JP3215221U - Peeling assembly for peeling device of flexible substrate placed on carrier board - Google Patents

Abstract

A peeling assembly for a peeling apparatus for a flexible substrate placed on a carrier board is provided. A peeling assembly 1 of a peeling apparatus for a flexible substrate placed on a carrier board according to the present invention has a flexible air peeling means 11 and the periphery of the flexible air peeling means 11 sealed, and the cross section has an arc shape. And a flexible seal ring 12 to be exhibited. Through this, the peeling assembly 1 can be provided and used in the related air suction facility of the peeling device, and when the flexible substrate is adsorbed, the flexible ventilation ring peeling means 11 can be easily deformed using the flexible seal ring 12. By doing so, it is possible to obtain a relatively large suction force and to easily peel the flexible substrate from the carrier board. [Selection] Figure 1

Description

  The present invention relates to a peeling assembly for a peeling device for a flexible substrate placed on a carrier board, and more particularly to a device that can be used in a peeling device for a flexible substrate.

  A conventional peeling device for a flexible substrate placed on a carrier board is usually used in combination with a peeling assembly, and the peeling assembly is composed of a support plate and a porous material laminated on each other, on the periphery of the porous material. Each is provided with a sealing member through which the flexible material is brought into contact with the flexible substrate, an air suction facility is connected to the peeling assembly, and the sealing member is used between the support plate and the porous material. The flexible board compresses the porous material and the sealing member by the suction force of the air suction equipment and causes deformation due to the air suction equipment, so that the flexible board is peeled off from the carrier board and moved to the related subsequent process. To do.

  However, regarding the conventional peeling assembly, the sealing member is a solid torus and has a rectangular cross section. Therefore, when the sealing member is compressed by the flexible substrate, the sealing member is deformed due to a predetermined volume. Therefore, when the sealing member is compressed, the whole of the sealing member is in a state of being under pressure, and is likely to break after a certain period of time. .

  Therefore, how to obtain a relatively large adsorption force, and achieve the purpose of easily peeling the flexible substrate from the carrier board, to flexibly mount the flexible substrate on the carrier board that effectively improves the conventional defects The present invention intends to actively disclose a peeling assembly of the peeling device.

  The inventor has intensively studied in view of the above-mentioned defects of the prior art, and has developed a peeling assembly for a peeling device for a flexible board to be placed on a carrier board, and easily peels the flexible board from the carrier board. To achieve the purpose.

  In order to achieve the above and other objects, the present invention provides a peeling assembly for a peeling device for a flexible board placed on a carrier board, and the peeling assembly for the peeling device for a flexible board placed on a carrier board. A flexible air-peeling means; and a flexible seal ring that seals a periphery of the flexible air-peeling means and has a circular cross section.

  In the peeling assembly of the peeling apparatus for a flexible substrate placed on the carrier board, the flexible ventilation peeling means includes a ventilation lower plate, a ventilation upper plate, and at least one porous material layer, and the porous material layer Is provided on the top surface of the ventilation lower plate, the ventilation upper plate is laminated on the top surface of the porous material layer, and the porous material layer is sandwiched between the ventilation lower plate and the ventilation upper plate.

  In the peeling assembly of the peeling device for the flexible board placed on the carrier board, the lower ventilation plate includes a plurality of lower ventilation holes, and the lower ventilation holes are located in the flexible seal ring.

  In the peeling assembly of the peeling apparatus for the flexible substrate placed on the carrier board, the ventilation upper plate includes a plurality of upper ventilation holes, and the upper ventilation holes are located in the flexible seal ring.

  In the peeling assembly of the flexible substrate peeling device placed on the carrier board, the flexible seal ring includes a first sticking ring part, a second sticking ring part, and a deformed ring part, and the cross section of the deformable ring part is It has an arc shape, the first sticking ring part faces the second sticking ring part, and the deformed ring part is connected to one end edge of the first sticking ring part and the second sticking ring part.

  In the peeling assembly of the flexible substrate peeling apparatus placed on the carrier board, the bottom face of the first sticking ring part is coupled to the top face of the flexible ventilation peeling means, and the top face of the second sticking ring part is It couple | bonds with the bottom face of this flexible ventilation peeling means, and this deformation | transformation ring part is located in the periphery of this flexible ventilation peeling means.

  In the peeling assembly of the peeling device for the flexible substrate placed on the carrier board, the flexible seal ring is made of rubber, silicone, polyurethane (PU) or polyethylene (PE).

  Through this, in the peeling assembly of the peeling device of the flexible substrate placed on the carrier board of the present invention, the peeling assembly can be used by providing it in the related air suction facility of the peeling device, and the flexible substrate is adsorbed. In some cases, a flexible sealing ring is used to easily deform the flexible air-peeling means, thereby obtaining a relatively large suction force and achieving the purpose of easily peeling the flexible substrate from the carrier board.

It is a schematic diagram which shows the cross-sectional state before peeling the flexible substrate in the preferable Example of this invention. It is a schematic diagram which shows the external appearance of the flexible seal ring in the preferable Example of this invention. It is a schematic diagram which shows the cross-sectional state after peeling the flexible substrate in the preferable Example of this invention.

  DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS In order to fully understand the objects, features and effects of the present invention, the present invention will be described in detail with reference to the accompanying drawings in the following specific embodiments.

  Referring to FIGS. 1 and 2, as shown in the drawings, the present invention is a peeling assembly of a peeling device for a flexible board placed on a carrier board, and the peeling assembly 1 includes at least a flexible ventilation peeling means 11 and a flexible assembly. The seal ring 12 is used.

  The flexible seal ring 12 seals the peripheral edge of the flexible ventilation separation means 11, and the cross section of the flexible seal ring 12 has an arc shape.

  In one embodiment of the present invention, the flexible ventilation separation means 11 includes a ventilation lower plate 111, a ventilation upper plate 112, and at least one porous material layer 113, and the porous material layer 113 is the ventilation lower plate. 111. The ventilation upper plate 112 is laminated on the top surface of the porous material layer 113, and the porous material layer 113 is sandwiched between the ventilation lower plate 111 and the ventilation upper plate 112. The lower ventilation plate 111 includes a plurality of lower ventilation holes 1111, the lower ventilation holes 1111 are located in the flexible seal ring 12, and the upper ventilation plate 112 includes a plurality of upper ventilation holes 1112. A vent 1112 is located in the flexible seal ring 12.

  In one embodiment of the present invention, the flexible seal ring 12 includes a first sticking ring part 121, a second sticking ring part 122, and a deformed ring part 123, and the cross section of the deformable ring part 123 has an arc shape. The first sticking ring part 121 faces the second sticking ring part 122, the deformation ring part 123 is connected to one end edge of the first sticking ring part 121 and the second sticking ring part 122, and the first The bottom surface of the adhesive ring portion 121 is coupled to the top surface of the ventilation upper plate 112 of the flexible ventilation separation means 11, and the top surface of the second adhesion ring portion 122 is connected to the bottom surface of the ventilation lower plate 111 of the flexible ventilation separation means 11. Combined, the deformed ring portion 123 is located at the periphery of the flexible ventilation separation means 11. The flexible seal ring 12 is made of rubber, silicone, polyurethane (PU) or polyethylene (PE).

  Referring to FIGS. 1 and 3, when in operation, the peeling assembly 1 is provided below a mounting base 2 of an associated air suction facility of a peeling apparatus, and the peeling assembly 1 is brought into contact with a flexible substrate, In order to form airtightness with the flexible seal ring 12, the flexible ventilation peeling means 11 compresses the porous material layer 113 from the ventilation upper plate 112 and the ventilation lower plate 111 when the air suction facility is activated. By deforming the flexible seal ring 12, the upper ventilation holes 1112 of the ventilation upper plate 112 and the lower ventilation holes 1111 of the ventilation lower plate 111 are combined with the porous material layer 113 and adsorbed to the flexible substrate. The flexible substrate is peeled off from the carrier board (carrier glass) by generating a force; And the deformed ring portion 123 is located at the periphery of the flexible ventilation separation means 11, so that when the porous material layer 113 is compressed and deformed, the deformable ring portion 123 is formed on the porous material layer 113 through the deformed ring portion 123. A relatively large amount of deformation is generated, and therefore, the flexible substrate can be peeled from the carrier board with a relatively large suction force. Further, since the cross section of the deformable ring portion 123 of the flexible seal ring 12 has an arc shape, the flexible seal ring 12 can be easily deformed and has a long life.

  The preferred embodiments made in the section of the detailed description of the invention are merely to clarify the technical contents of the present invention, and should not be construed in a narrow sense by limiting to such specific examples. Will be apparent to those skilled in the art. It should be noted that all equivalent structural changes and substitutions with the embodiment are within the scope of the present invention. Therefore, the protection scope of the present invention is the same as that specified in the utility model registration request.

DESCRIPTION OF SYMBOLS 1 Peeling assembly 11 Flexible ventilation peeling means 111 Ventilation lower board 1111 Lower ventilation hole 112 Ventilation upper board 1112 Upper ventilation hole 113 Porous material layer 12 Flexible seal ring 121 First sticking ring part 122 Second sticking ring part 123 Deformation ring part 2 Mounting base

Claims (7)

Flexible air release means;
A flexible seal ring that seals a peripheral edge of the flexible vent peeling means and has a circular cross section;
The peeling assembly of the peeling apparatus of the flexible substrate mounted in the carrier board characterized by the above-mentioned.   The flexible ventilation peeling means includes a ventilation lower plate, a ventilation upper plate, and at least one porous material layer, and the porous material layer is provided on a top surface of the ventilation lower plate, and the ventilation upper plate is The flexible substrate placed on the carrier board according to claim 1, wherein the flexible substrate is stacked on a top surface of the porous material layer, and the porous material layer is sandwiched between the ventilation lower plate and the ventilation upper plate. A peeling assembly of a peeling device.   The apparatus according to claim 2, wherein the ventilation lower plate includes a plurality of lower ventilation holes, and the lower ventilation holes are located in the flexible seal ring. Peeling assembly.   The apparatus according to claim 2, wherein the upper ventilation plate includes a plurality of upper ventilation holes, and the upper ventilation holes are located in the flexible seal ring. Peeling assembly.   The flexible seal ring includes a first sticking ring part, a second sticking ring part, and a deformed ring part. A cross section of the deformed ring part has an arc shape, and the first sticking ring part is the second sticking ring part. 2. The apparatus for peeling a flexible substrate placed on a carrier board according to claim 1, wherein the deformed ring portion is connected to one end edge of the first sticking ring portion and the second sticking ring portion. Peeling assembly.   The bottom surface of the first affixing ring portion is coupled to the top surface of the flexible ventilation separation means, the top surface of the second affixation ring portion is coupled to the bottom surface of the flexible ventilation separation device, and the deformation ring portion is the flexible 6. The peeling assembly of a peeling apparatus for a flexible substrate placed on a carrier board according to claim 5, wherein the peeling assembly is located at a peripheral edge of the ventilation peeling means. 2. The peeling assembly of a peeling apparatus for a flexible substrate placed on a carrier board according to claim 1, wherein the flexible seal ring is made of rubber, silicone, polyurethane (PU) or polyethylene (PE).