high coercive force (Hc) and a high remanence film thickness product (Mr · δ) is used.
A Pt-based alloy is used. When a magnetic recording medium is formed using this CoPt-based alloy, an underlayer is generally formed between the substrate and the magnetic layer in order to improve the magnetic properties. For example,
No. 8 (hereinafter referred to as "Document 1") discloses that the underlayer is made of Cr.
A magnetic recording medium containing V or CrFe and a magnetic layer containing CoPt is disclosed, and it is described that in this magnetic recording medium, the coercive force and the squareness ratio of the magnetization curve can be improved.

[0003] Further, in a magnetic recording medium, a third component is added to a CoPt magnetic film in order to increase the coercive force and the product of the residual magnetization film thickness. , The Journal of the Institute of Television Engineers of Japan
Vol. 0, No. 6, pp. 475-480 (1986)
(Hereinafter referred to as “Document 2”) is known. In this magnetic recording medium, CoPt has a third
A magnetic layer to which Mo is added as a component is formed directly on a glass substrate. The document states that this magnetic recording medium has a coercive force of not less than 500 Oe (Oe) and is capable of controlling the coercive force over a wide range as well as performing high-density recording.

Further, this type of magnetic recording medium is disclosed in Journal of Applied Physics (J. Appl.
Phys. 67 (12), 15 June 1990
pp 7507-7509) (hereinafter referred to as “Reference 3”). In this magnetic recording medium, a metal obtained by adding a small amount of Mo to Cr is used as an underlayer, and a magnetic layer made of CoNiCr is formed on the underlayer. Forming a layer.

[0005]

By the way, the magnetic recording medium described in Document 1 can obtain a high coercive force to some extent, but the coercive force is at most about 1600 Oe. Is not a satisfactory value.

In the magnetic recording medium described in Document 2, as described above, a magnetic layer is formed directly on a glass substrate without an intervening underlayer, and the coercive force of the magnetic layer made of CoPt is 1000 Oe. Despite the above, C
In a magnetic layer made of oPtMo, the coercive force tends to decrease as the Mo concentration increases. For example, when the Mo concentration is about 14 at%, the coercive force is about 350
Oe.

In addition, in the magnetic recording medium described in Document 2, the saturation magnetic flux density (Bs) decreases as the Mo concentration increases, and the saturation magnetization density (Bs) decreases.・ Δ) will also decrease.

As described above, in Reference 2, CoPt
It is understood that when the magnetic layer to which Mo is added is used, both the coercive force and the product of the residual magnetization thickness are reduced.

On the other hand, the coercive force of the magnetic recording medium disclosed in Document 3 is 1120 Oe, and the coercive force of the magnetic recording medium using the underlayer formed of Cr alone (128
0 Oe).

As can be understood from the descriptions in References 2 and 3, Mo is added to the underlayer in which Mo is added to Cr and Mo is added to CoPt.
In a magnetic recording medium having a magnetic layer to which is added, the coercive force and the product of the remnant magnetization film thickness decrease.

An object of the present invention is to provide a method of manufacturing a magnetic recording medium which can obtain a sufficient coercive force and a product of a residual magnetization film thickness and has little change with time.

[0012]

According to the present invention, there is provided a method for manufacturing a magnetic recording medium having at least an underlayer and a magnetic layer on a nonmagnetic substrate, wherein the nonmagnetic substrate is a glass substrate, Is CrM mainly containing Cr and Mo
An o-based alloy containing 2 to 40 at% of Mo in a composition ratio, and the magnetic layer is mainly composed of Co and Pt.
It is a Pt-based alloy containing 5 to 30 at% of Pt in a composition ratio, and the coercive force is such that the lattice spacing on the (110) plane of the underlayer is close to the lattice spacing on the (002) plane of the magnetic layer. The composition ratio of the underlayer and the magnetic layer is set so as to be 1750 Oe or more, and the substrate temperature at the time of forming the underlayer and the magnetic layer is from 100 ° C. to 40 ° C.
A method for manufacturing a magnetic recording medium, wherein the temperature is set within the range of 0 ° C. and the underlayer and the magnetic layer are formed, is obtained.

Further, in the present invention, the magnetic layer may further contain molybdenum (Mo). The magnetic layer further includes Ta, B, Cr, O, N, Nb, Mn,
At least one of Zn, W, Pb, Re, V, and Zr may be contained.

In addition, in the present invention, W,
B, V, Nb, Ta, Fe, Ni, Re, Cu, Zr,
At least one of Zn, P, Si, Ga, Ge, Hf, Al, and Ti may be contained.

When forming the underlayer, the Mo concentration may be increased in the direction from the nonmagnetic substrate to the magnetic layer.

When a protective layer is formed on the magnetic layer, it is desirable that the protective layer contains Cr and Mo.

[0017]

According to the present invention, Mo forms a solid solution with Cr in the underlayer containing Cr and Mo. And Mo
The lattice expands in accordance with the addition amount of chromium, and the lattice spacing on the (110) plane of chromium approaches the lattice (002) plane of the magnetic layer containing Co and Pt. As a result, the orientation of the magnetic layer changes and the coercive force of the magnetic layer can be improved.

The addition of Mo to the magnetic layer not only increases the coercive force due to the pinning effect of the domain wall, but also promotes the magnetic isolation of the magnetic grains and increases the coercive force. Further, the coercive force increases due to the miniaturization of the magnetic particles. Due to the increase in the coercive force, the peak width in the reproduction wave is reduced, and the medium noise is reduced. Further, by adding Mo to the magnetic layer, the number of pinned pins increases and the width of the zigzag wall decreases, thereby reducing the medium noise.

In addition, when the same component is contained in the underlayer and the magnetic layer (that is, by containing Mo), diffusion of Mo at the interface between the underlayer and the magnetic layer is facilitated. The magnetic isolation of the magnetic grains is further promoted, and the adhesion strength between the underlayer and the magnetic layer can be increased.

When the above-mentioned Zr, Zn, Cu and the like are added to the underlayer containing Cr and Mo, these added elements are unlikely to form a solid solution with Cr or Mo in the underlayer.
The additive element segregates at the grain boundaries of the crystal grains in the underlayer, for example, thereby promoting the miniaturization of the crystal grains and the separation between the grains. Thereby, the miniaturization of crystal grains and the separation (magnetic isolation) between grains in the magnetic layer are promoted by reflecting the film structure of the underlayer, and the coercive force is increased and the medium noise is reduced. it can.

[0021]

The present invention will be described below by way of examples.
You. Here, not only the embodiment of the present invention but also the
A reference example will be described. In the reference example,
Each film is formed while keeping the substrate temperature at room temperature .

( Reference Example 1) Referring to FIG. 1, a glass substrate 1 having a diameter of 65 mm and a thickness of 0.9 mm is prepared, and the glass substrate 1 is mounted in a chamber of an RF magnetron sputtering apparatus (not shown). I do. Then, the pressure in the chamber is reduced to 5 × 10 ⁻⁷ Torr or less. Thereafter, argon gas was supplied as a sputtering gas to the sputtering apparatus at a gas pressure of 10 mTorr, the substrate temperature was set to room temperature, and the input power density was 2.5 W / c.
m ² , Cr ₈₀ Mo ₂₀ (at%) as a target, a 1000 Å thick underlayer 2 on a glass substrate 1.
(Formula Cr _100-x Mo _x (x = 0 to 10)
0) when x = 20). Subsequently, in the same manner, Co ₈₂ Pt was
A magnetic layer 3 having a composition of Co ₈₂ Pt ₁₈ and a thickness of 400 Å was formed on the underlayer 2 with a target of ₁₈ (at%). Then, a Cr ₈₀ Mo ₂₀ layer 4a having a thickness of 50 Å and a carbon layer 4b having a thickness of 400 Å are formed on the magnetic layer 3 by using argon gas as a sputtering gas, and these Cr ₈₀ Mo ₂₀ layers 4a are formed.
And the carbon layer 4b was used as the protective layer 5. A lubricating layer 5 made of perfluoropolyether was applied on the protective layer 4 to a thickness of 20 angstroms to obtain a magnetic disk (magnetic recording medium) 6.

Further, the general formula Cr _100-x Mo _x (x = 0
To 100) are 0, 10, 30, and 4 respectively.
0, 50, 60, 70, 80, 90, ie, C
_{r, Cr 90 Mo 10, Cr} 70 Mo 30, Cr 60 Mo 40, Cr
₅₀ Mo ₅₀ , Cr ₄₀ Mo ₆₀ , Cr ₃₀ Mo ₇₀ , Cr ₂₀ M
Magnetic disks each having o ₈₀ and Cr ₁₀ Mo ₉₀ (at%) as underlayers were prepared. At this time, a glass substrate,
The magnetic layer, the protective layer, and the lubricating layer were the same as those of the disk A, and other conditions such as the film thickness were the same as those of the disk A.

Samples each having a diameter of 8 mm were cut out from each of these disks, and the coercive force (Hc) and the product of the residual magnetization film (Mr.
δ) was measured. At this time, a magnetic field was applied in the direction of the film surface with a maximum external applied magnetic field of 12 kOe. The result is shown in FIG. In FIG. 2, ◎ indicates the coercive force of each sample.

As is apparent from FIG. 2, a magnetic recording medium having a high coercive force can be obtained by using the magnetic layer made of CoPt and the underlayer made of CrMo. In particular, the general formula Cr _100-x Mo _x
In (x = 0 to 100), it can be seen that the coercive force becomes higher by using the underlayer of x = 10 to 80.

Next, a magnetic layer of Co ₇₄ Pt ₁₈ Mo ₈ and a general formula Cr _100-x Mo _x (x = 0-100)
A magnetic disk having an underlayer having a composition represented by the following formula was prepared by changing x in the range of 0 to 90 as described above. At this time, the glass substrate, the protective layer, and the lubricating layer were the same as those of the disk A, and other conditions such as the film thickness were the same as those of the disk A. Each of these disks has a diameter of 8
mm sample, and using a vibrating sample magnetometer,
The coercive force (Hc) and the product of the residual magnetization film thickness (Mr · δ) were measured for each sample. The result is shown in FIG. In FIG. 2, ○ indicates the coercive force of each sample.

As is apparent from FIG. 2, a magnetic recording medium having a high coercive force can be obtained by using the magnetic layer made of CoPtMo and the underlayer made of CrMo. In particular, the general formula Cr _100-x M
In o _{x (x} = 0~100), it can be seen that the coercive force becomes higher by using the underlayer of x = 10 to 80.

Furthermore, using the same method as the case of preparing the disc A, the general formula _{Cr 100-xy Mo y Zr x} (at
%) And Co ₇₄ Pt ₁₈ Mo ₈ (a
(% by mass) on a glass substrate to obtain a magnetic disk. At this time, the Mo concentration in the underlayer is 9 at% (that is, y = 9), and the Zr concentration is changed in the range of 0 to 50 at% (that is, x =
0 to 50) to obtain a plurality of magnetic disks. Similarly, when the Mo concentration in the underlayer is 18 at% (that is, y = 18) and the Zr concentration is changed in the range of 0 to 50 at% (that is, x = 0 to 50), a plurality of magnetic layers are formed. Got a disc. The coercive force of these magnetic disks was measured in the same manner as for disk A. The measurement results are shown in FIG. 3 (in FIG. 3, ◇ indicates that the Mo concentration is 9a).
represents the case of t%, and ◆ represents the case of the Mo concentration of 18 at%).

As is apparent from FIG. 3, the coercive force of the magnetic disk can be increased by adding Zr to the underlayer made of CrMo. The amount of Zr added in the underlayer is 0.1 to 30 at%.
, The coercive force is increased, and in particular, 0.1 to 4
It can be seen that in the range of at%, the coercive force is higher than that of the magnetic disk using the underlayer consisting of only CrMo.

Next, a magnetic disk having an underlayer of Cr ₈₀ Mo ₂₀ (at%) and a magnetic layer of Co ₇₄ Pt ₁₈ Mo ₈ (at%) (hereinafter, this magnetic disk is referred to as “disk B”. Other components and the film thickness of the disc B are the same as those of the disc A) and Cr ₈₀ Mo ₁₈ Zr ₂ (at%)
A magnetic disk having an underlayer and a magnetic layer of Co ₇₄ Pt ₁₈ Mo ₈ (at%) (hereinafter, the magnetic disk is referred to as “disk C”. The same was used to measure the recording / reproducing output. Here, the flying height of the magnetic head is 0.055 μm.
And the relative speed between the thin film head and the disc B was set to 6 m / s, and the linear recording density was 80 kfci (1).
The recording / reproducing output at a linear recording density of 80,000 bits per inch) was measured. The results are shown in Table 1. (In addition to the recording / reproducing output, Table 1 also shows the coercive force and the product of the remnant magnetization film thickness. As a comparative example, the measurement results of a magnetic disk using only Cr for the underlayer are also shown. In Table 1, disks B and C were referred to as Reference Examples 2 and 3, respectively). The thin film head used in the above-described measurement has 50 coil turns, a track width of 6 μm, and a magnetic head gap length of 0.25 μm.

[0031]

[Table 1]

As is clear from Table 1, since the disk B uses CrMo as the underlayer, the magnetic recording / reproducing characteristics are remarkably improved as compared with the comparative example using the underlayer of only Cr. Similarly, since the disk C also uses CrMoZr as the underlayer, it can be seen that the magnetic recording / reproducing characteristics are significantly higher than the comparative example using the Cr-only underlayer.

Further, the disks A and B were heated at a temperature of 80 ° C.
A corrosion resistance test was performed by leaving the substrate in a constant temperature and humidity chamber of 80% humidity for 1000 hours. The saturation magnetization (Ms) of the disks A and B was measured immediately before the corrosion resistance test and after 1000 hours. FIG. 4 shows the measurement results.

In FIG. 4, the horizontal axis represents time, and the vertical axis represents the value obtained by normalizing the saturation magnetization at each time with the saturation magnetization (Ms ₀ ) immediately before the start of the corrosion resistance test. As is clear from FIG. 4, the magnetic layers of CoPt (disk A) and CoPtMo (disk B) have excellent corrosion resistance.
It can be seen that the addition of Mo to Pt significantly improves the corrosion resistance.

Next, with the carrier frequency set to 9.4 MHz and the measurement band set to 15 MHz, the noise spectrum of the disks A, B and C during signal recording and reproduction was measured by a spectrum analyzer (medium noise Nm).
). As a result, the medium noise of the disk A is 7.
The medium noise of the disk B was 5.08 μVrms, whereas the medium noise was 58 μVrms.
By using PtMo, the medium noise could be further reduced. The medium noise of the disk C is 4.85 μV
rms, medium noise can be further reduced by using CoPtMo for the magnetic layer and using CrMoZr for the underlayer.

(Reference Examples 4 to 10) In the same manner as in Reference Example 1 , Cr ₈₀ Mo was used as a target.
₂₀ with (at%), was formed a film thickness 1500 Å underlayer (Cr ₈₀ Mo ₂₀ layer) on a glass substrate having a diameter of 65mm thickness of 0.9 mm. Subsequently, Co ₇₀ Pt ₁₈
Co ₇₀ Pt ₁₈ M with Mo ₁₂ (at%) as the target
The magnetic layer having a thickness of 400 Å having a composition of o ₁₂ was formed on the base layer. Si as a protective layer on the magnetic layer
O ₂ was formed to a thickness of 50 Å to form a magnetic disk (Reference Example 4) . Then, the coercive force and the product of the residual magnetization thickness of the magnetic disk were measured in the same manner as in Reference Example 1. Table 2 shows the results.

[0037]

[Table 2]

Further, magnetic disks were prepared with the compositions of the underlayer, the magnetic layer, and the protective layer as shown in Table 2 ( Reference Examples 5 to 10 ). Then, the coercive force and the product of the residual magnetization thickness of these magnetic disks were measured in the same manner as in Reference Example 4 .

As is apparent from Table 2, C is used as the underlayer.
It can be seen that the coercive force and the product of the remnant magnetization film thickness can be increased by using rMo and using a magnetic layer in which Mo is added to CoPt up to 30 at% as the magnetic layer.

Next, Examples 1 to 5 of the present invention will be described.
In these examples, a glass substrate having a diameter of 65 mm and a thickness of 0.9 mm is prepared, and this glass substrate is mounted in a chamber of a DC magnetron sputtering device (not shown).
Then, the pressure in the chamber is reduced to a pressure of 8 × 10 ⁻⁷ Torr or less. Thereafter, argon gas was supplied as a sputtering gas to the sputtering apparatus at a gas pressure of 15 mTorr, the input power density was 18 W / cm ² , and the substrate temperature was 10
0 ° C ( Example 1), 200 ° C (Example 2), 250 ° C
(Example 3), 300 ° C (Example 4), and 400 ° C
It was formed (Example 5) as a Cr ₇₀ Mo ₃₀ film thickness 2000 Å underlayer on a glass substrate (at%) as a target (Cr ₇₀ Mo ₃₀ layers). Subsequently, Co ₆₈ Pt ₁₇ Mo ₁₅ (a
(t%) as a target, a magnetic layer having a composition of Co ₆₈ Pt ₁₇ Mo ₁₅ and a thickness of 350 Å was formed on the underlayer. Then, a protective film having a thickness of 80 Å is formed on the magnetic layer using Cr ₇₀ Mo ₃₀ (at%) as a sputtering gas with argon gas as a target,
Further, a 150 Å thick S film is formed on the protective film.
A magnetic disk was manufactured by forming a protective layer made of iO ₂ .

With respect to the magnetic disks of Examples 1 to 5 , the coercive force and the product of the residual magnetization thickness were measured in the same manner as in Reference Example 1. Table 3 shows the measurement results.

[0042]

[Table 3]

As is apparent from Table 3, the substrate temperature was set at 40
It can be seen that even if the temperature is increased to 0 ° C. and a magnetic disk is prepared, good magnetic characteristics can be obtained without deterioration of the magnetic characteristics.

Further, Reference Example 1 related to the above-described embodiment.
1 to 30 will be described. Using the same method as in Reference Example 1 ,
Magnetic disks (Reference Examples 11 to 30) having an underlayer, a magnetic layer, and a protective layer having the compositions shown in Table 4 were prepared, and the magnetic disks of Reference Examples 11 to 30 were referred to.
The coercive force and the product of the remnant magnetization film thickness were measured in the same manner as described above.

[0045]

[Table 4]

As is evident from Table 4, it is possible to increase the coercive force and the product of the remnant magnetization film thickness even if an underlayer in which an additional component other than Zr is added to CrMo is used.

Further, Reference Examples 31 to 56 will be described.
You. Using the same method as in Reference Example 4 , an underlayer (film thickness of 2000 Å), a magnetic layer (film thickness of 450 Å), and a protective layer (film thickness of 150 Å) having the compositions shown in Table 5 were used.
Angstrom magnetic disk ( Reference Example 31)
To 56 ), and the coercive force and the product of the residual magnetization thickness of the magnetic disks of Reference Examples 31 to 56 were measured in the same manner as in Reference Example 4 .

[0048]

[Table 5]

As is clear from Table 5, it can be seen that the coercive force and the product of the remnant magnetization film thickness can be increased by using a magnetic layer in which CoPtMo is added with other additional components.

Reference Example 57 will be further described. Reference Example 5
In the preparation of 7, a glass substrate having a diameter of 65 mm and a thickness of 0.9 mm was first placed on an RF magnetron sputtering apparatus (not shown).
5 × 10 ^-7
The pressure is reduced to a pressure equal to or lower than Torr. Thereafter, an argon gas was supplied as a sputtering gas to the sputtering apparatus at a gas pressure of 10 mTorr, the substrate temperature was set to room temperature, and the Cr target and the Mo target were simultaneously discharged. At this time, C
The input power density for the r target is 2.5 W / cm ²
And the input power density for the Mo target is 0.1 W
/ Cm ² to 1.2 W / cm ² , and a 1500 Å thick underlayer was formed on a glass substrate. As a result, the Mo concentration in the underlayer increased sequentially from below to above.

Similarly, a film having a composition of Cr ₇₄ Pt ₁₈ Mo ₈ and a target of Cr ₇₄ Pt ₁₈ Mo ₈ (at%) using an argon gas as a sputtering gas.
A 0 Å magnetic layer was formed on the underlayer. Then, a Cr layer having a thickness of 50 Å and a thickness of 300 Å are formed on the magnetic layer by using argon gas as a sputtering gas.
Angstrom SiO ₂ was formed, and these Cr layer and SiO ₂ layer were used as protective layers. Thereafter, a lubricating layer made of perfluoropolyether was applied on the protective layer to a thickness of 20 angstroms to obtain a magnetic disk (magnetic recording medium).

The coercive force (Hc) of the magnetic disk was measured using a vibrating sample magnetometer. On this occasion,
A magnetic field was applied in the direction of the film surface with a maximum external applied magnetic field of 12 kOe. As a result, the coercive force was 2500 Oe.

Further, the recording / reproducing output of the magnetic disk was measured. Here, a thin film head having a magnetic head flying height of 0.055 μm is used, the relative speed between the thin film head and the disk B is set to 6 m / s, and the linear recording density is 8
The recording / reproducing output at 0 kfci was measured. As a result, the recording / reproducing output was 225 μV.

Also, the carrier spectrum was measured at a signal frequency of 9.4 MHz and the measurement band was 15 MHz, and the noise spectrum of the above magnetic disk during signal recording / reproduction was measured by a spectrum analyzer (expressed as medium noise Nm). As a result, the medium noise was 5.15 μVrms.

The thin-film head used in the above measurement has 50 coil turns, a track width of 6 μm, and a magnetic head gap length of 0.25 μm.

As described above, when the Mo concentration in the underlayer is changed so as to increase upward (in the direction from the substrate to the magnetic layer), good magnetic characteristics can be obtained.

Further, a reference example manufactured as follows :
58 will be described. 2.5 W / cm input power density
^The Cr target, Cr ₉₅ Mo ₅ target, Cr ₉₀ Mo ₁₀ target, Cr ₈₅ Mo ₁₅ target, and Cr ₈₀ Mo ₂₀ target were discharged simultaneously using an RF magnetron apparatus in the same manner as in Reference Example 57 except for using the RF magnetron apparatus. by, Cr on the _{substrate, Cr 95 Mo 5, Cr 90} Mo 10, Cr
_The substrates are sequentially conveyed in an RF magnetron device so that a film is formed in the order of ₈₅ Mo ₁₅ and Cr ₈₀ Mo ₂₀ . Thus, an underlayer having a thickness of 1500 angstroms was formed on the substrate. In this manner, by sequentially transporting the substrate to targets having different Mo concentrations, the Mo concentration sequentially increases upward in the underlayer. Thereafter, a magnetic layer, a protective layer, and a lubricating layer were sequentially formed on the underlayer in the same manner as in Reference Example 57 to obtain a magnetic disk. Then, the coercive force, recording / reproducing output, and medium noise were measured in the same manner as in Reference Example 57 . As a result, the coercive force,
Recording and reproduction output and medium noise are 2550O each
e, 225 μV and 5.10 μV rms.

As described above, good magnetic characteristics can be obtained even when the underlayer is formed using a plurality of films whose Mo concentration sequentially increases.

Further, Reference Examples 59 and 60 will be described.
You. First, Reference Example 59 was manufactured as follows.
These targets were simultaneously discharged using a Cr target, a Mo target, and a Zr target. At this time, the input power density for the Cr target was 2.5 W /
cm ^2, and the input power density for Zr target was fixed at 0.1 W / cm ^2, the input power density for a Mo target from 0.1W / cm ² 1.2W / cm ² continuously varied from, other Under the same conditions as in Reference Example 57, an underlayer having a thickness of 1500 Å was formed on the substrate. As a result, the Mo concentration in the underlayer increased sequentially from below to above. Thereafter, a magnetic layer, a protective layer, and a lubricating layer were sequentially formed on the underlayer in the same manner as in Reference Example 57 to obtain a magnetic disk. Then, the coercive force, recording / reproducing output, and medium noise were measured in the same manner as in Reference Example 57 . As a result, the coercive force, recording / reproducing output, and medium noise were 2600 Oe, 230 μV, and 4.90 μm, respectively.
Vrms.

In this way, even if the Mo concentration in the underlayer is sequentially increased upward, similarly good magnetic characteristics can be obtained.

(Reference Example 60) The input power density was set to 2.5 W / cm ² , and the other conditions were the same as in Reference Example 57 using an RF magnetron apparatus.
Target, Cr ₉₅ Mo ₃ Zr ₂ target, Cr ₉₀ M
The o ₈ Zr ₂ target, the Cr ₈₅ Mo ₁₃ Zr ₂ target, and the Cr ₈₀ Mo ₁₈ Zr ₂ target are simultaneously discharged, and Cr, Cr ₉₅ Mo ₃ Zr ₂ , Cr ₉₀ Mo are discharged on the substrate.
_{8 Zr 2, Cr 85 Mo 13} Zr 2, and Cr ₈₀ Mo ₁₈ Zr
_The substrates are sequentially transported in the RF magnetron device so that the films are formed in the order of ₂ . As a result, a film thickness of 1
An underlayer of 500 angstroms was formed. In this manner, by sequentially transporting the substrate to targets having different Mo concentrations, the Mo concentration sequentially increases upward in the underlayer. Then, Reference Example 57
Similarly, a magnetic layer, a protective layer, and a lubricating layer were sequentially formed on the underlayer to obtain a magnetic disk. Then, the coercive force, recording / reproducing output, and medium noise were measured in the same manner as in Reference Example 57 . As a result, the coercive force, recording / reproducing output, and medium noise were 2630 Oe, 225 μV, and 4.88, respectively.
μVrms.

As described above, good magnetic characteristics can be obtained even when the underlayer is formed using a plurality of films whose Mo concentration sequentially increases.

In the above-described reference example , the Mo concentration is increased in the direction from the substrate to the magnetic layer in the underlayer. However, not limited to Mo, the Cr or Zr concentration may be changed.

As is clear from the above Examples and Reference Examples , it is necessary that the underlayer contains at least Cr and Mo. For example, when the underlayer is made of Cr and Mo, sufficient protection is required. In order to obtain magnetic force, the ratio is preferably Cr _100-x Mo _x (1 ≦ x ≦ 90), and particularly preferably 10 ≦ x ≦ 80.

It is necessary that the magnetic layer contains at least Co and Pt.
In the case of using o and Pt, the ratio is preferably Co _100-y Mo _y (5 ≦ y ≦ 30) in order to obtain a sufficient coercive force.

Further, in addition to Co and Pt, Mo is added to the magnetic layer.
, The residual noise (Mr) tends to decrease, but the medium noise is reduced and the S / N ratio is increased. In order to minimize the reduction in output due to the reduction in remanent magnetization, the proportions of Co, Pt, and Mo must be Co
_{100-yz Pt y Mo z (} at%) (5 ≦ y ≦ 30,0 <
z ≦ 30), and in particular, 5 ≦ y ≦ 3
It is preferable that 0 and 5 ≦ z ≦ 20.

In addition, other components may be further added to the underlayer. For example, W, B, V, Nb, Ta, Fe,
Ni, Re, Cu, Zr, Zn, P, Si, Ga, G
At least one of e, Hf, Al, and Ti may be further contained. Then, in order to obtain a sufficient coercive force, it is desirable that the addition amount of these additional components be 30 at% or less. Cu, Zr, B, Zn, T
By adding a and Nb, the medium noise can be reduced (that is, the S / N ratio can be increased).
In particular, by adding Zr, the effect on reducing the medium noise is great.

In the magnetic layer, for example, Ta, B, C
r, O, N, Nb, Mn, Zn, W, Pb, Re, V,
And at least one of Zr and Zr. Then, in order to obtain a sufficient coercive force, it is desirable that the addition amount of these additional components be 30 at% or less.

Although a glass substrate is used as the non-magnetic substrate in the above-described embodiment, there is no particular limitation as long as it is non-magnetic. For example, a crystallized glass substrate and an aluminum substrate can be used.

When the protective layer is formed, the type of the protective layer is not particularly limited, and a single-layer or multiple-layer protective layer may be provided. As this protective layer, for example, silicon oxide (S
iO ₂ ), carbon (C), zirconium oxide (ZrO
₂ ), silicon nitride (Si ₃ N ₄ ), boron nitride (B
N), chromium (Cr), and chromium molybdenum alloy (C
Although rMo) is used, it is particularly preferable to use a protective layer having the same composition as that of the underlayer, for example, a metal containing Cr and Mo in terms of generating a diffusion effect from above and below the magnetic layer.

When forming the lubricating layer, the type of the lubricating layer is not particularly limited, and for example, perfluoropolyether, fatty acid, fatty acid amide, fatty acid ester, and fluorocarbon may be used alone or as a mixture.

[0072]

As described above, the production method of the present invention
The magnetic recording medium manufactured by the method has an effect that not only the coercive force and the product of the residual magnetization film thickness can be increased, but also the corrosion resistance can be enhanced. In particular, by including Co, Pt, and Mo in the magnetic layer, not only high recording / reproducing output can be obtained at a high linear recording density, but also medium noise can be reduced. As a result, there is an effect that the S / N ratio at the time of recording and reproduction can be improved at a high linear recording density.

[Brief description of the drawings]

Is a sectional view showing an embodiment of a magnetic recording medium according to the present invention; FIG.

[2] The present invention Co ₈₂ Pt ₁₈ as a magnetic layer in a magnetic recording medium according (◎) and _{Co 74 Pt 18 Mo 8 (○} )
FIG. 6 is a diagram showing a change in coercive force when the Mo content in the underlayer (CrMo) is changed using (at%).

[Figure 3] Co ₇₄ Pt ₁₈ Mo ₈ as a magnetic layer in a magnetic recording medium according to the present invention (at%) underlayer using (CrM
Using oZr), 9 at% (◇) and 18 at% of Mo
FIG. 7B is a diagram illustrating a change in coercive force when the Mo content in the underlayer is changed as (◆).

FIG. 4 is a diagram showing a relationship between a test time and a saturation magnetization in a corrosion resistance test.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Glass substrate 2 Underlayer 3 Magnetic layer 4 Protective layer 5 Lubrication layer 6 Magnetic recording medium

──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Masato Kobayashi 2-7-5 Nakaochiai, Shinjuku-ku, Tokyo Inside of Hoya Co., Ltd. (72) Inventor Jun Nozawa 2- 7-5 Nakaochiai, Shinjuku-ku, Tokyo (56) References JP-A-6-120030 (JP, A) (58) Fields investigated (Int. Cl. ⁷ , DB name) H01F 10/16 G11B 5/66 C23C 14 / 14 H01F 10/30

Claims (1)

(57) [Claims] 1. A method of manufacturing a magnetic recording medium having at least an underlayer and a magnetic layer on a nonmagnetic substrate, wherein the nonmagnetic substrate is a glass substrate, and the underlayer is mainly made of Cr.
And a Mo alloy containing Mo in a composition ratio of 2 to 40 at%, and the magnetic layer is mainly composed of C
CoPt-based alloy containing o and Pt
5 to 30 at%, and the coercive force has a lattice spacing on the (110) plane of the underlayer and (00) of the magnetic layer.
2) The composition ratio of the underlayer and the magnetic layer is set so that the lattice spacing on the plane is close to 1750 Oe or more, and the substrate temperature during the formation of the underlayer and the magnetic layer is from 100 ° C. to 400 ° C. A method for manufacturing the magnetic recording medium, wherein the underlayer and the magnetic layer are formed at a temperature within the range of ° C.