JP3133361U - Alignment mechanism of elliptical tray in semiconductor wafer transfer equipment - Google Patents
Alignment mechanism of elliptical tray in semiconductor wafer transfer equipment Download PDFInfo
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- JP3133361U JP3133361U JP2007001520U JP2007001520U JP3133361U JP 3133361 U JP3133361 U JP 3133361U JP 2007001520 U JP2007001520 U JP 2007001520U JP 2007001520 U JP2007001520 U JP 2007001520U JP 3133361 U JP3133361 U JP 3133361U
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- Prior art keywords
- roller
- semiconductor wafer
- alignment mechanism
- wafer transfer
- transfer equipment
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
【課題】 構造が複雑で組立てやメンテナンスに手間がかかる楕円トレーのセンタリング機構を単純な構造にし、正確な位置合わせをできるようにする。
【解決手段】 フリーで回転するローラーａ（１）とローラーｂ（２）がローラー駆動軸（５）に沿って動き、左右挟み込むようにした。
【選択図】図１PROBLEM TO BE SOLVED: To make a simple structure of an elliptical tray centering mechanism, which has a complicated structure and takes time for assembly and maintenance, and enables accurate alignment.
A roller a (1) and a roller b (2) that rotate freely move along a roller driving shaft (5) and are sandwiched between the left and right sides.
[Selection] Figure 1
Description
従来の楕円トレーのセンタリング機構は構造が複雑で組立てやメンテナンスに手間がかかり、他の機構とも干渉しやすく故障や誤動作が増えるという課題を有していた。 The conventional centering mechanism of the elliptic tray has a problem that the structure is complicated, and it takes time and labor to assemble and maintain, and it easily interferes with other mechanisms and increases the number of failures and malfunctions.
上記課題を解決するためにフリーで回転する４つのローラーがローラー駆動軸に沿って動き、左右挟み込むようにした。 In order to solve the above-mentioned problems, four rollers that rotate freely move along the roller drive shaft and are sandwiched between the left and right sides.
このようにすれば、正円でない楕円のトレーやずれた状態で運ばれてくるトレーも簡単かつ正確に位置を合わせ整列させることができる。また、構造が単純になるため、メンテナンスや組立てに手間がかからなくなり、コスト削減になる。 In this way, it is possible to easily and accurately align and align an elliptical tray that is not a perfect circle or a tray that is transported in a shifted state. In addition, since the structure is simple, maintenance and assembly are not time-consuming and the cost is reduced.
１ ローラーａ
２ ローラーｂ
３ 楕円トレー
４ 中心線
５ ローラー駆動軸1 Roller a
2 Roller b
3
Claims (1)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007001520U JP3133361U (en) | 2007-02-08 | 2007-02-08 | Alignment mechanism of elliptical tray in semiconductor wafer transfer equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007001520U JP3133361U (en) | 2007-02-08 | 2007-02-08 | Alignment mechanism of elliptical tray in semiconductor wafer transfer equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP3133361U true JP3133361U (en) | 2007-07-12 |
Family
ID=43284033
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007001520U Expired - Fee Related JP3133361U (en) | 2007-02-08 | 2007-02-08 | Alignment mechanism of elliptical tray in semiconductor wafer transfer equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3133361U (en) |
-
2007
- 2007-02-08 JP JP2007001520U patent/JP3133361U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20070405 |
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| R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
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| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100620 Year of fee payment: 3 |
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| LAPS | Cancellation because of no payment of annual fees |