JP3210312U - 光学処理システム用光学ヘッドおよびシャーシ - Google Patents

光学処理システム用光学ヘッドおよびシャーシ Download PDF

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Publication number
JP3210312U
JP3210312U JP2017000787U JP2017000787U JP3210312U JP 3210312 U JP3210312 U JP 3210312U JP 2017000787 U JP2017000787 U JP 2017000787U JP 2017000787 U JP2017000787 U JP 2017000787U JP 3210312 U JP3210312 U JP 3210312U
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JP
Japan
Prior art keywords
chassis
optical head
optical
laser
axis motor
Prior art date
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JP2017000787U
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English (en)
Japanese (ja)
Inventor
オデド・モル
ヨハイ・マナシュ
ダン・アロン
マルク・ロビン・シェリダン
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Orbotech Ltd
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Orbotech Ltd
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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
    • H01S3/0085—Modulating the output, i.e. the laser beam is modulated outside the laser cavity

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • General Physics & Mathematics (AREA)
  • Laser Beam Processing (AREA)
  • Microscoopes, Condenser (AREA)
JP2017000787U 2016-03-09 2017-02-24 光学処理システム用光学ヘッドおよびシャーシ Active JP3210312U (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201662305538P 2016-03-09 2016-03-09
US201662305557P 2016-03-09 2016-03-09
US62/305,557 2016-03-09
US62/305,538 2016-03-09

Publications (1)

Publication Number Publication Date
JP3210312U true JP3210312U (ja) 2017-05-18

Family

ID=58714602

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017000787U Active JP3210312U (ja) 2016-03-09 2017-02-24 光学処理システム用光学ヘッドおよびシャーシ

Country Status (4)

Country Link
JP (1) JP3210312U (ko)
KR (1) KR200494591Y1 (ko)
CN (2) CN208214578U (ko)
TW (1) TWM551276U (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019208014A (ja) * 2018-03-20 2019-12-05 オーボテック リミテッド 光学処理装置において基板からデブリを除去するためのシステム

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5324359A (en) * 1992-02-25 1994-06-28 Nouvas Manufacturing Technology Co. Material deposition device
US7598688B2 (en) 2006-06-22 2009-10-06 Orbotech Ltd Tilting device
KR102103247B1 (ko) * 2012-12-21 2020-04-23 삼성디스플레이 주식회사 증착 장치
US9332230B2 (en) * 2013-07-25 2016-05-03 Panasonic Intellectual Property Management Co., Ltd. Electronic component mounting apparatus and electronic component mounting method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019208014A (ja) * 2018-03-20 2019-12-05 オーボテック リミテッド 光学処理装置において基板からデブリを除去するためのシステム
JP7362272B2 (ja) 2018-03-20 2023-10-17 オルボテック リミテッド 光学処理装置において基板からデブリを除去するためのシステム

Also Published As

Publication number Publication date
CN208214578U (zh) 2018-12-11
KR200494591Y1 (ko) 2021-11-10
TWM551276U (zh) 2017-11-01
CN206998041U (zh) 2018-02-13
KR20170003249U (ko) 2017-09-19

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