JP3251093B2 - Superconductor and method of manufacturing the same - Google Patents
Superconductor and method of manufacturing the sameInfo
- Publication number
- JP3251093B2 JP3251093B2 JP09029393A JP9029393A JP3251093B2 JP 3251093 B2 JP3251093 B2 JP 3251093B2 JP 09029393 A JP09029393 A JP 09029393A JP 9029393 A JP9029393 A JP 9029393A JP 3251093 B2 JP3251093 B2 JP 3251093B2
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- Japan
- Prior art keywords
- superconductor
- layer
- alkaline earth
- mercury
- perovskite
- Prior art date
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Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
- Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment
Landscapes
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Physical Vapour Deposition (AREA)
Description
【0001】[0001]
【産業上の利用分野】本発明は、新規な銅酸化物超電導
体およびその製造方法に関するものである。さらに詳し
くは、超伝導特性の再現性に優れた銅酸化物超電導体お
よびその製造方法に関する。The present invention relates to a novel copper oxide superconductor and a method for producing the same. More specifically, the present invention relates to a copper oxide superconductor excellent in reproducibility of superconducting characteristics and a method for producing the same.
【0002】[0002]
【従来の技術】高温超伝導体として、ミュラー等により
ペロブスカイト類型構造の酸化物超伝導体が発見された
後、種々の化学組成を持つペロブスカイト類型構造の酸
化物系で超伝導性の確認が為された。主成分に水銀を含
む物質(Hg−Ba−R−Ca−Cu−O, R:希土類
元素)においてもペロブスカイト類型構造を取ることが
見い出されたが、この系の物質で超伝導性は得られてい
ない[S. N. Putilin (プチリン) 他, マテリアルズ
・リサーチ・ブリティン (Materials Research Bulleti
n), Vol.26, p.1299 (1991) ]。その後、この系の物質
のHg- Ba- Cu- O化合物が超伝導性を示すことが
発見された[S. N. Putilin (プチリン)他, ネイチャ
ー (Nature), Vol.362, p.226 (1993)]。2. Description of the Related Art After an oxide superconductor having a perovskite-type structure was discovered by Mueller et al. As a high-temperature superconductor, superconductivity was confirmed for an oxide system having a perovskite-type structure having various chemical compositions. Was done. It has been found that a substance containing mercury as a main component (Hg-Ba-R-Ca-Cu-O, R: rare earth element) also has a perovskite type structure, but superconductivity can be obtained with this type of substance. [SN Putilin and others, Materials Research Bulleti
n), Vol.26, p.1299 (1991)]. Later, it was discovered that the Hg-Ba-Cu-O compound of this system exhibited superconductivity [SN Putilin (Ptillin) et al., Nature, Vol. 362, p.226 (1993)]. .
【0003】[0003]
【発明が解決しようとする課題】しかしながら、この水
銀を含むペロブスカイト類型物質は、水銀元素の蒸気圧
が高いこともあって安定に得にくく、カプセルに封入し
て焼成する必要があるなど合成法も複雑であった。従っ
てよい超伝導特性を再現性よく得るのに難があり、この
系の物質の合成上の欠点が問題となっていた。However, this type of perovskite-type substance containing mercury is difficult to obtain stably due to the high vapor pressure of elemental mercury. It was complicated. Therefore, it is difficult to obtain good superconducting characteristics with good reproducibility, and there has been a problem in the synthesis of the substance of this system.
【0004】本発明は、前記従来の問題を解決するた
め、構造がより安定で合成が容易であり、かつ超伝導特
性の再現性に優れた酸化物超電導体およびその製造方法
を提供することを目的とする。[0004] The present invention provides an oxide superconductor having a more stable structure, easy synthesis, and excellent reproducibility of superconductivity, and a method for producing the same, in order to solve the above-mentioned conventional problems. Aim.
【0005】前記目的を達成するため、本発明の超伝導
体は、主成分が、鉛、水銀、アルカリ土類元素、銅、酸
素で構成されており、本発明の第1の超伝導体において
は、主成分が、Pb0.5 Hg0.5 A2 CuO4+x (ただ
し、A元素は1種以上のアルカリ土類元素を示し、xは
−1<x<1の範囲の数値)なる化学式で表わされ、C
uO6 八面体を含むペロブスカイト層A2 CuO4 が、
鉛元素と水銀元素を主成分とする1原子層で挟まれた結
晶構造を持つ。 [0005] To achieve the above object, the superconductor of the present invention, main component, lead, mercury, alkaline earth element, copper, is composed of oxygen, the first superconductor of the present invention Is represented by a chemical formula in which the main component is Pb 0.5 Hg 0.5 A 2 CuO 4 + x (where A represents one or more alkaline earth elements and x is a numerical value in the range of −1 <x <1). Wow, C
The perovskite layer A 2 CuO 4 containing uO 6 octahedron is
One lifting sandwiched crystal structure in one atomic layer composed mainly of lead element and mercury element.
【0006】第1の超伝導体においては、アルカリ土類
元素Aが、バリウム(Ba)であることが好ましい。[0006] In the first superconductor , the alkaline earth element A is preferably barium (Ba).
【0007】本発明の第2の超伝導体においては、主成
分が、Pb0.5 Hg0.5 A3 Cu2O6+x (ただし、A
元素は1種以上のアルカリ土類元素を示し、xは−1<
x<1の範囲の数値)なる化学式で表わされ、A元素の
1原子層を介して向かい合った2つのCuO5 ピラミッ
ドを含む酸素欠損ペロブスカイト層A3 Cu2 O6 が、
鉛元素と水銀元素を主成分とする1原子層で挟まれた結
晶構造を持つ。 In the second superconductor of the present invention, the main component is Pb 0.5 Hg 0.5 A 3 Cu 2 O 6 + x (where A
The element represents one or more alkaline earth elements, and x is −1 <
x <a numerical value in the range of 1), and an oxygen-deficient perovskite layer A 3 Cu 2 O 6 including two CuO 5 pyramids facing each other via one atomic layer of the element A,
One lifting sandwiched crystal structure in one atomic layer composed mainly of lead element and mercury element.
【0008】第2の超伝導体においては、アルカリ土類
元素Aが、バリウムとカルシウムの組合せであり、Pb
0.5 Hg0.5 Ba2 CaCu2 O6+x なる化学式で表わ
されることが好ましい。[0008] In the second superconductor , the alkaline earth element A is a combination of barium and calcium, and Pb
It is preferably represented by a chemical formula of 0.5 Hg 0.5 Ba 2 CaCu 2 O 6 + x .
【0009】第2の超伝導体においては、アルカリ土類
元素Aが、ストロンチウムとカルシウムの組合せであ
り、Pb0.5 Hg0.5 Sr2 CaCu2 O6+x なる化学
式で表わされることが好ましい。In the second superconductor , the alkaline earth element A is a combination of strontium and calcium, and is preferably represented by a chemical formula of Pb 0.5 Hg 0.5 Sr 2 CaCu 2 O 6 + x .
【0010】次に本発明の超伝導体の製造方法は、鉛と
水銀を主成分とした1原子層と、アルカリ土類元素と銅
からなるペロブスカイト酸化物層とを、分子堆積法によ
り交互に積層して分子の積層体を形成するという構成を
備えたものである。Next, the method for manufacturing a superconductor according to the present invention comprises the steps of alternately forming a monoatomic layer containing lead and mercury as main components and a perovskite oxide layer containing an alkaline earth element and copper by a molecular deposition method. It has a configuration in which the layers are stacked to form a molecular stack.
【0011】[0011]
【作用】これまでの水銀を含むペロブスカイト類型酸化
物(Hg−Ba−R−Ca−Cu−O化合物あるいはH
g−Ba−Cu−O超伝導体)は、ペロブスカイト構造
の層を水銀元素あるいはこれに酸素を付加した1原子層
が挟んだ構造を持つと考えられている。水銀は融点が低
く蒸気圧が高い元素であるので、前記構造を安定に得る
のは容易ではないと推察される。The perovskite type oxide containing mercury (Hg-Ba-R-Ca-Cu-O compound or H
g-Ba-Cu-O superconductor) is considered to have a structure in which a layer having a perovskite structure is interposed between elemental mercury or one atomic layer obtained by adding oxygen thereto. Since mercury has a low melting point and a high vapor pressure, it is presumed that it is not easy to stably obtain the above structure.
【0012】本発明は、鉛、水銀、アルカリ土類元素お
よび銅からなるペロブスカイト類型酸化物で、ペロブス
カイト構造の層を水銀と鉛元素またはこれに酸素を付加
した1原子層が挟んだ構造からなると考えられる。すな
わちペロブスカイト層を挟む原子層に、水銀に加えて鉛
が入ることにより、構造がより安定になり合成が容易に
なった。従って超伝導特性の再現性も、本発明のように
水銀に加えて鉛を同時に含ませることにより向上をみせ
た。The present invention relates to a perovskite-type oxide comprising lead, mercury, an alkaline earth element and copper, which has a perovskite structure layer in which a mercury and lead element or one atomic layer obtained by adding oxygen thereto is interposed. Conceivable. In other words, by introducing lead in addition to mercury into the atomic layers sandwiching the perovskite layer, the structure became more stable and the synthesis became easier. Therefore, the reproducibility of the superconductivity was also improved by simultaneously containing lead in addition to mercury as in the present invention.
【0013】またこの構造は特に薄膜の形態にすると作
製し易いことが判ったが、鉛と水銀の層と、アルカリ土
類元素と銅のペロブスカイト酸化物層との交互積層が非
常に有効であった。積層法で酸化物超伝導体を作製する
方法は幾つかの物質で試みられているが、どういう成分
の層を積層させるかは各物質で異なり、新規物質では実
際に実験で最適な積層を検討する必要がある。本発明者
等は本発明の新規の超伝導体について種々の積層法を検
討した結果、ペロブスカイト層と、鉛および水銀の層と
で交互に積層を行えば、再現性よく作製が行えることを
確認した。Although it has been found that this structure is particularly easy to fabricate in the form of a thin film, alternate lamination of a lead and mercury layer and an alkaline earth element and copper perovskite oxide layer is very effective. Was. Several methods have been used to fabricate oxide superconductors by the lamination method.However, the composition of the layers differs depending on the material. There is a need to. The present inventors have studied various lamination methods for the novel superconductor of the present invention, and have confirmed that if the perovskite layer and the layers of lead and mercury are alternately laminated, fabrication can be performed with good reproducibility. did.
【0014】[0014]
実施例1 図1に示す2元スパッタ装置により、本実施例の超伝導
体の薄膜作製を行った。ターゲットの一方は、酸化水銀
と酸化鉛を混合して円盤状に成形したターゲット11で
あり、もう一方はBa2 CuO3 の焼結円盤ターゲット
12を用いた。基板13にはMgO単結晶(100)面
を用いた。ターゲットと基板間にはシャッター14を配
置させ、この回転により片方のターゲットが選択されて
スパッタ蒸着が行われる。アルゴンガス3Paの雰囲気
中でスパッタリングし、ヒーター15により550℃に
加熱された基板上にシャッター制御を行って交互に積層
を行った。シャッターの回転を、ちょうど鉛と水銀を主
体とした層1原子層、およびBaとCuのペロブスカイ
ト酸化物1分子層が堆積するように制御した時、ペロブ
スカイト類型構造の層状化合物が得られることが判っ
た。シャッターを用いずに2つのターゲットの成分を同
時に蒸着した場合にもペロブスカイト類型構造物質が得
られることがあったが、再現性ははるかに低いものであ
った。この化合物を詳細に分析した結果、化学組成は約
Pb0.5 Hg0.5 Ba2 CuO4+x (1<x<1) となってお
り、結晶構造は図2に示す構造をとることが判った。す
なわち、CuO6 8面体21とBa元素22からなるペ
ロブスカイト構造の層23を、水銀と鉛元素からなる1
原子層24が挟んだ構造をとると考えられる。このよう
にして作製したペロブスカイト類型化合物の電気抵抗率
は室温で1mΩcmと低く、低温の80ケルビンで超伝導
転移によると思われる抵抗ドロップをみせた。すなわち
Pb0.5 Hg0.5 Ba2 CuO4+x は新しい超伝導体で
あることが確認された。なお、ここではスパッタリング
を例として説明したが、分子線エピタキシー法、加熱蒸
着法などを用いても同様に形成できることは勿論であ
る。Example 1 A thin film of the superconductor of this example was produced by a binary sputtering apparatus shown in FIG. One of the targets was a disk-shaped target 11 obtained by mixing mercury oxide and lead oxide, and the other was a sintered disk target 12 of Ba 2 CuO 3 . The substrate 13 was a MgO single crystal (100) plane. A shutter 14 is disposed between the target and the substrate, and one of the targets is selected by this rotation to perform sputter deposition. Sputtering was performed in an atmosphere of 3 Pa of argon gas, and lamination was performed alternately on a substrate heated to 550 ° C. by a heater 15 by performing shutter control. It was found that when the rotation of the shutter was controlled to deposit just one atomic layer mainly composed of lead and mercury and one monolayer of perovskite oxide of Ba and Cu, a layered compound having a perovskite type structure was obtained. Was. Perovskite-type structural materials were sometimes obtained even when components of two targets were simultaneously deposited without using a shutter, but the reproducibility was much lower. As a result of detailed analysis of this compound, it was found that the chemical composition was about Pb 0.5 Hg 0.5 Ba 2 CuO 4 + x (1 <x <1), and that the crystal structure had the structure shown in FIG. That is, a layer 23 having a perovskite structure composed of a CuO 6 octahedron 21 and a Ba element 22 is made of a 1 layer composed of mercury and lead element.
It is considered that the structure has an atomic layer 24 interposed therebetween. The electric resistivity of the perovskite-type compound thus prepared was as low as 1 mΩcm at room temperature, and exhibited a resistance drop at 80 Kelvin at a low temperature which was considered to be due to a superconducting transition. That is, it was confirmed that Pb 0.5 Hg 0.5 Ba 2 CuO 4 + x was a new superconductor. Note that, although sputtering has been described as an example here, it is needless to say that the film can be similarly formed by using a molecular beam epitaxy method, a heating evaporation method, or the like.
【0015】実施例2 同様の装置により、酸化水銀と酸化鉛のターゲットと、
Sr2 CaCu2 O5のターゲットを用いて、スパッタ
リングによる積層を行った。交互積層の周期を、ちょう
ど鉛と水銀を主体とした層1原子層、およびSr,Ca
とCuのペロブスカイト酸化物2分子層が堆積するよう
に制御した際、前実施例より軸長の長いペロブスカイト
類型構造の層状化合物が得られた。この化合物を詳細に
分析した結果、化学組成は約Pb0.5 Hg0.5 Sr2 C
aCu2 O6+x (1<x<1) となっており、結晶構造は図3
に示す構造をとることが判った。すなわちCa元素1原
子層31を介して向かい合った2個のCuO5 ピラミッ
ド32およびSr元素33からなる酸素欠損ペロブスカ
イト層34を、水銀と鉛元素からなる1原子層24が挟
んだ構造をとる。この化合物の電気抵抗率の温度変化を
測定したところ、約90ケルビンで超伝導転移によると
思われる抵抗ドロップをみせた。すなわちPb0.5 Hg
0.5 Sr2 CaCu2 O6+x は新しい超伝導体であるこ
とが確認された。Example 2 Using a similar apparatus, a target of mercury oxide and lead oxide was
Lamination by sputtering was performed using a target of Sr 2 CaCu 2 O 5 . The period of the alternate lamination is just one atomic layer composed mainly of lead and mercury, and Sr, Ca
And a Cu perovskite oxide bilayer was deposited to obtain a layered compound having a perovskite-type structure with a longer axial length than in the previous example. As a result of detailed analysis of this compound, the chemical composition was found to be about Pb 0.5 Hg 0.5 Sr 2 C
aCu 2 O 6 + x (1 <x <1), and the crystal structure is shown in FIG.
The structure shown in FIG. That is, a structure is adopted in which an oxygen-deficient perovskite layer 34 composed of two CuO 5 pyramids 32 and an Sr element 33 facing each other via a Ca element atomic layer 31 is sandwiched by a 1 atomic layer 24 composed of mercury and lead elements. When the temperature change of the electric resistivity of this compound was measured, a resistance drop at about 90 Kelvin, which was considered to be caused by the superconducting transition, was observed. That is, Pb 0.5 Hg
0.5 Sr 2 CaCu 2 O 6 + x was confirmed to be a new superconductor.
【0016】本実施例ではアルカリ土類元素の組合せと
してSrとCaを用いたが、これ以外のアルカリ土類元
素の組合せでも超伝導体が作製できること勿論である。
またペロブスカイト層の分子単位が3分子層以上からな
るペロブスカイト類型構造も同様に超伝導体となること
は容易に類推される。In this embodiment, Sr and Ca are used as a combination of alkaline earth elements. However, it is a matter of course that a superconductor can be produced with other combinations of alkaline earth elements.
It is easily presumed that a perovskite-type structure in which the molecular unit of the perovskite layer is composed of three or more molecular layers also becomes a superconductor.
【0017】[0017]
【発明の効果】以上のように本発明の超伝導体は、水銀
を含む酸化物超伝導体において、再現性よく合成可能な
新規の物質およびその製法を実現したものである。この
結果、水銀を含む酸化物超伝導体が安定に得られるよう
になり、実用上の使用も期待できるようになった。特に
この水銀を含む物質は、結晶構造が比較的単純なので薄
膜化にも向いている。従って、デバイス応用に有望な超
伝導材料を提供するもので、本発明の工業的価値は大き
い。As described above, the superconductor of the present invention realizes a novel substance which can be synthesized with good reproducibility and a method for producing the same in an oxide superconductor containing mercury. As a result, an oxide superconductor containing mercury can be obtained stably, and practical use can be expected. In particular, the substance containing mercury has a relatively simple crystal structure, and is therefore suitable for thinning. Therefore, the present invention provides a promising superconducting material for device application, and the industrial value of the present invention is great.
【図1】本発明の一実施例における超伝導体を作製する
装置の図。FIG. 1 is a diagram of an apparatus for manufacturing a superconductor according to one embodiment of the present invention.
【図2】本発明の一実施例で作製されたPb0.5 Hg
0.5 Ba2 CuO4+x 薄膜の結晶構造図。FIG. 2 shows Pb 0.5 Hg produced in one example of the present invention.
FIG. 3 is a crystal structure diagram of a 0.5 Ba 2 CuO 4 + x thin film.
【図3】本発明の一実施例で作製されたPb0.5 Hg
0.5 Sr2 CaCu2 O6+x 薄膜の結晶構造図。FIG. 3 shows Pb 0.5 Hg produced in one example of the present invention.
FIG. 3 is a crystal structure diagram of a 0.5 Sr 2 CaCu 2 O 6 + x thin film.
11 水銀と鉛の酸化物ターゲット 12 Ba2 CuO3 ターゲット 13 MgO基板 14 シャッター 15 ヒーター 21 CuO6 8面体ブロック層 22 Ba元素 23 ペロブスカイト構造層 24 水銀と鉛の1原子層 31 Ca元素1原子層 32 CuO5 ピラミッド 33 Sr元素 34 酸素欠損ペロブスカイト層11 oxides of mercury and lead target 12 Ba 2 CuO 3 target 13 MgO substrate 14 shutter 15 heater 21 CuO 6 8 tetrahedral blocking layer 22 Ba element 23 perovskite structure 1 atomic layer of the layer 24 mercury and lead 31 Ca element 1 atomic layer 32 CuO 5 pyramid 33 Sr element 34 Oxygen deficient perovskite layer
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7,DB名) C01G 1/00 CA(STN) JICSTファイル(JOIS) REGISTRY(STN)──────────────────────────────────────────────────続 き Continuation of front page (58) Field surveyed (Int. Cl. 7 , DB name) C01G 1/00 CA (STN) JICST file (JOIS) REGISTRY (STN)
Claims (6)
4+x (ただし、A元素は1種以上のアルカリ土類元素を
示し、xは−1<x<1の範囲の数値)なる化学式で表
わされ、CuO6 八面体を含むペロブスカイト層A2 C
uO4 が、鉛元素と水銀元素を主成分とする1原子層で
挟まれた結晶構造を持つ超伝導体。The main component is Pb 0.5 Hg 0.5 A 2 CuO.
4 + x (where A represents one or more kinds of alkaline earth elements, x is represented by a chemical formula of -1 <x <1), and a perovskite layer A 2 containing CuO 6 octahedron C
uO 4 is, one lifting the crystalline structure sandwiched by one atomic layer composed mainly of lead element and mercury element superconductor.
a)である請求項1に記載の超伝導体。2. The method according to claim 1, wherein the alkaline earth element A is barium (B
The superconductor according to claim 1 , which is a).
O6+x (ただし、A元素は1種以上のアルカリ土類元素
を示し、xは−1<x<1の範囲の数値)なる化学式で
表わされ、A元素の1原子層を介して向かい合った2つ
のCuO5 ピラミッドを含む酸素欠損ペロブスカイト層
A3 Cu2 O6 が、鉛元素と水銀元素を主成分とする1
原子層で挟まれた結晶構造を持つ超伝導体。3. The method according to claim 1, wherein the main component is Pb 0.5 Hg 0.5 A 3 Cu 2
O 6 + x (where A represents one or more alkaline earth elements, and x is represented by a chemical formula of −1 <x <1), and is represented by one atomic layer of A An oxygen-deficient perovskite layer A 3 Cu 2 O 6 including two opposing pyramids of CuO 5 is composed of one element mainly composed of lead element and mercury element.
Superconductor single lifting sandwiched crystal structure at the atomic layer.
シウムの組合せであり、Pb0.5 Hg0.5 Ba2 CaC
u2 O6+x なる化学式で表わされる請求項3に記載の超
伝導体。4. An alkaline earth element A comprising a combination of barium and calcium, wherein Pb 0.5 Hg 0.5 Ba 2 CaC
superconductor according to claim 3 represented by u 2 O 6 + x becomes formula.
とカルシウムの組合せであり、Pb0.5 Hg0.5 Sr2
CaCu2 O6+x なる化学式で表わされる請求項3に記
載の超伝導体。5. The method according to claim 1, wherein the alkaline earth element A is a combination of strontium and calcium, and Pb 0.5 Hg 0.5 Sr 2.
Superconductor according to CaCu 2 O 6 + x becomes claim 3 represented by the chemical formula.
ルカリ土類元素と銅からなるペロブスカイト酸化物層と
を、分子堆積法により交互に積層して分子の積層体を形
成する超伝導体の製造方法。6. A superatomic layer in which a monoatomic layer mainly composed of lead and mercury and a perovskite oxide layer composed of an alkaline earth element and copper are alternately laminated by a molecular deposition method to form a molecular laminate. Conductor manufacturing method.
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JP09029393A JP3251093B2 (en) | 1993-04-16 | 1993-04-16 | Superconductor and method of manufacturing the same |
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JP09029393A JP3251093B2 (en) | 1993-04-16 | 1993-04-16 | Superconductor and method of manufacturing the same |
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JP3251093B2 true JP3251093B2 (en) | 2002-01-28 |
Family
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