JP3190989B2 - X-ray collimator - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION The present invention relates to an X-ray diffractometer and the like.
The present invention relates to a collimator used in a wire apparatus. That is, X
The present invention relates to a comelter for irradiating a sample with a limited line width of X-rays emitted from a source.

[0002]

2. Description of the Related Art A conventional collimator of the type shown in FIG. 6 is known. The collimator includes an XY stage 52 and a capillary glass tube 54 fixedly mounted on the XY stage. At the center of the capillary glass tube, a small-diameter through hole 56 is provided along the axial direction.

The X-rays emitted from the X-ray source 53 are taken into the through hole 56 from the X-ray incident end 54a of the capillary glass tube 54, and travel to the left in the figure while being totally reflected in the through hole 56. Then, the light is emitted from the X-ray emission end 54b in a state where the line width is restricted. The emitted X-rays enter the sample 51 and are subjected to X-ray diffraction measurement.

In the above-described conventional collimator, the XY stage 52 moves the capillary glass tube 54 in the vertical direction in the drawing and in the direction perpendicular to the paper. As a result, as much X-rays as possible are taken in from the X-ray entrance end 54a, and the X-rays from the X-ray exit end 54b are transferred to the sample 51.
At the desired position.

[0005]

However, in the above-mentioned capillary glass tube, it is very difficult to machine the through-hole 56 for guiding X-rays so as to exactly coincide with the center axis of the capillary glass tube 54. It is. For example, as illustrated extremely in FIG. 7, the through hole 56 may be formed to be inclined with respect to the center axis Y of the glass tube. In such a case, no matter how much the entire position of the capillary glass tube 54 is adjusted by the parallel movement using the XY stage, it is not possible to obtain a strong X-ray.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems in a conventional collimator, and has an X-ray having a high intensity by tilting an X-ray limiting member such as a capillary glass tube with respect to an X-ray optical path. The purpose of the present invention is to provide a comerita that can obtain

[0007]

In order to achieve the above-mentioned object, a collimator of an X-ray apparatus according to the present invention comprises an X-ray restricting member for restricting a line width of an X-ray radiated from an X-ray source and emitting the X-ray. A cover surrounding the X-ray restricting member, and a limit disposed between the cover and the X-ray restricting member and supporting the X-ray restricting member so that the inclination angle of the X-ray restricting member with respect to the cover can be changed. It comprises a support member, and a limiting member tilting means for adjusting the angle of inclination with respect to the cover of the X-ray restriction member supported by the restricting member supporting member, the restriction member
The tilting means is fixed to the cover and has an X-ray restricting portion.
Elastic urging member for urging the material and opposing the elastic urging member
And a pressing member that is screwed to the cover at a position where the pressing is performed.

[0008]

The X-ray restricting member is tilted in the cover by the restricting member tilting means. Even if the X-ray introduction through-hole in the X-ray restriction member is machined so as to be inclined, the position of the through-hole can be corrected so as to coincide with or parallel to the X-ray optical path by the above-described tilting. Thereby, strong X-rays are emitted from the X-ray emission end of the X-ray limiting member. Also, the limiting member tilting means
Is an elastic urging member for urging the X-ray restriction member
Structure and operation.
Is very simple and the overall shape of the collimator is
Can always be formed small.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Before describing a collimator according to the present invention, an example of an X-ray apparatus using the collimator will be briefly described. FIG. 5 shows a minute part X-ray diffraction apparatus which is an example of the X-ray apparatus. This minute part X-ray diffraction apparatus is used when a minute sample or a part of a sample of a normal size is to be measured.

In the figure, a micro sample 1 is fixed to a lower end of a sample holder 5. The sample holder 5 is supported by a Φ-axis rotation drive mechanism 6, and is driven by the Φ-axis rotation drive mechanism 6 to move a desired angle around a Φ axis which is one axis passing through the sample 1. It reciprocates, that is, swings. The Φ axis rotation drive mechanism 6 is supported by an X (chi) axis arm 7, and the X axis arm 7 is rotated by an arbitrary angle around the X axis which is another axis passing through the sample 1. It swings. Further, the X-axis arm 7 is supported by the Ω-axis arm 8, and the Ω-axis arm 8 swings at an arbitrary desired angle about the Ω-axis, which is another axis passing through the sample 1. It has become.

On the right side of the sample 1, a collimator 10 is provided.
A wire tube 9 is provided. An XY stage 2 is provided between the collimator 10 and the X-ray tube 9 to translate the entire collimator 10 vertically and horizontally. An X-ray source 3 is provided inside the X-ray tube 9. A so-called point-shaped X-ray radiated from the X-ray source 3 is converted into an X-ray having a minute line width of 5 to 100 μm by a collimator 10. After that, the sample 1 is irradiated. When the X-ray irradiated on the sample 1 satisfies the diffraction condition in relation to the crystal lattice plane in the sample 1, the X-ray is diffracted by the sample 1 and is emitted from the sample 1 as a diffracted X-ray.

Below the sample 1, a position sensitive X-ray detector (PSPC) 11 is fixedly arranged. The PSPC 11 is known per se, and detects X-ray intensity simultaneously over the entire range of the X-ray detection wire 12 stretched inside the PSPC 11. Reference numeral 13 denotes an X-ray capturing window for capturing X-rays inside the PSPC 11.

X-rays diffracted by the minute sample 1, that is, diffracted X-rays are taken into the PSPC 11 through the X-ray taking-in window 13, and the intensity thereof is simultaneously detected within the stretched range of the X-ray detection wire 12. Is done. During this X-ray intensity detection processing, the sample 1 is swung about the Φ axis, the X axis, and the Ω axis. Since the X-ray emitted from the collimator 10 is limited to a small line width, the number of crystals in the sample 1 irradiated by the X-ray is very small. Sample 1 is Φ axis,
To swing around the X axis and the Ω axis,
This is to make the number of crystals existing in a minute X-ray irradiation region uniform for the purpose of preventing the measurement result from being varied due to the variation in the number of crystals. By PSPC11,
The diffraction X-ray intensity at each X-ray diffraction angle position within the stretched range of the X-ray detection wire 12 is measured.

The collimator 10, as shown in FIG.
It has a capillary glass tube 14 as a line limiting member, and a cylindrical metal cover 15 surrounding the glass tube 14. Inside the capillary glass tube 14, an extremely small diameter, for example, 5 which penetrates the glass tube 14 in the axial direction is provided.
A through hole 16 for introducing X-rays of about 100 μm is formed. X-rays emitted from the X-ray source 3 (see FIG. 5) enter the through-hole 16 from the right end thereof, travel to the left while totally reflecting inside the through-hole 16, and from the left end of the glass tube 14 The light is emitted to the outside and irradiates the sample 1. Since the X-rays travel while undergoing total reflection, extremely strong X-rays can be obtained despite the extremely small diameter of the emitted X-rays.

At the left end of the capillary glass tube 14, a ring member 17 as a restricting member supporting means is fitted. The ring member 17 is formed in an annular shape by using an elastic member such as rubber. On the other hand, at the right end of the glass tube 14, a tube tilting device 20 constituted by an elastic urging member 18 and a pressing member 19 is provided. As shown in FIG. 5, two sets of the elastic urging member 18 and the pressing member 19 are provided in two directions of up, down, left, and right.

In FIG. 1, an elastic biasing member 18 comprises a casing 22 screwed into an annular projection 21 projecting from the cover 15, and a compression spring 2 housed in the casing 22.
3 and a tip 24 urged by the compression spring 23
And is constituted by. Capillary glass tube 14
Is biased, i.e., a force is applied by the tip 24. The pressing member 19 is provided at a position facing the elastic urging member 18, and is configured by a screw member that is screwed into the above-mentioned annular protrusion 21 provided on the outer peripheral surface of the cover 15.

With the above-described configuration relating to the capillary glass tube 14, if the pressing member 19 is screwed into the cover 15, the glass tube 14 is opposed to the spring force of the elastic urging member 18.
Is tilted in the direction of arrow A inside the cover 15 around the ring member 17. Conversely, if the screw of the pressing member 19 is loosened and pulled out of the cover 15, the glass tube 14 is tilted in the direction of arrow A 'by the spring force of the elastic urging member 18. As described in FIG. 5, the elastic biasing member 1
Pipe tilting device 20 constituted by the pressure member 8 and the pressing member 19
Are provided along two directions, up and down and left and right, so that the above-described angle adjustment of the glass tube 14 can be performed in those two directions.

As described with reference to FIG. 7, the through-hole 16 for introducing X-rays in the capillary glass tube 14 is often formed so as to be inclined with respect to the center axis of the glass tube 14. In this state, strong X-rays cannot be obtained at the X-ray emission end of the collimator. In the present embodiment, the entire capillary glass tube 14 is tilted by the tube tilting device 20 so that the through hole 16 is adjusted so as to coincide with or be parallel to the X-ray optical path. I am trying to get a line.

In FIG. 1, the tip of the capillary glass tube 14 and the cover 15 on the X-ray emission side (the left end in the figure) are:
The slopes Q and R are tapered so that they become thinner toward the tip. If such inclinations Q and R are not provided, the collimator 1 out of the diffracted X-rays diffracted by the sample 1
The progress of the object in the direction of 0 (for example, the one indicated by the dashed line S in the figure) is blocked by the collimator 10, and the intensity of the diffracted X-ray in that part cannot be measured.
On the other hand, if the inclinations Q and R are provided at the tip of the collimator 10 as described above, it is not necessary to prevent the progress of such diffracted X-rays, and more diffracted X-ray information can be obtained. Becomes

FIG. 2 shows another embodiment. In this embodiment, a cylindrical tube 34 of a double slit type is used as an X-ray limiting member instead of the capillary glass tube 14 having the small diameter through hole 16.

FIG. 3 shows still another embodiment.
In this embodiment, the ring member 17 is provided on the X-ray incident end side,
The tube tilting device 20 is provided on the X-ray emission end side. In the embodiment of FIG. 1, the glass tube 1 is adjusted by adjusting the tube tilting device 20.
By tilting 4, the position of the X-ray incident end of the glass tube 14 changes greatly. This allows more X-rays to pass through the glass tube 14
Not very good with regard to incorporation. On the other hand, according to the embodiment shown in FIG. 3, even when the glass tube 14 is tilted, the positional fluctuation of the X-ray incident end can be reduced, so that
It is convenient.

FIG. 4 shows still another embodiment.
In this embodiment, in addition to the first tube tilting device 20, the second tube tilting device 30 is located closer to the X-ray emitting end than the ring member 17.
Is arranged. This second pipe tilting device 30
It is constituted by a pair of minute screws 31 and 32 facing each other. According to this embodiment, more precise adjustment is possible. The second pipe tilting device 30 is constituted by the minute screws 31 and 32 because the screws 31 and 32 are
The reason for this is that it does not significantly protrude from 5 and hinders the progress of the diffracted X-ray.

Although the present invention has been described with reference to several embodiments, the present invention is not limited to the embodiments. For example, the collimator according to the present invention is not limited to the micro X-ray diffraction device shown in FIG. 5, but can be applied to any other X-ray diffraction device or any other X-ray device. The limiting member supporting member is not limited to the elastic ring member 17, but may be a ring member made of a rigid material. Further, the shape is not necessarily required to be a ring shape, and any shape may be used as long as an appropriate gap is formed between the X-ray restricting member (the capillary glass tube 14 or the like) and the cover 15. can do. For example, the protrusions may be intermittently protruded from the inner wall surface of the cover 15 at appropriate angular intervals.

[0024]

According to the first aspect of the present invention, the capillary is provided.
X-ray restricting member such as glass glass tube for X-ray optical path
Strong X-ray can be obtained by tilting
You. The structure for achieving such a tilt is X
The elastic urging member for urging the line limiting member and the pressing member
The structure and operation are very
And the overall shape of the collimator is very small.
Can be formed into a mold.

According to the second aspect of the present invention, it is easily damaged.
Even when using a capillary glass tube, the capillary
Perform accurate tilt adjustment without damaging the lath
be able to.

According to the third aspect of the present invention, the detection range of the diffracted X-ray can be further widened.

According to the fourth and fifth aspects of the present invention, more precise adjustment can be performed.

[Brief description of the drawings]

FIG. 1 is a side sectional view showing one embodiment of a collimator according to the present invention.

FIG. 2 is a side sectional view showing another embodiment of the collimator according to the present invention.

FIG. 3 is a side sectional view showing still another embodiment of the collimator according to the present invention.

FIG. 4 is a side sectional view showing still another embodiment of the collimator according to the present invention.

FIG. 5 is a perspective view showing an example of an X-ray apparatus to which the collimator according to the present invention is applied.

FIG. 6 is a side sectional view showing an example of a conventional collimator.

FIG. 7 is an enlarged sectional view showing a part of the conventional collimator.

[Explanation of symbols]

 Reference Signs List 3 X-ray source 14 Capillary glass tube 15 Cover 17 Elastic ring member 18 Elastic urging member 19 Elastic member 20 Pipe tilting device 21 Annular protruding portion 22 Casing 23 Compression spring 24 Tip 34 Double slit type cylindrical tube Q, R Collimator tip Inclination

Continuation of the front page (56) References JP-A-1-305523 (JP, A) JP-A-2-47600 (JP, A) JP-A 62-4620 (JP, U) JP-A 63-190617 (JP) , U) Takahisa Sato and three others, "Basic study results of total internal reflection collimator optical system and its application to stress measurement device in minute area", Proceedings of the 27th Symposium on X-ray Material Strength, Japan Material Society of Japan X-ray Material Strength Section Committee, July 26, 1990, p. 94-97 HIROMOTO NAKAZAWA A, "X-ray Guide Tube for Diffusion Experiments", Journal of Applied Crystalography, INTERNAL VOL. 16 Part 2, 1 April 1983, p. 239− 241 (58) Field surveyed (Int. Cl. ⁷ , DB name) G21K 1/02 G21K 1/06

Claims (5)

(57) [Claims] 1. An X-ray restricting member that restricts a line width of an X-ray radiated from an X-ray source and emits the X-ray, a cover surrounding the X-ray restricting member, and a cover disposed between the cover and the X-ray restricting member. A restricting member supporting member that supports the X-ray restricting member so that the inclination angle of the X-ray restricting member with respect to the cover can be changed; and an inclination angle of the X-ray restricting member supported by the restricting member supporting member with respect to the cover. A limiting member tilting means for adjusting the position of the X-ray limiting member, the limiting member tilting means being fixed to the cover and biasing the X-ray limiting member, and a position opposing the elastic biasing member. A collimator having a pressing member screwed to the cover. 2. The restricting member supporting part according to claim 1, wherein
The material is a ring member formed in an annular shape by an elastic material
The X-ray restriction member has a small diameter through hole extending in the axial direction.
A collimator characterized in that the collimator has a capillary glass tube . 3. The comelter according to claim 1, wherein the end on the X-ray emission side is provided with a slope such that the outer diameter decreases toward the X-ray emission tip. 4. A restricting member tilting means different from the restricting member tilting means according to at least any one of claims 1 to 3, wherein the restricting member tilting means is opposite to the restricting member tilting means with respect to the restricting member supporting member. Comerita characterized by providing. 5. The commerizer according to claim 4, wherein the restricting member tilting means provided on the X-ray emitting end side of the restricting member supporting means includes a pair of micro screws arranged opposite to each other. .