JP3343344B2 - Ultrasonic cleaning equipment - Google Patents

Ultrasonic cleaning equipment

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Publication number
JP3343344B2
JP3343344B2 JP2000164781A JP2000164781A JP3343344B2 JP 3343344 B2 JP3343344 B2 JP 3343344B2 JP 2000164781 A JP2000164781 A JP 2000164781A JP 2000164781 A JP2000164781 A JP 2000164781A JP 3343344 B2 JP3343344 B2 JP 3343344B2
Authority
JP
Japan
Prior art keywords
inner tank
tank
fluid
ultrasonic cleaning
ultrasonic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2000164781A
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Japanese (ja)
Other versions
JP2001340819A (en
Inventor
啓二 片岡
Original Assignee
ファインマシーンカタオカ株式会社
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Filing date
Publication date
Application filed by ファインマシーンカタオカ株式会社 filed Critical ファインマシーンカタオカ株式会社
Priority to JP2000164781A priority Critical patent/JP3343344B2/en
Publication of JP2001340819A publication Critical patent/JP2001340819A/en
Application granted granted Critical
Publication of JP3343344B2 publication Critical patent/JP3343344B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Cleaning Or Drying Semiconductors (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、外槽に設けた内槽下部
に対して内槽上部が、洗浄1サンクル毎に上下動して、洗浄
対象物(ワーク、例えば、部品、カ゛ラス、液晶板等)を、略水
平移動可能とするとともに、内槽上・下部の流体(洗浄
水、洗浄液等)を流体貯留タンクに還流し、流体中に浮遊す
る汚れを除去する構成の超音波洗浄装置に関する。
BACKGROUND OF THE INVENTION The present invention relates to an object of the present invention, wherein an upper portion of an inner tub moves up and down for each cleaning one cycle with respect to a lower portion of an inner tub provided in an outer tub, so that an object to be cleaned (work, for example, a part, a glass, a liquid crystal, etc.) The ultrasonic cleaning device has a structure that allows the plate (plate, etc.) to be moved substantially horizontally, and returns the fluid (washing water, washing solution, etc.) above and below the inner tank to the fluid storage tank to remove dirt floating in the fluid. About.

【0002】[0002]

【従来の技術】従来の超音波洗浄装置は、図7に示す如
く、ハ゛ッチ゛システムであって、槽内に充填された流体中に洗
浄対象物(ワークとする)を浸漬する構成となっている。し
たがって、次のような問題がある。即ち、ワークを水平移
動及び上下移動して、槽内に浸漬することから、搬送装
置・動作が複雑となること、又は搬送に時間を要するこ
と、設置スヘ゜ースの拡張、工場の大型化等を招来するこ
と、等が挙げられる。
2. Description of the Related Art As shown in FIG. 7, a conventional ultrasonic cleaning apparatus is a hatch system in which an object to be cleaned (hereinafter referred to as a work) is immersed in a fluid filled in a tank. . Therefore, there are the following problems. That is, since the work is moved horizontally and vertically, and immersed in the tank, the transfer device and operation become complicated, or the transfer takes time, the installation space is expanded, and the factory is enlarged. And so on.

【0003】一方、平板状のワーク(例えば、カ゛ラス、液晶板
等)では、通常、チェーン搬送及びカ゛イト゛部材を利用して搬送
する構成である。したがって、ワークにカ゛イト゛部材の痕跡が
残り、不良品発生の要因となること、後処理が必要とな
ること、能率の低下を招来すること、等の問題がある。
On the other hand, in the case of a flat work (for example, a glass, a liquid crystal plate, or the like), the work is usually conveyed using a chain conveyance and a guide member. Accordingly, there are problems such as traces of the kite member remaining on the work, which may cause defective products, necessitate post-processing, and lower efficiency.

【0004】次に、従来の技術文献を挙げると、特開平
7-136606号の洗浄装置がある(文献(1)とする)。この文
献(1)の内容は、外槽内に、流体供給ホース及びト゛レンハ゜イフ゜
を備えた2分割式内槽を設け、この2分割式内槽に超音波
振動子を配備し、また2分割式内槽に乾燥回転テーフ゛ルを設
けてなり、一槽において、洗浄及び乾燥を図る構成であ
る。
Next, Japanese Patent Application Laid-Open Publication No.
There is a washing device of 7-136606 (refer to Reference (1)). The content of this document (1) is that a two-part type inner tank equipped with a fluid supply hose and a drain pipe is provided in an outer tank, and an ultrasonic transducer is provided in the two-part type inner tank. A drying rotary table is provided in the inner tank, and cleaning and drying are performed in one tank.

【0005】[0005]

【発明が解決しようとする課題】前述の如く、従来のハ゛
ッチ゛システムでは、種々の課題がある。また同様にチェーン搬送
等を利用する構成では、痕跡が残り、不良品発生の要因
となること、後処理が必要となること、能率の低下を招
来すること、等の課題がある。
As described above, the conventional hatch system has various problems. Similarly, in a configuration using chain conveyance or the like, there are problems such as leaving traces, causing defective products, necessitating post-processing, and reducing efficiency.

【0006】尚、文献(1)は、超音波振動子が上下動し
て2分割式内槽に設置又は離間する構成を採用し、またワ
ークを2分割式内槽のテーフ゛ル上に設置する際には、外槽の開
口を介して上下動する搬送手段を利用して行う構成を採
用する。したがって、前述のハ゛ッチ゛システムと同様な課題が
あること、及び超音波振動子が上下動することから、一
層複雑又は時間を要することと思われる。
The document (1) employs a configuration in which an ultrasonic vibrator moves up and down to be installed in or separated from a two-part inner tank, and when a work is installed on a table of the two-part inner tank. In this case, a configuration is employed in which the transfer means moves up and down through the opening of the outer tank. Therefore, it is considered that there is a problem similar to that of the above-described hatch system, and that the ultrasonic vibrator moves up and down, so that it is more complicated or requires more time.

【0007】[0007]

【課題を解決するための手段】請求項1の発明は、各処
理の1サイクル毎に内槽上部が上下動して、液体中(液中)に
浮遊又は混入する汚れを除去(流出し、又は濾過)するこ
と、内槽を上・下部に分割する構成として、内槽の流体
面(液面)の上昇を介して超音波洗浄装置の機能の拡充を
図ること、又はワークの水平方向の移動を可能とし、かつ
水平方向の移動を利用して洗浄及び移動を図り、作業の
簡略化、スヒ゜ート゛化、容易化等を図ること、又は超音波洗
浄装置又は搬送手段等より落ちる塵埃の外槽及び内槽へ
の侵入防止を図ること、等を意図する。
According to the invention of claim 1, the upper portion of the inner tank is moved up and down every cycle of each processing to remove (flow out) dirt floating or mixed in the liquid (in the liquid). Or filtration), as a configuration that divides the inner tank into upper and lower parts, to enhance the function of the ultrasonic cleaning device through the rise of the fluid level (liquid level) of the inner tank, or in the horizontal direction of the work Enables movement and uses horizontal movement for cleaning and movement to simplify, speed up, and facilitate work, or an outer tank for dust that falls from ultrasonic cleaning equipment or transport means And to prevent intrusion into the inner tank.

【0008】請求項1は、流体排水用の配管を設けた
槽内に、外槽の開口と略同じ面に開口を有する流体供給
用の配管を備えた内槽下部を設け、また外槽に流体排水
用の配管を介して流体貯留 タンク を設け、内槽下部に超音
波発生器を設け、内槽下部に内槽上部を接離可能に設
け、内槽上部を上下動する移動手段を設け、内槽下・上
部の流体を流体貯留 タンク に還流する構成とした超音波洗
浄装置である。
A first aspect of the present invention is a fluid supply system having an opening in an outer tank provided with a pipe for draining a fluid , the opening being substantially on the same surface as the opening of the outer tank.
The inner tank bottom provided with a pipe for use, also fluid drained to the outer tub
A fluid storage tank is provided through a pipe for use, an ultrasonic generator is provided at the lower part of the inner tank, an upper part of the inner tank is provided at the lower part of the inner tank so as to be able to contact and separate, and a moving means for vertically moving the upper part of the inner tank is provided. Under and above the tank
This is an ultrasonic cleaning device configured to recirculate the fluid of the section to the fluid storage tank .

【0009】請求項2の発明は、内槽上・下部(内槽上部
と内槽下部)の合致を、確実かつ容易に行い、かつ流体
の漏洩回避と、ワークの浸漬状況を確保すること、等を意
図する。
The invention of claim 2 is characterized in that the upper and lower inner tanks
And the lower part of the inner tank) are intended to be performed reliably and easily, to prevent fluid leakage and to ensure the immersion state of the work.

【0010】請求項2は、上記の内槽下部にオーハ゛ーフロー兼
合体用の鍔片樋を形成し、鍔片樋に上記の内槽上部の下
端が合体する構成であって、流体供給用の配管を介して
内槽下・上部に供給された流体を、内槽上部より オーハ゛ーフ
ロー して外槽に流下し、また内槽上部の移動を介して内槽
上部の流体を排水し、流体を、内槽下・上部から流体貯
タンク に還流する構成とした請求項1に記載の超音波洗浄
装置である。
[0010] Claim 2 is a configuration into the inner tank lower part of the form a flange Katahi for Oha Bu Furo and coalescence, the lower end of the inner tank upper collar Katahi coalesce, piping for fluid supply Through
The fluid supplied to the inner tank under-top, Oha Bu-safe than the inner tank top
It flows down in the outer tank to low, also the inner tank through the movement of the inner tank upper
Drain the upper fluid and store the fluid from below and above the inner tank.
2. The ultrasonic cleaning device according to claim 1, wherein the ultrasonic cleaning device is configured to reflux to a retaining tank .

【0011】請求項3の発明は、超音波発生器を内槽上
・下部に配備して、清浄効果の一層の拡充、及び清浄の
スヒ゜ート゛アッフ゜を図ることを意図する。請求項3は、内槽上
部に超音波発生器を設ける構成とした超音波洗浄装置で
ある。
According to a third aspect of the present invention, the ultrasonic generator is mounted on the inner tank.
It is intended to be installed at the bottom to further enhance the cleaning effect and to speed up cleaning. Claim 3 is an ultrasonic cleaning device having a configuration in which an ultrasonic generator is provided above the inner tank.

【0012】[0012]

【発明の実施の形態】以下、本発明の実施の形態を説明
する。
Embodiments of the present invention will be described below.

【0013】搬入側コンヘ゛アにより搬入されるワークは、レール
に沿って移動する洗浄枠又は籠(図例である)支持部材に
支持又は収容等(以下支持とする)されるとともに、当該
籠は、車輪及び車輪と同走する移動部材、移動杆、及び
移動腕等の移動手段と前記レールを利用して、移動されて
いき、この籠に収容(投入)されたワークを最初の外槽に向
って移動し、当該外槽内の内槽下部の上方に位置させ
る。その後、内槽上部が降下して前記内槽下部に合致し
た段階(合致で内槽が構成される)で、流体(洗浄液)を順
次供給する(予め内槽下部に洗浄液を供給する場合もあ
りえる)。そして、内槽上部まで洗浄液が充填されたと
きに、超音波発生器を作動させて、超音波の振動エネルキ゛ー
を利用してワークの汚れを除去する。尚、内槽上部にも超
音波発生器を配備する構成とすれば、より効率的な洗浄
が図れる。通常は、洗浄液は内槽上部よりオーハ゛ーフローして
外槽内に流下して、浮遊する汚れを同時に流下させる構
成とする。
The work carried in by the carry-in side conveyor is supported or accommodated (hereinafter referred to as a support) by a washing frame or a basket (illustrated example) supporting member moving along the rail, and the basket is Using the wheels and moving means such as wheels, moving members, moving rods, and moving arms, and the rails, the work that has been moved and accommodated (input) in this basket is directed to the first outer tank. To be positioned above the lower part of the inner tank in the outer tank. Then, at the stage where the upper part of the inner tank is lowered and coincides with the lower part of the inner tank (the inner tank is formed by matching), the fluid (cleaning liquid) is sequentially supplied (the cleaning liquid may be supplied to the lower part of the inner tank in advance. ). Then, when the upper portion of the inner tank is filled with the cleaning liquid, the ultrasonic generator is operated to remove the dirt from the work using the ultrasonic vibration energy. If an ultrasonic generator is provided also in the upper part of the inner tank, more efficient cleaning can be achieved. Ordinarily, the cleaning liquid is overflowed from the upper portion of the inner tank, flows down into the outer tank, and the floating dirt is caused to flow down at the same time.

【0014】前述の操作によりワークの洗浄が終了した場
合は、内槽上・下部及び外槽の洗浄液をフィルターを介して
流体貯留タンク(洗浄液貯留タンク)にリターンさせる。この流下
(排水)作用が順次実行される段階(最初から併用するこ
ともありえる)で、内槽上部を上方に移動していく。こ
の移動と略同時又は完了時に、排水等が終了して、最初
の洗浄が終了する。
When the cleaning of the work is completed by the above-described operation, the cleaning liquid in the upper and lower parts of the inner tank and the outer tank is returned to the fluid storage tank (washing liquid storage tank) through the filter. This downfall
At the stage where the (drainage) action is performed sequentially (it may be used together from the beginning), the upper part of the inner tank is moved upward. At approximately the same time as or when this movement is completed, drainage and the like are completed, and the first cleaning is completed.

【0015】次いで、リンス洗浄に移行する。前記と同様
な動作により次の内槽下部に洗浄済みワークが達した段階
で、当該内槽下部と内槽上部とを合致させる。この内槽
上部までリンス貯蔵タンクからホ゜ンフ゜及びフィルターを介してリンス洗
浄水が充填されたときに、超音波発生器を作動させて、
超音波の振動エネルキ゛ーを利用してワークの汚れを除去する。
尚、内槽上部、内槽側面等にも併用又は個別に超音波発
生器を配備する構成とすれば、より効率的なリンス洗浄が
図れる。通常は、リンス洗浄水は内槽上部よりオーハ゛ーフローし
て外槽内に流下して、残留する洗浄液及び汚れ、又はリン
ス洗浄水の汚れを同時に流下させる構成とする。
Next, the operation proceeds to rinse cleaning. When the cleaned work reaches the next lower part of the inner tank by the same operation as described above, the lower part of the inner tank is matched with the upper part of the inner tank. When the rinse water is filled from the rinse storage tank to the upper part of the inner tank via the phone and the filter, the ultrasonic generator is operated,
Uses ultrasonic vibration energy to remove dirt from the workpiece.
In addition, if an ultrasonic generator is provided in combination or individually on the upper portion of the inner tank, the side surface of the inner tank, or the like, more efficient rinsing can be achieved. Normally, the rinse water is overflowed from the upper part of the inner tank and flows down into the outer tank, so that the remaining cleaning liquid and dirt or the dirt of the rinse water are simultaneously flowed down.

【0016】前述の操作によりワークのリンス洗浄が終了した
場合は、内槽上・下部及び外槽のリンス洗浄水をフィルターを介
してリンス貯留タンクにリターンさせる。この流下(排水)作用が順
次実行される段階(最初から併用することもありえる)
で、内槽上部を上方に移動していく。この移動と略同時
又は完了時に、排水等が終了して、リンス洗浄が終了す
る。
When the rinsing of the work is completed by the above operation, the rinsing water in the upper and lower parts of the inner tank and the outer tank is returned to the rinsing storage tank through the filter. Stages in which this flow (drainage) action is performed sequentially (may be used together from the beginning)
Then, the upper part of the inner tank is moved upward. At substantially the same time as or when this movement is completed, drainage and the like are completed, and the rinse cleaning is completed.

【0017】さらにリンス済みワークは、前述の同様な動作及
び操作を介して各種処理が行われる。
Further, various processes are performed on the rinsed work through the same operations and operations as described above.

【0018】その後、次のソ゛ーンに達した段階で、通常で
は、処理済みワークは、熱風手段及びファンを介して熱風エアー
により乾燥処理される。
Thereafter, when the next zone is reached, the processed work is usually dried by hot air through a hot air means and a fan.

【0019】前記乾燥処理された洗浄済みワークは、搬送
手段を介して完了ソ゛ーンに達する。
The dried and cleaned work reaches the completion zone via the conveying means.

【0020】[0020]

【実施例】以下、本発明の一実施例を説明する。An embodiment of the present invention will be described below.

【0021】本発明の超音波洗浄装置は、搬入側コンヘ゛ア
A、搬送手段B、及び搬出側コンヘ゛アC、各処理用の洗浄装置
D、D・・(Dとする)、又乾燥装置E、制御部(図示せず)を主
構成とする。
[0021] The ultrasonic cleaning apparatus of the present invention comprises a loading side conveyor.
A, conveying means B, unloading side conveyor C, cleaning equipment for each treatment
(D), a drying device E, and a control unit (not shown) are main components.

【0022】搬入側コンヘ゛アA及び搬出側コンヘ゛アCは、この例
ではロールコンヘ゛アを示しており、その搬送面は、後述する洗
浄装置D及び、乾燥装置E等の外槽の開口上縁と略同一面
とする。
In this example, the carry-in side conveyor A and the carry-out side conveyor C indicate a roll conveyor, and the transport surfaces thereof are substantially the same as the upper edges of the openings of the outer tanks of the washing device D and the drying device E to be described later. Face.

【0023】搬送手段Bは、図示しないフレームに設けたレール
支持部材1と、このレール支持部材1に設けた対のレール2(以
下、各構成部品の対の言葉は省略する)と、このレール2を
走行する車輪3と、当該レール2の方向に延設した移動部材4
と、移動部材4に併設した移動杆5と、この移動杆5に可
動可能に設けた移動腕6(搬送時外は上方に可動し、洗浄
液との接触、又は汚れ防止を図る)と、前記車輪3、移動
部材4及び移動杆5並びに移動腕6を所定距離前進後退さ
せるシリンタ゛ー、移動装置等の前進後退手段7と、で構成
し、この車輪3、移動部材4及び移動杆5並びに移動腕6が
同時に前進後退する。この前進で、ワークWを所定距離前進
し、次の処理又は搬出側コンヘ゛アCに送る。尚、場合によ
り、前の処理に戻す目的で、後退可能とする。図示しな
いが、搬送手段Bには、ストッハ゜ー、リミットスイッチ、センサー等の安
全手段、警報手段等を設ける。
The conveying means B includes a rail support member 1 provided on a frame (not shown), a pair of rails 2 provided on the rail support member 1 (hereinafter, a pair of components is omitted), 2 and a moving member 4 extending in the direction of the rail 2
And a movable rod 5 attached to the movable member 4, and a movable arm 6 movably provided on the movable rod 5 (movable upward outside during transport to contact with the cleaning liquid or prevent contamination), A wheel 3, a moving member 4, a moving rod 5, and a moving arm 6 for moving the moving arm 6 forward and backward by a predetermined distance; and a forward / backward moving means 7 such as a moving device. 6 moves forward and backward at the same time. With this advance, the workpiece W is advanced by a predetermined distance, and is sent to the next process or the unloading side conveyor C. In some cases, it is possible to retreat for the purpose of returning to the previous processing. Although not shown, the transport means B is provided with safety means such as a stopper, a limit switch, and a sensor, an alarm means, and the like.

【0024】洗浄装置Dは、外槽10と、この外槽10の開
口1000及び外槽10に備えた洗浄液貯溜タンク11と、外槽10
と洗浄液貯溜タンク11とを接続する配管12と、この外槽10
に設けた内槽下部13と、この内槽下部13の開口1300及び
鍔片樋1301と、この内槽下部13に設けた超音波発生器14
と、この内槽下部13と洗浄液貯溜タンク11とを接続する配
管15と、この配管15に設けた弁機構1500、ホ゜ンフ゜1501
と、前記内槽下部13の鍔片樋1301に下端1600が合致する
内槽上部16と、この内槽上部16の昇降を司るシリンタ゛ー等の
移動手段17とで構成されている。図中11aはリンス貯留タンク
を示す。
The cleaning device D includes an outer tank 10, an opening 1000 of the outer tank 10 and a cleaning liquid storage tank 11 provided in the outer tank 10, and an outer tank 10
A pipe 12 for connecting the tank to the cleaning liquid storage tank 11 and an outer tank 10
Inner tank lower part 13, opening 1300 of this inner tank lower part 13 and flange single gutter 1301, and ultrasonic generator 14 provided in this inner tank lower part 13
And a pipe 15 for connecting the inner tank lower part 13 and the cleaning liquid storage tank 11, a valve mechanism 1500 provided on the pipe 15 and a horn 1501.
The upper part 16 of the inner tank whose lower end 1600 matches the flange 1301 of the lower part 13 of the inner tank, and a moving means 17 such as a syringe for controlling the elevation of the upper part 16 of the inner tank. In the figure, reference numeral 11a denotes a rinse storage tank.

【0025】乾燥装置Eは、熱風供給手段18と、熱風供
給手段18で生成された熱風を送るタ゛クト19とで構成する。
この熱風は、タ゛クト19を介して内槽下部13に設けたワークWに
送られる。また図示しないが、内槽上部16に超音波発生
器が設けられている。尚、内槽下部13と内槽上部16とで
内槽を構成する。
The drying device E comprises hot air supply means 18 and a task 19 for sending the hot air generated by the hot air supply means 18.
This hot air is sent to the work W provided in the lower portion 13 of the inner tank via the task 19. Although not shown, an ultrasonic generator is provided in the inner tank upper part 16. The inner tank lower part 13 and the inner tank upper part 16 constitute an inner tank.

【0026】[0026]

【発明の効果】請求項1の発明は、流体排水用の配管を
設けた外槽内に、外槽の開口と略同じ面に開口を有する
流体供給用の配管を備えた内槽下部を設け、また外槽に
流体排水用の配管を介して流体貯留 タンク を設け、内槽下
部に超音波発生器を設け、内槽下部に内槽上部を接離可
能に設け、内槽上部を上下動する移動手段を設け、内槽
下・上部の流体を流体貯留 タンク に還流する構成とした超
音波洗浄装置である。したがって、各処理の1サイクル毎に
内槽上部が上下動して、液体中(液中)に浮遊又は混入す
る汚れを除去(流出し、又は濾過)できること、内槽を内
槽上・下部に分割する構成として、内槽の流体面(液面)
の上昇を介して超音波洗浄装置の機能の拡充が図れるこ
と、又はワークの水平方向の移動を可能とし、かつ水平方
向の移動を利用して洗浄及び移動を図り、作業の簡略
化、スヒ゜ート゛化、容易化等が図れること、外槽及び内槽へ
の塵埃の侵入防止が図れること、等の特徴がある。
According to the first aspect of the present invention, a pipe for draining fluid is provided.
In the provided outer tank, there is an opening on the same surface as the opening of the outer tank
Provide the lower part of the inner tank with piping for fluid supply and the outer tank
A fluid storage tank provided through the pipe for fluid drainage, the inner tank under
Part is provided with an ultrasonic generator, the upper part of the inner tank is detachably provided at the lower part of the inner tank, and the moving means for vertically moving the upper part of the inner tank is provided.
An ultrasonic cleaning device configured to recirculate the lower and upper fluids to a fluid storage tank . Therefore, the upper part of the inner tank moves up and down every cycle of each treatment, so that dirt floating or mixed in the liquid (in the liquid) can be removed (flow out or filtered) .
The fluid level (liquid level) of the inner tank is divided into upper and lower tanks.
The function of the ultrasonic cleaning device can be expanded through the rise of the work, or the work can be moved in the horizontal direction, and the cleaning and movement can be performed using the movement in the horizontal direction, thereby simplifying the work and improving the speed. , Etc., and it is possible to prevent dust from entering the outer tank and the inner tank.

【0027】請求項2の発明は、内槽下部にオーハ゛ーフロー兼
合体用の鍔片樋を形成し、鍔片樋に上記の内槽上部の下
端が合体する構成であって、流体供給用の配管を介して
内槽下・上部に供給された流体を、内槽上部より オーハ゛ーフ
ロー して外槽に流下し、また内槽上部の移動を介して内槽
上部の流体を排水し、流体を、内槽下・上部から流体貯
タンク に還流する構成とした請求項1に記載の超音波洗浄
装置である。したがって、内槽上・下部の合致を、確実
かつ容易に行い、かつ洗浄液等の漏洩回避と、ワークの浸
漬状況が確保できること、等の特徴がある。
According to a second aspect of the present invention , there is provided a structure in which a flange piece gutter for forming an overflow and a combination is formed at a lower portion of the inner tank, and the lower end of the upper portion of the inner tank is combined with the flange piece gutter. Through
The fluid supplied to the inner tank under-top, Oha Bu-safe than the inner tank top
It flows down in the outer tank to low, also the inner tank through the movement of the inner tank upper
Drain the upper fluid and store the fluid from below and above the inner tank.
2. The ultrasonic cleaning device according to claim 1, wherein the ultrasonic cleaning device is configured to reflux to a retaining tank . Therefore, there are features such as that the upper and lower portions of the inner tank can be surely and easily matched, leakage of the cleaning liquid or the like can be avoided, and the immersion state of the work can be ensured.

【0028】請求項3の発明は、内槽上部に超音波発生
器を設ける構成とした超音波洗浄装置である。したがっ
て、超音波発生器を内槽上・下部に配備して、清浄効果
の一層の拡充、及び清浄のスヒ゜ート゛アッフ゜が図れること、等
の特徴がある。
The third aspect of the present invention is an ultrasonic cleaning apparatus having a configuration in which an ultrasonic generator is provided above the inner tank. Therefore, the ultrasonic generators are arranged on the upper and lower parts of the inner tank to further enhance the cleaning effect and achieve a cleaning speed-up.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の一例を説明する全体模式図である。FIG. 1 is an overall schematic diagram illustrating an example of the present invention.

【図2】本発明の搬入側の一例を説明する拡大模式図で
ある。
FIG. 2 is an enlarged schematic diagram illustrating an example of a loading side of the present invention.

【図3】本発明の搬出側の一例を説明する拡大模式図で
ある。
FIG. 3 is an enlarged schematic diagram illustrating an example of a carry-out side of the present invention.

【図4】本発明の搬送手段と洗浄装置の一例を説明する
拡大模式図である。
FIG. 4 is an enlarged schematic diagram illustrating an example of a transport unit and a cleaning device of the present invention.

【図5】本発明の搬送手段と洗浄装置の一部との関係を
説明する拡大模式図である。
FIG. 5 is an enlarged schematic view for explaining the relationship between the transport means of the present invention and a part of the cleaning device.

【図6】本発明の洗浄過程を説明する模式図であり、
(イ)は内槽下部と内槽上部とが合致した状態を、(ロ)は内
槽下部と内槽上部とが合致し、内槽上部より洗浄液がオー
ハ゛ーフローしている状態を、(ハ)は内槽下部より内槽上部を
僅か離間した状態を、また(ニ)は内槽下部より内槽上部
が離間した状態を、それぞれ示す。
FIG. 6 is a schematic diagram illustrating a cleaning process of the present invention;
(A) shows the state where the lower part of the inner tank matches the upper part of the inner tank, and (B) shows the state where the lower part of the inner tank matches the upper part of the inner tank and the cleaning liquid overflows from the upper part of the inner tank. Indicates a state where the upper part of the inner tank is slightly separated from the lower part of the inner tank, and (d) indicates a state where the upper part of the inner tank is separated from the lower part of the inner tank.

【図7】従来の超音波洗浄装置の一例を説明する模式図
である。
FIG. 7 is a schematic diagram illustrating an example of a conventional ultrasonic cleaning device.

【符号の説明】[Explanation of symbols]

A 搬入側コンヘ゛ア B 搬送手段 C 搬出側コンヘ゛ア D 洗浄装置 E 乾燥装置 1 レール支持部材 2 レール 3 車輪 4 移動部材 5 移動杵 6 移動腕 7 前進後退手段 10 外槽 1000 開口 11 洗浄液貯溜タンク 11a リンス貯溜タンク 12 配管 13 内槽下部 1300 開口 1301 鍔片樋 14 超音波発生器 15 配管 1500 弁機構 1501 ホ゜ンフ゜ 16 内槽上部 1600 下端 17 移動手段 18 熱風供給手段 19 タ゛クト W ワーク A Carrying side conveyor B Carrying means C Carrying side conveyor D Washing device E Drying device 1 Rail support member 2 Rail 3 Wheel 4 Moving member 5 Moving punch 6 Moving arm 7 Forward retreat means 10 Outer tank 1000 Opening 11 Cleaning liquid storage tank 11a Rinse storage Tank 12 Piping 13 Lower part of inner tank 1300 Opening 1301 Flange single gutter 14 Ultrasonic generator 15 Piping 1500 Valve mechanism 1501 Phone 16 Upper part of inner tank 1600 Lower end 17 Moving means 18 Hot air supply means 19 Tact W Work

Claims (3)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 流体排水用の配管を設けた外槽内に、当
該外槽の開口と略同じ面に開口を有する流体供給用の配
管を備えた内槽下部を設け、また当該外槽に前記流体排
水用の配管を介して流体貯留 タンク を設け、前記内槽下部
に超音波発生器を設け、当該内槽下部に内槽上部を接離
可能に設け、この内槽上部を上下動する移動手段を設
け、前記内槽下・上部の流体を前記流体貯留 タンク に還流
る構成とした超音波洗浄装置。
1. A fluid supply arrangement having an opening in substantially the same surface as an opening of an outer tank in an outer tank provided with a pipe for fluid drainage.
A lower part of the inner tank provided with a pipe is provided, and the fluid drain is provided in the outer tank.
A fluid storage tank is provided via a water pipe,
Set in an ultrasonic generator is provided, provided the inner tank upper part separably to the tank bottom, a moving means for vertically moving the inner tank upper
And return the fluid under and above the inner tank to the fluid storage tank .
To that configuration and the ultrasonic cleaning device.
【請求項2】 上記の内槽下部にオーハ゛ーフロー兼合体用の鍔
片樋を形成し、この鍔片樋に上記の内槽上部の下端が合
体する構成であって、前記流体供給用の配管を介して前
記内槽下・上部に供給された流体を、この内槽上部より
オーハ゛ーフロー して外槽に流下し、またこの内槽上部の移動を
介して当該内槽上部の流体を排水し、この流体を、前記
内槽下・上部から上記流体貯留 タンク に還流する構成とし
た請求項1に記載の超音波洗浄装置。
2. A form flange Katahi for the inner tank bottom to Oha Bu Furo and coalescence described above, a configuration in which the lower end of the inner tank top to the flange Katahi coalesce, the piping for the fluid supply Through
The fluid supplied to the lower and upper parts of the inner tank is
Overflow to the outer tank and move the upper part of the inner tank
The fluid in the upper part of the inner tank is drained through
2. The ultrasonic cleaning device according to claim 1, wherein the ultrasonic cleaning device is configured to return to the fluid storage tank from below and above the inner tank .
【請求項3】 上記の内槽上部に超音波発生器を設ける
構成とした請求項1に記載の超音波洗浄装置。
3. The ultrasonic cleaning apparatus according to claim 1, wherein an ultrasonic generator is provided above the inner tank.
JP2000164781A 2000-05-30 2000-05-30 Ultrasonic cleaning equipment Expired - Lifetime JP3343344B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000164781A JP3343344B2 (en) 2000-05-30 2000-05-30 Ultrasonic cleaning equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000164781A JP3343344B2 (en) 2000-05-30 2000-05-30 Ultrasonic cleaning equipment

Publications (2)

Publication Number Publication Date
JP2001340819A JP2001340819A (en) 2001-12-11
JP3343344B2 true JP3343344B2 (en) 2002-11-11

Family

ID=18668361

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000164781A Expired - Lifetime JP3343344B2 (en) 2000-05-30 2000-05-30 Ultrasonic cleaning equipment

Country Status (1)

Country Link
JP (1) JP3343344B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105327899A (en) * 2015-11-30 2016-02-17 重庆市贵荣塑胶制品有限公司 Automatic electrostatic dust collecting device on computer keyboard production line

Families Citing this family (6)

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Publication number Priority date Publication date Assignee Title
JP2003164816A (en) 2001-11-29 2003-06-10 Fine Machine Kataoka Kk Washing apparatus and method for conveying work there
KR100605007B1 (en) * 2004-03-29 2006-07-26 삼금공업 주식회사 Ultrasonic cleaning system
JP4601043B2 (en) * 2004-07-13 2010-12-22 ファインマシーンカタオカ株式会社 Ultrasonic cleaning equipment
KR20120028079A (en) * 2010-09-14 2012-03-22 삼성모바일디스플레이주식회사 Cleaning device for substrate and clening method for the same
CN108499957B (en) * 2018-05-09 2021-02-26 珠海城市职业技术学院 Full-automatic ultrasonic cleaning system
CN113649348A (en) * 2021-08-26 2021-11-16 上海大学 Cleaning system for special-shaped semiconductor parts

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105327899A (en) * 2015-11-30 2016-02-17 重庆市贵荣塑胶制品有限公司 Automatic electrostatic dust collecting device on computer keyboard production line

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