JP3176808U - 6 stage roots type vacuum pump - Google Patents

Abstract

To provide a compact six-stage roots-type vacuum pump capable of obtaining the same rotation speed at commercial power supplies of 50 Hz and 60 Hz.
A first stage chamber, a third stage chamber, a fifth stage chamber, a second stage chamber, a fourth stage chamber, and a sixth stage chamber are arranged in parallel, and the first stage chamber, the third stage chamber, A pair of first rotor shafts 21 having roots rotors inserted into the fifth stage chambers respectively, and a pair of second rotors having roots rotors inserted into the second stage chambers, the fourth stage chambers and the sixth stage chambers, respectively. The shaft 23 is rotatably supported by a housing attached to the casing, the timing gear 28 meshing with the end of the first rotor shaft is fixed, and the timing gear 32 meshing with the end of the second rotor shaft is fixed. An intermediate gear 36 that always meshes with one timing gear of the first rotor shaft and one timing gear of the second rotor shaft is attached to the output shaft of the motor device 42, and the air sucked from the suction port 6 by driving the motor device 42 Is discharged from the discharge port 9.
[Selection] Figure 5

Description

  The present invention relates to a six-stage roots-type vacuum pump used as a vacuum source for a manufacturing process of solar cells, pharmaceuticals, etc., or a vacuum drying apparatus.

  Patent Document 1 describes a “4-stage and 6-stage roots-type vacuum pump” according to the present applicant. The vacuum pump rotatably supports a pair of first rotor shafts and a pair of second rotor shafts by a housing, and fixes timing gears that mesh with each other at the end portions of the first rotor shafts protruding from the front housing. In addition, a timing gear that meshes with each other at the end of each second rotor shaft is fixed, and one timing gear of the first rotor shaft and an intermediate gear that meshes with one timing gear of the second rotor shaft are attached to the front housing. The first rotor shaft is provided so as to be rotatable, and is connected to the end of the first rotor shaft or the second rotor shaft projecting from the rear housing through a coupling, and is driven by the motor device. By rotating the shaft and the second rotor shaft, the air sucked from the suction port is discharged from the discharge port.

  However, the conventional roots-type vacuum pump described above has a structure in which the vacuum pump and the output shaft of the motor are connected and driven via a coupling, so the length in the center direction of the output shaft of the motor is large. The installation space was inevitably large.

  Further, since the vacuum pump and the output shaft of the motor are directly connected, and the rotation speed of the vacuum pump is different between 50 Hz and 60 Hz of the commercial power supply, there is a difference in exhaust speed of about 20%. The motor device with an inverter that is currently used can control the number of rotations of the motor, so that such a problem does not occur, but the cost of the motor device is high. Countermeasures were required.

Utility Model Registration No. 3139905

  An object of the present invention is to provide a compact six-stage roots-type vacuum pump that can obtain the same number of rotations of the vacuum pump at commercial power supplies of 50 Hz and 60 Hz.

In order to achieve the above object, the device according to claim 1 includes a front first stage chamber, a third stage chamber, and a rear fifth stage chamber in a casing in which a suction port and a discharge port are formed. A pair of front stage second stage chambers, fourth stage chambers, and rear side sixth stage chambers arranged in parallel and having roots rotors inserted into the first stage chamber, the third stage chamber, and the fifth stage chamber, respectively. The first rotor shaft and a pair of second rotor shafts each having a root rotor inserted into the second stage chamber, the fourth stage chamber, and the sixth stage chamber can be freely rotated by housings respectively attached to the front and rear of the casing. The timing gear is fixed so as to mesh with each other at the end of each first rotor shaft, and the timing gear is fixed with each other at the end of each second rotor shaft. Further, one timing gear of the first rotor shaft and one of the second rotor shaft Always attached to the output shaft of the intermediate gear motor unit meshing with Mingugiya,
The motor device is configured to rotate the first rotor shaft and the second rotor shaft in opposite directions to discharge air sucked from the suction port from the discharge port. It is.

  In order to achieve the same object, the invention described in claim 2 is the six-stage roots-type vacuum pump according to claim 1, wherein the number of revolutions of the same vacuum pump is the same regardless of whether the power supply for the motor device is 50 Hz or 60 Hz. The intermediate gear is provided so as to be interchangeable for 50 Hz and 60 Hz.

  This six-stage Roots type vacuum pump employs a gear system in which the first rotor shaft and the second rotor shaft are directly driven by an intermediate gear attached to the output shaft of the motor device, so that the conventional vacuum pump and the motor output shaft There is an advantage that a more compact structure can be obtained compared to a structure in which the two are connected via a coupling, and an installation space can be reduced.

For example, in the case of an installation space of a small vacuum pump with an exhaust amount of 75 (m ³ / hour), it is about 80% compared to a conventional vacuum pump.

  In addition, according to this 6-stage Roots type vacuum pump, the intermediate gear can be exchanged for 50 Hz and 60 Hz, so the rotation speed of the same vacuum pump is the same regardless of whether the power supply for the motor device is 50 Hz or 60 Hz. Thus, the same displacement can be obtained, and there is an advantage that it can be produced at low cost without using a motor device with an inverter.

Side view of 6-stage roots vacuum pump according to the present invention Same front view Same as above, cross section AA line sectional view of FIG. Explanatory drawing showing arrangement of timing gear and intermediate gear

  The best mode of the present invention will be described below with reference to the drawings.

  As shown in FIG. 1, the six-stage roots vacuum pump P according to the present invention is integrated with a flange type motor device 42 and is mounted on a base 45 provided with casters 46.

  As shown in FIG. 4, the casing 1 of the vacuum pump P includes a suction side block 5 in which a suction port 6 is formed on the right side surface 2 a of the central block 2 provided with the attachment portion 3 for fixing to the base 45. A discharge-side block 8 having discharge ports 9 is attached to the left side surface 2b of the central block 2, and these are integrally provided.

  Inside the casing 1 are a first stage chamber (a), an intermediate third stage chamber (c) and a fifth stage chamber (e), a second stage chamber (b), and an intermediate fourth stage chamber (d ) And the sixth stage chamber (f) are arranged in parallel.

  A cover 11 provided with a connection port 12 communicating with the suction port 6 is attached to the suction side block 5. A cover 14 provided with a connection port 15 communicating with the discharge port 9 is attached to the discharge side block 8. As shown in FIG. 3, 18a is a passage that connects the first stage chamber (a) and the second stage chamber (b), and 18b is a path that connects the second stage chamber (b) and the third stage chamber (c). , 18c are passages that connect the third stage chamber (c) and the fourth stage chamber (d), 18d are passages that connect the fourth stage chamber (d) and the fifth stage chamber (e), and 18e is the fifth stage. It is a channel | path which connects a chamber (e) and a 6th stage | chamber (f).

  As shown in FIG. 3, a pair of first rotor shafts 21 provided with a trilobal root rotor 22 inserted into the first stage chamber (a), the third stage chamber (c), and the fifth stage chamber (e), respectively. And the pair of second rotor shafts 23 provided with the trilobal root rotor 24 inserted into the second stage chamber (b), the fourth stage chamber (d), and the sixth stage chamber (f), respectively, are the casing 1 The bearing 26 is attached to the housing 25 attached to the front portion 1a of the housing 1 and is rotatably supported by the bearing 30 attached to the motor-side housing 29 attached to the rear portion 1b of the casing 1. Reference numeral 27 denotes a shaft seal seal attached to the inside of the housing 25, and 31 denotes a shaft seal seal attached to the inside of the motor side housing 29.

  The ratio of the lengths of the first stage, the third stage and the fifth stage root rotor 22 and the second stage, the fourth stage and the sixth stage root rotor 24 is 1: (0.7 To 0.8): about (0.5 to 0.6).

  As shown in FIG. 5, timing gears 28 are fixed to the end portions of the pair of first rotor shafts 21 so as to mesh with each other, and the end portions of the pair of second rotor shafts 23 are meshed with each other. The timing gears 32 are fixed respectively. Reference numeral 38 denotes a gear case attached to the motor side housing 29, and 39 denotes an end cover attached to the housing 25.

  A motor device 42 is attached to the gear case 38 so that the output shaft 42a is parallel to the first rotor shaft 21 and is directed toward the root rotor 22 side. An intermediate gear 36 is attached to the output shaft 42a. The intermediate gear 36 is provided so as to always mesh with one timing gear 28 of the first rotor shaft 21 and one timing gear 32 of the second rotor shaft 23.

  In FIG. 5, an intermediate gear 36 indicated by a solid line indicates a case where the power supply for the motor device is for 60 Hz. In the drawing, an intermediate gear 36 ′ for 50 Hz indicated by a two-dot chain line is formed by increasing the outer diameter of the intermediate gear 36 for 60 Hz by about 20%. It is assumed that a gear case 38 is also provided exclusively for the intermediate gear 36 '.

  Thus, in the six-stage roots vacuum pump P according to the present invention, the intermediate gear is provided so as to be exchangeable for 50 Hz and 60 Hz. Therefore, the rotation speed of the same vacuum pump P in any region of 50 Hz and 60 Hz. And the same displacement is obtained.

  Reference numeral 40 denotes a silencer attached to the connection port 15 of the casing 1. 50 a is an intake port of the intake pipe 50 attached to the connection port 12, and 51 is an exhaust port of the silencer 40.

  In this vacuum pump P, a water-cooling type that cools the casing 1 and the bearing portion with cooling water is adopted. In FIG. 1, 55 is an inlet of cooling water, and 56 is an outlet of cooling water. Note that a forced air cooling method using an electric fan can be adopted instead of the water cooling method.

  Accordingly, the intermediate gear 36 is rotated by driving the motor device 42 and the timing gears 28 and 32 are rotated. Therefore, the pair of first rotor shafts 21 and the pair of second rotor shafts 23 are rotated in opposite directions to perform suction. A six-stage roots-type vacuum pump P according to the present invention for discharging air sucked from the port 6 from the discharge port 9 is configured.

Next, the operation of the six-stage roots vacuum pump P according to the present invention will be described.
Since the intermediate gear 36 is rotated by driving the motor device 42 and the timing gears 28 and 28 and the timing gears 32 and 32 are rotated, the pair of first rotor shafts 21 and 21 and the pair of second rotor shafts 23 and 23 are mutually connected. Rotate in the opposite direction. As a result, the first stage chamber (a) is maintained at a negative pressure, so ambient air is sucked into the first stage chamber (a) from the suction port 6. The sucked air is sequentially compressed from the first stage chamber (a) through the passages 18a to 18e to the sixth stage chamber (f), passes through the discharge port 9, and is sent from the silencer 40 to the atmosphere. Discharged inside.

  In FIG. 5, the intermediate gear 36 is for 60 Hz. However, in the region where the power supply for the motor device is for 60 Hz, the intermediate gear 36 ′ is replaced with an intermediate gear 36 ′ indicated by a two-dot chain line. Thereby, the same number of rotations of the vacuum pump P can be obtained in any region of 50 Hz and 60 Hz, and the same exhaust amount can be obtained.

P: 6-stage roots vacuum pump according to the present invention (a) ... 1st stage chamber (b) ... 2nd stage chamber (c) ... 3rd stage chamber (d) ... Fourth stage chamber (e) ... Fifth stage chamber (f) ... Sixth stage chamber 1 ... Casing 6 ... Suction port 9 ... Discharge port 21, 21 ... First rotor Shafts 22, 22 ... Roots rotors 23, 23 ... Second rotor shafts 24, 24 ... Roots rotor 25 ... Housings 28, 28 ... Timing gears 32, 32 ... Timing gears 29 ... Motor side housing 36, 36 '... intermediate gear 42 ... motor device 42a ... output shaft

Claims (2)

Inside the casing formed with the suction port and the discharge port, the front first stage chamber, the third stage chamber and the rear fifth stage chamber, the front second stage chamber, the fourth stage chamber and the rear first stage chamber A pair of first rotor shafts provided with a root rotor inserted in the first stage chamber, the third stage chamber, and the fifth stage chamber, the second stage chamber, and the fourth stage chamber. And a pair of second rotor shafts having roots rotors respectively inserted into the sixth stage chambers are rotatably supported by housings attached to the front and rear of the casing, and the first rotor shafts protruding from the rear housings The timing gear is fixed so as to mesh with each other at the end portion, the timing gear is fixed so as to mesh with the end portion of each second rotor shaft, and one timing gear of the first rotor shaft and the second rotor shaft are fixed. An intermediate gear that always meshes with one of the timing gears Mounted on the force axis,
The motor device is configured to rotate the first rotor shaft and the second rotor shaft in opposite directions to discharge air sucked from the suction port from the discharge port. Stage roots type vacuum pump.   The intermediate gear is provided so as to be interchangeable for 50 Hz and 60 Hz so that the same rotation speed of the vacuum pump can be obtained regardless of whether the power supply for the motor device is 50 Hz or 60 Hz. 6-stage roots-type vacuum pump described in 1.

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