JP3369612B2 - Manufacturing method of aluminum foil for printed coil board - Google Patents

Manufacturing method of aluminum foil for printed coil board

Info

Publication number
JP3369612B2
JP3369612B2 JP32254792A JP32254792A JP3369612B2 JP 3369612 B2 JP3369612 B2 JP 3369612B2 JP 32254792 A JP32254792 A JP 32254792A JP 32254792 A JP32254792 A JP 32254792A JP 3369612 B2 JP3369612 B2 JP 3369612B2
Authority
JP
Japan
Prior art keywords
aluminum foil
aluminum
printed coil
oxide film
conductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP32254792A
Other languages
Japanese (ja)
Other versions
JPH06152125A (en
Inventor
知克 畑
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Foil Manufacturing Co Ltd
Original Assignee
Nippon Foil Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Foil Manufacturing Co Ltd filed Critical Nippon Foil Manufacturing Co Ltd
Priority to JP32254792A priority Critical patent/JP3369612B2/en
Publication of JPH06152125A publication Critical patent/JPH06152125A/en
Application granted granted Critical
Publication of JP3369612B2 publication Critical patent/JP3369612B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Landscapes

  • Metal Rolling (AREA)
  • Coils Or Transformers For Communication (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Windings For Motors And Generators (AREA)
  • Manufacture Of Motors, Generators (AREA)

Description

【発明の詳細な説明】 【0001】 【産業上の利用分野】本発明は、小型のモーター用プリ
ントコイルやセンサー用プリントコイル等を製造する際
に使用されるプリントコイル基板用アルミニウム箔に関
するものである。 【0002】 【従来の技術】従来、モーターのコイルはエナメル線、
ホルマール線等を巻いたものが使用されていたが、近年
オーディオ機器や映像機器等の小型化や薄型化に伴い電
気銅等の導体材料を絶縁性基板の上にコイルパターンに
して設けたプリントコイルが多く利用されてきている。
このようなプリントコイルは、例えば特開昭57−91
590号公報に示されるように以下の(a)〜(d)の
工程を経て製造されている。 (a)アルミニウム箔などの金属箔を基板とし、基板上
にレジストをパターン部分以外の部分に形成する工程、 (b)基板を陰極にしてパターン部分に電解メッキによ
って銅等の導電体を形成する工程、 (c)導電体を絶縁性基板に金属箔を上面にして貼りつ
ける工程、 (d)金属箔をエッチング除去する工程。 【0003】従来、このようなプリントコイルを製造す
るにあたっては、プリントコイル基板用金属箔としてJ
IS H4160 1N30で規定される化学組成のア
ルミニウムを所定の厚さに冷間圧延したものが使用され
ていた。 【0004】 【発明が解決しようとする課題】しかしながら、このよ
うな従来のプリントコイル基板用アルミニウム箔は、所
定の厚さに形成するためにアルミニウム鋳塊に冷間圧延
を施して形成されているが、アルミニウム箔の製造工程
においてアルミニウム箔の表面に形成された酸化皮膜中
の水和酸化皮膜の割合(以下、酸化皮膜中の水和率とい
う)が高いと、水和酸化皮膜が多孔質であるために、皮
膜自体が凝集破壊を起こして上記(a)工程でのレジス
トとアルミニウム箔表面との密着性が悪くなるために、
上記(b)の工程において電解メッキで形成される導電
体がパターン部の外側にはみ出してしまい、となりの導
電体と接触して導電体の短絡が生じ易く、導電体の配線
密度を上げることが困難であった。 【0005】本発明は、上記従来のプリントコイル基板
用アルミニウム箔の問題点を解決したものであり、アル
ミニウム箔の表面に形成された酸化皮膜の水和率を低く
することによりレジストとアルミニウム箔との密着性を
改善して、導電体の短絡の恐れがなく、導電体の配線密
度を上げることを可能としたプリントコイル基板用アル
ミニウム箔を提供するとともに、アルミニウム箔製造時
の冷間圧延の途中で行われる中間焼鈍の条件および冷間
圧延の条件をプリントコイル基板用アルミニウム箔にと
って適切にし、プリントコイル基板用アルミニウム箔の
表面に形成された酸化皮膜の水和率を低くすることによ
りレジストとアルミニウム箔との密着性を改善して、導
電体の短絡の恐れがなく、導電体の配線密度を上げるこ
とを可能としたプリントコイル基板用アルミニウム箔の
製造方法を提供することを目的とするものである。 【0006】 【課題を解決するための手段】本発明は、プリントコイ
ル基板用アルミニウム箔の製造方法に係るものであり、
アルミニウム純度が99.0〜99.9%のアルミニウム鋳塊を
均質化処理後、熱間圧延と冷間圧延を行った後、適宜厚
さの板厚で200℃以上の温度で中間焼鈍を行い、その
後1回当たりの圧延量が0.5mm以下の冷間圧延によっ
て所定の板厚まで圧延することを特徴とするプリントコ
イル基板用アルミニウム箔の製造方法である。 【0007】 【作用】本発明は、アルミニウム純度が99.0〜99.9%の
アルミニウム鋳塊を均質化処理後、熱間圧延と冷間圧延
を行った後、適宜厚さの板厚で200℃以上の温度で中
間焼鈍を行い、その後1回当たりの圧延量が0.5mm以
下の冷間圧延によって所定の板厚まで圧延することを特
徴とするプリントコイル基板用アルミニウム箔の製造方
法であるので、冷間圧延の1回当たりの圧延量を少なく
規制してアルミニウム箔の製造を行うため、冷間圧延の
際に生成されるアルミニウム箔表面での酸化皮膜の水和
酸化皮膜の割合が極めて小さく、酸化皮膜の水和率を3
0%以下に抑えてプリントコイル基板用アルミニウム箔
を形成することができるものである。なお、上記アルミ
ニウム箔表面の酸化皮膜の水和率とは、例えばXPS分
析により、箔表面のO 1 sスペクトルを測定し、そのス
ペクトルをAl−OによるピークとAl−OHによるピ
ークとに分離し、Al−OHによるピークのO 1 sピー
クに対する面積比として求められる。図1に、XPS分
析結果の一例を示す。 【0008】すなわち、アルミニウム箔の製造工程にお
いて、アルミニウム箔表面の酸化皮膜は、熱間圧延およ
び初期の冷間圧延量の大きい冷間圧延で主に形成され
る。この酸化皮膜は、冷間圧延の圧延量が大きい為に材
料の加工熱によって和率が高い皮膜になって生成され
るが、発明者は鋭意討の結果、アルミニウム板の冷間
圧延途中で行われる中間焼鈍によって水和率を下げるこ
とが可能であることを見いだし、中間焼鈍の温度を20
0℃以上にすると共に冷間圧延の時の1回当たりの圧延
量を0.5mm以下にすることで酸化皮膜の水和率を30
%以下に下げたアルミニウム箔を形成可能であることに
到達したものである。 【0009】従って、本発明の製造方法によれば、中間
焼鈍の条件と冷間圧延の条件を適切な組み合わせで行う
ことによってアルミニウム箔表面の酸化皮膜の水和率を
30%以下にしたレジストの密着性に優れたプリントコ
イル基板用アルミニウム箔が安定して形成できるもので
ある。 【0010】上記中間焼鈍の温度は、200℃未満では
酸化皮膜の水和率が30%以下に下がらないために、2
00℃以上が必要であるが、温度が低いほど中間焼鈍に
長時間を要するので、生産性の点から300℃以上で行
うのが好ましい。 【0011】また、中間焼鈍を行う際のアルミニウム板
厚さは何処でもよいが、1回当たりの冷間圧延量が0.
5mmを越えると酸化皮膜の水和率が高くなってしまうこ
とから、中間焼鈍後の冷間圧延の生産性の点から2mm以
下の厚さにしてから中間焼鈍を行うのが好ましい。 【0012】そして、本発明の製造方法により製造され
たプリントコイル基板用アルミニウム箔は、アルミニウ
ム純度が99.0〜99.9%のアルミニウム箔であるので、ア
ルミニウム純度が高く不純物による巨大な金属化合物を
生成することがなく、導電体の電解メッキを行う際に導
電体が均一にメッキされるようになりメッキ抜けによる
配線の不良箇所が生じることがない。 【0013】しかも、アルミニウム箔の表面酸化皮膜中
の水和酸化皮膜の割合が30%以下であるので、アルミ
ニウム箔表面の皮膜自体が凝集破壊を起こすことがな
く、レジストとアルミニウム箔表面との密着性に優れて
おり、レジスト形成後の電解メッキによる導電体がパタ
ーン部の外側へのはみ出しが生じることがない。 【0014】更に、本発明の製造方法により製造された
プリントコイル基板用アルミニウム箔が、アルミニウム
箔の表面酸化皮膜中の水和酸化皮膜の割合が30%以下
で、且つ酸化皮膜の厚さが60Å以下である場合には、
酸化皮膜が薄く皮膜自体の凝集破壊がさらに防止されて
レジストの密着性に優れており、レジストがアルミニ
ム箔から剥離することがなく、レジストとアルミニウム
箔との間に剥離による隙間が生じないで電解メッキによ
る導電体がこのような隙間に浸入するのが防止され導電
体がプリントコイルのパターン部に正確にメッキされて
パターン部の外側にはみだすことがない。 【0015】又、酸化皮膜は水和酸化皮膜の割合が30
%を越えると酸化皮膜の厚さが60Å以下の薄い厚さで
あっても、レジストの密着性が低下してレジストがアル
ミニウム箔から剥離して、電解メッキにより形成される
導電体がパターン部の外側にはみ出して隣接する導電体
と接触しやすくなるため、酸化皮膜の水和酸化皮膜の割
合を30%以下にしておくものである。 【0016】本発明により得られるプリントコイル基板
用アルミニウム箔の厚さとしては、10〜300μmの
範囲が好ましく、特に20〜200μmの厚さにしてお
くのが取扱性および生産性の点から好ましい。すなわ
ち、10μm以下の箔厚では腰がなくなって取扱難く、
300μm以上になるとプリントコイル製造時のエッチ
ング除去に時間がかかりプリントコイルの生産性が低下
してしまうためである。 【0017】 【実施例1】次に、本発明のプリントコイル基板用アル
ミニウム箔の実施例について説明する。表1に示す組成
のアルミニウム(Fe、Si以外の成分は、アルミニウ
ムでありその他の不可避不純物が若干含有されてい
る。)鋳塊を均質化処理後、熱間圧延、冷間圧延したの
ち、1.0mmの板厚で350℃、10時間の中間焼鈍を
行い、その後4回の冷間圧延(1回目は1.0 mmから0.6
mm、2回目は0.6 mmから0.3 mm、3回目は0.3 mmから0.
2 mm、4回目は0.2 mmから0.1 mm)を行って100 μmの
厚さのアルミニウム箔を得た。このアルミニウム箔を基
板とし、以下の(A)〜(D)の工程を経て、表1の1
〜8に示す導体幅、導体間隔を持つプリントコイルを製
造した。製造工程は、 (A)基板上にレジストをパターン部以外の部分に形成
する、 (B)基板を陰極とし、パターン部に電解メッキにより
銅の導体を形成する、 (C)導体を絶縁基板にアルミニウム箔を上にして貼り
つける、 (D)アルミニウム箔をエッチング除去するというもの
である。 【0018】 【比較例1】一方、比較例1として表1の9〜14に示
す実施例1よりもアルミニウム純度の低い組成のアルミ
ニウム(Fe、Si以外の成分は、アルミニウムであり
その他の不可避不純物が若干含有されている。)鋳塊を
実施例1と同じ条件で冷間圧延を行って100 μmの厚さ
のアルミニウム箔を得て、上記(A)〜(D)の工程を
経てプリントコイルを製造した。 【0019】 【表1】【0020】(1)メッキ抜け不良は、同心円状のコイ
ル導体3本中に直径5μm以上のメッキ抜け不良が何箇
所あるかを、顕微鏡観察して数えた。 【0021】表1から明らかな通り、本発明の実施例1
〜8に係るアルミニウム箔を基板にして製造したプリン
トコイルは、導体部のメッキ抜け不良がなく、プリント
コイル基板用アルミニウム箔として好適に使用しうるも
のであった。 【0022】 【実施例2】発明の実施例としてFeを0.5%、S
iを0.1%含有するアルミニウム(Fe.Si以外の
成分はアルミニウムであり、その他不可避不純物が若干
含有されている。)鋳塊を均質化処理後、熱間圧延、冷
間圧延した後、1.0mmの板厚で表2に示す板厚条件、
中間焼鈍条件(温度、時間の条件)で中間焼鈍を行い、
その後に示す回数の冷間圧延によって1回当たり
の冷間圧延量を0.5mm以下にしてアルミニウム箔を得
た。 【0023】このアルミニウム箔を基板とし、実施例1
と同じ製造工程を経て、表の1〜12に示す導体幅、導
体間隔を持つプリントコイルを製造した。得られたプリ
ントコイルについて、隣同士の導体の接触状況を観察し
た結果を表に示す。また、アルミニウム箔の表面酸化
皮膜の厚さを測定した結果と、酸化皮膜の水和率をXP
S分析により求めた結果を表2に示す。 【0024】 【比較例2】一方、比較例として表に示す中間焼鈍
条件(温度、時間の条件)で中間焼鈍を行い、その後
に示す回数の冷間圧延によって1回当たりの冷間圧
延量を実施例とは違う中間焼鈍条件と冷間圧延の条件
でアルミニウム箔を得た。このアルミニウム箔を基板と
し、実施例1と同じ製造工程を経て、表の13〜24に示
す導体幅、導体間隔を持つプリントコイルを製造した。 【0025】得られたプリントコイルについて、隣同士
の導体の接触状況を観察した結果を表5に示す。また、
アルミニウム箔の表面酸化皮膜の厚さを測定した結果
と、酸化皮膜の水和率をXPS分析により求めた結果を
に示す。 【0026】 【表2】 【0027】表の中の「導体接触箇所数」は、同心円
状のコイル導体10本中に隣同士の導体が何箇所あるかを
顕微鏡観察して数えた。 【0028】 【表3】【0029】表の中の「導体接触箇所数」は、同心円
状のコイル導体10本中に隣同士の導体が何箇所あるかを
顕微鏡観察して数えた。 【0030】表から明らかな通り、本発明の実施例
に係るアルミニウム箔を基板として製造したプリントコ
イルは、レジストの密着性に優れており、隣同士の導体
の接触がなく、プリントコイル基板用アルミニウム箔と
して配線密度を高くして形成する場合にも好適に使用し
うるものであった。 【0031】一方、表の比較例では、酸化皮膜の厚
さおよび水和率の関係からプリントコイル基板用アルミ
ニウム箔として用いた場合には、隣接する導電体と10
ヶ所以上の接触が観察されて、不良率が高いものであっ
た。 【0032】 【発明の効果】以上述べた如く、本発明は、アルミニウ
ム純度が99.0〜99.9%のアルミニウム鋳塊を均質化処理
後、熱間圧延と冷間圧延を行った後、適宜厚さの板厚で
200℃以上の温度で中間焼鈍を行い、その後1回当た
りの圧延量が0.5mm以下の冷間圧延によって所定の板
厚まで圧延することを特徴とするプリントコイル基板用
アルミニウム箔の製造方法であるのでアルミニウム箔表
面の酸化皮膜の水和率を30%以下にして製造すること
ができるものであり、これによってレジストの密着性に
優れ導電体の短絡が生じる恐れがないプリントコイル基
板用アルミニウム箔を効率よく生産できるものであり、
導体の幅および間隔を狭くした高密度のパターンのプリ
ントコイル用のアルミニウム箔が安定供給できるもので
ある。
Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an aluminum foil for a printed coil substrate used for manufacturing a small-sized printed coil for a motor or a printed coil for a sensor. is there. 2. Description of the Related Art Conventionally, motor coils are enameled wires,
A coil wound with formal wire etc. was used, but in recent years, with the miniaturization and thinning of audio equipment and video equipment etc., a printed coil in which a conductive material such as electrolytic copper is provided in a coil pattern on an insulating substrate Is often used.
Such a printed coil is disclosed in, for example, Japanese Patent Application Laid-Open No. 57-91.
As shown in JP-A-590, it is manufactured through the following steps (a) to (d). (A) a step of forming a resist on a portion other than a pattern portion on a substrate using a metal foil such as an aluminum foil as a substrate, and (b) forming a conductor such as copper by electrolytic plating on the pattern portion using the substrate as a cathode. (C) attaching a conductor to an insulating substrate with the metal foil facing upward, and (d) etching and removing the metal foil. Conventionally, when manufacturing such a printed coil, J is used as a metal foil for a printed coil board.
Aluminum having a chemical composition specified by IS H4160 1N30 cold-rolled to a predetermined thickness was used. [0004] However, such a conventional aluminum foil for a printed coil board is formed by subjecting an aluminum ingot to cold rolling to form a predetermined thickness. However, when the ratio of the hydrated oxide film in the oxide film formed on the surface of the aluminum foil in the aluminum foil manufacturing process (hereinafter referred to as the hydration rate in the oxide film) is high, the hydrated oxide film is porous. Because the film itself causes cohesive failure and the adhesion between the resist and the aluminum foil surface in the step (a) is deteriorated,
In the step (b), the conductor formed by electrolytic plating protrudes outside the pattern portion, and is likely to be short-circuited by contact with the next conductor, thereby increasing the wiring density of the conductor. It was difficult. The present invention solves the above-mentioned problems of the conventional aluminum foil for a printed coil board, and reduces the hydration rate of an oxide film formed on the surface of the aluminum foil to reduce the resist and the aluminum foil. The present invention provides an aluminum foil for a printed coil board that has improved the adhesiveness of the conductor, has no risk of short-circuiting of the conductor, and can increase the wiring density of the conductor, and during the cold rolling during the production of the aluminum foil. The conditions of the intermediate annealing and the cold rolling performed in the aluminum foil for the printed coil board are appropriate for the aluminum foil for the printed coil board, and the hydration rate of the oxide film formed on the surface of the aluminum foil for the printed coil board is reduced to thereby reduce the resist and the aluminum. Improves adhesion to foil, eliminates the possibility of short-circuiting of the conductor, and increases the wiring density of the conductor. It is an object to provide a Ntokoiru manufacturing method of an aluminum foil substrate. [0006] The present invention relates to a method of manufacturing an aluminum foil for a printed coil board,
After homogenizing an aluminum ingot with an aluminum purity of 99.0 to 99.9%, perform hot rolling and cold rolling, perform intermediate annealing at a temperature of 200 ° C. or more with an appropriate thickness, and then once A method for producing an aluminum foil for a printed coil board, characterized in that the aluminum foil is rolled to a predetermined thickness by cold rolling with a rolling amount of 0.5 mm or less. According to the present invention, an aluminum ingot having an aluminum purity of 99.0 to 99.9% is subjected to a homogenizing treatment, then subjected to hot rolling and cold rolling, and then to an appropriate thickness of 200 ° C. or more. A method of manufacturing an aluminum foil for a printed coil board, characterized in that intermediate annealing is performed at a temperature, and then rolling is performed to a predetermined thickness by cold rolling with a rolling amount of 0.5 mm or less per time. Since the production of aluminum foil is performed with the rolling amount per cold rolling reduced, the ratio of the hydrated oxide film of the oxide film on the surface of the aluminum foil generated during cold rolling is extremely small. Hydration rate of the film is 3
It is possible to form an aluminum foil for a printed coil substrate while suppressing the content to 0% or less. The above aluminum
The hydration rate of the oxide film on the surface of the aluminum foil is, for example,
The O 1 s spectrum of the foil surface was measured by
The spectrum is divided into a peak by Al-O and a peak by Al-OH.
O 1 s peak of Al-OH peak
It is calculated as the area ratio to the area. Figure 1 shows the XPS
An example of the analysis result is shown. That is, in the manufacturing process of the aluminum foil, the oxide film on the surface of the aluminum foil is mainly formed by hot rolling and cold rolling with a large initial cold rolling amount. The oxide film is hydrated rate by processing heat of the material for a large amount of rolling of the cold rolling is generated becomes high coating inventors result of intensive consider, way cold rolling of aluminum plate It is found that the hydration rate can be reduced by the intermediate annealing performed in
The hydration rate of the oxide film can be reduced to 30 ° C. or more by setting the rolling amount per cold rolling to 0.5 mm or less.
% Or less can be formed. Therefore, according to the manufacturing method of the present invention, the hydration ratio of the oxide film on the aluminum foil surface is reduced to 30% or less by performing the conditions of the intermediate annealing and the conditions of the cold rolling in an appropriate combination. An aluminum foil for a printed coil board having excellent adhesion can be formed stably. When the temperature of the intermediate annealing is lower than 200 ° C., the hydration ratio of the oxide film does not drop below 30%.
The temperature is required to be not lower than 00 ° C., but the lower the temperature, the longer the intermediate annealing takes. The thickness of the aluminum plate during the intermediate annealing is not limited.
If the thickness exceeds 5 mm, the hydration rate of the oxide film becomes high. Therefore, it is preferable to perform the intermediate annealing after reducing the thickness to 2 mm or less from the viewpoint of the productivity of the cold rolling after the intermediate annealing. [0012] And it is manufactured by the manufacturing method of the present invention.
Aluminum foil for printed coil boards is made of aluminum
Aluminum purity of 99.0 to 99.9%.
Giant metal compounds with high luminium purity and impurities
It is not generated during electroplating of conductors.
The conductor is now plated evenly, resulting in missing plating
There is no occurrence of defective wiring. In addition, in the surface oxide film of the aluminum foil
Since the proportion of the hydrated oxide film of
The film on the surface of the aluminum foil itself does not cause cohesive failure.
Excellent adhesion between resist and aluminum foil surface
The conductor formed by electrolytic plating after resist formation
The protrusion does not protrude outside the loop portion. [0014] Further, the present invention is manufactured by the manufacturing method of the present invention.
Aluminum foil for printed coil board is aluminum
The percentage of hydrated oxide film in the surface oxide film of the foil is 30% or less
And when the thickness of the oxide film is 60 ° or less,
The oxide film is thin and cohesive failure of the film itself is further prevented
It has excellent adhesion of the resist, the resist is Arumini c
Resist and aluminum without peeling from the foil
Electroplating without gaps between foil
Conductive material is prevented from entering such gaps,
The body is accurately plated on the printed coil pattern
It does not protrude outside the pattern section. The oxide film has a hydrated oxide film ratio of 30.
%, The thickness of the oxide film is as thin as 60 mm or less.
Even if the
Peeled from minium foil and formed by electrolytic plating
Conductor protrudes outside the pattern area and is adjacent to the conductor
Hydrated oxide film
Is set to 30% or less. The thickness of the aluminum foil for a printed coil substrate obtained by the present invention is preferably in the range of 10 to 300 μm, and more preferably in the range of 20 to 200 μm from the viewpoint of handleability and productivity. In other words, with a foil thickness of 10 μm or less, it is difficult to handle because it has no rigidity,
If the thickness is 300 μm or more, it takes a long time to remove the etching when manufacturing the print coil, and the productivity of the print coil is reduced. Embodiment 1 Next, an embodiment of an aluminum foil for a printed coil board according to the present invention will be described. Aluminum having the composition shown in Table 1 (the component other than Fe and Si is aluminum and contains some other unavoidable impurities). Intermediate annealing at 350 ° C. for 10 hours with a thickness of 0.0 mm, and then cold rolling four times (first time from 1.0 mm to 0.6 mm)
mm the second time from 0.6 mm to 0.3 mm and the third time from 0.3 mm to 0.3 mm.
2 mm and the fourth time from 0.2 mm to 0.1 mm) to obtain an aluminum foil having a thickness of 100 μm. This aluminum foil was used as a substrate, and the following steps (A) to (D) were performed.
Printed coils having conductor widths and conductor intervals shown in Nos. To 8 were manufactured. The manufacturing process includes: (A) forming a resist on a portion other than the pattern portion on the substrate; (B) forming a copper conductor by electrolytic plating on the pattern portion using the substrate as a cathode; and (C) forming a conductor on the insulating substrate. (D) Etching and removing the aluminum foil. Comparative Example 1 On the other hand, as Comparative Example 1, aluminum having a composition with a lower aluminum purity than that of Example 1 shown in Tables 9 to 14 (the component other than Fe and Si is aluminum and other unavoidable impurities) The ingot was subjected to cold rolling under the same conditions as in Example 1 to obtain an aluminum foil having a thickness of 100 μm, and the printed coil was subjected to the above steps (A) to (D). Was manufactured. [Table 1] (1) The number of plating omission defects was determined by observing the number of plating omission defects having a diameter of 5 μm or more in three concentric coil conductors by microscopic observation. As is clear from Table 1, Example 1 of the present invention
Printed coils manufactured using the aluminum foils according to Nos. To 8 as substrates had no defective plating of the conductor portion, and could be suitably used as aluminum foil for printed coil substrates. Embodiment 2 As Embodiment 2 of the present invention, 0.5% Fe and S
aluminum containing 0.1% of i (a component other than Fe.Si is aluminum and contains some other unavoidable impurities). The ingot is homogenized, hot-rolled, and cold-rolled. A sheet thickness condition shown in Table 2 with a sheet thickness of 1.0 mm,
Intermediate annealing is performed under intermediate annealing conditions (temperature, time conditions)
Thereafter , an aluminum foil was obtained by performing cold rolling the number of times shown in Table 2 so that the amount of cold rolling per time was 0.5 mm or less. Example 1 was prepared using this aluminum foil as a substrate.
Through the same manufacturing process as, 1-12 to show the conductor width of the table 2, were produced printed coil with conductor spacing. Table 2 shows the results of observing the state of contact between adjacent conductors for the obtained printed coil. In addition, the results of measuring the thickness of the surface oxide film on the aluminum foil and the hydration rate of the oxide film were calculated using XP.
Table 2 shows the results obtained by the S analysis. Comparative Example 2 On the other hand, as Comparative Example 2 , intermediate annealing was performed under the intermediate annealing conditions (temperature and time conditions) shown in Table 3 , and thereafter ,
An aluminum foil was obtained by cold rolling the number of times shown in Table 3 under different intermediate annealing conditions and cold rolling conditions than in Example 2 for the amount of cold rolling per time. Using this aluminum foil as a substrate, printed coils having conductor widths and conductor intervals shown in Tables 13 to 24 in Table 3 were produced through the same production steps as in Example 1. Table 5 shows the results of observing the state of contact between adjacent conductors in the obtained printed coil. Also,
Table 3 shows the results obtained by measuring the thickness of the surface oxide film on the aluminum foil and the results obtained by XPS analysis of the hydration rate of the oxide film. [Table 2] The "number of conductor contact points" in Table 2 was determined by observing the number of adjacent conductors in 10 concentric coil conductors by microscopic observation. [Table 3] The "number of conductor contact points" in Table 3 was counted by observing how many adjacent conductors were present in 10 concentric coil conductors. As is clear from Table 2, Example 2 of the present invention
The printed coil manufactured using the aluminum foil according to the above as a substrate has excellent adhesiveness of the resist, there is no contact between adjacent conductors, and it is also suitable for a case where the wiring density is high as an aluminum foil for a printed coil substrate. It could be used for On the other hand, in Comparative Example 2 in Table 3 , when used as an aluminum foil for a printed coil board due to the relationship between the thickness of the oxide film and the hydration rate, the distance between the adjacent conductor and the aluminum foil was 10%.
Contact was observed at more than three places, and the defect rate was high. As described above, according to the present invention , an aluminum ingot having an aluminum purity of 99.0 to 99.9% is subjected to a homogenizing treatment, then subjected to hot rolling and cold rolling, and then to an appropriate thickness. An aluminum foil for a printed coil substrate characterized by being subjected to intermediate annealing at a temperature of 200 ° C. or more at a sheet thickness, and then rolling to a predetermined sheet thickness by cold rolling with a rolling amount per time of 0.5 mm or less. Since it is a manufacturing method, it can be manufactured by setting the hydration rate of the oxide film on the aluminum foil surface to 30% or less, whereby the printed coil substrate has excellent resist adhesion and does not cause a short circuit of the conductor. For efficient production of aluminum foil for
An aluminum foil for a printed coil having a high-density pattern in which the width and interval of the conductor are reduced can be stably supplied.

【図面の簡単な説明】 【図1】本発明における酸化皮膜の水和率を求めるXS
P分析を説明する説明図。
BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 XS for determining hydration rate of oxide film in the present invention
Explanatory drawing explaining P analysis.

───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7,DB名) H05K 3/38 B21B 1/28 H01F 17/00 H02K 3/26 ──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int. Cl. 7 , DB name) H05K 3/38 B21B 1/28 H01F 17/00 H02K 3/26

Claims (1)

(57)【特許請求の範囲】 【請求項1】 アルミニウム純度が99.0〜99.9%のアル
ミニウム鋳塊を均質化処理後、熱間圧延と冷間圧延を行
った後、適宜厚さの板厚で200℃以上の温度で中間焼
鈍を行い、その後1回当たりの圧延量が0.5mm以下の
冷間圧延によって所定の板厚まで圧延することを特徴
するプリントコイル基板用アルミニウム箔の製造方法。
(57) [Claims] [Claim 1] After homogenizing an aluminum ingot having an aluminum purity of 99.0 to 99.9%, performing hot rolling and cold rolling, and then appropriately adjusting the thickness of the ingot. perform intermediate annealing at 200 ° C. or higher, a manufacturing method of an aluminum foil for printed coil substrate, characterized by rolling to a predetermined thickness rolling amount by the following cold rolling 0.5mm per thereafter once.
JP32254792A 1992-11-06 1992-11-06 Manufacturing method of aluminum foil for printed coil board Expired - Fee Related JP3369612B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP32254792A JP3369612B2 (en) 1992-11-06 1992-11-06 Manufacturing method of aluminum foil for printed coil board

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Application Number Priority Date Filing Date Title
JP32254792A JP3369612B2 (en) 1992-11-06 1992-11-06 Manufacturing method of aluminum foil for printed coil board

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JPH06152125A JPH06152125A (en) 1994-05-31
JP3369612B2 true JP3369612B2 (en) 2003-01-20

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