JP3202751U - Slit nozzle and chemical coating device - Google Patents

Abstract

A slit nozzle and a chemical solution coating apparatus capable of uniformly applying a chemical solution to a curved surface of a coating object by a spinless coating method are provided. A slit nozzle has a lower end surface on which a slit-like discharge port for discharging a chemical solution is formed. When the lower end surface faces a curved surface S1 on the convex surface side of a curved glass sheet G, the discharge port The distance between the curved glass curved surface is uniform over the entire length. Further, the chemical liquid coating apparatus is configured so that the slit nozzle, the driving device 2 that moves the slit nozzle in the scanning direction D2 orthogonal to the extending direction of the discharge port, and the curved surface direction of the curved glass plate and the scanning direction are orthogonal to each other. And a support base 3 on which the curved glass plate is placed. [Selection] Figure 1

Description

  The present invention relates to a slit nozzle and a chemical solution coating apparatus, and more particularly to a slit nozzle for applying a chemical solution to a coating object having a curved shape by a spinless coating method and a chemical solution coating apparatus including the slit nozzle.

  In recent years, as a technique for uniformly applying a chemical solution to the surface of an object to be coated such as a glass plate, a spinless coating method has been widely used instead of the spin coating method. In the spinless coating method, a drug is uniformly applied to the surface of an application object by moving a slit nozzle having a slit-shaped discharge port along the surface of the application object while discharging a chemical solution. According to the spinless coating method, the chemical solution is less wasted than the spin coating method, and a coating film can be formed on a wide coating surface. An example of a chemical solution coating apparatus that applies a chemical solution to a flat glass plate by a spinless coating method is described in Patent Document 1 below.

JP 2013-187236 A International Publication No. 2015/015842

  In a device equipped with a display such as a mobile device, a design that curves the surface of the display has been proposed. For this reason, it is requested | required that the glass plate which comprises a display may also be curved. An example of such a curved glass plate is disclosed in Patent Document 2 described above.

  However, in a conventional chemical solution coating apparatus using a spinless coating method, it is difficult to uniformly apply a chemical solution to a curved surface even though the chemical solution can be uniformly applied to a flat surface such as the surface of a flat glass plate.

  This invention is made | formed in view of said situation, and it aims at providing the slit nozzle and chemical | medical solution coating device which can apply | coat a chemical | medical solution uniformly to the curved surface of a coating object by the spinless coating method.

  The slit nozzle of the present invention is a slit nozzle for applying a chemical solution to the curved surface of an application object having a curvature in one direction, and has a lower end surface on which a slit-like discharge port for discharging the chemical solution is formed. When the lower end surface is opposed to the curved surface of the application object, the lower end surface has a shape in which the distance between the curved surface of the application object along the one direction and the lower end surface over the entire length of the discharge port is uniform. It is characterized by having.

  In addition, a chemical liquid application apparatus of the present invention is a chemical liquid application apparatus for applying a chemical liquid to a curved surface of an object to be coated having a curvature in one direction, and the slit nozzle and the slit nozzle are extended from the discharge port. A driving device that moves in a scanning direction orthogonal to the current direction, and a support base on which the application target is placed so that the one direction of the application target and the scanning direction are orthogonal to each other. It is said.

  Thus, according to the slit nozzle and the coating apparatus of the present invention, the bottom of the slit nozzle is set so that the distance between the curved surface of the coating object and the lower end surface where the discharge port on the slit of the slit nozzle is formed is uniform. An end face is formed. Thereby, the chemical | medical solution discharged from the discharge port of the slit nozzle can flow in a strip shape between the discharge port and the curved surface of the object to be coated without interruption. As a result, the chemical solution can be uniformly applied to the curved surface of the application object by the spinless application method.

  According to the slit nozzle and the chemical solution application apparatus of the present invention, the chemical solution can be uniformly applied to the curved surface of the application object by the spinless application method.

1 is a perspective view of a chemical liquid coating apparatus according to a first embodiment of the present invention. It is sectional drawing of the chemical | medical solution coating device by 1st Embodiment of this invention. (A) is a perspective view of a support base body for applying a chemical liquid to the convex surface of the application object, and (B) is a perspective view of a support base body for applying the chemical liquid to the concave surface of the application object. is there. (A) is a front view of the slit nozzle by 1st Embodiment of this invention, (B) is the bottom view. (A) is sectional drawing along AA of FIG. 4 (A), (B) is sectional drawing along BB of FIG. 4 (B). It is sectional drawing of the chemical | medical solution coating device by 2nd Embodiment of this invention. (A) is a front view of the slit nozzle by 2nd Embodiment of this invention, (B) is the bottom view. (A) is sectional drawing which followed AA of FIG. 7 (A), (B) is sectional drawing along BB of FIG. 7 (B).

Hereinafter, embodiments of a slit nozzle of the present invention and a chemical solution coating apparatus including the slit nozzle will be described with reference to the drawings.
(First embodiment)
In FIG. 1, the perspective view of the chemical | medical solution coating device by 1st Embodiment of this invention is shown. In the present embodiment, the curved glass plate G is an application object. The curved glass plate G has a cylindrical surface having a uniform thickness and a certain curvature in one direction. In the present embodiment, a chemical solution is applied to the curved surface S1 on the convex side of the cylindrical surface.

  As shown in FIG. 1, the chemical solution coating apparatus of the present embodiment includes a slit nozzle 1, a driving device 2 that moves the slit nozzle 1, and a support base 3 on which a curved glass plate G is placed.

  The drive device 2 is disposed across the support base 3 and includes a gate-shaped attachment portion 21 to which the slit nozzle 1 is attached, and a drive portion 22 that translates the attachment portion 21. The drive unit 22 is configured by, for example, a ball screw mechanism, and moves the gate-shaped attachment unit 21 along a scanning direction A orthogonal to the extending direction of the slit nozzle 1.

  The support base 3 includes a frame portion 31 having a recess 31a formed on the upper surface 3a, and a support base body 32 fitted into the recess 31a of the frame portion 31. The upper surface 32 a of the support base body 32 is formed with a curved surface having a curvature only in a direction D <b> 1 orthogonal to the driving direction D <b> 2 of the driving device 2.

  FIG. 2 is a perspective view of the support base body. 2A shows a perspective view of the support base body 32 used when a chemical solution is applied to the convex curved surface S1 of the curved glass plate G. FIG. 2B shows the concave side of the curved glass plate G. The perspective view of the support base main body 33 for apply | coating a chemical | medical solution to the curved surface is shown. The support base bodies 32 and 33 are exchanged according to the curved surface (convex surface side or concave surface side) on which the chemical solution of the curved glass plate G is applied. The support base bodies 32 and 33 can be easily and accurately positioned by fitting the bottom portions of the support base bodies 32 and 33 into the recesses 31a of the frame portion 31, and the curvature direction of the curved surface of the upper surface can be easily and accurately set. be able to.

FIG. 3 shows a cross-sectional view of the chemical solution coating apparatus according to the present embodiment. In FIG. 3, illustration of the drive device 2 is omitted. On the upper surface 32a of the support base body 32, the curved glass plate G faces the convex curved surface S1 so that the direction D1 of curvature of the curved glass plate G and the scanning direction D2 of the drive device 2 are orthogonal to each other. It is placed. The upper surface 32a of the support base body 32 has a shape that abuts on the entire rear surface S2 with the back surface (curved surface on the concave surface side) S2 opposite to the curved surface S1 of the curved glass plate G placed on the support base body 32. By bringing the curved surface S2 on the concave side of the curved glass plate G into close contact with the upper surface 32a of the support base body 32, it is possible to prevent unnecessary bending due to the weight of the curved glass plate G.
In FIG. 3, for convenience, the curved glass plate G and the support body 32 are shown separated from each other.

  Next, the slit nozzle 1 of this embodiment is demonstrated with reference to FIG. The slit nozzle 1 has a long shape as shown in FIG. 4A, and the lower surface of the slit nozzle 1 extends along the longitudinal direction of the slit nozzle 1 as shown in FIG. Thus, a slit-like discharge port 11 is formed. The discharge port 11 is defined by a lip portion 12. As shown in FIG. 4A, the lower end surface 13 where the discharge port 11 is formed, that is, the lower end surface 13 including the tip of the lip portion 12 is recessed at the center along the extending direction of the discharge port 11. It has a curved shape.

  As shown in FIG. 3, when the lower end surface 1a of the slit nozzle 1 faces the curved surface S1 on the convex surface side of the curved glass plate G, the curved surface S1 and the discharge port are formed along the direction in which the curved surface S1 has a curvature. 11 has a shape with a uniform distance from the lower end surface 1a over the entire length. Thereby, the chemical | medical solution discharged from the discharge port 11 of the slit nozzle 1 can flow in the strip | belt shape without a discontinuity over the full length of the discharge port 11 between the discharge port 11 and the curved surface S1 of the curved glass plate G. As a result, the chemical solution can be uniformly applied to the curved surface S1 of the curved glass plate G by the spinless coating method.

  FIG. 5 shows a sectional view of the slit nozzle 1. 5A shows a cross-sectional view along AA in FIG. 4A, and FIG. 5B shows a cross-sectional view along BB in FIG. 4B. As shown in FIG. 5 (A), the slit nozzle 1 is configured by attaching two slit members 10a and 10b, and the slit members 10a and 10b are connected by a bolt (not shown). A slit 13 is formed between the slit members 10a and 10b.

  Furthermore, as shown in FIG. 5A, a manifold 14 that communicates with the slit 13 is formed in the slit nozzle 1 over the entire length of the discharge port 11. As shown in FIG. 5B, the manifold 14 is formed at a constant distance from the lower end surface 1 a over the entire length of the discharge port 11. In other words, the length of the slit 13 between the manifold 14 and the discharge port 11 is constant over the entire length of the discharge port 11. Thereby, the chemical solution introduced into the manifold 14 from the chemical solution introduction path 15 opened to the manifold 14 at the center in the longitudinal direction of the slit nozzle 1 passes through the slit 13 and is uniformly discharged from the discharge port 11 over the entire length of the discharge port 11. Is done. As a result, the chemical solution can be more uniformly applied to the curved surface S1 on the convex surface side of the curved glass plate G by the spinless coating method.

(Second Embodiment)
FIG. 6 shows a cross-sectional view of the chemical solution coating apparatus according to the present embodiment. In the present embodiment, the chemical solution is applied to the curved surface S2 on the concave surface side of the curved glass plate G. Therefore, in this embodiment, in the chemical solution application apparatus shown in FIG. 1, instead of the support base body 32, the support base body 33 shown in FIG. 3B is fitted into the recess 31 a of the frame portion 31, and the support base 3 '.

  The curved glass plate G is concave on the upper surface 33a of the support base body 33 on which the curved glass plate G is placed so that the direction D1 having the curvature of the curved glass plate G and the scanning direction 2 of the driving device 2 are orthogonal to each other. It is placed with the curved surface S2 on the side facing up. The upper surface 33a of the support base body 33 has a shape that makes contact with the entire back surface S1 of the back surface (curved surface) S1 opposite to the curved surface S1 of the curved glass plate G placed on the support base body 33. By bringing the curved surface S1 on the convex surface side of the curved glass plate G into close contact with the upper surface 33a of the support base body 33, the bending of the curved glass plate G can be prevented.

  Next, the slit nozzle 4 of this embodiment is demonstrated with reference to FIG. The slit nozzle 4 has a long shape as shown in FIG. 7A, and the lower surface of the slit nozzle 4 extends along the longitudinal direction of the slit nozzle 4 as shown in FIG. 7B. Thus, a slit-like discharge port 41 is formed. The discharge port 41 is defined by a lip portion 42. As shown in FIG. 7A, the lower end surface 43 where the discharge port 41 is formed, that is, the lower end surface 43 including the tip of the lip portion 42, has a central portion downward along the extending direction of the discharge port 41. It has a curved shape that is convex.

  As shown in FIG. 6, when the lower end surface 4a of the slit nozzle 4 faces the curved surface S2 on the concave surface side of the curved glass plate G, the curved surface S2 and the discharge port are formed along the direction in which the curved surface S2 has a curvature. It has a shape in which the distance from the lower end surface 4a over the entire length of 41 is uniform. Thereby, the chemical | medical solution discharged from the discharge port 41 of the slit nozzle 4 can flow in a strip shape between the discharge port 41 and the curved surface S2 of the curved glass plate G without interruption. As a result, the chemical solution can be uniformly applied to the curved surface S2 of the curved glass plate G by the spinless coating method.

  FIG. 8 shows a cross-sectional view of the slit nozzle 4. 8A shows a cross-sectional view along AA in FIG. 7A, and FIG. 8B shows a cross-sectional view along BB in FIG. 7B. As shown in FIG. 8A, the slit nozzle 4 is configured by attaching two slit members 40a and 40b, and a slit 43 is formed between the slit members 40a and 40b.

  Further, as shown in FIG. 8A, a manifold 44 that communicates with the slit 43 is formed in the slit nozzle 4 over the entire length of the discharge port 41. As shown in FIG. 8B, the manifold 44 is formed at a constant distance from the lower end surface 4 a over the entire length of the discharge port 41. In other words, the length of the slit 43 between the manifold 44 and the discharge port 41 is constant over the entire length of the discharge port 41. Thereby, the chemical solution introduced into the manifold 44 from the chemical solution introduction path 45 opened in the manifold 44 at the center in the longitudinal direction of the slit nozzle 4 passes through the slit 43 and is uniformly discharged from the discharge port 41 over the entire length of the discharge port 41. Is done. As a result, the chemical solution can be more uniformly applied to the curved surface S2 on the concave surface side of the curved glass plate G by the spinless coating method.

  As mentioned above, although embodiment of this invention was described, this invention is not limited to embodiment mentioned above, A various change implementation is possible in the range of this invention. For example, in the above-described embodiment, the example in which the convex surface and the concave surface of the cylindrical surface are the application targets has been described, but in this document, the application target is not limited to these. In addition, the convex surface and the concave surface of the parabolic column surface may be the application target, and the corrugated surface may be the application target.

  INDUSTRIAL APPLICABILITY The present invention is suitable for application of a drug to a glass substrate constituting a display of a mobile device or an in-vehicle device and a glass substrate constituting a solar cell panel.

DESCRIPTION OF SYMBOLS 1 Slit nozzle 1a Lower end surface 10a, 10b Nozzle member 11 Discharge port 12 Lip part 13 Slit 14 Manifold 15 Chemical solution introduction path 2 Drive device 21 Mounting part 22 Drive part 3, 3 'Support stand 31 Frame part 31a Recess 32, 33 Main body 32a, 33a Upper surface of support base body 4 Slit nozzle 4a Lower end surface 40a, 40b Nozzle member 41 Discharge port 42 Lip part 43 Slit 44 Manifold 45 Chemical solution introduction path

Claims (4)

A slit nozzle for applying a chemical solution to the curved surface of an application object having a curvature in one direction,
The curved surface of the application object along the one direction has a lower end surface formed with a slit-like discharge port for discharging a chemical solution, and the lower end surface faces the curved surface of the application object. The slit nozzle has a shape in which a distance between the lower end surface and the entire length of the discharge port is uniform. A manifold is formed inside,
2. The manifold is formed so as to communicate with a slit opened to the discharge port over the entire length of the discharge port and at a constant distance from the lower end surface over the entire length of the discharge port. The slit nozzle as described. A chemical application device for applying a chemical to a curved surface of an object to be coated having a curvature in one direction,
A slit nozzle according to claim 1 or 2,
A driving device for moving the slit nozzle in a scanning direction orthogonal to the extending direction of the discharge port;
A chemical solution coating apparatus comprising: a support base on which the coating target is placed so that the one direction of the coating target and the scanning direction are orthogonal to each other. The support base is composed of a frame part and a support base body fitted in the frame part,
The upper surface of the support base body has a shape that makes contact with the entire back surface of the back surface opposite to the curved surface of the application object placed on the support base body. Chemical solution applicator.

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