JP3154866U

JP3154866U - Fine adjustment and positioning device for gantry

Info

Publication number: JP3154866U
Application number: JP2009005800U
Authority: JP
Inventors: 立霖郭
Original assignee: 立霖郭
Priority date: 2008-10-27
Filing date: 2009-08-17
Publication date: 2009-10-29
Anticipated expiration: 2019-08-17
Also published as: TWM352531U

Abstract

【課題】搭載する架台の位置を容易に微調整可能な架台用微調整及び位置決め装置を提供する。【解決手段】第１通気路１１が形成された底座１０と、前記底座１０の中央に設置され、該第１通気路１１と連通する第２通気路２１が形成され、上部に芯軸スリーブ２０１が取り付けられた芯軸と、前記芯軸に環設されると共に、該第２通気路２１と連通する第３通気路が形成される浮動盤と前記芯軸スリーブ２０１の下方に位置するように浮動盤と連結する載り台３６とを有するロックユニットと、前記底座１０の周縁に設置され、収容空間が形成されるハウジング４０と、伸縮自在であり、一端が前記芯軸スリーブ２０１の周縁に当接する内部ピンセットと一端が前記ハウジング４０の内面に当接する外部ピンセットとが設けられると共に、載り台３６の上面に当接する複数のスチールボール５８が設置される架設盤を有する調整ユニット５０と、前記ハウジング４０の上部に設置される載置ユニットとを備えている。【選択図】図１There is provided a fine adjustment and positioning device for a gantry capable of easily fine-tuning the position of a gantry to be mounted. A bottom seat 10 having a first air passage 11 formed therein, a second air passage 21 installed in the center of the bottom seat 10 and communicating with the first air passage 11 is formed, and a core shaft sleeve 201 is formed at an upper portion. Is attached to the core shaft, and is provided below the core shaft sleeve 201 and the floating plate in which the third air passage communicating with the second air passage 21 is formed. A lock unit having a mounting base 36 connected to the floating plate, a housing 40 installed at the periphery of the bottom seat 10 to form an accommodation space, and telescopic, and one end abutting the periphery of the core sleeve 201. There are provided an internal tweezers that are in contact with each other and an external tweezers whose one end is in contact with the inner surface of the housing 40, and an adjustment unit having an installation board on which a plurality of steel balls 58 that are in contact with the upper surface of the mounting table 36 are installed. And bets 50, and a mounting unit disposed in an upper portion of the housing 40. [Selection] Figure 1

Description

本考案は、特に重量物を載置する時、重量物の位置を容易に微調整可能な架台用微調整及び位置決め装置に関するものである。 The present invention relates to a gantry fine adjustment and positioning device capable of easily fine-tuning the position of a heavy object, particularly when placing a heavy object.

ガラス基板工場においては、各工程の間のガラス基板の搬送は運搬装置によって行われ、該運搬装置には、手動式或いは電動式を有し、その運搬装置によりガラス基板の入った架台を搭載して次に行われる工程の入り口まで搬送している。 In the glass substrate factory, the glass substrate is transported between the processes by a transportation device, and the transportation device has a manual type or an electric type, and the platform containing the glass substrate is mounted on the transportation device. It is transported to the entrance of the next process.

しかしながら、上記運搬装置は、架台を前後方向又は左右方向に下ろすことはできるが、下ろされた架台は自身の重量と搭載するガラスの重量が過大であるため、架台を移動して設置位置の微調整を行うことは非常に困難であった。尚、架台を運搬装置に再び搭載し、運搬装置を移動させることによって架台の位置を再調整することはできるが、その作業には時間と手間がかかっていた。 However, the transporting device can lower the gantry in the front-rear direction or the left-right direction, but the lowered gantry is excessive in its weight and the weight of the glass to be mounted. It was very difficult to make adjustments. The position of the gantry can be readjusted by remounting the gantry on the transporting device and moving the transporting device, but this operation takes time and effort.

そこで、案出されたのが本考案であって、搭載する架台の位置を容易に微調整可能な架台用微調整及び位置決め装置を提供することを目的としている。 Therefore, the present invention has been devised, and an object thereof is to provide a gantry fine adjustment and positioning device that can easily finely adjust the position of the gantry to be mounted.

本願の請求項１の考案は、第１通気路（１１）が形成された底座（１０）と、前記底座（１０）の中央に設置され、該底座（１０）における第１通気路（１１）と連通する第２通気路（２１）が形成され、上部に芯軸スリーブ（２０１）が取り付けられた芯軸（２０）と、前記芯軸（２０）に環設されると共に、該芯軸（２０）における第２通気路（２１）と連通する第３通気路（３１１）が形成される浮動盤（３１）と前記芯軸スリーブ（２０１）の下方に位置するように浮動盤（３１）と連結する載り台（３６）とを有するロックユニット（３０）と、前記底座（１０）の周縁に設置され、収容空間が形成されると共に、底部に前記ロックユニット（３０）の底部を支持する載架板（４１）が設置されるハウジング（４０）と、伸縮自在であり、一端が前記芯軸スリーブ（２０１）の周縁に当接する内部ピンセットと一端が前記ハウジング（４０）の内面に当接する外部ピンセットとが設けられると共に、載り台（３６）の上面に当接する複数のスチールボール（５８）が設置される架設盤（５１）を有する調整ユニット（５０）と、前記ハウジング（４０）の上部に設置される上部板（６１）を有する載置ユニット（６０）とを備えていることを特徴とする架台用微調整及び位置決め装置、を提供する。 The invention of claim 1 of the present application includes a bottom seat (10) in which a first air passage (11) is formed, and a first air passage (11) in the bottom seat (10) that is installed in the center of the bottom seat (10). A second vent passage (21) communicating with the core shaft (20) is attached to the upper portion of the core shaft (20), and the core shaft (20) is connected to the core shaft (20). 20) in which a third air passage (311) communicating with the second air passage (21) is formed, and a floating disc (31) so as to be positioned below the core shaft sleeve (201). A lock unit (30) having a mounting base (36) to be connected, and a mount that is installed on the periphery of the bottom seat (10) to form a housing space and support the bottom of the lock unit (30) at the bottom. A housing (40) in which the base plate (41) is installed, and telescopic There are provided an internal tweezers whose one end is in contact with the peripheral edge of the core sleeve (201) and an external tweezers whose one end is in contact with the inner surface of the housing (40). An adjustment unit (50) having an installation board (51) on which a steel ball (58) is installed, and a mounting unit (60) having an upper plate (61) installed on the upper part of the housing (40). Provided is a gantry fine adjustment and positioning device characterized by comprising the gantry.

本願の請求項２の考案は、前記架設盤（５１）は、貫通孔を有し、複数の溝（５２）が放射状に形成された環状体であり、該架設盤（５１）の外周縁及び貫通孔の内面に夫々複数の貫通孔（５４１）（５５１）を有する外部環体（５４）と内部環体（５５）が設けられると共に、該外部環体（５４）と内部環体（５５）との間に連結棒（５９）が設けられ、
スプリング（５３）と外部ピン（５６）とを有する前記外部ピンセットと、スプリング（５３）と内部ピン（５７）とを有する前記内部ピンセットのいずれもが前記複数の溝（５２）の１つに設置され、該外部ピンの一端をスプリング（５３）にプレロードをかけさせながら他端を前記外部環体（５４）における貫通孔（５４１）に通らせてハウジング（４０）の内面に当接させ、該内部ピンの一端をスプリング（５３）にプレロードをかけさせながら他端を前記内部環体（５５）における貫通孔（５５１）に通らせて芯軸スリーブ（２０１）の外面に当接させることを特徴とする請求項1に記載の架台用微調整及び位置決め装置、を提供する。 In the invention of claim 2 of the present application, the erection board (51) is an annular body having a through hole and a plurality of grooves (52) formed radially, and an outer peripheral edge of the erection board (51) and An outer ring (54) and an inner ring (55) each having a plurality of through holes (541) and (551) are provided on the inner surface of the through hole, and the outer ring (54) and the inner ring (55). A connecting rod (59) is provided between
Both the external tweezers having a spring (53) and an external pin (56) and the internal tweezers having a spring (53) and an internal pin (57) are installed in one of the plurality of grooves (52). One end of the external pin is applied to the spring (53) with the other end passing through the through hole (541) in the external ring (54) to contact the inner surface of the housing (40), One end of the internal pin is preloaded on the spring (53), and the other end is passed through the through hole (551) in the internal ring body (55) and brought into contact with the outer surface of the core sleeve (201). The gantry fine adjustment and positioning device according to claim 1 is provided.

本願の請求項３の考案は、前記複数の溝（５２）に設置される外部ピンセットと内部ピンセットとが交互に配置されていることを特徴とする請求項２に記載の架台用微調整及び位置決め装置、を提供する。 The contrivance according to claim 3 of the present application is characterized in that the external tweezers and the internal tweezers installed in the plurality of grooves (52) are alternately arranged. Device.

本願の請求項４の考案は、前記ロックユニット（３０）における浮動盤（３１）に複数のスプリング（３３）が設けられると共に、該浮動盤（３１）の外周縁に外側環体（３４）が設けられ、該外側環体（３４）に、前記載り台（３６）と浮動盤（３１）との間に位置すると共に、底部が該スプリング（３３）の上部に当接する中間板（３５）が設けられていることを特徴とする請求項１乃至３の何れか一項に記載の架台用微調整及び位置決め装置、を提供する。 In the invention of claim 4 of the present application, a plurality of springs (33) are provided on the floating plate (31) in the lock unit (30), and an outer ring (34) is provided on the outer peripheral edge of the floating plate (31). An intermediate plate (35) is provided on the outer ring body (34), which is located between the aforementioned stand (36) and the floating plate (31), and whose bottom part is in contact with the upper part of the spring (33). The gantry fine adjustment and positioning device according to any one of claims 1 to 3, wherein the gantry fine adjustment and positioning device is provided.

本願の請求項５の考案は、前記浮動盤（３１）に軸孔（３２）が形成されると共に、該軸孔（３２）の内壁における、前記芯軸（２０）の第２通気路（２１）の開口より外側に環状溝（３２１）が形成されていることを特徴とする請求項４に記載の架台用微調整及び位置決め装置、を提供する。 In the invention of claim 5 of the present application, a shaft hole (32) is formed in the floating plate (31), and a second air passage (21) of the core shaft (20) in the inner wall of the shaft hole (32). The pedestal fine adjustment and positioning device according to claim 4, wherein an annular groove (321) is formed outside the opening.

本考案は上記の課題を解決するものであり、重量物の入った架台を台座に設置された本考案に載せる時に、手で架台を動かすと、調整ユニットにおける内部ピンセットが芯軸スリーブにより押圧されて溝に入り込むので、載置ユニットが架台と一緒に移動可能となる。そして、圧縮空気を第１通気路に流し込むと、圧縮空気によりロックユニットにおける載り台が押し上げられ、該載り台によりスチールボールが押動されて移動板の底部に当接することから、架台の位置の微調整を行った後に上部板を位置決めさせることができるので、本考案によれば、運搬装置を使用することなく容易に架台の位置の微調整及び位置決めを行うことができる。 The present invention solves the above-mentioned problems, and when the platform containing heavy objects is placed on the present invention installed on the pedestal, if the platform is moved by hand, the internal tweezers in the adjustment unit are pressed by the core shaft sleeve. Since it enters the groove, the mounting unit can move together with the gantry. Then, when compressed air is poured into the first air passage, the mounting base in the lock unit is pushed up by the compressed air, and the steel ball is pushed by the mounting base and comes into contact with the bottom of the moving plate. Since the upper plate can be positioned after performing fine adjustment, according to the present invention, the position of the gantry can be finely adjusted and positioned easily without using a transport device.

本考案に係る架台用微調整及び位置決め装置の平面透視図である。It is a plane perspective view of the gantry fine adjustment and positioning device according to the present invention. 図１に示す架台用微調整及び位置決め装置の２−２断面図である。It is 2-2 sectional drawing of the fine adjustment and positioning apparatus for mounts shown in FIG. 図１に示す架台用微調整及び位置決め装置の３−３断面図である。It is 3-3 sectional drawing of the fine adjustment and positioning apparatus for mounts shown in FIG. 図１に示す架台用微調整及び位置決め装置の４−４断面図である。FIG. 4 is a 4-4 sectional view of the gantry fine adjustment and positioning device shown in FIG. 1. 本考案に係る架台用微調整及び位置決め装置により位置調整を行う状態を示す図である。It is a figure which shows the state which performs position adjustment with the fine adjustment and positioning device for mounts concerning this invention. 第１通気路に空気を流し込み、ロックユニットにより調整ユニットを位置決めする状態を示す断面図である。It is sectional drawing which shows the state which poured air into the 1st ventilation path and positions an adjustment unit with a lock unit. 台座に設置される本考案に係る架台用微調整及び位置決め装置及び架台の位置の調整を行う状態を示す図である。It is a figure which shows the state which performs the fine adjustment and positioning apparatus for bases based on this invention installed in a base, and adjustment of the position of a base.

以下、添付図面を参照して本考案の好適な実施の形態を詳細に説明する。尚、下記実施例は、本考案の好適な実施の形態を示したものにすぎず、本考案の技術的範囲は、下記実施例そのものに何ら限定されるものではない。 Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In addition, the following Example is only what showed the preferred embodiment of this invention, and the technical scope of this invention is not limited to the following Example itself at all.

図１は本考案に係る架台用微調整及び位置決め装置の平面透視図であり、図２は図１に示す架台用微調整及び位置決め装置の２−２断面図であり、図３は図１に示す架台用微調整及び位置決め装置の３−３断面図であり、図４は図１に示す架台用微調整及び位置決め装置の４−４断面図であり、図５は本考案に係る架台用微調整及び位置決め装置により位置調整を行う状態を示す図であり、図６は第１通気路に空気を流し込み、ロックユニットにより調整ユニットを位置決めする状態を示す断面図であり、図７は台座に設置される本考案に係る架台用微調整及び位置決め装置及び架台の位置の調整を行う状態を示す図である。 FIG. 1 is a plan perspective view of a gantry fine adjustment and positioning device according to the present invention, FIG. 2 is a 2-2 cross-sectional view of the gantry fine adjustment and positioning device shown in FIG. 1, and FIG. 4 is a cross-sectional view of the gantry for fine adjustment and positioning shown in FIG. 4, FIG. 4 is a cross-sectional view of the gantry for fine adjustment and positioning shown in FIG. 4, and FIG. FIG. 6 is a view showing a state in which position adjustment is performed by the adjustment and positioning device, FIG. 6 is a cross-sectional view showing a state in which air is poured into the first air passage, and the adjustment unit is positioned by the lock unit, and FIG. It is a figure which shows the state which performs the position adjustment of the fine adjustment and positioning apparatus for a gantry and the gantry concerning the present invention.

図１乃至図４に示すように、本考案に係る架台用微調整及び位置決め装置は、底座（１０）と、芯軸（２０）と、ロックユニット（３０）と、ハウジング（４０）と、調整ユニット（５０）と、載置ユニット（６０）とを備える構成である。
その内、前記底座（１０）には、圧縮空気供給源に接続するための第１通気路（１１）が形成され、
前記芯軸（２０）には、前記底座（１０）の中央に設置されると共に、上部に芯軸スリーブ（２０１）が取り付けられ、底座（１０）における第１通気路（１１）と連通する第２通気路（２１）が形成され、前記ロックユニット（３０）には、浮動盤（３１）と、載り台（３６）とを有し、該浮動盤（３１）は、前記芯軸（２０）に環設されると共に、芯軸（２０）における第２通気路（２１）と連通する第３通気路（３１１）が形成され、該載り台（３６）は、芯軸スリーブ（２０１）の下方に位置するように浮動盤（３１）と連結されている。 As shown in FIGS. 1 to 4, the gantry fine adjustment and positioning device according to the present invention includes a bottom seat (10), a core shaft (20), a lock unit (30), a housing (40), and an adjustment. It is a structure provided with a unit (50) and a mounting unit (60).
Among them, the bottom seat (10) is formed with a first air passage (11) for connection to a compressed air supply source,
The core shaft (20) is installed at the center of the bottom seat (10), and a core shaft sleeve (201) is attached to the upper portion of the core shaft (20) so as to communicate with the first air passage (11) in the bottom seat (10). Two air passages (21) are formed, and the lock unit (30) includes a floating plate (31) and a mounting base (36), and the floating plate (31) includes the core shaft (20). And a third air passage (311) communicating with the second air passage (21) in the core shaft (20) is formed, and the mounting base (36) is located below the core shaft sleeve (201). It is connected with the floating board (31) so that it may be located in.

更に、前記ロックユニット（３０）における浮動盤（３１）に複数のスプリング（３３）が設けられると共に、浮動盤（３１）の外周縁に外側環体（３４）が設けられ、該外側環体（３４）に、前記載り台（３６）と浮動盤（３１）との間に位置すると共に、底部が前記スプリング（３３）の上部に当接する中間板（３５）が設けられている。
また、前記浮動盤（３１）に軸孔（３２）が形成されると共に、該軸孔（３２）の内壁における、前記芯軸（２０）の第２通気路（２１）の開口より外側に環状溝（３２１）が形成されている。 Furthermore, a plurality of springs (33) are provided on the floating plate (31) of the lock unit (30), and an outer ring (34) is provided on the outer peripheral edge of the floating plate (31). 34) is provided with an intermediate plate (35) which is located between the above-mentioned stand (36) and the floating plate (31) and whose bottom abuts against the upper portion of the spring (33).
A shaft hole (32) is formed in the floating plate (31), and an annular shape is formed on the inner wall of the shaft hole (32) outside the opening of the second air passage (21) of the core shaft (20). A groove (321) is formed.

前記ハウジング（４０）は、前記底座（１０）に設置され、収容空間が形成されると共に、底部に前記ロックユニット（３０）の底部を支持する載架板（４１）が設置されている。
前記調整ユニット（５０）は、架設盤（５１）を有し、該架設盤（５１）に、載り台（３６）に当接するスチールボール（５８）と、伸縮自在であり、一端が前記芯軸スリーブ（２０１）の周縁に当接する内部ピンセットと一端が前記ハウジング（４０）の内面に当接する外部ピンセットとが設けられている。 The housing (40) is installed on the bottom seat (10) to form an accommodation space, and a mounting plate (41) for supporting the bottom of the lock unit (30) is installed on the bottom.
The adjustment unit (50) has an erection board (51). The erection board (51) is extendable and retractable with a steel ball (58) that comes into contact with the mounting base (36). An internal tweezers that abuts the peripheral edge of the sleeve (201) and an external tweezers that one end abuts on the inner surface of the housing (40) are provided.

前記架設盤（５１）は、貫通孔を有し、複数の溝（５２）が放射状に形成された環状体であり、前記架設盤（５１）の外周縁及び貫通孔の内面に夫々複数の貫通孔（５４１）（５５１）を有する外部環体（５４）と内部環体（５５）が設けられ、該外部環体（５４）と内部環体（５５）との間に連結棒（５９）が設けられ、更に、スプリング（５３）と外部ピン（５６）とを有する前記外部ピンセットと、スプリング（５３）と内部ピン（５７）とを有する前記内部ピンセットのいずれもが前記複数の溝（５２）の１つに設置され、該外部ピンの一端をスプリング（５３）にプレロードをかけさせながら他端を前記外部環体（５４）における貫通孔（５４１）に通らせてハウジング（４０）の内面に当接させ、該内部ピンの一端をスプリング（５３）にプレロードをかけさせながら他端を前記内部環体（５５）における貫通孔（５５１）に通らせて芯軸スリーブ（２０１）の外面に当接させている。 The installation board (51) is an annular body having a through hole and a plurality of grooves (52) formed radially, and a plurality of through holes are formed on the outer peripheral edge of the installation board (51) and the inner surface of the through hole, respectively. An outer ring (54) and an inner ring (55) having holes (541) and (551) are provided, and a connecting rod (59) is provided between the outer ring (54) and the inner ring (55). Further, both the external tweezers provided with the spring (53) and the external pin (56) and the internal tweezers including the spring (53) and the internal pin (57) are provided in the plurality of grooves (52). One end of the external pin is preloaded on the spring (53) and the other end is passed through the through hole (541) in the external ring (54) to the inner surface of the housing (40). Abut one end of the internal pin 53) the while allowed prestressed and thereby pass the other end through hole (551) in said inner ring member (55) is brought into contact with the outer surface of the core shaft sleeve (201).

前記載置ユニット（６０）は、上部板（６１）と、移動板（６２）とを有し、該上部板（６１）は、ハウジング（４０）の上部に設置され、該移動板は、上部板（６１）とハウジング（４０）との間に設置されている。 The mounting unit (60) includes an upper plate (61) and a moving plate (62), and the upper plate (61) is installed on an upper portion of the housing (40). It is installed between the plate (61) and the housing (40).

図５に示すように、調整ユニット（５０）は、載置ユニット（６０）に横方向の作用力が加わった時に横方向に移動可能であり、調整ユニット（５０）が移動する時、一部の外部ピン（５６）は、ハウジング（４０）により押圧されて溝（５２）に入り込み、一部の内部ピン（５７）は芯軸スリーブ（２０１）に押圧されて溝（５２）に入り込む。
また、図６に示すように、圧縮空気を第１通気路（１１）に流し込むと、圧縮空気は、該第１通気路（１１）と連通する第２通気路（２１）に流れ込み且つ載り台（３６）を押し上げ、その後、該載り台（３６）によりスチールボール（５８）が押動されて移動板（６２）の底部に当接し、上部板（６１）を位置決めする。 As shown in FIG. 5, the adjustment unit (50) is movable in the lateral direction when a lateral acting force is applied to the mounting unit (60), and a part of the adjustment unit (50) is moved when the adjustment unit (50) is moved. The outer pin (56) is pressed by the housing (40) and enters the groove (52), and a part of the inner pin (57) is pressed by the core shaft sleeve (201) and enters the groove (52).
Further, as shown in FIG. 6, when compressed air is poured into the first ventilation path (11), the compressed air flows into the second ventilation path (21) communicating with the first ventilation path (11) and is placed on the platform. (36) is pushed up, and then the steel ball (58) is pushed by the mounting table (36) to come into contact with the bottom of the moving plate (62) to position the upper plate (61).

上記の構成によれば、本考案に係る架台用微調整及び位置決め装置に重量物を載置した時、該重量物の位置の微調整を容易に行うことができ、図７に示すように、台座（７０）に複数の架台用微調整及び位置決め装置を設置し、そして運搬装置により搬送される、例えば数十枚の大型ガラス基板の入った架台（８０）を、それらの架台用微調整及び位置決め装置に搭載する場合、操作員は手で架台（８０）を移動させ、圧縮空気を各通気路（１１）（２１）（３１１）に流し込めば、載置ユニット（６０）を設定位置に位置決めすることができるので、架台（８０）の位置の調整が非常に容易である。 According to the above configuration, when a heavy object is placed on the gantry fine adjustment and positioning device according to the present invention, the position of the heavy object can be easily finely adjusted, as shown in FIG. A plurality of pedestal fine adjustment and positioning devices are installed on the pedestal (70), and the pedestal (80) containing, for example, several tens of large glass substrates is conveyed by the transport device. When mounted on the positioning device, the operator manually moves the pedestal (80) and flows compressed air into the air passages (11), (21), and (311), thereby placing the mounting unit (60) in the set position. Since it can position, adjustment of the position of a mount frame (80) is very easy.

本考案は上記の構成を有するので、載置ユニットに搭載される重量物の位置の調整及び位置決めを容易に行うことができる。 Since the present invention has the above-described configuration, it is possible to easily adjust and position the heavy object mounted on the mounting unit.

１架台用微調整及び位置決め装置
１０底座
１１第１通気路
２０芯軸
２０１芯軸スリーブ
２１第２通気路
３０ロックユニット
３１浮動盤
３１１第３通気路
３２軸孔
３２１環状溝
３３スプリング
３４外側環体
３５中間板
３６載り台
４０ハウジング
４１載架板
５０調整ユニット
５１架設盤
５２溝
５３スプリング
５４外部環体
５４１貫通孔
５５内部環体
５５１貫通孔
５６外部ピン
５７内部ピン
５８スチールボール
５９連結棒
６０載置ユニット
６１上部板
６２移動板
７０台座
８０架台 DESCRIPTION OF SYMBOLS 1 Fine adjustment and positioning apparatus for base 10 Base seat 11 1st ventilation path 20 Core shaft 201 Core shaft sleeve 21 2nd ventilation path 30 Lock unit 31 Floating board 311 3rd ventilation path 32 Shaft hole 321 Annular groove 33 Spring 34 Outer ring 35 Intermediate plate 36 Mounting base 40 Housing 41 Mounting plate 50 Adjustment unit 51 Installation board 52 Groove 53 Spring 54 External ring 541 Through hole 55 Internal ring body 551 Through hole 56 External pin 57 Internal pin 58 Steel ball 59 Connecting rod 60 Mount Mounting unit 61 Upper plate 62 Moving plate 70 Pedestal 80 Mounting base

Claims

A bottom seat (10) in which a first air passage (11) is formed;
A second air passage (21) is formed in the center of the bottom seat (10) and communicates with the first air passage (11) in the bottom seat (10), and a core shaft sleeve (201) is attached to the upper portion. A core shaft (20);
A floating plate (31) formed around the core shaft (20) and formed with a third air passage (311) communicating with the second air passage (21) in the core shaft (20), and the core shaft A lock unit (30) having a platform (36) connected to the floating plate (31) so as to be positioned below the sleeve (201);
A housing (40) installed at the periphery of the bottom seat (10) to form a housing space and a mounting plate (41) supporting the bottom of the lock unit (30) at the bottom;
An internal tweezers that is extendable and has one end abutting on the peripheral edge of the core shaft sleeve (201) and an external tweezers having one end abutting on the inner surface of the housing (40) are provided on the upper surface of the mounting table (36). An adjustment unit (50) having an erection panel (51) on which a plurality of steel balls (58) to be in contact are installed;
A gantry fine adjustment and positioning device comprising: a mounting unit (60) having an upper plate (61) installed on an upper portion of the housing (40).

The installation board (51) is an annular body having through holes and a plurality of grooves (52) formed radially, and a plurality of through holes are formed on the outer peripheral edge of the installation board (51) and the inner surface of the through holes, respectively. An outer ring (54) and an inner ring (55) having holes (541) and (551) are provided, and a connecting rod (59) is provided between the outer ring (54) and the inner ring (55). Is provided,
Both the external tweezers having a spring (53) and an external pin (56) and the internal tweezers having a spring (53) and an internal pin (57) are installed in one of the plurality of grooves (52). One end of the external pin is applied to the spring (53) with the other end passing through the through hole (541) in the external ring (54) to contact the inner surface of the housing (40), One end of the internal pin is preloaded on the spring (53), and the other end is passed through the through hole (551) in the internal ring body (55) and brought into contact with the outer surface of the core sleeve (201). 2. The fine adjustment and positioning device for a gantry according to claim 1.

3. The gantry fine adjustment and positioning device according to claim 2, wherein the external tweezers and the internal tweezers installed in the plurality of grooves (52) are alternately arranged.

The floating plate (31) in the lock unit (30) is provided with a plurality of springs (33), and an outer ring (34) is provided on the outer peripheral edge of the floating plate (31). ) Is provided with an intermediate plate (35) which is located between the above-mentioned stand (36) and the floating plate (31) and whose bottom abuts against the top of the spring (33). The gantry fine adjustment and positioning device according to any one of claims 1 to 3.

A shaft hole (32) is formed in the floating plate (31), and an annular groove (outside the opening of the second air passage (21) of the core shaft (20) on the inner wall of the shaft hole (32)). 321) is formed, The gantry fine adjustment and positioning device according to claim 4, wherein the gantry is finely adjusted.