JP3180623B2 - Support plate for electronic device - Google Patents

Support plate for electronic device

Info

Publication number
JP3180623B2
JP3180623B2 JP14823495A JP14823495A JP3180623B2 JP 3180623 B2 JP3180623 B2 JP 3180623B2 JP 14823495 A JP14823495 A JP 14823495A JP 14823495 A JP14823495 A JP 14823495A JP 3180623 B2 JP3180623 B2 JP 3180623B2
Authority
JP
Japan
Prior art keywords
support plate
electronic device
main body
plate main
adhesive layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP14823495A
Other languages
Japanese (ja)
Other versions
JPH08316300A (en
Inventor
浩士 平山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Metal Mining Co Ltd
Original Assignee
Sumitomo Metal Mining Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Metal Mining Co Ltd filed Critical Sumitomo Metal Mining Co Ltd
Priority to JP14823495A priority Critical patent/JP3180623B2/en
Publication of JPH08316300A publication Critical patent/JPH08316300A/en
Application granted granted Critical
Publication of JP3180623B2 publication Critical patent/JP3180623B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Supply And Installment Of Electrical Components (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は半導体装置等の電子デバ
イス用支持板、特に半導体チップやその他の電子部品を
搭載する基材として樹脂フィルム等を使用した電子デバ
イス用支持板に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a support plate for an electronic device such as a semiconductor device, and more particularly to a support plate for an electronic device using a resin film or the like as a base on which a semiconductor chip or other electronic components are mounted.

【0002】[0002]

【従来の技術】上記のような半導体装置等の電子デバイ
スにおいては、それらの電子デバイス自体もしくはそれ
らを組付ける各種電子機器の小型・薄型化あるいは軽量
化を図るために、フレキシブル基板やTAB実装式薄型
パッケージの基材としてテープ状その他適宜形状のポリ
イミド等よりなる樹脂フィルムが使用されている。これ
らの樹脂フィルムは一般に軟質のものが用いられ、該フ
ィルム上に半導体チップやその他の電子部品を搭載した
場合には、それらを支持するのに充分な強度を得ること
が困難であった。
2. Description of the Related Art In an electronic device such as a semiconductor device as described above, a flexible substrate or a TAB mounting type is used in order to reduce the size, thickness, and weight of the electronic device itself or various electronic devices to which the electronic device is attached. As a base material of the thin package, a resin film made of a tape or other appropriately shaped polyimide or the like is used. These resin films are generally soft, and when a semiconductor chip or other electronic components are mounted on the film, it is difficult to obtain sufficient strength to support them.

【0003】また上記のような樹脂フィルムを用いた電
子デバイスを、各種電子機器等に組付けるに当たって
は、それらの個々の電子デバイスをホルダ等で保持して
搬送したり、組付ける等のハンドリング操作が困難であ
り、従来は例えば長尺なテープ状の樹脂フィルム上に多
数の電子デバイスを連続的に実装してリール状に巻き取
った状態でハンドリングしたり、あるいは上記のように
連続的に実装したものを、1つずつ切り離してプラスチ
ック製のキャリア等に保持してハンドリングするように
している。
[0003] When assembling the electronic device using the resin film as described above to various electronic devices, handling operations such as holding and transporting each electronic device with a holder or assembling, etc. Conventionally, for example, a large number of electronic devices are continuously mounted on a long tape-shaped resin film and handled in a state of being wound up in a reel shape, or continuously mounted as described above. These are separated one by one and held in a plastic carrier or the like for handling.

【0004】[0004]

【発明が解決しようとする課題】ところが、上記前者の
ようにリール状に巻き取ったものは、巻き癖がついて反
りやカールが発生し、それを無理に戻すと、変形や亀裂
が生じる等のおそれがある。また後者のようにプラスチ
ック製のキャリア等で保持する場合には、その着脱操作
が面倒で非能率的である等の問題がある。
However, the reel wound as in the former case has a curl and curl due to a curl, and if it is forcibly returned, deformation and cracks may occur. There is a risk. Further, in the case of holding by a plastic carrier or the like as in the latter case, there is a problem that the attaching / detaching operation is troublesome and inefficient.

【0005】本発明は上記の問題点に鑑みて提案された
もので、半導体チップ等の電子部品を樹脂フィルム等よ
りなる基材上に実装する際、もしくは実装した後の基材
の反り等の発生を防止することを可能とし、かつ上記の
実装工程や各種電子機器への組立工程等において搬送も
しくは組付ける際のハンドリング操作を容易に行うこと
のできる電子デバイス用支持板を提供することを目的と
する。
[0005] The present invention has been proposed in view of the above problems, and is intended for mounting electronic components such as a semiconductor chip on a substrate made of a resin film or the like, or for preventing warpage of the substrate after mounting. It is an object of the present invention to provide a support plate for an electronic device that can prevent occurrence of the problem and can easily perform a handling operation when transporting or assembling in the above-described mounting process or assembling process to various electronic devices. And

【0006】[0006]

【課題を解決するための手段】上記の目的を達成するた
めに本発明による電子デバイス用支持板は以下のように
したものである。
To achieve the above object, a support plate for an electronic device according to the present invention is as follows.

【0007】即ち、樹脂フィルム等を基材として使用す
る半導体装置等の電子デバイスにおいて、上記基材を補
強し、もしくは半導体チップ等の電子部品を保護する支
持板であって、金属板等よりなる支持板本体の略中央部
に半導体チップ等の電子部品の収容部を形成し、その支
持板本体の少なくとも片面に上記の樹脂フィルム等より
なる基材に接合が可能な耐熱性接着剤層を設けたことを
特徴とする。
That is, in an electronic device such as a semiconductor device using a resin film or the like as a base material, a support plate for reinforcing the base material or protecting electronic components such as semiconductor chips, and is made of a metal plate or the like. A housing portion for electronic components such as a semiconductor chip is formed at a substantially central portion of the support plate main body, and a heat-resistant adhesive layer that can be bonded to a base made of the above resin film or the like is provided on at least one surface of the support plate main body. It is characterized by having.

【0008】[0008]

【作用】上記のように構成された電子デバイス用支持板
を、樹脂フィルム等の基材上に半導体チップ等の電子部
品を実装してなる半導体装置等の電子デバイスに使用す
るに当たっては、上記電子部品が支持板本体の収容部内
に位置するようにして上記接着剤層により支持板本体を
基材上に貼着すればよく、その支持板本体で軟質の樹脂
フィルム等よりなる基材が補強されて反りやカール等が
発生するのを防止できると共に、その支持板本体を貼着
した電子デバイスを各種電子機器等に組付ける際には上
記の支持板本体を利用してハンドリング操作を行うこと
が可能となる。
When the electronic device support plate constructed as described above is used for an electronic device such as a semiconductor device in which an electronic component such as a semiconductor chip is mounted on a base material such as a resin film, the above-mentioned electronic device is used. What is necessary is just to stick a support plate main body on a base material by the said adhesive layer so that a component may be located in the accommodation part of a support plate main body, and the base material which consists of a soft resin film etc. is reinforced by the support plate main body. In addition to preventing the occurrence of warping and curling, it is possible to perform the handling operation using the above-described support plate body when assembling the electronic device to which the support plate body is attached to various electronic devices. It becomes possible.

【0009】[0009]

【実施例】以下、本発明を図に示す実施例に基づいて具
体的に説明する。図1は本発明による電子デバイス用支
持板の一実施例を示すもので、同図(a)は平面図、同
図(b)は縦断正面図である。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be specifically described below based on an embodiment shown in the drawings. 1A and 1B show one embodiment of a support plate for an electronic device according to the present invention, wherein FIG. 1A is a plan view and FIG. 1B is a longitudinal sectional front view.

【0010】図において、1は金属板等よりなる支持板
本体で、その支持板本体1は本実施例においては平面略
方形に形成され、中央部には図に省略した半導体チップ
等の電子部品を収容する収容部として方形の開口部10
が設けられている。又その支持板本体1の一方の面、図
の場合は上記開口部10を除く下面全面に接着剤層2が
形成されている。
In FIG. 1, reference numeral 1 denotes a support plate main body made of a metal plate or the like. The support plate main body 1 is formed in a substantially rectangular shape in a plane in this embodiment, and an electronic component such as a semiconductor chip not shown in the figure is provided at the center. Opening 10 as an accommodating portion for accommodating
Is provided. In addition, an adhesive layer 2 is formed on one surface of the support plate main body 1, that is, on the entire lower surface excluding the opening 10 in the case of the drawing.

【0011】上記の支持板本体1の材質は適宜である
が、好ましくは金属板を用いるとよく、例えば銅や鉄等
の金属単体または合金もしくは表面処理鋼板等を用いる
ことができる。また支持板本体1の大きさ・形状等は適
用する半導体装置の大きさ・形状に応じて適宜設計すれ
ばよく、本実施例においては厚さが0.5mmの金属板
が用いられ、外形が25mm角に形成されている。
Although the material of the support plate body 1 is appropriate, a metal plate is preferably used. For example, a single metal such as copper or iron, an alloy, a surface-treated steel plate, or the like can be used. The size and shape of the support plate body 1 may be appropriately designed according to the size and shape of the semiconductor device to be applied. In this embodiment, a metal plate having a thickness of 0.5 mm is used. It is formed in a 25 mm square.

【0012】接着剤層2としては、前記のような半導体
装置におけるポリイミド等の樹脂フィルムよりなる基材
(不図示)に室温で接着可能な耐熱性の感圧接着剤等を
用いるとよい。その接着剤層2の形成手段としては、例
えば支持板本体1の表面に接着剤を塗布し、必要に応じ
てその表面に剥離紙3を設ける。あるいは接着テープ等
を用いてもよく、例えば両面に剥離紙を有する両面テー
プの一方の剥離紙を剥がして支持板本体1に貼着しても
よい。
As the adhesive layer 2, a heat-resistant pressure-sensitive adhesive or the like which can be bonded at room temperature to a substrate (not shown) made of a resin film of polyimide or the like in the semiconductor device as described above may be used. As a means for forming the adhesive layer 2, for example, an adhesive is applied to the surface of the support plate main body 1, and a release paper 3 is provided on the surface as necessary. Alternatively, an adhesive tape or the like may be used. For example, one release paper of a double-sided tape having release paper on both sides may be peeled off and adhered to the support plate main body 1.

【0013】上記のような電子デバイス用支持板を製造
するに当たっては、例えばプレス打抜き加工等により支
持板本体1とその開口部10とを同時に打抜き、その支
持板本体1の一方の面に接着剤層2と剥離紙3とを設け
る、または剥離紙付の接着テープを貼着する。あるいは
支持板本体1の片面に予め接着剤層2と剥離紙3とを設
けるか、あるいは剥離紙付の接着テープを貼着したのち
所定の形状に打抜けばよい。
In manufacturing the support plate for an electronic device as described above, the support plate main body 1 and its opening 10 are simultaneously punched by, for example, press punching, and an adhesive is applied to one surface of the support plate main body 1. The layer 2 and the release paper 3 are provided, or an adhesive tape with release paper is attached. Alternatively, the adhesive layer 2 and the release paper 3 may be provided in advance on one side of the support plate main body 1, or an adhesive tape with a release paper may be attached and then punched into a predetermined shape.

【0014】上記のようにして製造した電子デバイス用
支持板を、図に省略した樹脂フィルム等の基材上に半導
体チップ等の電子部品を実装する半導体装置等の電子デ
バイスに使用する場合には、上記の電子部品を実装する
前もしくは実装した後に前記の剥離紙をリムーバー等で
剥がして接着剤層2により支持板本体1を基材上に貼着
するもので、その際、上記の電子部品は支持板本体1の
開口部10内に位置させて基材上に実装する、また予め
基材上に電子部品を実装した場合には支持板本体1の開
口部10内に電子部品が位置するようにして支持板本体
1を基材上に貼着する。なお、上記の基材として長尺な
テープ状の樹脂フィルムを用い、その上に半導体チップ
等の電子部品を順次搭載して半導体装置等の電子デバイ
スを連続的に多数形成したものにあっては、その連続し
たままの状態で、あるいは個々の電子デバイスを1つず
つに分割した後に支持板本体を貼着することもできる。
When the electronic device support plate manufactured as described above is used for an electronic device such as a semiconductor device in which electronic components such as a semiconductor chip are mounted on a base material such as a resin film not shown in the figure. Before or after mounting the electronic component, the release paper is peeled off by a remover or the like, and the support plate main body 1 is adhered to a base material by an adhesive layer 2, and at this time, the electronic component Is positioned in the opening 10 of the support plate main body 1 and mounted on the base material. When an electronic component is mounted on the base material in advance, the electronic component is positioned in the opening 10 of the support plate main body 1. Thus, the support plate main body 1 is stuck on the base material. In the case where a long tape-shaped resin film is used as the base material, electronic components such as semiconductor chips are sequentially mounted thereon, and a large number of electronic devices such as semiconductor devices are continuously formed. Alternatively, the support plate body can be adhered in the continuous state or after the individual electronic devices are divided into individual electronic devices.

【0015】上記のように樹脂フィルム等よりなる基材
上に支持板本体を貼着することによって、その支持板本
体で上記基材が補強されて、反りやカール等が生じるの
を防止できると共に、上記基材上に搭載した半導体チッ
プ等の電子部品を良好に保護することができる。また上
記のように支持板本体を貼着してなる電子デバイスを各
種の電子機器等に組付ける際には、上記の支持板本体を
摘んだり、磁石等で保持させて搬送・組付け等のハンド
リング操作を行うことができ、作業性や操作性を向上さ
せることができる。図1において、1aは上記の支持板
本体1を電子デバイスに貼着する際もしくは貼着した後
に支持板本体1または電子デバイスの位置や向きを揃え
る際の位置決め用の面取り部である。
By sticking the support plate main body on the base material made of a resin film or the like as described above, the base material is reinforced by the support plate main body, and it is possible to prevent warpage and curling from occurring. In addition, electronic components such as semiconductor chips mounted on the base material can be protected well. Also, when assembling the electronic device formed by adhering the support plate body to various electronic devices and the like as described above, the support plate body is picked up or held by a magnet or the like for transport / assembly. A handling operation can be performed, and workability and operability can be improved. In FIG. 1, reference numeral 1a denotes a chamfer for positioning when the support plate main body 1 or the electronic device is aligned in position or direction when the support plate main body 1 is attached to the electronic device or after the electronic device is attached.

【0016】なお図2に示すように支持板本体1の表
面、即ち接着剤層2と反対側の面、より好ましくは接着
剤層2を有する部分を除く支持板本体1の表面全面に
は、必要に応じて絶縁性の被膜4を形成するとよい。そ
の被膜4の材質や形成方法等は適宜であるが、例えば絶
縁性の塗料をスクリーン印刷法等で支持板本体1の表面
にコーティングすればよい。上記のように支持板本体1
の表面に被膜4を形成すると、半導体装置を実装空間の
せまい薄型高密度実装機器に搭載した場合にも、半導体
装置が実装基板やケース等との接触してショートする等
のトラブルを防止することができる。支持板本体1がC
u系合金等変色しやすい金属である場合は、上記の被膜
4が変色防止の機能も果たし、特にブラックカラーの被
膜は半導体装置の色調としても最適である。
As shown in FIG. 2, the surface of the support plate main body 1, that is, the surface opposite to the adhesive layer 2, more preferably the entire surface of the support plate main body 1 except for the portion having the adhesive layer 2, An insulating film 4 may be formed as needed. Although the material and the forming method of the coating 4 are appropriate, for example, the surface of the support plate body 1 may be coated with an insulating paint by a screen printing method or the like. Support plate body 1 as described above
When the coating 4 is formed on the surface of the semiconductor device, even when the semiconductor device is mounted on a thin and high-density mounting device having a small mounting space, it is possible to prevent a trouble such as a short circuit caused by the semiconductor device coming into contact with a mounting substrate or a case. Can be. Support plate body 1 is C
In the case of a metal that is easily discolored, such as a u-based alloy, the coating 4 also functions to prevent discoloration, and in particular, a black color coating is optimal as a color tone of a semiconductor device.

【0017】上記実施例は半導体チップ等の電子部品の
収容部として支持板本体1に開口部10を形成したが、
図3または図4に示すような凹部11としてもよい。そ
の凹部11の形成方法等は適宜であり、図3は厚手の支
持板本体1に凹部11を切削加工等により形成した例、
図4は薄手の支持板本体1をしぼり加工もしくはプレス
加工等して凹部11を形成した例を示す。ただし鋳造そ
の他の手段で形成することもできる。
In the above embodiment, the opening 10 is formed in the support plate main body 1 as an accommodating portion for an electronic component such as a semiconductor chip.
The recess 11 may be as shown in FIG. 3 or FIG. The method of forming the concave portion 11 is appropriate. FIG. 3 shows an example in which the concave portion 11 is formed in the thick support plate body 1 by cutting or the like.
FIG. 4 shows an example in which the concave portion 11 is formed by squeezing or pressing the thin support plate body 1. However, it can also be formed by casting or other means.

【0018】上記図3および図4の実施例においても前
記実施例と同様に支持板本体1の凹部11を除く下面全
面に耐熱性接着剤層2を設けると共に、その下面に必要
に応じて剥離紙3を設けるようにしたもので、前記実施
例と同様の効果が得られる。特に、上記のように半導体
チップ等の電子部品の収容部を凹部11とすると、その
凹部11内に収容される電子部品を更に良好に保護する
ことが可能となる。又その場合にも支持板本体1の表面
に必要に応じて前記実施例と同様に絶縁性の被膜4を形
成すればよい。
In the embodiment shown in FIGS. 3 and 4, the heat-resistant adhesive layer 2 is provided on the entire lower surface of the support plate body 1 except for the concave portion 11 as in the previous embodiment, and the lower surface is peeled off as necessary. Since the paper 3 is provided, the same effect as in the above embodiment can be obtained. In particular, if the accommodating portion of the electronic component such as the semiconductor chip is formed as the concave portion 11 as described above, the electronic component accommodated in the concave portion 11 can be further protected. Also in this case, the insulating film 4 may be formed on the surface of the support plate main body 1 as necessary in the same manner as in the above embodiment.

【0019】[0019]

【発明の効果】以上説明したように本発明による電子デ
バイス用支持板は、金属板等よりなる支持板本体1の略
中央部に半導体チップ等の電子部品を収容する開口部1
0または凹部11等の収容部を形成し、その支持板本体
1の少なくとも片面に上記の樹脂フィルム等よりなる基
材に接合が可能な耐熱性接着剤層2を設けた構成である
から、樹脂フィルム等の基材上に半導体チップ等の電子
部品を実装する、もしくは実装してなる半導体装置等の
電子デバイスに使用するに当たっては、上記電子部品が
支持板本体1の開口部10または凹部11内に位置する
ようにして上記接着剤層2により支持板本体1を基材上
に貼着するだけで、軟質の樹脂フィルム等よりなる基材
が補強されて反りやカール等が発生するのを防止できる
と共に、上記電子部品を基板上に実装する際もしくはそ
の電子部品を実装した電子デバイスを各種電子機器等に
組付ける際には上記の支持板本体を利用してハンドリン
グ操作を行うことが可能となり、作業性や操作性を大幅
に向上させることができる等の効果がある。
As described above, the supporting plate for an electronic device according to the present invention has an opening 1 for accommodating an electronic component such as a semiconductor chip at a substantially central portion of a supporting plate main body 1 made of a metal plate or the like.
0 or a concave portion 11 and the like, and a heat-resistant adhesive layer 2 that can be bonded to a base made of the above resin film or the like is provided on at least one surface of the support plate main body 1. When mounting an electronic component such as a semiconductor chip on a base material such as a film or using the mounted electronic component such as a semiconductor device, the electronic component is placed in the opening 10 or the concave portion 11 of the support plate body 1. The base material 1 made of a soft resin film or the like is reinforced by preventing the warp or the curl from being generated simply by sticking the support plate main body 1 on the base material by the adhesive layer 2 so that When the electronic component is mounted on a substrate or when an electronic device on which the electronic component is mounted is mounted on various electronic devices, a handling operation using the support plate body should be performed. Possible and it is effective, such can be significantly improved workability and operability.

【図面の簡単な説明】[Brief description of the drawings]

【図1】(a)は本発明による電子デバイス用支持板の
一実施例を示す平面図。(b)はその縦断正面図。
FIG. 1A is a plan view showing one embodiment of a support plate for an electronic device according to the present invention. (B) is the longitudinal front view.

【図2】上記実施例による電子デバイス用支持板の一部
の拡大縦断正面図。
FIG. 2 is an enlarged vertical sectional front view of a part of the electronic device support plate according to the embodiment.

【図3】(a)は本発明による電子デバイス用支持板の
他の実施例を示す平面図。(b)はその縦断正面図。
FIG. 3A is a plan view showing another embodiment of the electronic device support plate according to the present invention. (B) is the longitudinal front view.

【図4】(a)は本発明による電子デバイス用支持板の
他の実施例を示す平面図。(b)はその縦断正面図。
FIG. 4A is a plan view showing another embodiment of the electronic device support plate according to the present invention. (B) is the longitudinal front view.

【符号の説明】[Explanation of symbols]

1 支持板本体 2 接着剤層 3 剥離紙 4 絶縁性被膜 DESCRIPTION OF SYMBOLS 1 Support board main body 2 Adhesive layer 3 Release paper 4 Insulating coating

───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7,DB名) H05K 13/02 H01L 21/68 H01L 23/12 B65D 73/00 ──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. 7 , DB name) H05K 13/02 H01L 21/68 H01L 23/12 B65D 73/00

Claims (5)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 樹脂フィルム等を基材として使用する半
導体装置等の電子デバイスにおける上記基材の補強もし
くは反り等を防止する電子デバイス用支持板であって、
金属板等よりなる支持板本体の略中央部に半導体チップ
等の電子部品の収容部を形成し、その支持板本体の少な
くとも片面に上記の樹脂フィルム等よりなる基材に接合
が可能な耐熱性接着剤層を設けたことを特徴とする電子
デバイス用支持板。
An electronic device support plate for preventing reinforcement or warpage of an electronic device such as a semiconductor device using a resin film or the like as a substrate,
A housing portion for an electronic component such as a semiconductor chip is formed at a substantially central portion of a support plate main body made of a metal plate or the like, and heat resistance capable of bonding to a base made of the above resin film or the like on at least one surface of the support plate main body. An electronic device support plate provided with an adhesive layer.
【請求項2】 前記の収容部として支持板本体に開口部
または凹部を形成してなる請求項1記載の電子デバイス
用支持板。
2. The support plate for an electronic device according to claim 1, wherein an opening or a recess is formed in the support plate main body as the accommodation portion.
【請求項3】 前記接着剤層が常温加圧接合タイプであ
ることを特徴とする請求項1または2記載の電子デバイ
ス用支持板。
3. The support plate for an electronic device according to claim 1, wherein the adhesive layer is a room temperature pressure bonding type.
【請求項4】 前記接着剤層の支持板本体と反対側の面
に剥離紙を設けてなる請求項1、2または3記載の電子
デバイス用支持板。
4. The electronic device support plate according to claim 1, wherein a release paper is provided on a surface of the adhesive layer opposite to the support plate main body.
【請求項5】 前記支持板本体の接着剤層と反対側の面
に絶縁性の被膜を形成してなる請求項1、2、3または
4記載の電子デバイス用支持板。
5. The support plate for an electronic device according to claim 1, wherein an insulating film is formed on a surface of the support plate main body opposite to the adhesive layer.
JP14823495A 1995-05-23 1995-05-23 Support plate for electronic device Expired - Lifetime JP3180623B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14823495A JP3180623B2 (en) 1995-05-23 1995-05-23 Support plate for electronic device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14823495A JP3180623B2 (en) 1995-05-23 1995-05-23 Support plate for electronic device

Publications (2)

Publication Number Publication Date
JPH08316300A JPH08316300A (en) 1996-11-29
JP3180623B2 true JP3180623B2 (en) 2001-06-25

Family

ID=15448263

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14823495A Expired - Lifetime JP3180623B2 (en) 1995-05-23 1995-05-23 Support plate for electronic device

Country Status (1)

Country Link
JP (1) JP3180623B2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6441495B1 (en) 1997-10-06 2002-08-27 Rohm Co., Ltd. Semiconductor device of stacked chips
JP4737942B2 (en) * 2004-03-24 2011-08-03 Tdk株式会社 Manufacturing method of solar cell
JP7266036B2 (en) * 2018-07-26 2023-04-27 日本碍子株式会社 Temporary fixing substrate, temporary fixing method, and method for manufacturing electronic component

Also Published As

Publication number Publication date
JPH08316300A (en) 1996-11-29

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