JP2008290830A - Substrate reversing device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a substrate reversing device with a simple and inexpensive constitution capable of coping with green sheets of varieties of thickness. <P>SOLUTION: This substrate reversing device is provided with a pair of substrate mounting members 1 and 2 having bearing parts 1b and 2b on each one end side of plate parts 1a and 2a on which the green sheets can be mounted, a spindle 3 inserted into the bearing parts 1b and 2b, and driving arms 5 and 6 for rotating both the substrate mounting members 1 and 2 around the spindle 3 by about 90° in directions to approach and separate the mutual plate parts 1a and 2a, to mount the green sheets 10 mounted on the plate part 1a with the green sheets 10 reversed to the plate part 2a. By securing clearances 7 and 8 to permit moving of the bearing parts 1b and 2b in prescribed directions in relation to the spindle 3 between the bearing parts 1b and 2b and the spindle 3, both the substrate mounting members 1 and 2 can be slid and moved in directions to narrow an opposed interval of the plate parts 1a and 2a which have substantially parallel standing attitudes by rotary movement. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a substrate reversing device used for reversing a green sheet.

In the process of manufacturing a ceramic multilayer substrate, one or more green sheets on which a wiring pattern is formed may be reversed before being transported to the next process (for example, a lamination process). As a substrate reversing device used for reversing a substrate in this way, a device having a configuration in which a substrate receiver capable of holding a substrate is rotated 180 degrees in a vertical plane is known (for example, Patent Document 1). reference).
JP-A-8-51296 (Page 2-3, FIG. 1)

  By the way, when the above-described conventional substrate reversing apparatus is applied to the reversing operation of the green sheet, the mounted green sheet can be sandwiched and released, and the substrate receiver can be rotated 180 degrees together with the sandwiching mechanism. Therefore, it is necessary to make the device complicated and expensive.

  Therefore, the present inventors use a pair of plate members that are driven by a pair of vertically moving actuators and can rotate approximately 90 degrees between a recumbent posture and a standing posture, and when both plate members are in a standing posture, A substrate inversion device configured to face each other substantially in parallel with an interval corresponding to the thickness of the sheet was studied. The substrate reversing apparatus having such a configuration can invert and place the green sheet placed on one plate member on the other plate member by raising both plate members in the lying position and then lying down again. . Further, the substrate reversing device having such a configuration does not need to be provided with a special clamping mechanism and can rotate the plate member by the vertical movement of the actuator, so that the entire configuration can be simplified and the device can be inexpensive. .

  However, when the thickness of the green sheet to be reversed is not uniform, it has been found that a problem arises when the reversing operation is performed by the above-described substrate reversing apparatus studied by the present inventors. That is, when the opposing spacing when the two plate members are rotated from the lying position and are erected substantially in parallel is t, and a thin green sheet having a thickness of t or less is sandwiched between the two plate members, the rotation radius The pressure is concentrated on the larger side, causing the green sheet to be crushed. On the other hand, if a thick green sheet having a thickness of t or more is sandwiched between the two plate members, the applied pressure is concentrated on the side with a smaller rotation radius, causing the green sheet to be crushed. As described above, in the manufacturing process of the ceramic multilayer substrate, only one green sheet may be reversed or a plurality of stacked green sheets may be reversed. Therefore, as a substrate reversing device for green sheets, It is desirable to be able to cope with various thickness green sheets.

  The present invention has been made in view of the actual situation of the prior art, and an object of the present invention is to provide a substrate reversing apparatus that has a simple configuration and is inexpensive, and that can handle green sheets of various thicknesses.

  In order to achieve the above object, the present invention provides a pair of substrate mounting members having a bearing portion on one end side of a plate portion on which one or a plurality of laminated green sheets can be placed, and both the substrate mounting members. And a driving means for rotating the two board mounting members approximately 90 degrees around the axis of the supporting shaft in a direction in which the plate portions approach and separate from each other. A substrate reversing device in which the green sheet placed on a plate portion is placed on the other plate portion by being reversed, and the bearing portion with respect to the support shaft is between the bearing portion and the support shaft. A clearance that allows movement in a predetermined direction is secured, and when the plate portions of the two substrate mounting members are rotated to positions close to each other and substantially parallel to each other, Opposite spacing The Mel facing both substrate mounting member has a configuration which is slidable movement.

  The substrate reversing device configured as described above uses the clearance between the bearing portion and the support shaft at the stage where the adjacent plate portions face each other substantially in parallel with the rotation of the both substrate mounting members. Since both the substrate mounting members can be slid in the direction in which the facing distance between the plate portions is narrowed, the green sheet can be sandwiched by narrowing the facing distance while maintaining the parallelism of both plate portions. Therefore, the facing distance t1 between the two plate portions at the start of the slide movement is set to be equal to the thickness of the thickest green sheet to be reversed, and the clearance size d is set to be the target of the reversal work with t1. By setting the value to about half of the difference from the thickness t0 of the thinnest green sheet (ie, 2d≈t1−t0), all the green sheets having a thickness in the range from t0 to t1 are crushed. It is possible to sandwich and invert without raising. Further, this substrate reversing device does not need to be provided with a special clamping mechanism, and since the rotation range of the plate portion is approximately 90 degrees, a simple mechanism that simply moves the actuator up and down can be employed as the driving means. Therefore, the overall configuration can be simplified and the device can be inexpensive.

  In the above configuration, it is preferable that the plate portion is provided with a suction unit capable of sucking and fixing the green sheet placed thereon, and thus, the green sheet mounted on the plate portion can be easily deformed without being deformed. Can hold. In addition, when both plate parts sandwich the green sheet, if the suction of one plate part is turned off and the suction of the other plate part is switched on, the suction surface of the green sheet is reversed. It can be done smoothly.

  Further, in the above configuration, the drive means has a pair of drive arms that are pivotally connected to the bottom sides of the two plate portions and move up and down, and by moving both the drive arms upward, It is preferable that the rotational movement and the sliding movement are continuously performed because it is not necessary to separately provide a dedicated driving means for sliding the both plate portions. In other words, the drive arm is pivotally connected to the bottom surface of the plate portion, so that when the drive arm that pushes the plate portion up to the upright position further moves up, it is restricted by the support shaft and cannot rise. It is possible to smoothly change the direction in which the driving arm is pushed into the plate portion in the direction in which the sliding movement occurs.

  According to the substrate reversing device of the present invention, at the stage where the two plate portions that are close to each other face in parallel with the rotation of the pair of substrate mounting members, both clearances between the bearing portion and the support shaft are utilized. Since both the substrate mounting members can be slid in the direction in which the facing distance between the plate portions is narrowed, the green sheet can be sandwiched by narrowing the facing distance while maintaining the parallelism of both plate portions. Therefore, not only the green sheet having the same thickness as the facing distance between the two plate portions at the start of slide movement, but also a green sheet that is about twice as thin as the clearance, or a green sheet having an arbitrary thickness in between. The sheet can be sandwiched and reversed without causing the sheet to be crushed, and a substrate reversing apparatus capable of dealing with green sheets having various thicknesses can be obtained. Further, this substrate reversing device does not need to be provided with a special clamping mechanism, and since the rotation range of the plate portion is approximately 90 degrees, a simple mechanism that simply moves the actuator up and down can be adopted as the driving means. Therefore, the overall configuration can be simplified and the apparatus becomes inexpensive.

  DETAILED DESCRIPTION OF THE INVENTION Embodiments of the present invention will be described with reference to the drawings. FIG. 1 is an overall configuration diagram showing a plate portion lying state of a substrate reversing apparatus according to an embodiment of the present invention, and FIG. FIG. 3 is an overall configuration diagram showing a plate portion standing state of the substrate reversing device, FIG. 4 is an enlarged view of a main portion of FIG. 3, and FIG. 5 is an enlarged view of a main portion showing a green sheet clamping state of the substrate reversing device. These are the whole block diagrams which show the green sheet inversion state of this board | substrate inversion apparatus.

  The substrate reversing device shown in these drawings includes a first substrate mounting member 1 having a bearing portion 1b on one end side of a plate portion 1a, and a second substrate mounting member 2 having a bearing portion 2b on one end side of the plate portion 2a. The main shaft 3 is mainly constituted by the support shaft 3 inserted through both the bearing portions 1b and 2b, and the first drive arm 5 and the second drive arm 6 that operate as actuators of the air cylinder 4. This substrate reversing device is used in the process of manufacturing a ceramic multilayer substrate, and is used for reversing and placing the green sheet 10 conveyed from the upstream side and placed on one plate portion 1a on the other plate portion 2a. The green sheet 10 thus reversed is conveyed downstream.

  The configuration of the first substrate mounting member 1 and the second substrate mounting member 2 will be described in detail. As shown in FIGS. 1 and 6, the green sheet 10 is mounted on the upper surface of the plate portion 1a and the upper surface of the plate portion 2a. Can be placed. A suction means (not shown) for sucking and holding the green sheet 10 placed on the upper surface is incorporated in the plate portion 1a and the plate portion 2a. Here, the green sheet 10 may be a single sheet or a plurality of stacked green sheets. Driving force transmitting portions 1c and 2c are fixed to the bottom surface of the plate portion 1a and the bottom surface of the plate portion 2a, respectively. A first driving arm 5 is rotatably connected to the driving force transmitting portion 1c, and a second driving arm 6 is rotatably connected to the driving force transmitting portion 2c. The first substrate mounting member 1 and the second substrate mounting member 2 rotate approximately 90 degrees in the opposite direction around the axis of the support shaft 3 as the first and second drive arms 5 and 6 move up and down. The plate portions 1a and 2a are moved closer to and away from each other by this rotation operation. That is, when the first and second driving arms 5 and 6 are moved up and down by the air cylinder 4, the driving force is transmitted to the plate portions 1a and 2a via the driving force transmitting portions 1c and 2c. 1a and 2a rotate and move between the lying posture shown in FIGS. 1 and 6 and the standing posture shown in FIG. When the two plate portions 1a and 2a are erected as shown in FIG. 3, the two plate portions 1a and 2a are close to each other and are substantially parallel to each other. At this time, the facing interval t1 between the two plate portions 1a and 2a is set to be equal to the thickness of the thickest green sheet to be subjected to the reversing operation.

  Further, as shown in FIGS. 2 and 4, a predetermined direction of the bearing portion 1b with respect to the support shaft 3 (in the direction of arrow A in FIG. 4) is provided between the bearing portion 1b of the first substrate mounting member 1 and the support shaft 3. A clearance 7 that allows movement to () is secured. Similarly, a clearance 8 between the bearing portion 2b of the second substrate mounting member 2 and the support shaft 3 that allows the bearing portion 2b to move in a predetermined direction (the direction of arrow B in FIG. 4) relative to the support shaft 3. Is secured. However, the sizes d of the clearances 7 and 8 are the same. When both plate portions 1a and 2a are erected as shown in FIG. 3, there is a clearance 7 in the right direction of the support shaft 3 and a clearance 8 in the left direction of the drawing as shown in FIG. In this state, the first substrate mounting member 1 can slide in the left direction in the figure, and the second substrate mounting member 2 can slide in the right direction in the figure. That is, in the state shown in FIG. 3 and FIG. 4, the first and second substrate mounting members 1 and 2 are slid in the direction of narrowing the facing distance between the two plate portions 1a and 2a to shift to the state of FIG. If the green sheet 10 is not present, the minimum value t0 of the facing distance between the two plate portions 1a and 2a is t1-2d. In order to slide the first and second substrate mounting members 1 and 2 from the state shown in FIGS. 3 and 4 to the state shown in FIG. 5, the first and second drive arms 5 and 6 are shown in FIG. What is necessary is just to further move up from the position shown.

  Next, an operation procedure for reversing the green sheet 10 using the substrate reversing apparatus configured as described above will be described. First, as shown in FIGS. 1 and 2, the green sheet 10 conveyed from the upstream side and placed on the plate portion 1a of the first substrate mounting member 1 is adsorbed by the adsorbing means in the plate portion 1a. Then, the first and second drive arms 5 and 6 are moved up to rotate the first and second substrate mounting members 1 and 2 around the axis of the support shaft 3 in the opposite directions. As a result, both board mounting members 1 and 2 rotate approximately 90 degrees, and both plate portions 1a and 2a shift from the lying posture shown in FIGS. 1 and 2 to the standing posture shown in FIGS. As a result, the two plate portions 1a and 2a are close to each other and are substantially parallel to each other. At this time, if the thickness of the green sheet 10 is smaller than the facing interval t1 between the two plate portions 1a and 2a, the two drive arms 5 and 6 are provided. With the further upward movement, the first and second substrate mounting members 1 and 2 slide and move so as to narrow the facing distance between the two plate portions 1a and 2a. As shown in FIG. 1a and 2a. That is, since the first and second drive arms 5 and 6 are rotatably connected to the bottom surfaces of the plate portions 1a and 2a via the drive force transmission portions 1c and 2c, the plate portions 1a and 2a are raised. When the first and second drive arms 5 and 6 pushed up to the posture further move upward, the pushing directions of the drive arms 5 and 6 with respect to the plate portions 1a and 2a that are restricted by the support shaft 3 and cannot be raised are as follows. The direction in which the slide movement is generated is smoothly changed. Further, since the slide movement is performed after the both plate portions 1a and 2a are opposed to each other substantially in parallel, the parallelism of the two plate portions 1a and 2a does not change during the slide movement.

  If the green sheet 10 is sandwiched between the two plate portions 1a and 2a as shown in FIG. 5, the suction of the plate portion 1a of the first substrate mounting member 1 is turned off and the plate portion 2a of the second substrate mounting member 2 is turned off. Switch on adsorption. As a result, the suction surface of the green sheet 10 is reversed, so that the green sheet 10 is suctioned and fixed to the plate part 2a without being sucked to the plate part 1a. Thereafter, the first and second drive arms 5 and 6 are moved downward, so that the first and second substrate mounting members 1 and 2 are first slid in a direction to widen the facing distance between the plate portions 1a and 2a. Next, the plate portions 1a and 2a are in the recumbent posture shown in FIG. 6 by rotating approximately 90 degrees in the opposite direction. The green sheet 10 placed on the plate portion 2a in FIG. 6 is inverted because the top and bottom surfaces are reversed from those placed on the plate portion 1a in FIGS. The green sheet 10 can be conveyed to the next process (for example, a lamination process).

  When the thickness of the green sheet 10 is equal to the facing distance t1 between the two plate portions 1a and 2a at the start of the slide movement, the first and second drive arms 5 and 6 are moved up to move the plate portion. When 1a, 2a becomes the standing posture shown in FIGS. 3 and 4, the green sheet 10 is sandwiched between the plate portions 1a, 2a facing each other substantially in parallel.

  As described above, in the substrate reversing device according to the present embodiment, both the plate portions 1a and 2a that stand up close together with the rotation of the first and second substrate mounting members 1 and 2 face each other substantially in parallel. At the stage, using the clearances 7 and 8 between the bearing portions 1b and 2b and the support shaft 3, the both substrate mounting members 1 and 2 are slid in a direction to narrow the facing distance between the plate portions 1a and 2a. Therefore, the green sheet 10 can be clamped by narrowing the facing interval while maintaining the parallelism of both the plate portions 1a and 2a. Therefore, the facing distance t1 between the two plate portions 1a and 2a at the start of the slide movement is set to be equal to the thickness of the thickest green sheet to be reversed, and the size d of the clearances 7 and 8 is set to the t1. Is set to a value that is about half of the difference from the thickness t0 of the thinnest green sheet to be reversed (that is, 2d≈t1-t0), so that the green within the range from t0 to t1 is obtained. All sheets can be sandwiched and flipped without causing any crushing.

  Further, this substrate reversing device does not require any special clamping mechanism and the rotation range of the plate portions 1a and 2a is approximately 90 degrees, so that the first and second drive arms 5 and 6 are moved up and down. Only a simple mechanism driving means can be adopted. Therefore, the overall configuration can be simplified and the device can be inexpensive. In addition, since both the drive arms 5 and 6 are rotatably connected to the bottom surfaces of the plate portions 1a and 2a, the plate arms 1a and 2a are rotated and moved by moving these drive arms 5 and 6 upward. And slide movement can be performed continuously and smoothly. Therefore, it is not necessary to separately provide a dedicated drive means for slidingly moving both the plate portions 1a and 2a, and in this respect also, simplification of the configuration is realized.

  The means for holding the green sheet 10 mounted on the plate portions 1a and 2a is not particularly limited, but when the plate portions 1a and 2a are provided with suction means as in the present embodiment, Since the green sheet 10 can be easily held without being deformed, and the suction surface can be easily reversed, the green sheet 10 can be reversed very smoothly.

It is a whole block diagram which shows the plate part lying state of the board | substrate inversion apparatus which concerns on the example of embodiment of this invention. It is a principal part enlarged view of FIG. It is a whole block diagram which shows the plate part standing state of this board | substrate inversion apparatus. It is a principal part enlarged view of FIG. It is a principal part enlarged view which shows the green sheet clamping state of this board | substrate inversion apparatus. It is a whole block diagram which shows the green sheet inversion state of this board | substrate inversion apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1, 2 Substrate mounting member 1a, 2a Plate part 1b, 2b Bearing part 1c, 2c Driving force transmission part 3 Support shaft 4 Air cylinder 5, 6 Driving arm 7, 8 Clearance 10 Green sheet

Claims (3)

A pair of substrate mounting members having a bearing portion on one end side of a plate portion on which one or a plurality of stacked green sheets can be placed; a support shaft inserted through the bearing portions of both the substrate mounting members; Drive means for rotating both substrate mounting members approximately 90 degrees around the axis of the support shaft in a direction in which the plate portions approach and separate from each other, and the green sheet placed on one plate portion is the other A substrate reversing device that is reversed and placed on the plate part,
A clearance that allows movement of the bearing portion in a predetermined direction with respect to the support shaft is secured between the bearing portion and the support shaft, and the plate portions of the two board mounting members are brought close to each other. A substrate reversing apparatus, wherein both the substrate mounting members are slidable in a direction to narrow the facing distance between the two plate portions when rotated to a position facing substantially parallel.   The substrate reversing apparatus according to claim 1, wherein the plate portion includes suction means capable of sucking and fixing the green sheet placed thereon.   In the description of claim 1 or 2, the drive means has a pair of drive arms that are pivotally connected to the bottom sides of the two plate portions and move up and down, and by moving both the drive arms upward, A substrate reversing apparatus characterized in that the rotational movement and sliding movement of both the plate portions are continuously performed.

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