JP2010094653A - Coating machine - Google Patents

Coating machine Download PDF

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JP2010094653A
JP2010094653A JP2008270008A JP2008270008A JP2010094653A JP 2010094653 A JP2010094653 A JP 2010094653A JP 2008270008 A JP2008270008 A JP 2008270008A JP 2008270008 A JP2008270008 A JP 2008270008A JP 2010094653 A JP2010094653 A JP 2010094653A
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die
slit
plate
curved
coating
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JP2008270008A
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JP5253959B2 (en
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Kengo Kazumae
憲悟 一前
Masanori Koda
正紀 甲田
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Chugai Ro Co Ltd
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Chugai Ro Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a coating machine that can adjust the gap between a die and a plate and give a coating film of a uniform thickness. <P>SOLUTION: The die 5 of the coating machine 1 includes a slit 11 extending in the direction of crossing the plate. The die 5 is curved in the parallel direction to the plate, preferably in a circular arc form symmetrically to the center in the vertical direction of the plate. An inclining means 8 is installed to incline the die 5 around a rotating shaft 6 parallel to the direction of crossing the plate. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、板材に液膜を塗布する塗布装置に関する。   The present invention relates to a coating apparatus that applies a liquid film to a plate material.

フラットディスプレイパネルの製造工程などでは、基台の上に載置した板材に、基台に対して相対移動するダイ(ノズル)によって液膜を塗布する装置が使用されている。このような工程では、ダイと板材との隙間をミクロン単位で一定にし、塗膜の厚みを均一にすることが求められている。   In a flat display panel manufacturing process or the like, an apparatus for applying a liquid film to a plate material placed on a base by a die (nozzle) that moves relative to the base is used. In such a process, it is required to make the gap between the die and the plate material constant in microns and to make the thickness of the coating film uniform.

特許文献1には、塗膜の厚みを測定し、ダイを上下方向に湾曲させることによって、塗膜の厚みを一定にする技術が記載されている。一般に、ダイは、特許文献2に記載されているように、水平方向に延伸する液溜め部と、液溜め部から下方に延伸するスリットとを有する。このようなダイを、応力によって上下に湾曲させると、下方に押し出された部分のスリットの幅が拡がり、塗料の流出特性が変化するため、僅かながら塗装ムラを生じさせるという問題がある。   Patent Document 1 describes a technique for making the thickness of the coating film constant by measuring the thickness of the coating film and bending the die in the vertical direction. Generally, as described in Patent Document 2, the die has a liquid reservoir portion that extends in the horizontal direction and a slit that extends downward from the liquid reservoir portion. When such a die is bent up and down by stress, the width of the slit of the portion pushed downward is widened, and the outflow characteristic of the paint is changed.

また、ダイを大きく変形させることは困難であり、このような塗布装置では、板材がミリメートル単位で湾曲しているような場合には、塗料を塗布することが不可能であった。
特開2008−183490号公報 特開平3−169365号公報
Further, it is difficult to greatly deform the die, and with such a coating apparatus, it is impossible to apply paint when the plate material is curved in millimeters.
JP 2008-183490 A Japanese Patent Laid-Open No. 3-169365

スリット幅を変化させずに、ダイと板材との隙間を調節し、塗膜の厚みを均一にできる塗布装置を提供することを課題とする。   It is an object of the present invention to provide a coating apparatus capable of adjusting the gap between the die and the plate material without changing the slit width and making the thickness of the coating film uniform.

前記課題を解決するために、本発明による塗布装置は、板面を横断する方向に延伸し、且つ、板面に平行な方向に湾曲して開口するスリットを有するダイと、前記板面を横断する方向に平行な軸周りに前記ダイを傾斜させる傾斜手段とを備えるものとする。   In order to solve the above-mentioned problems, a coating apparatus according to the present invention includes a die that has a slit extending in a direction transverse to the plate surface and curved and opened in a direction parallel to the plate surface, and the plate surface. And tilting means for tilting the die around an axis parallel to the direction in which the die moves.

この構成によれば、ダイを僅かに傾斜させることによって、水平方向に湾曲したスリットが上下方向に僅かに湾曲して開口する。これによって、スリットの開口する高さを板面の横断方向に変化させ、塗膜の厚みが一定となるように調節できる。ダイ自体は変形しないので、応力によってスリット幅が変化することがなく、塗りムラを生じさせない。   According to this configuration, by slightly inclining the die, the slit curved in the horizontal direction opens slightly curved in the vertical direction. Thus, the height at which the slit opens can be changed in the transverse direction of the plate surface, and the thickness of the coating film can be adjusted to be constant. Since the die itself is not deformed, the slit width does not change due to stress, and uneven coating does not occur.

また、本発明の塗布装置において、前記スリットは、前記板面を縦断する方向の中心に対して対称に湾曲してもよい。   Moreover, the coating device of this invention WHEREIN: The said slit may curve symmetrically with respect to the center of the direction which cuts the said plate surface vertically.

この構成によれば、スリットの高さを左右対称にすることで、板材の左右対称な反りによる塗膜の変化をなくすことができる。   According to this configuration, the change in the coating film due to the symmetrical warping of the plate material can be eliminated by making the height of the slits symmetrical.

また、本発明の塗布装置において、前記ダイは、円弧または楕円弧状に湾曲していてもよい。   In the coating apparatus of the present invention, the die may be curved in a circular arc shape or an elliptical arc shape.

この構成によれば、円弧または楕円弧状に湾曲した板材に均一な液膜を塗布できる。   According to this configuration, a uniform liquid film can be applied to a plate material curved in an arc shape or an elliptical arc shape.

本発明によれば、板面に平行な方向に湾曲したスリットを有するダイを傾斜させることで、ダイを変形させることなく、スリットを上に凸または下に凸に調節し、塗膜の厚みを均一にできる。   According to the present invention, by tilting a die having a slit curved in a direction parallel to the plate surface, the slit is adjusted to be convex upward or downward without deforming the die, and the thickness of the coating film is adjusted. Can be uniform.

これより、本発明の実施形態について、図面を参照しながら説明する。図1は、本発明の1つの実施形態の塗布装置1の概略を示す。塗布装置1は、板材2を水平に載置する基台3と、基台3上を水平移動する移動枠4に保持されたダイ5とを有する。   Embodiments of the present invention will now be described with reference to the drawings. FIG. 1 shows an outline of a coating apparatus 1 according to one embodiment of the present invention. The coating apparatus 1 includes a base 3 on which the plate material 2 is horizontally placed and a die 5 held by a moving frame 4 that horizontally moves on the base 3.

基台3は、例えば、板材2をバキュームによって吸着する。移動枠4は、不図示のリニアモータ等によって、基台3の天面に平行に水平移動可能に設けられる。他の実施形態では、移動枠4は固定され、基台3が水平移動することにより、基台3に対して相対移動してもよい。   The base 3 adsorbs the plate material 2 by vacuum, for example. The moving frame 4 is provided so as to be horizontally movable in parallel with the top surface of the base 3 by a linear motor (not shown) or the like. In another embodiment, the moving frame 4 may be fixed, and the base 3 may move relative to the base 3 by moving horizontally.

ダイ5は、板材2の横断方向(移動枠4の移動方向に直交する方向)の両端に突出する回転軸6を有し、回転軸6が移動枠4に回転可能に保持されている。ダイ5は、回転軸6に取り付けられたプーリ7が、移動枠4に設けられたサーボモータ8(傾斜手段)によって、タイミングベルト9を介して駆動されることで、回転軸6周りに任意の傾斜が付けられるようになっている。   The die 5 has a rotation shaft 6 protruding at both ends in the transverse direction of the plate member 2 (a direction orthogonal to the moving direction of the moving frame 4), and the rotating shaft 6 is rotatably held by the moving frame 4. The die 5 is driven by a pulley 7 attached to the rotary shaft 6 via a timing belt 9 by a servo motor 8 (tilting means) provided on the moving frame 4, so that an arbitrary rotation around the rotary shaft 6 is achieved. It is designed to be inclined.

図2に、ダイ5の断面を示す。ダイ5は、板材2の横断方向に延伸し、その中に塗料供給口(図示せず)から塗料Pが供給される液溜め部10と、液溜め部10から板材2の板面に垂直な下向きに延伸し、ダイ5の下端に板材2の横断方向に連続して開口するスリット11とを有する。ダイ5は、下に向かって細くなり、スリット11の開口部では、前後の幅が最小限となっている。   FIG. 2 shows a cross section of the die 5. The die 5 extends in the transverse direction of the plate material 2, and has a liquid reservoir portion 10 into which the paint P is supplied from a paint supply port (not shown), and is perpendicular to the plate surface of the plate material 2 from the liquid reservoir portion 10. A slit 11 that extends downward and opens continuously in the transverse direction of the plate 2 at the lower end of the die 5 is provided. The die 5 is narrowed downward, and the width of the front and rear is minimized at the opening of the slit 11.

図3に示すように、ダイ5は、回転軸6周りに傾斜することなく保持され、スリット11が鉛直下向きになるとき、板面に平行な水平方向に、液溜め部10およびスリット11を含めて湾曲、より詳しくは、板材2の縦断方向(移動枠4の移動方向)の中心に対して左右対称、且つ、移動枠4の移動方向後側に凸な円弧を描くように湾曲している。   As shown in FIG. 3, the die 5 is held without being inclined about the rotation axis 6, and includes the liquid reservoir 10 and the slit 11 in the horizontal direction parallel to the plate surface when the slit 11 is vertically downward. More specifically, it is curved so as to draw a circular arc that is bilaterally symmetric with respect to the center of the longitudinal direction of the plate member 2 (the moving direction of the moving frame 4) and is convex to the rear side in the moving direction of the moving frame 4. .

この状態で、ダイ5を保持する移動枠4を板材2が載置された基台3上を矢印方向に水平移動させることで、スリット11から塗料Pを流出させ、平坦な板材2の表面に塗料Pを均一に塗布することができる。   In this state, the moving frame 4 holding the die 5 is horizontally moved in the direction of the arrow on the base 3 on which the plate material 2 is placed, so that the coating material P flows out from the slit 11 and is applied to the surface of the flat plate material 2. The paint P can be uniformly applied.

塗布装置1において、図4に示すように、ダイ5を回転軸6周りに、スリット11が板材2の縦断方向後方に移動するように僅かに傾斜させると、スリット11は、中央部が高く、両端が低くなるように上下に湾曲して開口する。これにより、塗布装置1は、横断方向に上に凸に湾曲した板材2に、塗料Pを均一に塗布することができる。   In the coating apparatus 1, as shown in FIG. 4, when the die 5 is slightly tilted around the rotation axis 6 so that the slit 11 moves rearward in the longitudinal direction of the plate member 2, the slit 11 has a high central portion, It is curved and opened so that both ends are lowered. Thereby, the coating device 1 can apply | coat the coating material P uniformly to the board | plate material 2 curved to convex upward in the cross direction.

また、図5に示すように、ダイ5を回転軸6周りに、スリット11が板材2の縦断方向前方に移動するように僅かに傾斜させると、スリット11は、中央部が低く、両端が高くなるように上下に湾曲して開口する。これにより、塗布装置1は、中央部が低くなるように横断方向に湾曲した板材2に、塗料Pを均一に塗布することができる。   Further, as shown in FIG. 5, when the die 5 is slightly tilted around the rotation axis 6 so that the slit 11 moves forward in the longitudinal direction of the plate member 2, the slit 11 has a low center portion and high ends. It opens so as to be curved up and down. Thereby, the coating device 1 can apply | coat the coating material P uniformly to the board | plate material 2 curved in the cross direction so that a center part may become low.

このダイ5の傾斜は、塗料Pの塗布に影響のないように、前後に数度の範囲内で行われ、それによるスリット11の上下方向の変化は、板材2の横断方向の幅の1%以下である。ダイ5の傾斜角度は、板材2に塗料Pを試験的に塗布し、移動枠4に配設した不図示のレーザ距離センサによって塗膜の厚みを実測し、中央部の膜圧と両端部の膜圧との差をなくすことができる角度を算出する。   The inclination of the die 5 is performed within a range of several degrees back and forth so as not to affect the application of the paint P, and the vertical change of the slit 11 is 1% of the transverse width of the plate 2. It is as follows. The inclination angle of the die 5 is determined by applying the paint P to the plate material 2 on a trial basis, measuring the thickness of the coating film by a laser distance sensor (not shown) disposed on the moving frame 4, An angle that can eliminate the difference from the film pressure is calculated.

円弧状に湾曲したダイ5を傾斜させると、基台3に対して楕円弧状に凸形状または凹形状になる。板材2を縦断する方向に径が長い惰円弧状にダイ5を形成すれば、ダイ5を傾斜させるに連れて、ダイ5の垂直方向の湾曲が正確な円弧に近付くようになる。   When the die 5 curved in an arc shape is inclined, the base 3 becomes a convex shape or a concave shape in an elliptical arc shape. If the die 5 is formed in a circular arc shape having a long diameter in the direction of cutting the plate member 2, the vertical curvature of the die 5 approaches an accurate arc as the die 5 is tilted.

また、塗布装置1において、サーボモータ8は、ダイ5を任意の角度に保持することができ、ダイ5を180°反転させることによりスリット11のエア抜きをなど行うことができる。   In the coating apparatus 1, the servo motor 8 can hold the die 5 at an arbitrary angle, and can perform air bleeding of the slit 11 by reversing the die 5 by 180 °.

本実施形態では、ダイ5は移動枠4の移動方向後側に凸になるように湾曲しているが、移動枠4の移動方向前側に凸になるように湾曲してもよい。   In the present embodiment, the die 5 is curved so as to be convex toward the rear side in the movement direction of the moving frame 4, but may be curved so as to be convex toward the front side in the movement direction of the moving frame 4.

また、本実施形態の傾斜手段はタイミングベルト9を介して回転軸6に設けたプーリ7を駆動するが、回転軸6を直接またはギアを介して駆動してもよく、他のいかなる角度調節手段を採用してもよい。   Further, the tilting means of this embodiment drives the pulley 7 provided on the rotating shaft 6 via the timing belt 9, but the rotating shaft 6 may be driven directly or via a gear, and any other angle adjusting means. May be adopted.

本発明の1つの実施形態の塗布装置の斜視図。The perspective view of the coating device of one embodiment of this invention. 図1の塗布装置のダイの断面図。Sectional drawing of the die | dye of the coating device of FIG. 図1の塗布装置のダイの水平方向の形状を示す図。The figure which shows the shape of the horizontal direction of the die | dye of the coating device of FIG. 図1の塗布装置のダイを後方に傾斜させた様子を示す図。The figure which shows a mode that the die | dye of the coating device of FIG. 1 was inclined back. 図1の塗布装置のダイを前方に傾斜させた様子を示す図。The figure which shows a mode that the die | dye of the coating device of FIG. 1 was inclined ahead.

符号の説明Explanation of symbols

1…塗布装置
2…板材
3…基台
4…移動枠
5…ダイ
6…回転軸
7…プーリ
8…サーボモータ(傾斜手段)
9…タイミングベルト
10…液溜め部
11…スリット
DESCRIPTION OF SYMBOLS 1 ... Coating apparatus 2 ... Plate material 3 ... Base 4 ... Moving frame 5 ... Die 6 ... Rotating shaft 7 ... Pulley 8 ... Servo motor (tilting means)
9 ... Timing belt 10 ... Liquid reservoir 11 ... Slit

Claims (3)

板面を横断する方向に延伸して開口するスリットを有し、板面に平行な方向に湾曲したダイと、
前記板面を横断する方向に平行な軸周りに前記ダイを傾斜させる傾斜手段とを備えることを特徴とする塗布装置。
A die having a slit that extends and opens in a direction crossing the plate surface, and is curved in a direction parallel to the plate surface;
And a tilting means for tilting the die around an axis parallel to a direction crossing the plate surface.
前記ダイは、前記板面を縦断する方向の中心に対して対称に湾曲していることを特徴とする請求項1に記載の塗布装置。   The coating apparatus according to claim 1, wherein the die is curved symmetrically with respect to a center in a direction of longitudinally cutting the plate surface. 前記ダイは、円弧または楕円弧状に湾曲していることを特徴とする請求項2に記載の塗布装置。   The coating apparatus according to claim 2, wherein the die is curved in an arc shape or an elliptical arc shape.
JP2008270008A 2008-10-20 2008-10-20 Coating device Expired - Fee Related JP5253959B2 (en)

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Application Number Priority Date Filing Date Title
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JP2010094653A true JP2010094653A (en) 2010-04-30
JP5253959B2 JP5253959B2 (en) 2013-07-31

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014054618A (en) * 2012-08-10 2014-03-27 Tokyo Electron Ltd Slit nozzle, coating applicator, and coating application method
CN105562290A (en) * 2015-12-14 2016-05-11 武汉华星光电技术有限公司 Curved surface coating head and coating method
KR101935614B1 (en) 2012-08-10 2019-01-04 도쿄엘렉트론가부시키가이샤 Slit nozzle, coating apparatus and coating method

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59173163A (en) * 1983-03-24 1984-10-01 Kao Corp Method and device for coating viscous material
JP2000176348A (en) * 1998-12-17 2000-06-27 Nec Corp Arc aqua-knife structure
JP2001338864A (en) * 2000-05-30 2001-12-07 Dainippon Screen Mfg Co Ltd Apparatus and method for treatment of substrate
JP2002033261A (en) * 2000-07-18 2002-01-31 Dainippon Screen Mfg Co Ltd Substrate-treating apparatus
JP2004281429A (en) * 2003-03-12 2004-10-07 Shimada Phys & Chem Ind Co Ltd Wet cleaning device and nozzle used therefor

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59173163A (en) * 1983-03-24 1984-10-01 Kao Corp Method and device for coating viscous material
JP2000176348A (en) * 1998-12-17 2000-06-27 Nec Corp Arc aqua-knife structure
JP2001338864A (en) * 2000-05-30 2001-12-07 Dainippon Screen Mfg Co Ltd Apparatus and method for treatment of substrate
JP2002033261A (en) * 2000-07-18 2002-01-31 Dainippon Screen Mfg Co Ltd Substrate-treating apparatus
JP2004281429A (en) * 2003-03-12 2004-10-07 Shimada Phys & Chem Ind Co Ltd Wet cleaning device and nozzle used therefor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014054618A (en) * 2012-08-10 2014-03-27 Tokyo Electron Ltd Slit nozzle, coating applicator, and coating application method
KR101935614B1 (en) 2012-08-10 2019-01-04 도쿄엘렉트론가부시키가이샤 Slit nozzle, coating apparatus and coating method
CN105562290A (en) * 2015-12-14 2016-05-11 武汉华星光电技术有限公司 Curved surface coating head and coating method

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