TWM556721U - Adhesion structure of peeling device of flexible substrate carried on bearing plate - Google Patents

Abstract

The present invention provides an adsorption structure of a peeling device carried on a flexible substrate of a carrier sheet, comprising a peeling assembly; a flexible sealing ring disposed on a bottom surface of the peeling assembly, the cross section of the flexible sealing ring An L-shaped; and a top surface is coupled to one of the bottom surfaces of the stripping assembly, the first porous material layer, the first porous material layer being disposed within the flexible sealing ring. Thereby, the peeling module can be used in the relevant suction device of the peeling device, and when the flexible substrate is adsorbed, since the contact area between the flexible sealing ring and the flexible substrate is small, the flexible substrate is easily formed. The deformation around the periphery is achieved to achieve the effect of facilitating the peeling of the flexible substrate from the carrier sheet.

Description

Adsorption structure of peeling device carried on flexible substrate of carrier plate

The present invention relates to an adsorption structure of a peeling device for a flexible substrate carried on a carrier sheet, and more particularly to a peeling device that can be applied to a flexible substrate.

Generally, a peeling device for a flexible substrate carried on a carrier sheet is generally used in combination with a peeling member which is composed of a support plate and a porous material which are laminated to each other, and the porous material is formed. The periphery is respectively provided with a sealing member; thereby, the porous substrate can be contacted with the porous material, and connected to the peeling assembly by a suction device, so that the sealing plate and the porous material are sealed with airtightness. And the flexible substrate compresses the porous material and the sealing member by the suction of the suction device, thereby peeling the flexible substrate from a carrier plate for moving to a subsequent related process.

However, in the case of conventional peeling components, the porous substrate is directly contacted with the flexible substrate to adsorb the flexible substrate from the carrier sheet, however, since the porous material has a predetermined volume and thickness, The porosity of the porous material is limited, thereby affecting the adsorption efficiency of the porous material.

Therefore, how to create an adsorption structure of a peeling device carried on a flexible substrate of a carrier plate, so that a better adsorption mode can be obtained, and the flexible substrate can be easily peeled off from the carrier plate, thereby effectively Improving the lack of customary use will be the active disclosure of this creative work.

In view of the shortcomings of the above-mentioned prior art, the creator feels that he has not perfected it, exhausted his mind to study and overcome it, and developed an adsorption structure of a peeling device carried on a flexible substrate of a carrier plate, with a view to achieving The purpose of making the flexible substrate easy to peel off from the carrier sheet.

To achieve the above and other objects, the present invention provides an adsorption structure of a peeling device carried on a flexible substrate of a carrier sheet, comprising: a peeling assembly; and a flexible sealing ring disposed on a bottom surface of the peeling assembly The flexible sealing ring has an L-shaped cross section; and a first porous material layer disposed in the flexible sealing ring and the top surface is connected to one of the bottom surfaces of the peeling assembly.

In the above-mentioned adsorption structure of the peeling device of the flexible substrate of the carrier plate, the peeling assembly comprises a gas permeable lower plate, a gas permeable upper plate, at least a second porous material layer and a flexible sealing ring. The second porous material layer is disposed on the top surface of the gas permeable lower plate, and the gas permeable upper plate is laminated on the top surface of the second porous material layer, so that the second porous material layer is sandwiched by the gas permeable layer Between the plate and the gas permeable upper plate, the flexible sealing ring and the first porous material layer are disposed on a bottom surface of the gas permeable lower plate, the flexible sealing ring sealing the gas permeable lower plate, the gas permeable upper surface A perimeter of the plate and the second layer of porous material, the flexible seal ring having an arcuate profile.

In the above-mentioned adsorption structure of the peeling device of the flexible substrate of the carrier plate, the gas permeable lower plate has a plurality of lower vent holes, and the lower vent holes are located in the flexible sealing ring, and the gas permeable upper plate has Most of the upper vents are located within the flexible sealing ring.

In the above-mentioned adsorption structure of the peeling device of the flexible substrate of the carrier plate, the flexible sealing ring comprises a first attaching ring portion, a second attaching ring portion and a deforming ring portion, the deformation The cross section of the ring portion has an arc shape, and the first attaching ring portion is opposite to the second attaching ring portion, and the deforming ring portion is coupled to the first attaching ring portion and the second attaching ring portion One end edge, and the bottom surface of the first attachment ring portion is coupled to the top surface of the gas permeable upper plate, and the top surface of the second attachment ring portion is coupled to the bottom surface of the gas permeable lower plate, and the deformation ring portion And a periphery of the gas permeable lower plate, the gas permeable upper plate and the second porous material layer.

In the above-mentioned adsorption structure of the peeling device of the flexible substrate of the carrier sheet, the flexible sealing ring is made of rubber, silicone, PU or PE.

In the above-mentioned adsorption structure of the stripping device of the flexible substrate of the carrier plate, the flexible sealing ring includes a first surface, a second surface and a notch, the first surface being located at the flexible The top surface of the sealing ring is connected to the bottom surface of the peeling assembly, and the second surface is located on the bottom surface of the flexible sealing ring, and the notch portion is located on the outer side of the flexible sealing ring and adjacent to the second surface.

In the above-mentioned adsorption structure of the peeling device of the flexible substrate of the carrier sheet, the first surface is larger than the second surface.

Therefore, the adsorption structure of the stripping device of the flexible substrate supported by the present invention can be used by the stripping device in the relevant pumping device of the stripping device, and is flexible when the flexible substrate is adsorbed. The contact area between the sealing ring and the flexible substrate is small, and it is easy to deform the periphery of the flexible substrate to facilitate the peeling of the flexible substrate from the carrier sheet.

In order to fully understand the purpose, features and effects of this creation, the following specific examples, together with the attached drawings, provide a detailed description of the creation, as explained below:

Referring to FIG. 1 to FIG. 2 , the present invention is an adsorption structure of a peeling device of a flexible substrate supported on a carrier board, which is at least composed of a peeling component 1 , a flexible sealing ring 2 , and A first layer of porous material 6 is formed.

The flexible sealing ring 2 is disposed on the bottom surface of the peeling assembly 1, and the flexible sealing ring 2 has an L-shaped cross section.

The first porous material layer 6 is disposed in the flexible sealing ring 2 and the top surface is connected to the bottom surface of the peeling assembly 1.

In an embodiment of the present invention, the peeling assembly 1 includes a gas permeable lower plate 11, a gas permeable upper plate 12, at least one second porous material layer 13 and a flexible sealing ring 14, the second porous The material layer 13 is disposed on the top surface of the gas permeable lower plate 11, and the gas permeable upper plate 12 is laminated on the top surface of the second porous material layer 13, so that the second porous material layer 13 is sandwiched by the gas permeable layer. Between the plate 11 and the gas permeable upper plate 12, and the top surface of the flexible sealing ring 2 and the top surface of the first porous material layer 6 are disposed on the bottom surface of the gas permeable lower plate 11, the flexible sealing The ring 14 seals the periphery of the gas permeable lower plate 11, the gas permeable upper plate 12 and the second porous material layer 13, the flexible sealing ring 14 has an arc shape, and the gas permeable lower plate 11 has a plurality of lower portions. The venting holes 111 are located in the flexible sealing ring 14 . The venting upper plate 12 has a plurality of upper venting holes 121 , and the upper venting holes 121 are located in the flexible sealing ring 14 .

In addition, the flexible sealing ring 14 includes a first attaching ring portion 141, a second attaching ring portion 142 and a deforming ring portion 143. The deforming ring portion 143 has an arc shape, the first The attaching ring portion 141 is opposite to the second attaching ring portion 142, and the deforming ring portion 143 is connected to one end edge of the first attaching ring portion 141 and the second attaching ring portion 142, and the first The bottom surface of the attachment ring portion 141 is coupled to the top surface of the gas permeable upper plate 12, and the top surface of the second attachment ring portion 142 is coupled to the bottom surface of the gas permeable lower plate 11, and the deformation ring portion 143 is located The gas permeable lower plate 11, the gas permeable upper plate 12 and the periphery of the second porous material layer 13, the flexible sealing ring 14 is made of rubber, silicone, PU or PE.

In one embodiment of the present invention, the flexible sealing ring 2 includes a first surface 21, a second surface 22 and a notch 23, the first surface 21 being located in the flexible sealing ring 2 The top surface is connected to the bottom surface of the gas permeable lower plate 11 of the peeling assembly 1, and the second surface 22 is located on the bottom surface of the flexible sealing ring 2 and is connected to the top surface of a flexible substrate 5, the notch portion 23 It is located on the outer side of the flexible sealing ring 2 and adjacent to the second surface 22, and the first surface 21 is larger than the second surface 22.

When applied, the stripping assembly 1 is disposed under the fixing seat 4 of the associated pumping device of the stripping device, and the flexible substrate 2 and the first porous material layer 6 are in contact with the flexible substrate 5 When the air suction device is activated, the second porous material layer 13 is compressed by the gas permeable upper plate 12 and the gas permeable lower plate 11 and is coupled to cause the flexible sealing ring 14 to be deformed, thereby being ventilated. The upper venting holes 121 of the plate 12, the lower venting holes 111 of the ventilating lower plate 11, the second porous material layer 13 and the first porous material layer 6 cooperate with each other to the flexible substrate 5, generating an adsorption force, and then peeling the flexible substrate 5 from a carrier plate 3, the carrier plate 3 may be a carrier glass and may be adsorbed and fixed by another suction device; due to the peeling assembly 1 and the flexible The flexible sealing ring 2 and the first porous material layer 6 are disposed between the substrate 5, so that when the flexible substrate 5 is adsorbed on the carrier plate 3, the flexible sealing can be sealed by the flexible substrate 5 The second surface 22 of the ring 2 makes the contact area between the flexible sealing ring 2 and the flexible substrate 5 small, and Peeling adsorption assembly 1, the easily flexible substrate 5 around the deformed, thereby obtained adsorbed preferred embodiment, the flexible substrate can be achieved so easily peeled off from the carrier plate efficacy.

The present invention has been disclosed in the above preferred embodiments, and it should be understood by those skilled in the art that the present invention is only intended to depict the present invention and should not be construed as limiting the scope of the present invention. It should be noted that variations and permutations equivalent to those of the embodiments are intended to be included within the scope of the present invention. Therefore, the scope of protection of this creation is subject to the definition of the scope of patent application.

1‧‧‧ peeling components
11‧‧‧Ventilated lower plate
111‧‧‧ lower vent
12‧‧‧ Breathable upper plate
121‧‧‧Upper vent
13‧‧‧Second porous material layer
14‧‧‧Flexible seal ring
141‧‧‧First Attachment Ring
142‧‧‧Second Attachment Ring
143‧‧‧Transformation ring
2‧‧‧Flexible seal
21‧‧‧ first surface
22‧‧‧ second surface
23‧‧‧Gap section
3‧‧‧Loading board
4‧‧‧ Fixed seat
5‧‧‧Flexible substrate
6‧‧‧First porous material layer

Fig. 1 is a schematic cross-sectional view showing a preferred embodiment of the present invention. [Fig. 2] is a schematic view showing the appearance of a flexible sealing ring in a preferred embodiment of the present invention.

Claims (7)

An adsorption structure of a peeling device of a flexible substrate supported on a carrier board comprises: a peeling component; a flexible sealing ring disposed on a bottom surface of the peeling component, the flexible sealing ring has a cross section L-shaped; and a first porous material layer disposed in the flexible sealing ring and the top surface is connected to the bottom surface of the peeling assembly. The adsorption structure of the peeling device of the flexible substrate of the carrier sheet according to claim 1, wherein the peeling assembly comprises a gas permeable lower plate, a gas permeable upper plate, at least one second porous material layer and a a flexible sealing ring, the second porous material layer is disposed on a top surface of the gas permeable lower plate, and the gas permeable upper plate is laminated on a top surface of the second porous material layer to sandwich the second porous material layer Provided between the gas permeable lower plate and the gas permeable upper plate, and the flexible sealing ring and the first porous material layer are disposed on the bottom surface of the gas permeable lower plate, the flexible sealing ring sealing the gas permeable a periphery of the plate, the gas permeable upper plate and the second porous material layer, the flexible sealing ring having an arc shape. The adsorption structure of the peeling device of the flexible substrate of the carrier sheet according to claim 2, wherein the gas permeable lower plate has a plurality of lower vent holes, and the lower vent holes are located in the flexible sealing ring, The venting upper plate has a plurality of upper venting holes, the upper venting holes being located within the flexible sealing ring. The adsorption structure of the peeling device of the flexible substrate of the carrier sheet according to claim 2, wherein the flexible sealing ring comprises a first attaching ring portion, a second attaching ring portion and a deformation a ring portion, the deformation ring portion has an arc shape, the first attachment ring portion is opposite to the second attachment ring portion, and the deformation ring portion is coupled to the first attachment ring portion and the first portion The bottom surface of the first attaching ring portion is coupled to the top surface of the gas permeable upper plate, and the top surface of the second attaching ring portion is coupled to the bottom surface of the gas permeable lower plate. The deformation ring portion is located at a periphery of the gas permeable lower plate, the gas permeable upper plate and the second porous material layer. The adsorption structure of the peeling device of the flexible substrate of the carrier sheet according to claim 2, wherein the flexible sealing ring is made of rubber, silicone, PU or PE. The adsorption structure of the stripping device of the flexible substrate of the carrier sheet according to claim 1, wherein the flexible sealing ring comprises a first surface, a second surface and a notch, the first surface Located on the top surface of the flexible sealing ring and connected to the bottom surface of the peeling assembly, the second surface is located on the bottom surface of the flexible sealing ring, the notch portion is located on the outer side of the flexible sealing ring and adjacent to The second surface. The adsorption structure of the peeling device of the flexible substrate of the carrier sheet according to claim 6, wherein the first surface is larger than the second surface.