JP3341114B2 - Laser processing apparatus and laser processing method - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser processing apparatus, and more particularly, to a laser processing apparatus and a processing method mainly intended for drilling and improved so that the processing speed can be improved.

[0002]

2. Description of the Related Art High-density multilayer wiring boards are used in electronic devices such as mobile phones, digital video cameras and personal computers. In manufacturing such a high-density multilayer wiring board, it is necessary to provide a conduction hole called a via hole for each layer of the substrate in order to establish signal line conduction between the inner layer and the outer layer substrate.
In particular, in order to achieve high-density wiring, it is required to minimize the diameter of the via hole.

In manufacturing the high-density multilayer wiring board, a plurality of substrates for a high-density multilayer wiring board of a predetermined size are cut from one work (base plate) in a so-called multi-layer manner. A work in which machining areas of a size are set in a matrix is used. Then, drilling is performed at a plurality of positions determined in advance for each processing region of the predetermined size.

[0004] As a device for performing such a small-diameter drilling, a laser processing device has recently been widely used.
In general, a laser processing apparatus mainly for such drilling is provided with a so-called XY stage capable of horizontally moving a stage on which a work is mounted in an X-axis direction and a Y-axis direction. . This laser processing device is XY
The processing position by the pulsed laser beam is changed by moving the work by the stage. Therefore, XY
Positioning by the stage takes time, and the processing speed is limited. For convenience, this laser processing apparatus is referred to as a first method.

On the other hand, as shown in FIG. 8, there is provided a laser processing apparatus in which a laser beam is oscillated in an X-axis direction and a Y-axis direction using a galvano scanner to improve a processing speed. Briefly, the laser oscillator 4
The laser beam output from 1 is expanded into an expander 43,
The light is guided to a mask 45 via a mirror 44. Mask 45
Is reflected downward by the mirror 47. The laser beam reflected by the mirror 47 is oscillated in the X and Y directions by a first galvanometer mirror 48 and a second galvanometer mirror 49. This type of galvanomirror can respond at a driving frequency of 200 to 400 (Hz), and the laser light is swung so as to irradiate a processing area 52 set on the work 51 through the fθ lens 50.

Although the work 51 is placed on the XY stage 53, the illustration and description of the drive system of the XY stage 53 are omitted here. Also, mirror 4
An alignment system for positioning the work 51 by the lens 54 and the CCD camera 55 is provided above the lens 7, but the description is also omitted. For convenience, this laser processing apparatus is referred to as a second method.

[0007]

In this second method,
After processing is performed by oscillating laser light on the processing area 52 on the work 51, the work 51 is moved by the XY stage 53 so that the next processing area is directly below. According to such a second method, by combining the first and second galvanometer mirrors 48 and 49 and the XY stage 53, the processing speed can be improved as compared with the first method.

By the way, the size of the work is 300 on one side.
In general, ten or more processing regions are set in a matrix in such a work for multi-face milling. On the other hand, the area that can be scanned by the galvanomirror usually has a side of 50 (m
m), and the second method requires a certain amount of time to machine all the machining areas of one work.

Accordingly, the present invention is to provide a laser processing apparatus and a processing method capable of further improving the processing speed by making use of the advantage of the above-mentioned second method.

[0010]

According to the present invention, there are provided a plurality of galvano scan systems for irradiating a laser beam through an fθ lens in the X-axis direction and the Y-axis direction on a work surface and irradiating the same. Of two galvano scan systems adjacent to each other are arranged in a bilaterally symmetric relationship, and the two galvano scan systems
The two galvanos so that the inspection order is reversed
A control device for controlling the can system, and machining of the work
There is provided a laser processing apparatus for simultaneously processing regions .

According to the present invention, the laser beam is emitted by the fθ laser.
X-axis direction and Y-axis direction on the work surface
Multiple galvano-scan systems to irradiate
When machining the machining area of the work using
Of two galvano scan systems adjacent to each other
The Luvano scan system is placed in a symmetrical relationship, and the two
The scanning order by the galvano scanning system
By simultaneously processing the work area of the work
A laser processing method is provided.

According to the present invention, further, the laser beam is
In the X-axis direction and Y-axis direction on the work surface
A plurality of galvano-scanning systems for shaking;
The machining area of the workpiece is
In the laser processing apparatus for performing time processing, the plurality of galvanometers
Horizontally move at least one of the no-scan systems
Between at least two galvanoscan systems
The distance between the feature and this with a drive mechanism for varying
Laser processing equipment and laser light through fθ lens
Swing in the X-axis direction and Y-axis direction on the work surface
A plurality of galvano scanning systems for
Simultaneous processing of the work area of the work by scanning system
In the laser processing apparatus, the plurality of galvano scans
The drive system drives the system individually and vertically to the workpiece.
Laser processing equipment provided with a moving mechanism provided
Is done.

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The basic configuration of a laser processing apparatus according to the present invention will be described with reference to FIG. In FIG. 1, a pulsed laser beam from a laser oscillator 10 passes through mirrors 11 and 12 and is split into two beams by a beam splitter 13 through a mask (not shown) for obtaining a predetermined beam size. As the laser beam splitting means, an optical element such as a prism or a half mirror can be used in addition to the beam splitter. One of the branched laser lights is introduced into a first galvano scanner 14, and the other laser light is introduced into a second galvano scanner 16 by a mirror 15. As is well known, the structure of a galvano scanner is
A first galvanomirror for oscillating the laser light in the X-axis direction and a second galvanomirror for further oscillating the laser light from the first galvanomirror in the Y-axis direction are provided. In this way, the laser beams emitted from the first and second galvano scanners are respectively assigned to the fθ lenses 17 and 1.
Irradiated on the work 20 through 8. Work 20 is
XY stage 2 that can move horizontally in X-axis direction and Y-axis direction
1 The above components are controlled by a control device (not shown). This control device includes a data input unit for inputting conditions necessary for processing as numerical data.

As the laser oscillator 10, a carbon dioxide laser, a YAG harmonic laser, an excimer laser, or the like can be used. According to this type of laser, an output power of several tens to several hundreds of watts can be obtained. Obtainable. On the other hand, the power required for drilling is generally 10 watts or less, and there is no problem even if the laser beam from the laser oscillator 10 is branched into two.

FIG. 2 shows a processing area set in advance on the work 20 for multi-face milling.
= 16 processing areas 20-1 are set in a matrix. The illustrated processing area 20-1 has the same size as the substrate size provided as a final product, which is determined by the size of the electronic device to be mounted. In any case, when performing laser processing for drilling a workpiece 20 as shown in FIG. 2, a half area A is performed by the first galvano scanner 14 and the fθ lens 17, and a remaining half area B is 2 with the galvano scanner 16 and the fθ lens 18. For example, when the first galvano scanner 14 and the fθ lens 17 start processing from the left corner in the drawing of the processing area 20-1a, the second galvano scanner 16 and the fθ lens 1
8 also starts processing from the left corner in the drawing of the processing area 20-1b,
As a result, the same processing pattern is obtained at the end of processing. Then, by moving the XY stage 21 in the X-axis and Y-axis directions, apparently, the laser processing of the same processing pattern by the combination of the galvano scanner and the fθ lens is performed in the order indicated by solid arrows in FIG. Done in At this time, the distance L between the center points of the fθ lenses 17 and 18
Is maintained.

The size of the work 20 varies depending on the substrate size of the final product.
It is 00 to 600 (mm). Due to this size, fθ
The distance L between the center points of the lenses 17 and 18 is also 150 <L <3.
It must be changed in the range of 00. For this, the first
It is necessary that at least one of the combination of the galvano scanner 14 and the fθ lens 17 and the combination of the second galvano scanner 16 and the fθ lens 18 be movable in the horizontal direction with respect to the other, which will be described later.

The work 20 is an XY stage 21
The work is manually or automatically set on an upper plate (means for holding a work by vacuuming, but not shown). Further, as described in FIG. 8, the beam splitter 13 and the mirror 1 shown in FIG.
5, an alignment system by an image processing device (not shown) is mounted, and a reference position mark (usually referred to as an alignment mark) previously attached on the work 20 is recognized to set the set position of the work 20. 10 (μ
m) Detect with the following accuracy and set the processing area 20-1. At this time, the size, interval, and the like of the processing area 20-1 are input in advance by an operator through a data input unit, and the control device determines an optimal distance L based on the input data, and determines the optimum distance L based on the distance L. The combination of the first galvano scanner 14 and the fθ lens 17 and the combination of the second galvano scanner 16 and the fθ lens 18 are arranged, and the processing area 20-1 is set.

Next, a preferred embodiment of the present invention will be described with reference to FIG. In FIG. 3, the device is
A first scanning system 31 in which the first galvano scanner 14 and the fθ lens 17 are integrally mounted, and a second scanning system 32 in which the second galvano scanner 16 and the fθ lens 18 are integrally mounted. And The first galvanometer scanner 14 is provided with the first and second galvanometer mirrors 1.
4-1 and 14-2, and the second galvano scanner 16
Has first and second galvanomirrors 16-1 and 16-2. The first scan system 31 is mounted on a first Z-axis stage 33 that can drive the first scan system 31 in the Z-axis direction (perpendicular to the work 20). First Z-axis stage 33
Is mounted on an L-axis stage 34 that can be driven in the L-axis direction parallel to the surface of the work 20, and the L-axis stage 34 is mounted on a base frame 35. On the other hand, the second scanning system 32 is capable of driving the second scanning system 32 in the Z-axis direction.
The second Z-axis stage 36 is mounted on the axis stage 36 and is attached to the base frame 35. Thus, the first scan system 31 can move in the Z-axis and L-axis directions, and the second scan system 32 can move only in the Z-axis direction.

The present embodiment is different from the basic configuration of FIG. 1 in that the first and second scanning systems 31 and 2 are arranged so that the relationship between the first and second galvanometer scanners 14 and 16 is symmetrical.
32. This is the first and second f
This is for minimizing the distance La between the center points of the θ lenses 17 and 18 as much as possible. Conversely, in FIG. 3B, for example, the first, second,
If the second galvanometer mirrors 16-1 and 16-2 are oriented in the same direction as the first and second galvanometer mirrors 14-1 and 14-2 in the first galvanometer scanner 14, the first
The optical axes of the second galvanometer mirrors 16-1 and 16-2 are shown in FIG.
(B) It shifts to the right in the middle, and the distance L
This is because a must be increased.

In this case, the mirrors 37 and 38 for receiving the branched laser light are made opposite to each other so as to receive the branched laser light from the opposite direction. Mirror 38
The reflected light is introduced into the second galvano scanner 16 through the mirror 39, and the laser light from the mirror 37 is similarly introduced into the first galvano scanner 14 through a mirror (not shown).

In the case of such a structure, the processing by the first and second scanning systems 31 and 32 also becomes a symmetrical pattern. For example, if the first scanning system 31 is the processing area 2 shown in FIG.
When processing is started from the left corner in the drawing of 0-1a, the second scan system 32 starts processing from the right corner in the drawing of the processing area 20-1b, but the same processing pattern is obtained at the end of the processing. Such processing is performed by the second galvano scanner 16.
The scanning order by the first galvano scanner 14 may be the reverse of the scanning order by the first galvano scanner 14, and the scanning drive signal supplied to the second galvano scanner 16 is supplied to the first galvano scanner 14. What is necessary is just to reverse a signal. Of course, this is done by the controller. The order of movement of the processing area is as described in FIG. 2 by controlling the drive of the XY stage 21.

Also, here, the first scanning system 31 is moved in the L-axis direction according to the size of the work 20 and the size of the processing area, and the distance between the center points of the first and second fθ lenses 17 and 18 is adjusted. Is changed. Note that the second scan system 32 may also be moved in a direction opposite to the movement direction of the first scan system 31 by using an L-axis stage similar to the L-axis stage 34.

As described above, the driving of the first and second galvano scanners 14 and 16 is controlled by the control device. X
The -Y stage 21 is also driven to move the workpiece 20 to the next processing area after the laser processing for a certain processing area is completed by the control device, and horizontally moves in the X-axis direction and the Y-axis direction.

The processing position with respect to the processing area 20-1 is determined by a rotation angle command value given to each galvano scanner from the control device, so that not only holes arranged regularly but also holes arranged irregularly can be formed.

According to the device of the present invention, the second device described with reference to FIG.
The processing can be performed at a speed twice as fast as the processing speed by the method of (1).

It should be noted that, as shown in FIG.
In the case of a work 20 'whose total number of 1 cannot be divided into two, the work 20' is divided into the same number of areas A and B, and these areas are simultaneously processed.
A beam shutter may be provided in the path of the laser light of the scanning system 31 to shield light, and laser processing may be performed by the second scanning system 32.

Next, a reference example of the present invention will be described with reference to FIGS. In this example, a mechanical branching unit different from the optical element, that is, an optical chopper, is provided as a laser beam branching unit. As shown in FIG. 6, this optical chopper includes a rotating body 60 in which laser light reflecting mirrors 62 and transmission portions 63 are alternately arranged in a region equally divided around the rotation axis 61, It includes a drive mechanism 64 including a motor that rotationally drives the body 60, and a synchronization control unit 65 that controls the drive mechanism 64 so that the pulsed laser light from the laser oscillator 10 alternately repeats reflection and transmission. Rotating body 60
Here, four reflecting mirrors 62 are connected to the ring-shaped frame 6.
6 is attached at an angle of, for example, 45 degrees with respect to the incident direction of the laser beam.

The synchronization control unit 65 outputs a trigger pulse for defining a pulsed laser output timing to the laser oscillator 10 and controls the rotation speed of the motor of the drive mechanism 64 in synchronization with the output timing. Thus, a continuous pulsed laser alternately repeats reflection and transmission. As a result, as shown in FIG. 7, the pulsed laser with diagonal lines passes through the optical chopper and reaches the mirror 15, and the pulsed laser without diagonal lines is reflected by the reflecting mirror 62 in the optical chopper. To the first galvano scanner 14.

When such an optical chopper is used, the energy density on the processing surface per pulsed laser does not decrease unlike the branching by the optical element. In other words, in the example of FIG. 1, when a 50% transmission type beam splitter is used, for example, the energy density on the processing surface per pulsed laser is halved. Therefore,
According to this embodiment, the present invention can be applied to a laser oscillator having a low pulse energy. For example, in the case of processing a via hole in a wiring board as described above, the energy density of the laser on the processing surface is 20 J / depending on the material of the substrate.
cm ² or more is preferred. However, in the case of a laser oscillator of a type having a low pulse energy, it is difficult to form a via hole in a wiring board due to a decrease in energy density in branching by an optical element. Via hole processing can be performed with an energy density of 10 nm.

Although the present invention has been described with respect to two examples, the present invention is not limited to the above-described embodiment, and various modifications are possible. For example, although two galvano scanners and fθ lenses are used, three or more galvano scanners and fθ lenses may be used. In addition, the present invention can be applied not only to a printed circuit board but also to a boring process for other materials.

[0031]

As described above, according to the present invention, the same processing can be simultaneously performed on a plurality of sets of galvanometer scanners in another processing area of one work, thereby achieving a higher processing speed. Can be greatly improved.

[Brief description of the drawings]

FIG. 1 is a diagram showing a basic configuration of a laser processing apparatus according to a first embodiment of the present invention.

FIG. 2 is a view for explaining a processing area of a work processed by the apparatus of the present invention.

3A and 3B are views showing a laser processing apparatus according to an embodiment of the present invention, wherein FIG. 3A is a plan view, FIG.
Figure (c) is a side view.

FIG. 4 is a diagram for explaining a processing area in another example of a workpiece processed by the apparatus of the present invention.

FIG. 5 is a diagram showing a basic configuration of a laser processing apparatus according to a reference example of the present invention.

6 is a diagram showing a configuration of a rotating body in the optical chopper shown in FIG. 5, FIG. 6 (a) is a front view, and FIG. 6 (b).
FIG. 7 is a sectional view taken along line AA ′ of FIG.

FIG. 7 is a view for explaining branching of a pulsed laser by the optical chopper shown in FIG. 5;

FIG. 8 is a diagram showing a schematic configuration of a conventional laser processing apparatus using a galvano scanner.

[Explanation of symbols]

 11, 12, 15, 37, 38, 39 mirror 17, 18 fθ lens 14 first galvano scanner 16 second galvano scanner 20 work 21 XY stage 31 first scan system 32 second scan system 33, 36 First and second Z-axis stages 34 L-axis stage 35 Base frame 60 Rotating body 61 Rotating axis 62 Reflecting mirror 63 Transmitter 64 Drive mechanism 65 Synchronization controller 66 Frame

Claims (4)

(57) [Claims] 1. A plurality of galvano scan systems for irradiating a laser beam in an X-axis direction and a Y-axis direction on a work surface through an fθ lens and irradiating the laser beam, wherein two of the plurality of galvano scan systems are adjacent to each other. Two galvano scan systems are arranged in a symmetrical relationship,
So that the scanning order by the no-scan system is reversed
A control device for controlling the two galvano scan systems is provided.
A laser processing apparatus for simultaneously processing the processing area of the work ; 2. A laser beam is passed through an fθ lens to a workpiece.
Shake in the X-axis direction and the Y-axis direction on the surface and irradiate
Using multiple galvano scan systems for
When machining the machining area, the plurality of galvano-scan
Two galvano scan systems that are adjacent to each other
The two galvano scans are arranged in a symmetrical relationship.
By reversing the order of scanning by the system,
Laser that simultaneously processes the work area of the workpiece
Processing method. 3. A plurality of galvano scan systems for oscillating a laser beam in an X-axis direction and a Y-axis direction on a work surface through an fθ lens , wherein the plurality of galvano scans are provided.
Laser processing that simultaneously processes the work area
A plurality of galvano-scan systems,
Horizontal movement of at least one of the
Variable the distance between the two galvano scan systems
A laser processing apparatus comprising a driving mechanism. 4. A laser beam is passed through an fθ lens to a workpiece.
For swinging in the X-axis and Y-axis directions on the surface
A plurality of galvano scan systems.
Laser that simultaneously processes the work area of the work
In the processing apparatus, the plurality of galvano scan
Separately, a drive mechanism for driving the work vertically.
A laser processing apparatus comprising: