TWM555347U - Peeling component of peeling device for flexible substrate carried by carrying board - Google Patents

Peeling component of peeling device for flexible substrate carried by carrying board Download PDF

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Publication number
TWM555347U
TWM555347U TW106215851U TW106215851U TWM555347U TW M555347 U TWM555347 U TW M555347U TW 106215851 U TW106215851 U TW 106215851U TW 106215851 U TW106215851 U TW 106215851U TW M555347 U TWM555347 U TW M555347U
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TW
Taiwan
Prior art keywords
peeling
flexible
gas permeable
ring portion
flexible substrate
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TW106215851U
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Chinese (zh)
Inventor
Kun-Lin Chou
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Eclat Forever Machinery Co Ltd
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Priority to TW106215851U priority Critical patent/TWM555347U/en
Publication of TWM555347U publication Critical patent/TWM555347U/en

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Abstract

本創作係提供一種承載於承載板之可撓性基板的剝離裝置之剝離組件,係包含有一可撓性透氣剝離單元;以及密封該可撓性透氣剝離單元周緣之一可撓性密封環,該可撓性密封環之截面係呈弧型。藉此,可將剝離組件設於剝離裝置之相關抽氣設備進行使用,而於吸附可撓性基板時,利用可撓性密封環之配合,使可撓性透氣剝離單元易於產生形變,以獲得較大之吸附力,而達到易於從承載板上剝離可撓性基板之功效。The present invention provides a peeling assembly of a peeling device carried on a flexible substrate of a carrier sheet, comprising a flexible gas permeable peeling unit; and a flexible sealing ring sealing one of the circumferences of the flexible gas permeable peeling unit, The section of the flexible sealing ring is curved. Thereby, the peeling component can be used in the relevant suction device of the peeling device, and when the flexible substrate is adsorbed, the flexible gas-permeable peeling unit is easily deformed by the cooperation of the flexible sealing ring to obtain the deformation. The large adsorption force achieves the effect of easily peeling off the flexible substrate from the carrier sheet.

Description

承載於承載板之可撓性基板的剝離裝置之剝離組件Stripping assembly of a peeling device carried on a flexible substrate of a carrier sheet

本創作係關於一種承載於承載板之可撓性基板的剝離裝置之剝離組件,尤指一種可運用於可撓性基板之剝離裝置者。The present invention relates to a peeling assembly for a peeling device of a flexible substrate carried on a carrier sheet, and more particularly to a peeling device that can be applied to a flexible substrate.

按,一般習用承載於承載板之可撓性基板之剝離裝置,通常會搭配一剝離組件進行使用,而該剝離組件係由相互層疊之支撐板與多孔隙材料所構成,而於該多孔隙材料之周緣係分別設有一密封件;藉此,可以多孔隙材料接觸該可撓性基板,並以抽氣設備連接至該剝離組件,使該支撐板與多孔隙材料之間利用密封件形成氣密,且由抽氣設備之吸力而讓可撓性基板壓縮多孔隙材料與密封件產生形變,進而將可撓性基板從一承載板上加以剝離,以便移至後續之相關製程。Generally, a peeling device for a flexible substrate carried on a carrier sheet is generally used in combination with a peeling member which is composed of a support plate and a porous material which are laminated to each other, and the porous material is formed. The periphery is respectively provided with a sealing member; thereby, the porous substrate can be contacted with the porous material, and connected to the peeling assembly by a suction device, so that the sealing plate and the porous material are sealed with airtightness. And the flexible substrate compresses the porous material and the sealing member by the suction of the suction device, thereby peeling the flexible substrate from a carrier plate for moving to a subsequent related process.

然,以習用之剝離組件而言,由於密封件係為一實心之環體,且其截面呈長方形,故當密封件受可撓性基板壓縮時,會因其具有一預定之體積而不易變形,進而影響多孔隙材料之形變吸附功效,且由於該密封件於壓縮時,其整體皆為受壓之形態,而於使用一段時間之後,容易造成有斷裂損壞之情形。However, in the case of the conventional peeling assembly, since the sealing member is a solid ring body and has a rectangular cross section, when the sealing member is compressed by the flexible substrate, it is not easily deformed because it has a predetermined volume. Moreover, the deformation adsorption effect of the porous material is affected, and since the sealing member is compressed, the whole is in a compressed state, and after a period of use, it is easy to cause breakage damage.

因此,如何創作出一種承載於承載板之可撓性基板的剝離裝置之剝離組件,以使其可獲得較大之吸附力,而易於從承載板上剝離可撓性基板的目的,藉以有效改善習用之缺失,將是本創作所欲積極揭露之處。Therefore, how to create a peeling assembly of a peeling device of a flexible substrate carried on a carrier sheet so that a large adsorption force can be obtained, and the flexible substrate can be easily peeled off from the carrier sheet, thereby effectively improving The lack of customary use will be the active disclosure of this creative work.

有鑑於上述習知技術之缺憾,創作人有感其未臻於完善,遂竭其心智悉心研究克服,進而研發出一種承載於承載板之可撓性基板的剝離裝置之剝離組件,以期可達到易於從承載板上剝離可撓性基板的目的。In view of the shortcomings of the above-mentioned prior art, the creator feels that he has not perfected it, exhausted his mind and researched and overcome it, and developed a stripping device of a peeling device carried on a flexible substrate of a carrier plate, with a view to achieving The purpose of easily peeling off the flexible substrate from the carrier sheet.

為達上述目的及其他目的,本創作係提供一種承載於承載板之可撓性基板的剝離裝置之剝離組件,其包含有:一可撓性透氣剝離單元;以及密封該可撓性透氣剝離單元周緣之一可撓性密封環,該可撓性密封環之截面係呈弧型。To achieve the above and other objects, the present invention provides a peeling assembly for a peeling device carried on a flexible substrate of a carrier sheet, comprising: a flexible breathable peeling unit; and sealing the flexible breathable peeling unit One of the peripheral flexible sealing rings, the flexible sealing ring has an arc shape.

上述之承載於承載板之可撓性基板的剝離裝置之剝離組件中,該可撓性透氣剝離單元係包括有一透氣下板、一透氣上板及至少一多孔隙材料層,該多孔隙材料層係設於該透氣下板之頂面,該透氣上板係層疊於該多孔隙材料層之頂面,使該多孔隙材料層夾設於該透氣下板與該透氣上板之間。In the above-mentioned peeling assembly of the peeling device of the flexible substrate of the carrier sheet, the flexible gas permeable peeling unit comprises a gas permeable lower plate, a gas permeable upper plate and at least one porous material layer, the porous material layer The gas permeable upper plate is laminated on the top surface of the porous material layer, and the porous material layer is sandwiched between the gas permeable lower plate and the gas permeable upper plate.

上述之承載於承載板之可撓性基板的剝離裝置之剝離組件中,該透氣下板係具有多數下通氣孔,該等下通氣孔位於該可撓性密封環內。In the above-mentioned peeling assembly of the peeling device of the flexible substrate of the carrier sheet, the gas permeable lower plate has a plurality of lower vent holes, and the lower vent holes are located in the flexible sealing ring.

上述之承載於承載板之可撓性基板的剝離裝置之剝離組件中,該透氣上板係具有多數上通氣孔,該等上通氣孔位於該可撓性密封環內。In the above-described peeling assembly of the peeling device of the flexible substrate of the carrier sheet, the gas permeable upper plate has a plurality of upper vent holes, and the upper vent holes are located in the flexible sealing ring.

上述之承載於承載板之可撓性基板的剝離裝置之剝離組件中,該可撓性密封環係包含有一第一貼附環部、一第二貼附環部及一變形環部,該變形環部之截面係呈弧型,該第一貼附環部係與該第二貼附環部相對向,該變形環部係連接於該第一貼附環部與該第二貼附環部之一端緣。In the above-mentioned peeling assembly of the peeling device of the flexible substrate of the carrier plate, the flexible sealing ring comprises a first attaching ring portion, a second attaching ring portion and a deforming ring portion, the deformation The cross section of the ring portion has an arc shape, and the first attaching ring portion is opposite to the second attaching ring portion, and the deforming ring portion is coupled to the first attaching ring portion and the second attaching ring portion One end edge.

上述之承載於承載板之可撓性基板的剝離裝置之剝離組件中,該第一貼附環部之底面係結合於該可撓性透氣剝離單元之頂面,該第二貼附環部之頂面係結合於該可撓性透氣剝離單元之底面,該變形環部係位於該可撓性透氣剝離單元之周緣。In the above-mentioned peeling assembly of the peeling device of the flexible substrate of the carrier sheet, the bottom surface of the first attaching ring portion is coupled to the top surface of the flexible gas permeable peeling unit, and the second attaching ring portion is The top surface is bonded to the bottom surface of the flexible gas permeable peeling unit, and the deformation ring portion is located at the periphery of the flexible gas permeable peeling unit.

上述之承載於承載板之可撓性基板的剝離裝置之剝離組件中,該可撓性密封環係為橡膠、矽膠、PU或PE之材質。In the above-mentioned peeling assembly of the peeling device of the flexible substrate of the carrier sheet, the flexible sealing ring is made of rubber, silicone, PU or PE.

藉此,本創作之承載於承載板之可撓性基板的剝離裝置之剝離組件,可將剝離組件設於剝離裝置之相關抽氣設備進行使用,而於吸附可撓性基板時,利用可撓性密封環之配合,使可撓性透氣剝離單元易於產生形變,以獲得較大之吸附力,而達到易於從承載板上剝離可撓性基板的目的。Therefore, the peeling assembly of the peeling device of the flexible substrate supported by the present invention can be used by the peeling device in the relevant suction device of the peeling device, and can be flexibly used when adsorbing the flexible substrate. The cooperation of the sealing ring makes the flexible gas permeable and peeling unit easy to deform to obtain a large adsorption force, and the purpose of easily peeling off the flexible substrate from the carrier sheet is achieved.

為充分瞭解本創作之目的、特徵及功效,茲藉由下述具體之實施例,並配合所附之圖式,對本創作做一詳細說明,說明如後:In order to fully understand the purpose, features and effects of this creation, the following specific examples, together with the attached drawings, provide a detailed description of the creation, as explained below:

請參閱圖1及圖2,如圖所示:本創作係一種承載於承載板之可撓性基板的剝離裝置之剝離組件,該剝離組件1至少係由一可撓性透氣剝離單元11以及一可撓性密封環12所構成。Please refer to FIG. 1 and FIG. 2 . As shown in the figure, the present invention is a stripping assembly of a peeling device supported on a flexible substrate of a carrier sheet. The stripping assembly 1 is at least composed of a flexible and breathable stripping unit 11 and a The flexible sealing ring 12 is constructed.

該可撓性密封環12係密封該可撓性透氣剝離單元11之周緣,且該可撓性密封環12之截面係呈弧型。The flexible sealing ring 12 seals the periphery of the flexible gas permeable and peeling unit 11, and the flexible sealing ring 12 has an arc shape.

於本創作之一實施例中,該可撓性透氣剝離單元11係包括有一透氣下板111、一透氣上板112及至少一多孔隙材料層113,該等多孔隙材料層113係設於該透氣下板111之頂面,該透氣上板112係層疊於該多孔隙材料層113之頂面,使該多孔隙材料層113夾設於該透氣下板111與該透氣上板112之間,該透氣下板111係具有多數下通氣孔1111,該等下通氣孔1111位於該可撓性密封環12內,該透氣上板112係具有多數上通氣孔1112,該等上通氣孔1112位於該可撓性密封環12內。In one embodiment of the present invention, the flexible gas permeable stripping unit 11 includes a gas permeable lower plate 111, a gas permeable upper plate 112, and at least one porous material layer 113, and the porous material layer 113 is disposed thereon. The top surface of the ventilating lower plate 111 is laminated on the top surface of the porous material layer 113 such that the porous material layer 113 is interposed between the gas permeable lower plate 111 and the gas permeable upper plate 112. The ventilating lower plate 111 has a plurality of lower venting holes 1111. The lower venting holes 1111 are located in the flexible sealing ring 12, and the venting upper plate 112 has a plurality of upper venting holes 1112, and the upper venting holes 1112 are located therein. Inside the flexible sealing ring 12.

於本創作之一實施例中,該可撓性密封環12係包含有一第一貼附環部121、一第二貼附環部122及一變形環部123,該變形環部123之截面係呈弧型,該第一貼附環部121係與該第二貼附環部122相對向,該變形環部123係連接於該第一貼附環部121與該第二貼附環部122之一端緣,且該第一貼附環部121之底面係結合於該可撓性透氣剝離單元11之透氣上板112之頂面,該第二貼附環部122之頂面係結合於該可撓性透氣剝離單元11之透氣下板111之底面,而該變形環部123係位於該可撓性透氣剝離單元11之周緣,其中該可撓性密封環12係為橡膠、矽膠、PU或PE之材質。In one embodiment of the present invention, the flexible sealing ring 12 includes a first attaching ring portion 121, a second attaching ring portion 122, and a deforming ring portion 123. The cross-section of the deforming ring portion 123 The first attachment ring portion 121 is opposite to the second attachment ring portion 122 , and the deformation ring portion 123 is coupled to the first attachment ring portion 121 and the second attachment ring portion 122 . One of the end edges, and the bottom surface of the first attachment ring portion 121 is coupled to the top surface of the gas permeable upper plate 112 of the flexible gas permeable and peeling unit 11, and the top surface of the second attachment ring portion 122 is bonded thereto. The flexible gas permeable stripping unit 11 is permeable to the bottom surface of the lower plate 111, and the deforming ring portion 123 is located at the periphery of the flexible gas permeable peeling unit 11, wherein the flexible sealing ring 12 is made of rubber, silicone, PU or PE material.

請參閱圖1及圖3,當運用時,係將該剝離組件1設於剝離裝置之相關抽氣設備之固定座2下方,並以該剝離組件1接觸可撓性基板,由於該可撓性透氣剝離單元11係以該可撓性密封環12形成氣密,因此,當該抽氣設備啓動時,係由該透氣上板112與該透氣下板111壓縮該多孔隙材料層113,並連帶使得該可撓性密封環12產生形變,藉以由該透氣上板112之該等上通氣孔1112以及該透氣下板111之該等下通氣孔1111配合該多孔隙材料層113對該可撓性基板產生一吸附力,而將該可撓性基板加以從一承載板(可為承載玻璃)上剝離;由於該可撓性密封環12之截面係呈弧型,且該變形環部123係位於該可撓性透氣剝離單元11之周緣,因此,當該多孔隙材料層113被壓縮而形變時,係可藉由該變形環部123使該多孔隙材料層113產生較大之變形量,進而讓剝離組件1以較大之吸力從該承載板上剝離該可撓性基板。另外,由於該可撓性密封環12之變形環部123的截面係呈弧型,因此該可撓性密封環12可易於變形且使用壽命長。Referring to FIG. 1 and FIG. 3, when used, the stripping assembly 1 is disposed under the fixing seat 2 of the associated air extracting device of the stripping device, and the stripping unit 1 is in contact with the flexible substrate due to the flexibility. The gas permeable peeling unit 11 is formed to be airtight by the flexible sealing ring 12, and therefore, when the air suction device is activated, the porous material layer 113 is compressed by the gas permeable upper plate 112 and the gas permeable lower plate 111, and is associated with Deformation of the flexible sealing ring 12, whereby the upper venting opening 1112 of the gas permeable upper plate 112 and the lower venting opening 1111 of the gas permeable lower plate 111 cooperate with the porous material layer 113 for the flexibility The substrate generates an adsorption force, and the flexible substrate is peeled off from a carrier plate (which may be a carrier glass); since the flexible sealing ring 12 has an arc shape, and the deformation ring portion 123 is located The periphery of the flexible gas permeable and peeling unit 11 is such that when the porous material layer 113 is compressed and deformed, the porous material layer 113 can be deformed by the deformation ring portion 123, thereby further Let the stripping assembly 1 be pulled from the carrier plate with a large suction force Away from the flexible substrate. In addition, since the section of the deforming ring portion 123 of the flexible sealing ring 12 is curved, the flexible sealing ring 12 can be easily deformed and has a long service life.

本創作在上文中已以較佳實施例揭露,然熟習本項技術者應理解的是,該實施例僅用於描繪本創作,而不應解讀為限制本創作之範圍。應注意的是,舉凡與該實施例等效之變化與置換,均應設為涵蓋於本創作之範疇內。因此,本創作之保護範圍當以申請專利範圍所界定者為準。The present invention has been disclosed in the above preferred embodiments, and it should be understood by those skilled in the art that the present invention is only intended to depict the present invention and should not be construed as limiting the scope of the present invention. It should be noted that variations and permutations equivalent to those of the embodiments are intended to be included within the scope of the present invention. Therefore, the scope of protection of this creation is subject to the definition of the scope of patent application.

1‧‧‧剝離組件
11‧‧‧可撓性透氣剝離單元
111‧‧‧透氣下板
1111‧‧‧下通氣孔
112‧‧‧透氣上板
1112‧‧‧上通氣孔
113‧‧‧多孔隙材料層
12‧‧‧可撓性密封環
121‧‧‧第一貼附環部
122‧‧‧第二貼附環部
123‧‧‧變形環部
2‧‧‧固定座
1‧‧‧ peeling components
11‧‧‧Flexible Breathable Stripping Unit
111‧‧‧Ventilated lower plate
Ventilation under 1111‧‧
112‧‧‧ Breathable upper plate
1112‧‧‧Upper vent
113‧‧‧Polyporous material layer
12‧‧‧Flexible sealing ring
121‧‧‧First Attachment Ring
122‧‧‧Second Attachment Ring
123‧‧‧Transformation ring
2‧‧‧ Fixed seat

[圖1]係本創作較佳具體實施例剝離可撓性基板前之剖面狀態示意圖。 [圖2]係本創作較佳具體實施例之可撓性密封環之外觀示意圖。 [圖3] 係本創作較佳具體實施例剝離可撓性基板後之剖面狀態示意圖。[Fig. 1] Fig. 1 is a schematic view showing a state of a cross section before peeling off a flexible substrate in a preferred embodiment of the present invention. Fig. 2 is a schematic view showing the appearance of a flexible sealing ring of a preferred embodiment of the present invention. [Fig. 3] Fig. 3 is a schematic view showing a state of a cross section of a preferred embodiment after peeling off a flexible substrate.

1‧‧‧剝離組件 1‧‧‧ peeling components

11‧‧‧可撓性透氣剝離單元 11‧‧‧Flexible Breathable Stripping Unit

111‧‧‧透氣下板 111‧‧‧Ventilated lower plate

1111‧‧‧下通氣孔 Ventilation under 1111‧‧

112‧‧‧透氣上板 112‧‧‧ Breathable upper plate

1112‧‧‧上通氣孔 1112‧‧‧Upper vent

113‧‧‧多孔隙材料層 113‧‧‧Polyporous material layer

12‧‧‧可撓性密封環 12‧‧‧Flexible sealing ring

121‧‧‧第一貼附環部 121‧‧‧First Attachment Ring

122‧‧‧第二貼附環部 122‧‧‧Second Attachment Ring

123‧‧‧變形環部 123‧‧‧Transformation ring

2‧‧‧固定座 2‧‧‧ Fixed seat

Claims (7)

一種承載於承載板之可撓性基板的剝離裝置之剝離組件,係包含: 一可撓性透氣剝離單元;以及 一可撓性密封環,係密封該可撓性透氣剝離單元之周緣,該可撓性密封環之截面係呈弧型。A peeling assembly for a peeling device of a flexible substrate carried on a carrier sheet, comprising: a flexible gas permeable peeling unit; and a flexible sealing ring sealing the periphery of the flexible gas permeable peeling unit The section of the flexible sealing ring is curved. 如請求項1所述之承載於承載板之可撓性基板的剝離裝置之剝離組件,其中該可撓性透氣剝離單元係包括有一透氣下板、一透氣上板及至少一多孔隙材料層,該多孔隙材料層係設於該透氣下板之頂面,該透氣上板係層疊於該多孔隙材料層之頂面,使該多孔隙材料層夾設於該透氣下板與該透氣上板之間。The peeling assembly of the peeling device of the flexible substrate of the carrier sheet according to claim 1, wherein the flexible gas permeable peeling unit comprises a gas permeable lower plate, a gas permeable upper plate and at least one porous material layer. The porous material layer is disposed on a top surface of the gas permeable lower plate, and the gas permeable upper plate is laminated on a top surface of the porous material layer, so that the porous material layer is sandwiched between the gas permeable lower plate and the gas permeable upper plate between. 如請求項2所述之承載於承載板之可撓性基板的剝離裝置之剝離組件,其中該透氣下板係具有多數下通氣孔,該等下通氣孔位於該可撓性密封環內。The stripping assembly of the peeling device of the flexible substrate of the carrier sheet according to claim 2, wherein the gas permeable lower plate has a plurality of lower vent holes, and the lower vent holes are located in the flexible sealing ring. 如請求項2所述之承載於承載板之可撓性基板的剝離裝置之剝離組件,其中該透氣上板係具有多數上通氣孔,該等上通氣孔位於該可撓性密封環內。The stripping assembly of the peeling device of the flexible substrate of the carrier sheet according to claim 2, wherein the gas permeable upper plate has a plurality of upper vent holes, and the upper vent holes are located in the flexible sealing ring. 如請求項1所述之承載於承載板之可撓性基板的剝離裝置之剝離組件,其中該可撓性密封環係包含有一第一貼附環部、一第二貼附環部及一變形環部,該變形環部之截面係呈弧型,該第一貼附環部係與該第二貼附環部相對向,該變形環部係連接於該第一貼附環部與該第二貼附環部之一端緣。The peeling assembly of the peeling device of the flexible substrate of the carrier sheet according to claim 1, wherein the flexible sealing ring comprises a first attaching ring portion, a second attaching ring portion and a deformation a ring portion, the deformation ring portion has an arc shape, the first attachment ring portion is opposite to the second attachment ring portion, and the deformation ring portion is coupled to the first attachment ring portion and the first portion Two attached to the end of the ring. 如請求項5所述之承載於承載板之可撓性基板的剝離裝置之剝離組件,其中該第一貼附環部之底面係結合於該可撓性透氣剝離單元之頂面,該第二貼附環部之頂面係結合於該可撓性透氣剝離單元之底面,該變形環部係位於該可撓性透氣剝離單元之周緣。The peeling assembly of the peeling device of the flexible substrate of the carrier sheet according to claim 5, wherein a bottom surface of the first attaching ring portion is coupled to a top surface of the flexible gas permeable peeling unit, the second The top surface of the attaching ring portion is bonded to the bottom surface of the flexible gas permeable peeling unit, and the deforming ring portion is located at the periphery of the flexible gas permeable peeling unit. 如請求項1所述之承載於承載板之可撓性基板的剝離裝置之剝離組件,其中該可撓性密封環係為橡膠、矽膠、PU或PE之材質。The peeling assembly of the peeling device of the flexible substrate of the carrier sheet according to claim 1, wherein the flexible sealing ring is made of rubber, silicone, PU or PE.
TW106215851U 2017-10-26 2017-10-26 Peeling component of peeling device for flexible substrate carried by carrying board TWM555347U (en)

Priority Applications (1)

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TWM555347U true TWM555347U (en) 2018-02-11

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