JP3140102B2 - Pitch tool manufacturing method and device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for manufacturing a pitch tool used for polishing optical elements such as lenses and mirrors.

[0002]

2. Description of the Related Art Conventionally, the above-mentioned pitch tool has been manufactured by using a pitch tool working jig 100 as shown in FIG.

[0003] This pitch tool manufacturing jig 100 includes a pellet 201 comprising a cylindrical small shaft portion 201a and a cylindrical large shaft portion 201b formed concentrically with the small shaft portion 201a. The large shaft portion 201b of the pellet 201
For manufacturing a pitch tool 200 comprising a pitch 202 fixed to a lower part of the pitch tool 200.

[0004] The pellet holder 101 includes a pellet 201.
And a large hole 101b into which the large shaft portion 201b of the pellet 201 fits, and an end face 101c on the side where the large hole 101b is formed.
Is a reference surface 300a on the upper surface of the pressing table 300 made of glass.
It is a flat surface that comes into contact with. Here, pellet 2
The length of the large shaft portion 201b of No. 01 is smaller than the height of the large hole 101b of the pellet holder 101. Further, a pitch 202 is formed on the reference surface 300a of the pressing table 300.
Nylon net 1 according to the uneven shape to be formed
02 (see FIG. 5).

Next, a method for manufacturing the pitch tool 60 using the pitch tool manufacturing jig 100 will be described.

[0006] First, the pellet 201 is placed in the large shaft portion 20.
It is fitted into the pellet holder 101 until 1b contacts the upper surface of the large hole 101b of the pellet holder 101.

Next, a predetermined amount of heated pitch 202 is inserted into the space formed below the pellet 201, and the end face 101 c of the pellet holder 101 is pressed against the reference face 300 a of the pressing table 300. Then, cooling is performed until the pitch 202 is fixed to the pellet 201. Subsequently, the pellet 201 to which the pitch 202 is fixed is removed from the pellet holder 101 and pressed against the net 102 stretched on the reference surface 300a. Then, the pitch 202 plastically flows in the mesh of the mesh 102, and irregularities corresponding to the shape of the mesh 102 are formed on the pitch processing surface 202 a of the pitch 202. Finally, when the net 102 is peeled off from the pitch 202, the pitch tool 200 is completed.

[0008]

However, the above-described conventional jig for manufacturing a pitch tool has the following problems.

(1) Since the pitch unevenness of the pitch tool is formed by a mesh, the size of the mesh and the
The thickness of the yarn changes, and every time a pitch tool is manufactured, the unevenness of the pitch tool varies.

(2) When forming irregularities on the pitch, the distance from the pellet to the reference surface of the pressing table is not constant, and the thickness of the pitch varies every time a pitch tool is manufactured.

(3) Since the types of nets are limited, the types of irregularities are limited.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems of the prior art, and provides a method of manufacturing a pitch tool and an apparatus therefor, which can easily manufacture a pitch tool having a uniform polishing uneven pattern. It is an object.

[0013]

SUMMARY OF THE INVENTION The lens, forming the abrasive uneven pattern on the polishing surface of the pitch tool to be used for polishing an optical element such as a mirror, a method for producing a pitch tool, the pitch to be used Temperature higher than the softening point of
At a first temperature, which is degrees, the pitch to be used is
A first step of keeping , and after the first step, the use
Lower the temperature of the pitch and soften the pitch used
At a second temperature, which is below the point temperature, the used pin
A second step of holding the switch for a certain time, and reaching the second temperature.
From the time when the pitch is used,
Press the transfer plate to form the pitch surface of the desired pitch.
Start and press the temperature of the pitch to be used and the transfer plate
Hold for a certain period of time while maintaining a predetermined relationship with the mounting force
After the third step and the third step, the predetermined relationship is maintained.
The temperature of the pitch to be used and the pressing
And lower the temperature of the pitch used to room temperature.
At the point when the pressing force is applied to the pitch to be used.
And a fourth step .

The present invention also relates to a pitch tool manufacturing apparatus for forming an uneven pattern for polishing on a polished surface of a pitch tool used for polishing an optical element such as a lens or a mirror. A transfer plate holder on which a transfer plate having a pattern surface with irregularities formed according to the condition is detachably mounted, and the pattern surface of the transfer plate mounted on the transfer plate holder is pressed against the polishing surface of the pitch tool. Pressurizing means for, and a pitch tool holding table that is arranged to face the pressurizing means and holds the pitch tool,
A pressure sensor for detecting a pressing force of the pressing means, a heating means for heating a surface corresponding to a polished surface of the pitch tool to a softening temperature, and a cooling means for cooling the pitch tool A temperature sensor for detecting a temperature of the pitch tool, a storage unit for storing a predetermined time-dependent change program of a pressing pressure by the pressing unit and a heating temperature by the heating unit, While driving the pressurizing means according to the change program, the pressing force detected by the pressure sensor is compared with a set pressing force determined by the time change program, and the pressing force of the pressurizing means is compared. A pressurization control unit that issues a pressure control command for correcting the temperature, and a detection detected by the temperature sensor while driving the heating unit according to the time-varying program. In order to correct the temperature of the pitch tool by comparing the temperature with a set temperature determined by the time change program, a cooling command for driving the cooling means or a heating command for driving the heating means is issued. And a control unit having a temperature control unit.

[0015]

According to the method of manufacturing a pitch tool of the present invention, a transfer plate having a pattern surface on which unevenness is formed in accordance with a polishing unevenness pattern is used. Since the pattern surface of the transfer plate is pressed against the pitch tool while the pitch tool is heated to the softening temperature, the manufacturing process can always be performed under certain conditions, and the unevenness of the transferred concave and convex polishing pattern is eliminated.

According to the pitch tool forming apparatus of the present invention, the transfer plate removably mounted on the transfer plate holder is pressed against the pitch tool to form an uneven pattern for polishing on the pitch tool. By doing so, it is possible to transfer various uneven patterns for polishing. Further, during the forming operation, the temperature of the pitch tool and the pressing force of the transfer plate by the pressurizing means are detected, and the detected values are set by a control unit in accordance with a predetermined time change program set value. Therefore, the molding operation can be always performed under certain conditions.

[0017]

Next, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a longitudinal sectional view showing an embodiment of a pitch tool manufacturing apparatus according to the present invention.

The pitch tool forming apparatus according to the present embodiment includes a pellet 31 comprising a cylindrical small shaft portion 31b formed concentrically with a lower surface of a cylindrical large shaft portion 31a, and a large shaft of the pellet 31. The pitch tool 30 is fixed to the upper surface of the portion 31a, and is for manufacturing a pitch tool 30 composed of a pitch 32 whose surface is an uneven pitch processing surface 32a, and a pellet for holding the pitch tool 30. Holder 11
And a transfer plate holder 12.

The pellet holder 11 is provided with a circular small hole 11a for fitting with the small shaft portion 31b of the pellet 31. Reference plane 1
It is a flat surface that comes into contact with 2a. Further, inside the pellet holder 11, a water inlet 14a and a water outlet 14b into which cooling water for cooling the pitch tool 30 is injected.
Is provided with a cooling water jacket 14 which is cooling means connected to the cooling water jacket 14. Further, the pellet holder 11 has a flat lower surface, and is in contact with an electrothermal heater 50 that heats the pitch tool 30 to soften it. The electrothermal heater 50 is driven by a heating drive signal from a control device (see FIG. 2) described later.

The lower portion of the transfer plate holder 12 is a large hole 12b fitted with the pellet holder 11,
A flat pellet holder reference surface 12a is set in the large hole 12b.
Are formed. The upper portion of the transfer plate holder 12 is provided with a transfer plate 13 of a constant thickness having a pattern surface on which a large number of small holes 13a corresponding to a polishing concavo-convex pattern to be formed on a pitch processing surface 32a having a pitch 32 are provided in advance. Transfer plate mounting hole 12c for tightly fitting the molding reference plate 20 having the pitch plane forming reference surface 20a with the transfer plate mounting hole 1.
A flat attitude reference surface 12d for defining the attitude of the transfer plate 13 and the molding reference plate 20 in 2c is formed.
This attitude reference surface 12d is parallel to the flat pellet holder reference surface 12a in the large hole 12b. The transfer plate 13 and the forming reference plate 20 are integrally fitted into the transfer plate mounting holes 12c, and are fixed to the transfer plate holder 12 by fixtures 12e. In this embodiment, the fixture 12e is screwed to the transfer plate holder 12 using a plurality of screws 12f.

Further, in this embodiment, the pressing means for pressing the transfer plate 13 against the pitch tool 30 is a pressurizing member having a pressing shaft 40a for pressing the transfer plate 13 in contact with the forming reference plate 20. A pressure cylinder 40, a frame 41 for fixedly holding the cylinder 40, and the frame 41 together with the pellet holder 11 and the transfer plate holder 12 mounted thereon, and the cylinder 4
And a base 42 which receives a pressing force in opposition to the base 42. The upper surface of the base 42 is flat and is in contact with the electric heater 50.

Further, a temperature sensor 51 for detecting the temperature of the pitch tool 30 heated by the electric heater 50 is fixed to the small hole 11 a on the upper surface of the pellet holder 11. A pressure sensor 52 for detecting a pressing force against the transfer plate 13 is fixed to the inserted pressure shaft 40a. These temperature sensor 51 and pressure sensor 5
The detected temperature and the pressing force detected by 2 are transferred to a control device described later as a detected temperature signal and a detected pressing force signal. The temperature sensor 51 of the present embodiment is made of a platinum resistance temperature sensor, and the pressure sensor 52 is made of a load cell.

The pressing force of the pressurizing cylinder 40 is controlled by changing the opening of the pressure regulating valve 61 in accordance with a pressure valve control signal output from a control device described later. The control of the flow rate of the cooling water to 14 is performed by changing the opening degree of the flow control valve 62 in accordance with the flow valve control signal similarly output from the control device.

A control device for controlling the pressing force, controlling the flow rate of the cooling water, and controlling the heating of the pitch tool 30 will now be described with reference to FIG.

The control device according to the present embodiment includes an input device 71 which is an input portion of an operation program and a control program of the pitch tool manufacturing device including the time change program of the heating and pressing force, and the input device 71. 72 that stores the operation program and control program input from the
A processor 73 that operates in accordance with the operation program and the control program;
/ D converters 74 and 76, first to third D / A converters 75, 77 and 78, first and second valve drive amplifiers 79 and 80, and an electric heater amplifier 81. .

The first A / D converter 74 converts the detected pressing signal from the pressure sensor 52 into a digital code and transfers it to the processor 73 as detected pressure data. The second A / D converter 76 converts the detected temperature signal from the temperature sensor 51 into a digital code and transfers it to the processor 73 as detected temperature data.

The processor 73 serves as both a pressurizing control section and a temperature controlling section. The processor 73 refers to the detected temperature data and the detected pressure data and detects the temperature of the pitch tool 30 detected by the temperature sensor 51 and the pressure sensor. The pressure control command, the heating command, and the cooling command are output so that the pressing force detected by the 52 becomes a set value determined by the time change program.

The first D / A converter 75 converts the pressure control command output from the processor 73 into an analog signal and transfers the analog signal to a first valve drive amplifier 79 for driving the pressure regulating valve 61. . The first valve drive amplifier 79 receives an analogized pressure control command, outputs a pressure drive signal indicating the opening of the pressure control valve 61 in accordance with the pressure control command, and controls the pressure control valve 61 to operate. Drive.

The second D / A converter 77 converts the cooling command output from the processor 103 into an analog signal, and transfers the analog signal to a second valve drive amplifier 80 for driving the flow regulating valve 92. The second valve drive amplifier 80 receives the analog cooling command, and outputs a flow valve drive signal indicating the opening of the flow control valve 62 in accordance with the cooling command to drive the flow control valve 62. I do.

The third D / A converter 78 converts the heating command output from the processor 73 into an analog signal and transfers the analog signal to an electric heater amplifier 81 for driving the electric heater 50. The electric heater amplifier 81 receives an analogized heating command, and outputs a heating drive signal indicating a heating amount of the electric heating heater 50 according to the heating command,
The electric heater 50 is driven.

The memory 72 in which the above-mentioned operation program and control program are stored is also used by the processor 73 as a temporary storage area for temperature data, pressure data, cooling water flow rate data, and the like.

Next, the pitch tool manufacturing operation in the present embodiment will be described.

First, the small shaft portion 31b of the pellet 31 is inserted into the small hole 11a of the pellet holder 11 until the lower surface of the large shaft portion 31a of the pellet 31 contacts the pressing surface 11b.

Subsequently, an appropriate amount of the pitch 32 is placed on the upper surface of the large shaft portion 31a of the pellet 31. Here, the appropriate amount is an amount slightly larger than the pitch used at the time of completion.
Then, the transfer plate mounting hole 12 is provided in the transfer plate holder 12.
The transfer plate 13 and the forming reference plate 20 are fitted into the transfer member c, and are fixed using the fixtures 12e and the plurality of screws 12f, so that the transfer plate holder 12, the transfer plate 13 and the forming reference plate 20 are integrated. Next, the large hole 12 b of the transfer plate holder 12 is fitted to the outer diameter of the pellet holder 11, and the transfer plate 13 is placed on the upper surface of the pitch 32. The thus-combined pellet holder 11 and transfer plate holder 12 are placed on the electrothermal heater 50 and placed on the base 42 at a position facing the pressurizing cylinder 40. The operation preparation is now completed.

Next, the forming process of the concave / convex pattern for polishing is started.

At this time, a preset time change program of the heating and pressing force is stored in the memory 72 via the input device 71. An example of this temporal change program is shown in FIG. 3, and an example of the input data format is shown in Table 1.

[0038]

[Table 1] The molding process is started via the input device 71. First, while maintaining the relationship between time and temperature shown in FIG. 3 from room temperature, the temperature slightly exceeds the softening point temperature of the used pitch 32 material (this embodiment). In this example, it is heated up to about 100 ° C. ([1] in FIG. 3). After maintaining this temperature for a certain period of time (about 30 seconds), the temperature of the pitch 32 is raised to the softening point temperature or a temperature slightly lower than the softening point temperature (about 75 ° C. in this embodiment) while maintaining the relationship between time and temperature. The temperature is lowered and maintained at that temperature for about 1 minute ([2] in FIG. 3). When the temperature reaches this temperature (about 75 ° C.), the pitch tool 30
Start pressing on.

First, while maintaining the relationship between time, pressing force and temperature shown in FIG. 3, a predetermined pressing force (about 1 kg) is applied.
f / cm ² ) and hold for a certain period of time ([3] in FIG. 3). Thereafter, similarly, while maintaining the relationship between the time, the pressing force, and the temperature shown in FIG. 3, the temperature and the pressing force are gradually reduced, and the pressing force is set to 0 when the temperature reaches room temperature.

In the above-described forming process, the temperature and the pressing force of the pitch tool 30 are monitored by the temperature sensor 51 and the pressure sensor 52, and are captured in the processor 73 in real time, and are shown in FIG. Reference is made to the time and temperature change program of the pressing force.
At this time, if there is a deviation between the detected temperature and the detected pressing force as compared with the set temperature and the set pressing force determined by the time change program, pressurizing or depressing the pressing force to correct the deviation. , The amount of cooling water to be increased or decreased, and the amount of heat generated by the electric heater 50 to be increased or decreased.

This command is transmitted to the pressure regulating valve 61 as a pressure valve driving signal via the first D / A converter 75 and the first valve driving amplifier 79 in the case of the pressing force, as described above. In the case of the flow rate of the cooling water, the second D
/ A converter 77 and second valve drive amplifier 80
Is transmitted to the flow control valve 62 as a flow valve drive signal via In addition, for the electric heater 50, the third D
The signal is transmitted as a heater drive signal via / A converter 8 and heater amplifier 81.

Finally, after the pitch 32 has cooled, the pitch tool 30 is removed from the pellet holder 11, and
The transfer plate holder 12 is disassembled. Thereby, the pitch tool 30 and the pitch 32 and the transfer plate 13 are removed from the apparatus. At this time, the pitch tool 30 and the pitch 32 are fixed, and the transfer plate 13 is attached to the pitch processing surface 32a of the pitch 32. Therefore, the transfer plate 12
The pitch tool 30 is completed by removing the excess pitch 32 protruding laterally from the pellet 31.

In the present embodiment, as the material used for the transfer plate 13, a fluororesin is preferable because it does not stick at the pitch 32 and has flexibility.

The effect of this embodiment will be described.

(1) Since irregularities having a pitch of 32 are formed by the transfer plate 13, there is no variation in the irregularities to be transferred.

(2) The number, shape and arrangement of the small holes 13a of the transfer plate 13 and the thickness of the transfer plate 13
Since it can be set freely within a range of strength not to be damaged when peeled off from the base 2, irregularities of various shapes can be formed on the pitch 32. Further, the transfer plate 13
By preventing small holes 13a from being formed in a portion corresponding to the outer side of the peripheral edge of the pitch processed surface 32a, it is possible to prevent the incompletely shaped convex portion from being formed on the peripheral edge of the pitch processed surface 32a. it can.

(3) The transfer plate 13 is the pellet holder 11
Is held with respect to the pellet 31 held at the predetermined distance, and is held at a fixed distance from the pellet 31. Pitch 32
Are always the same, and there is no variation. Also,
Since the center axis of the transfer plate 13 coincides with the center axis of the pellet 31, the unevenness of the pitch processing surface 32 a can always be formed at a fixed position with respect to the center axis of the pellet 31.

(4) When forming irregularities on the pitch 32 by the transfer plate 13, the extra pitch 32 is pushed into the pitch escape gap 11 c between the large shaft portion 31 a of the pellet 31 and the pellet holder 12. There is no hindrance that the plate holder 12 is fitted to the pellet holder 11.

(5) By automating the forming process, even if a large number of pitch tools 30 are formed, it is possible to obtain a uniform pitch tool with uniform quality.

(6) Since the molding process can be digitized and input, the process can be easily changed, and even when various pitch tools 30 are created, appropriate conditions can be set promptly.

In the above-described embodiment, the large-shaft portion 31a and the small-shaft portion 31b of the pellet 31 are each cylindrical, but this is not necessary. The shape of the pitch processing surface 32a of the pitch 32 is not limited to a plane, but may be a concave spherical surface or a convex spherical surface.

In the pressure means of this embodiment, the pressure mechanism is a cylinder pressure. Alternatively, an electromagnetic force such as a linear motor may be used.

[0053]

The present invention has the following effects because it is configured as described above.

(1) According to the pitch tool manufacturing method of the present invention, the temperature of the pitch used and the pressing force of the transfer plate
To the pitch at which the transfer plate is used while maintaining the prescribed relationship with
Since the polishing concavo-convex pattern of the transfer plate is transferred , the same concavo-convex pattern can always be formed under constant conditions, and a uniform pitch tool can be manufactured.

(2) According to the pitch tool manufacturing apparatus of the present invention, the transfer plate on which the uneven pattern corresponding to the polishing uneven pattern is formed is removably mounted on the transfer plate holder. A plurality of formed transfer plates can be exchanged and mounted, and pitch tools having various concavo-convex patterns can be easily manufactured.

(3) During the manufacturing operation, the control section compares and corrects the temperature of the pitch tool and the pressing force of the pressurizing means with the set values determined by the time change program. The conditions can always be kept constant, and a pitch tool having a constantly uneven pattern can be obtained.

[Brief description of the drawings]

FIG. 1 is a view showing one embodiment of a pitch tool manufacturing apparatus of the present invention.

FIG. 2 is a block diagram showing an example of a control unit in the pitch tool manufacturing device of the present invention.

FIG. 3 is a diagram showing an example of a time change program of a pressing force of a transfer plate by a pressing unit and a temperature of a pitch tool.

FIG. 4 is a view showing an example of a conventional pitch tool forming jig.

5 is a diagram showing a state of forming a pitch-processed surface of a pitch tool by the conventional pitch tool forming jig shown in FIG.

[Explanation of symbols]

 11 Pellet Holder 11a Small Hole 11b Mounting Surface 11c Pitch Escape Gap 12 Transfer Plate Holder 12a Pellet Holder Reference Surface 12b Large Hole 12c Transfer Plate Mounting Hole 12d Attitude Reference Surface 12e Fixture 12f Screw 13 Transfer Plate 13a Small Hole 14 Cooling Water Jacket 14a Water outlet 14b Water outlet 20 Forming reference plate 20a Pitch surface forming reference surface 30 Pitch tool 31 Pellet 31a Large shaft portion 31b Small shaft portion 32 Pitch 32a Pitch processing surface 40 Press cylinder 40a Press shaft 42 Base 50 Electrothermal heater 51 Temperature Sensor 52 Pressure sensor 61 Pressure regulating valve 62 Flow regulating valve 71 Input device 72 Memory 73 Processor 74,76 A / D converter 75,77,78 D / A converter 79,80 Valve drive amplifier 81 Electric heater amplifier

──────────────────────────────────────────────────続 き Continued on the front page (58) Fields surveyed (Int. Cl. ⁷ , DB name) B24B 13/01 B24B 37/00-37/04 B24D 3/00 340 B24D 3/28 B29C 59/00-59 / 02

Claims (5)

(57) [Claims] 1. A method of manufacturing a pitch tool, comprising forming an uneven pattern for polishing on a polished surface of a pitch tool used for polishing an optical element such as a lens or a mirror , the softening point temperature of the pitch used. Higher temperature than the first
The first process for maintaining the pitch to be used for a certain time at a temperature of
And after the first step, lower the temperature of the pitch to be used.
At a temperature equal to or lower than the softening point temperature of the pitch used.
At a certain second temperature, the pitch to be used is kept for a certain period of time
A second step, and from the time when the second temperature is reached, the pitch to be used
To form the pitch plane of the pitch to be used
Start pressing the transfer plate and start using the temperature of the pitch to be used.
And a predetermined relationship between the pressing force of the transfer plate and
A third step of holding for a predetermined time; and after the third step, gradually maintaining the predetermined relationship.
The temperature of the pitch used and the pressing force
When the temperature of the pitch used reaches room temperature,
A fourth process for eliminating the pressing force by using the pitch to be used
And a manufacturing method of the pitch tool. 2. The transfer plate is made of a fluorine-based resin.
The method for manufacturing a pitch tool according to claim 1. 3. A pitch tool manufacturing apparatus for forming an uneven pattern for polishing on a polished surface of a pitch tool used for polishing an optical element such as a lens or a mirror, the unevenness corresponding to the uneven pattern for polishing. A transfer plate holder on which a transfer plate having a pattern surface on which a pattern is formed is detachably mounted, and a pressure for pressing the pattern surface of the transfer plate mounted on the transfer plate holder against a polishing surface of the pitch tool. Means, a pitch tool holding table arranged to face the pressing means and holding the pitch tool, a pressure sensor for detecting a pressing force of the pressing means, and a polishing surface of the pitch tool. Heating means for heating the corresponding surface to a softening temperature, cooling means for cooling the pitch tool, a temperature sensor for detecting the temperature of the pitch tool, and a predetermined Further, a storage unit for storing a temporal change program of the pressing force of the pressurizing unit and the heating temperature of the heating unit, and the pressure sensor is driven while driving the pressurizing unit along the temporal change program. A pressurizing control unit for issuing a pressure control command for correcting the pressing force of the pressurizing means by comparing the detected pressing force with a set pressing force determined by the time change program; and The temperature of the pitch tool is corrected by comparing the detected temperature detected by the temperature sensor with a set temperature determined by the time change program while driving the heating means in accordance with the time change program. A temperature control unit for issuing a cooling command for driving the cooling means or a heating command for driving the heating means. Jigs and tools manufacturing equipment. 4. A pressure control unit and a temperature control unit of the control unit monitor a temperature detected by the temperature sensor and a pressing force detected by the pressure sensor at regular time intervals, and correspond to the detected temperature and the detected pressure. 4. The pitch tool manufacturing apparatus according to claim 3 , wherein the set temperature and the set pressing force at the time of performing are compared with each other. Wherein the cooling means is a water jacket through which cooling water flows, temperature control unit of the control unit according to claim 3 or 4, characterized in that to emit a cooling command to change the flow rate flowing into the water jacket The pitch tool manufacturing apparatus according to the above.