JP3312260B2 - Piezoelectric vibration gyro - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric vibratory gyroscope using ultrasonic vibration of a piezoelectric vibrator among gyroscopes used for a camera shake correction of a car navigation system and a camera-integrated VTR. The present invention relates to a piezoelectric vibrating gyroscope that has a simple structure and is easy to support, using energy trapping vibration of a parallel electric field excitation type thickness shear vibration mode as a vibration mode of a vibrator.

[0002]

2. Description of the Related Art A piezoelectric vibrating gyroscope is a gyroscope utilizing a dynamic phenomenon that when a rotational angular velocity is applied to a vibrating object, a Coriolis force is generated in a direction perpendicular to the direction of the vibration. In general, when a vibrator is rotated in a composite vibration system configured to be able to excite vibrations in two different directions that are orthogonal to each other and one of the vibrations is excited, the above-mentioned Coriolis force causes the vibrator to move in a direction perpendicular to this vibration. The force works and the other vibration is excited. Since the magnitude of this vibration is proportional to the magnitude of the input-side vibration and the rotational angular velocity,
When the magnitude of the vibration on the input side is constant, the magnitude of the rotational angular velocity can be obtained from the magnitude of the output voltage.

FIG. 15 is a perspective view showing the structure of a conventional piezoelectric vibrating gyroscope. In a metal triangular prism 110 having a regular triangular cross-sectional shape, electrodes are formed substantially at the center of three surfaces, and electrodes are formed on both surfaces. The piezoelectric ceramic thin plates 111, 112, and 113 which are polarized are joined. The metal triangular prism 110 can bend and vibrate at substantially the same resonance frequency in the direction connecting each side and the apex facing the same, and as shown in FIG. When a voltage of a frequency is applied, the surface to which the piezoelectric ceramic thin plate 111 is joined vibrates in a bending direction in a direction in which the surface becomes uneven. As shown in FIG. 17, two adjacent piezoelectric ceramic thin plates 111 and 11 are provided.
When a voltage having a frequency substantially equal to the resonance frequency of the metal triangular prism 110 having the same amplitude and the same phase is applied to the metal triangular prism 2, the bending vibration in the direction in which the surface where the piezoelectric ceramic thin plate 111 is bonded becomes uneven and the piezoelectric ceramic thin plate 112
Is combined with bending vibration in the direction in which the surface joined to the surface becomes uneven, and the surface to which the remaining piezoelectric ceramic thin plate 113 is joined vibrates in the direction in which the surface becomes uneven. On the other hand, as shown in FIG. 18, two adjacent piezoelectric ceramic thin plates 111 and 112 are provided.
When a voltage having a frequency substantially equal to the resonance frequency of the metal triangular prism 110 having the same amplitude and opposite phase is applied to the
In the case of 0, bending vibration in the direction in which the surface to which the piezoelectric ceramic thin plate 111 is joined becomes uneven is combined with bending vibration in the direction in which the surface to which the piezoelectric ceramic thin plate 112 is joined becomes uneven,
The bending vibration is performed in a direction parallel to the surface to which the remaining piezoelectric ceramic thin plates 113 are joined.

When the metal triangular prism 110 is rotated about the center in the longitudinal direction as an axis in the state of FIG. 17, the surface of the metal triangular prism 110 to which the piezoelectric ceramic thin plate 113 is joined as shown in FIG. Vibrates in a direction perpendicular to the direction in which the surface becomes uneven. As shown in FIG. 18, the bending vibration of the metal triangular prism 110 in the direction parallel to the piezoelectric ceramic thin plate 113 is reduced by the piezoelectric ceramic thin plates 111 and 112.
When the metal triangular prism 110 is flexibly vibrated in a direction parallel to the piezoelectric ceramic thin plate 113 by the opposite effect, the same amplitude is applied to the piezoelectric ceramic thin plates 111 and 112. ,
An opposite-phase voltage is generated, and one of the voltages applied to the piezoelectric ceramic thin plates 111 and 112 for driving is reduced by that amount, and the other is increased by that amount. Therefore, the voltage of the difference between the terminal voltages of the piezoelectric ceramic thin plates 111 and 112 is a voltage proportional to the rotational angular velocity of the metal triangular prism 110.

[0005]

In the conventional piezoelectric vibrating gyroscope shown in FIGS. 15 to 19, since the bending vibration mode of the columnar sound piece is used, the supporting and fixing of the vibrator is performed at the nodes of the vibration. Must be done in position. However,
Since the nodes of vibration are theoretically points or lines that have no width or area, when supported by lines of finite dimensions, etc., the influence of the support is inevitable, and the gyro characteristics deteriorate. I was Furthermore, if the diameter of the support wire is reduced in order to reduce the influence of the support, there is a disadvantage that the durability against external vibrations and impacts deteriorates.

Here, the energy trap type vibration will be described. FIG. 20 is a plan view showing the structure of a conventional energy trap type vibrator, and FIG. 21 is a sectional view thereof. Energy trapped vibration is a vibration mode in which the energy of the vibration is concentrated near the drive electrode. Many vibrations such as longitudinal vibration and sliding vibration in the thickness direction of the piezoelectric plate and longitudinal vibration and sliding vibration in the width direction of the piezoelectric rectangular plate are considered. There is a vibration mode, which is widely used for intermediate frequency filters of FM radios and televisions. As described above, since the energy of the energy confinement vibration is concentrated near the drive electrode, for example, as shown in FIG. 20, a piezoelectric plate 10 having a thickness of 6 mm × 6 mm and a thickness of 0.2 mm is used. As shown in FIG. 20, in a 10.7 MHz ceramic filter for FM radio, in which drive electrodes 121, 121 'and 122 are formed in a region of 1.5 mm in a diameter at a substantially central portion thereof, as shown in FIG.
If cavities are formed on both sides of a region having a diameter of 3 mm around 1 'and 122, the characteristics of the vibrator are hardly affected even if the other portions are fixed with the resin 13. That is, there is an advantage that a piezoelectric vibrator in which the formation of the lead terminals is free and which is not affected by the support or a filter using the same can be obtained.

Therefore, the technical problem of the present invention is that the structure is simple, the influence of taking out and supporting / fixing the input / output lead terminals on the gyro characteristic is small, and it is possible to firmly support the gyro characteristics, An object of the present invention is to provide a piezoelectric vibrating gyroscope having excellent impact resistance.

[0008]

According to the present invention, (1)
The outer periphery of the center of the piezoelectric ceramic rod is divided into 4n parts (however,
n is a natural number greater than or equal to 2) the length at which the strip-shaped electrode parallel to the length direction intersects at the center of the piezoelectric ceramic rod at a position where
l is 1/3 or less of the length L of the piezoelectric ceramic rod
4n electrodes are formed so as to be lower, and every other strip electrode is pulled to a different end of the piezoelectric ceramic rod.
Each polarization processing on a connection to the two terminals together with the out come, by connecting the strip electrodes of every other after the polarization processing and the common ground electrode, of the remaining 2n pieces of strip-shaped electrodes, the central axis of the piezoelectric ceramic rods The first symmetrical position
An AC voltage having a frequency substantially equal to the resonance frequency of the piezoelectric ceramic rod in the radial vibration mode is applied to the pair of band-shaped electrode pairs to excite radial vibration at the center of the piezoelectric ceramic bar, and the first band-shaped electrode pair is excited. Energy in the parallel electric field excitation type thickness-shear mode so as to detect the voltage generated at the second belt-shaped electrode pair at a position rotated by 90 °.
Thus , a piezoelectric vibrating gyroscope characterized in that the piezoelectric vibrating gyroscope is configured using the confined vibration is obtained.

[0009]

According to the present invention, (2) the length of the strip-shaped electrode intersecting at the center of the piezoelectric ceramic rod is
Is not more than 1/3 of the length L of the piezoelectric ceramic rod, and every other strip electrode is drawn out to a different end of the piezoelectric ceramic rod. Can be

According to the present invention, (2) a strip-shaped electrode parallel to the longitudinal direction intersects the center of the piezoelectric ceramic bar at a position where the outer periphery of the center of the piezoelectric ceramic bar is divided into four parts.
The length l is 1/1 / L of the length L of the piezoelectric ceramic rod.
Four electrodes are formed so as to be 3 or less, and every other band electrode is attached to a different end of the piezoelectric ceramic rod.
After being pulled out and connected and subjected to polarization treatment as two terminals, the connection is removed, the strip electrodes are made independent, the adjacent strip electrodes are respectively used as a driving electrode and a detection electrode, and the remaining two strip electrodes are used. The band-shaped electrode is used as an earth electrode, and an AC voltage having a frequency substantially equal to a resonance frequency of a radial vibration mode of the piezoelectric ceramic is applied to the driving electrode to excite radial vibration at a central portion of the piezoelectric ceramic rod, In order to detect the voltage generated at the detection electrode, the energy of the parallel electric field excitation type
A piezoelectric vibrating gyroscope characterized by being configured using the Lugie-confined vibration is obtained.

According to the present invention, (3 ) the piezoelectric vibrating gyroscope according to ( 1) or (2) , wherein the central portion of the piezoelectric ceramic rod has a circular cross section.

According to the present invention, (4 ) the piezoelectric vibrating gyroscope according to the above ( 1) or (2) , wherein the central portion of the piezoelectric ceramic rod has a square cross section.

According to the present invention, (5 ) the piezoelectric vibrating gyroscope according to (4), wherein the strip-shaped electrode is formed at the center of each side of the square cross section.

According to the present invention, (6 ) the piezoelectric vibratory gyroscope according to (4), wherein the band-shaped electrode is formed at each vertex of the square cross section.

According to the present invention, (7) the natural number n is 2
The piezoelectric vibrating gyroscope according to the above (1) is obtained.

[0017]

Next, the operation of the piezoelectric vibrating gyroscope according to the present invention will be described.

In the present invention, a piezoelectric vibrating gyroscope is constructed by utilizing the cross-sectional profile vibration mode of a piezoelectric ceramic rod so as to vibrate and detect two energy trapping vibrations that are orthogonal and degenerate. Therefore, in the piezoelectric vibrating gyroscope according to the present invention, the piezoelectric vibrating gyroscope is not coupled at the time of rest (orthogonal), and when a rotational angular velocity Ω is given, the Coriolis force has the same resonance frequency (degenerate). If a so-called double degenerate mode is used, the sensitivity of the piezoelectric vibrating gyroscope can be increased.

[0019]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a view showing the structure of a vibrator enclosing the sectional contour vibration energy of a piezoelectric ceramic cylinder used in a piezoelectric vibrating gyroscope according to a first embodiment of the present invention. In FIG. 1, eight strip-shaped electrodes 1 to 8 parallel to the longitudinal direction are formed at positions where the circumference on the outer peripheral surface at the center of the piezoelectric ceramic cylinder 9 is divided into eight equal parts. Every other is drawn to a different end.

FIG. 2 is a diagram showing the directions of remanent polarization when the strip-shaped electrodes are connected to the respective ends and polarization processing is performed as two terminals. As shown in FIG. 2, after the polarization process in the direction indicated by the dashed arrow, the strip-shaped electrodes 1, 3, 5, 7 drawn out at one end are grounded to a ground 31 to form a common ground electrode. Strip electrodes 2, 4, 6,
8 of the first pair of strip electrodes 2 and 6, which are located symmetrically with respect to the center axis of the piezoelectric ceramic cylinder, and have a positive polarity via an electrode terminal 24. A voltage is applied, and the electrode terminal 23 is
When a negative electrode is applied through the line, the direction of the applied electric field is the same as the direction of the remanent polarization as shown by the solid arrow 32 in FIG. On the other hand, as indicated by the solid line arrow 33, a contraction strain is generated in a portion where the direction of the applied electric field is opposite to the direction of the remanent polarization along the direction of the remanent polarization. Accordingly, when the frequency of the applied voltage is substantially equal to the resonance frequency of the piezoelectric ceramic cylinder in the radial vibration mode, radial vibration as shown by a white arrow in FIG. 4 is generated at the center of the piezoelectric ceramic cylinder.

Similarly, as shown in FIG.
In the position where the strip-shaped electrode pairs 2, 6 are rotated by 90 °.
When a voltage substantially equal to the resonance frequency of the piezoelectric ceramic cylinder 1 in the radial vibration mode is applied to the band-shaped electrode pairs 4 and 8, radial vibration as shown by a white arrow in FIG. 6 is generated. Here, the radial vibrations in FIGS. 5 and 6 are independent from each other (perpendicular to each other), and the vibration directions are also perpendicular to each other. In addition, the resonance frequency is coincident (degenerate), and the piezoelectric ceramic cylinder 1 is rotated around its axis in a state where a driving voltage is applied to one band electrode pair and one vibration is excited, as described above. Thus, the action of the Coriolis force excites the other vibration and generates a voltage proportional to the rotational angular velocity at the other strip-shaped electrode pair.

7 (a), 7 (b) and 7 (c) show the piezoelectric ceramic cylinder 1 shown in FIG.
The length at which the electrodes 8 to 8 intersect at the center is 1 (ell), and the strip-shaped electrodes drawn to the different ends are connected to form two terminals as in the case of the polarization, and 1 (el) / L is 0.4 , 0.3,
It shows the frequency response of the impedance seen from this terminal when each is changed to 0.2. From FIG. 7
As (L) / L becomes smaller, the spurious signal is not included in the response near the resonance frequency, and it can be seen that the device is an energy trapping oscillator.

FIG. 8 shows the ratio of the impedance of resonance and anti-resonance (curve 38) when both ends are made free by using the vibrator shown in FIG. 7 and the resonance and resonance in each case where the vibrator is fixed to an iron block. It is a figure which shows the ratio (curve 39) of the impedance of anti-resonance, respectively. As shown in FIG.
When the value of l (L) / L is 0.3 or less, the decrease in the impedance ratio due to the fixed both ends is reduced, which also indicates that the resonator is an energy trapping device.

FIGS. 9A and 9B are views showing an energy trapping mode vibrator according to a second embodiment of the present invention. FIG. 9A is a polarization electrode configuration, FIG. 9B is a gyro electrode configuration, and FIG. is there. As shown in FIG. 9A, the strip-shaped electrodes 51, 51 are located at positions where the outer peripheral surface of the piezoelectric ceramic cylinder 50 is divided into four equal parts.
', 52, 52' are respectively formed. These strip electrodes 51, 51 ', 52, 52' are extended to one end of the piezoelectric ceramic column 50 along the outer peripheral surface, as shown in FIG. , Extending to the other end of the piezoelectric ceramic column 50.

As shown in FIG. 9A, the strip electrodes 51,
51 'and the strip electrodes 52, 52' are connected to each other to form two terminals. The two-terminal strip electrode 51 side is positive,
The piezoelectric ceramic cylinder 50 is polarized so that the strip electrode 52 has a negative polarity. This polarization direction is indicated by a white arrow. Next, as shown in FIG.
When an AC voltage equal to the resonance frequency of the vibration mode in the radial direction is applied to the band-shaped electrodes 51 and 51 'as the first band-shaped electrode pair, vibration as shown in FIG. 10 is generated. Similarly, when an AC voltage equal to the resonance frequency of the vibration mode in the radial direction is applied to the other band-shaped electrodes 52, 52 'as well, FIG.
Vibrations as shown in (a) and (b) occur. FIG.
(A) shows the coordinate system of the piezoelectric ceramic cylinder.
FIG. 10B oscillates in the X direction and the Y direction, and is called isomorphous (1, 1) mode. These vibrations are independent of each other, and the vibration directions are also perpendicular. When the piezoelectric ceramic cylinder 50 is rotated around its axis in a state where a driving voltage is applied to one of the band-shaped electrode pairs and one of the vibrations is excited, the resonance frequency is the same as described above. Then, the other vibration is excited by the action of Coriolis force, and a voltage proportional to the rotational angular velocity is generated at the other electrode pair.

FIGS. 11 (a) and 11 (b) show an energy confinement mode type vibrator according to a third embodiment of the present invention. FIG. 11 (a) is a polarization electrode configuration, FIG. 11 (b) is a gyro electrode configuration, and FIG. is there. As shown in FIG. 11 (a), strip electrodes 61, 61 ', 6
2, 62 'are formed respectively. These strip electrodes 6
As shown in FIG. 11 (c), the piezoelectric ceramic prisms 6 are arranged alternately along the outer peripheral surface.
0, and the remaining strip-shaped electrode extends to the other end of the piezoelectric ceramic prism 60.

As shown in FIG. 11A, the strip electrode 6
1, 61 'and the strip electrodes 62, 62' are connected to each other to form two terminals. The piezoelectric ceramic prism 60 is polarized such that the two-terminal strip electrode 61 has a positive polarity and the strip electrode 62 has a negative polarity. This polarization direction is indicated by a white arrow. Next, as shown in FIG. 11 (b), when an AC voltage equal to the resonance frequency of the vibration mode in the direction along the side is applied using the strip electrodes 61 and 61 'as the first strip electrode pair, as shown in FIG. Such vibration occurs. Similarly, when an AC voltage equal to the resonance frequency of the vibration mode in the direction along the side is applied to the other strip electrodes 62 and 62 ', vibration as shown in FIG. 12 is generated.

FIG. 12A shows a coordinate system of a piezoelectric ceramic prism. FIG. 12B oscillates in the X direction and the Y direction, and is called isomorphic F1 mode. These vibrations are independent of each other, and the vibration directions are also perpendicular. The resonance frequencies of the piezoelectric ceramic prisms 6 are set in a state where a driving voltage is applied to one of the band-shaped electrode pairs and one of the vibrations is excited.
When 0 is rotated about its axis, the other vibration is excited by the action of the Coriolis force as described above, and a voltage proportional to the rotational angular velocity is generated at the other electrode pair.

FIGS. 13A and 13B are views showing an energy trapping mode type vibrator according to a fourth embodiment of the present invention. FIG. 13A is a polarization electrode configuration, FIG. 13B is a gyro electrode configuration, and FIG. is there. As shown in FIG. 13A, a band-shaped electrode 71 is provided at the center of each vertex of the quadrangle of the piezoelectric ceramic prism 60.
71 ', 72, 72' are formed respectively. These strip electrodes 71, 71 ', 72, 72' are shown in FIG.
As shown by, every other one is extended to one end of the piezoelectric ceramic prism 70 along the outer peripheral surface, and the remaining strip electrodes are
The terminal extends to the other end of the piezoelectric ceramic prism 70. As shown in FIG. 13 (a), the strip electrodes 71, 71 'and the strip electrodes 72, 72' are connected to each other to form two terminals. The piezoelectric ceramic prism 70 is polarized so that the side has a negative polarity. This polarization direction is indicated by a white arrow. Next, as shown in FIG. 13 (b), the strip electrodes 71 and 71 'are used as a first strip electrode pair.
When an AC voltage equal to the resonance frequency of the diagonal vibration mode is applied, a vibration as shown in FIG. 14 occurs. Similarly, when an AC voltage equal to the resonance frequency of the diagonal vibration mode is applied to the other band electrodes 72, 72 ', vibration as shown in FIG. 14 is generated.

FIG. 14A shows a coordinate system of a piezoelectric ceramic cylinder. FIG. 14 (b) vibrates at 45 ° with the X and Y directions, and FIG. 12 (b)
Are represented by the sum or difference of the isomorphous F1 modes. These vibrations are independent of each other, and the vibration directions are also perpendicular. The resonance frequencies of the piezoelectric ceramic cylinders 60 are the same, and when the driving voltage is applied to one of the band-shaped electrode pairs and one of the vibrations is excited, the piezoelectric ceramic cylinder 60 is rotated around its axis. Then, the other vibration is excited by the action of Coriolis force, and a voltage proportional to the rotational angular velocity is generated at the other electrode pair.

[0032]

As described above, according to the present invention, an energy trapping oscillator having a simple structure called a piezoelectric ceramic cylinder can be constructed. The use of an energy-trapping vibrator minimizes the influence on the gyro characteristics by taking out and supporting and fixing the lead terminals for input and output, and enables a strong support, making it a piezoelectric device with excellent vibration and shock resistance. A vibrating gyro can be provided.

[Brief description of the drawings]

FIG. 1 is a structural diagram of an energy trap type vibrator according to a first embodiment of the present invention.

FIG. 2 is an explanatory view showing the direction of remanent polarization of the oscillator shown in FIG. 1 after polarization processing.

FIG. 3 is an explanatory diagram showing an example of an applied voltage polarity of the vibrator shown in FIGS. 1 and 2;

FIG. 4 is an explanatory diagram showing directions of strain generated in the vibrator of FIG. 3;

FIG. 5 is an explanatory diagram showing another example of the applied voltage polarity of the vibrator shown in FIGS. 1 and 2;

FIG. 6 is an explanatory diagram showing directions of distortion generated in the vibrator of FIG. 5;

FIGS. 7A, 7B, and 7C are explanatory diagrams of energy confinement vibration conditions in the piezoelectric vibrating gyroscope according to the embodiment of the present invention.

FIG. 8 is an explanatory diagram of an energy trapping vibration condition in the piezoelectric vibrating gyroscope of FIG. 7;

FIG. 9 is a sectional view of an energy trap type vibrator according to a second embodiment of the present invention. (A) is an electrode configuration for polarization,
(B) is a gyro electrode configuration, (c) is a perspective view.

FIG. 10 is a diagram showing a sectional contour vibration of the vibrator of FIG. 9;
(A) shows the coordinate system, and (b) shows the isomorphic degeneration (1, 1) mode.

FIG. 11 is a view showing an energy trap type vibrator according to a third embodiment of the present invention. (A) is an electrode configuration for polarization,
(B) is a cross-sectional view showing the configuration of the gyro electrode, and (c) is a perspective view showing the whole.

FIG. 12 is a view showing a sectional contour vibration of the vibrator of FIG. 11;
(A) shows the coordinate system, and (b) shows the isomorphic F1 mode.

FIG. 13 is a sectional view of an energy trap type vibrator according to a fourth embodiment of the present invention. (A) is an electrode configuration for polarization,
(B) is a gyro electrode configuration, (c) is a perspective view.

FIG. 14 is a view showing a sectional contour vibration of the vibrator of FIG. 13;
(A) shows a coordinate system, and (b) shows an isomorphic F1 mode mode in which the modes in FIG.

FIG. 15 is an explanatory view of the structure and operation principle of a conventional piezoelectric vibrating gyroscope.

16 is an explanatory diagram of the structure and operation principle of the piezoelectric vibrating gyroscope of FIG.

17 is an explanatory diagram of a structure and an operation principle of the piezoelectric vibrating gyroscope of FIG.

18 is an explanatory diagram of a structure and an operation principle of the piezoelectric vibrating gyroscope of FIG.

19 is an explanatory diagram of the structure and operation principle of the piezoelectric vibrating gyroscope of FIG.

FIG. 20 is a structural view of a conventional energy trap type vibrator.

FIG. 21 is a support structure diagram of a conventional energy trap type vibrator.

FIG. 22 is a support structure diagram of a conventional energy trap type vibrator.

[Description of Signs] 1,2,3,4,5,6,7,8 Strip-shaped electrode 9 Piezoelectric ceramic cylinder 10 Vibrator 23,24,25,26 Electrode terminal 31 Earth 50 Piezoelectric ceramic cylinder 51,52,51 ' , 52 'strip electrode 60, 70 piezoelectric ceramic prism 61, 62, 61', 62 'strip electrode 71, 72, 71', 72 'strip electrode 110 metal triangular prism 111, 112, 113 piezoelectric ceramic thin plate 121, 121', 122 Drive electrode

Continuation of the front page (56) References JP-A-4-106406 (JP, A) JP-A-5-45169 (JP, A) JP-A-62-162915 (JP, A) JP-A-5-14828 (JP) , U) Tadashi Chino, "Piezoelectric Vibrating Gyroscope and Direction Sensor," Grant-in-Aid for Scientific Research, Ministry of Education, Science and Technology, 1986 (General Research (B)) Research Shigeru Oyama, et al. , IEICE Technical Report Vol. 87, N (58) Field surveyed (Int. Cl. ⁷ , DB name) G01C 19/56 G01P 9/04

Claims (7)

(57) [Claims] 1. The outer periphery of a central portion of a piezoelectric ceramic rod is
A strip-shaped electrode parallel to the length direction is placed at the center of the piezoelectric ceramic rod at a position where it is divided by n (where n is a natural number of 2 or more).
The length l intersecting with is equal to the length L of the piezoelectric ceramic rod.
4n electrodes are formed so as to be 1/3 or less with respect to each other .
It is pulled out to different ends and connected to each other to perform polarization processing as two terminals. After the polarization processing, every other strip electrode is connected to form a common ground electrode. Of the remaining 2n strip electrodes, the piezoelectric ceramic rod is used. An AC voltage having a frequency substantially equal to the resonance frequency of the radial vibration mode of the piezoelectric ceramic rod is applied to the first pair of strip electrodes located at positions symmetrical with respect to the central axis of the piezoelectric ceramic rod. In the parallel electric field excitation type thickness-shear mode, the vibration is excited, and the voltage generated at the second band electrode pair at the position where the first band electrode pair is rotated by 90 ° is detected.
A piezoelectric vibratory gyroscope characterized by using energy confinement vibration . 2. The outer periphery of the center of the piezoelectric ceramic rod is
A longitudinal band-shaped electrodes in a position to divide the piezoelectric cell
The length l intersecting at the center of the Lamix rod is
4 so that it is 1/3 or less of the length L of the mixing rod
And the formation, each of the pressure strip electrodes of every other one another
Pull out to the different ends of the electroceramic rod and it
After each connection and polarization processing as two terminals, the connection is removed, the strip electrodes are made independent, and the adjacent strip electrodes are respectively a driving electrode and a detection electrode,
The other two strip-shaped electrodes are used as ground electrodes, and an AC voltage whose frequency is substantially equal to the resonance frequency of the piezoelectric ceramic in the radial vibration mode is applied to the driving electrode, and a radial direction is applied to the center of the piezoelectric ceramic rod. the vibration is excited so as to detect a voltage generated in the detection electrode, parallel conductive
Energy-confined vibration of a field-excited thickness-shear mode
A piezoelectric vibratory gyroscope characterized by using the above . Wherein said piezoelectric ceramic rod central unit according to claim 1 or 2, wherein the piezoelectric vibrating gyro characterized in that it is a circular cross section. Wherein said piezoelectric central portion of the ceramic rod according to claim 1 or 2 SL <br/> mounting of the piezoelectric vibrating gyro characterized by having a cross-section square cross section. 5. The piezoelectric vibrating gyroscope according to claim 4, wherein said band-shaped electrode is formed at a center position of each side of said square cross section. 6. The piezoelectric vibratory gyroscope according to claim 4, wherein said band-shaped electrode is formed at each vertex of said square cross section. 7. The method of claim 1 Symbol mounting of the piezoelectric vibrating gyro, wherein the natural number n is 2.