JP3107168B2 - Coated silicon nitride sintered body for tools - Google Patents

Coated silicon nitride sintered body for tools

Info

Publication number
JP3107168B2
JP3107168B2 JP03220983A JP22098391A JP3107168B2 JP 3107168 B2 JP3107168 B2 JP 3107168B2 JP 03220983 A JP03220983 A JP 03220983A JP 22098391 A JP22098391 A JP 22098391A JP 3107168 B2 JP3107168 B2 JP 3107168B2
Authority
JP
Japan
Prior art keywords
sintered body
silicon nitride
titanium
base material
weight
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP03220983A
Other languages
Japanese (ja)
Other versions
JPH0543323A (en
Inventor
裕二 佐藤
学 佐藤
祐次 勝村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tungaloy Corp
Original Assignee
Tungaloy Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tungaloy Corp filed Critical Tungaloy Corp
Priority to JP03220983A priority Critical patent/JP3107168B2/en
Publication of JPH0543323A publication Critical patent/JPH0543323A/en
Application granted granted Critical
Publication of JP3107168B2 publication Critical patent/JP3107168B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/52Multiple coating or impregnating multiple coating or impregnating with the same composition or with compositions only differing in the concentration of the constituents, is classified as single coating or impregnation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Products (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、旋削工具,フライス工
具,ドリル,エンドミル等の切削工具、切断刃,裁断
刃,型工具等の耐摩耗工具、バルブ,ノズル,メカニカ
ルシール等の耐蝕用工具及びベアリングボール等の潤滑
工具に適し、特に鋳鉄を切削するための切削工具として
最適な工具用被覆窒化ケイ素焼結体に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to cutting tools such as turning tools, milling tools, drills and end mills, wear-resistant tools such as cutting blades, cutting blades, and mold tools, and corrosion-resistant tools such as valves, nozzles, and mechanical seals. The present invention relates to a coated silicon nitride sintered body for a tool, which is suitable for a lubricating tool such as a bearing ball and the like, and particularly, is most suitable as a cutting tool for cutting cast iron.

【0002】[0002]

【従来の技術】窒化ケイ素焼結体は、機械的強度,耐熱
性,耐熱衝撃性に優れていることから、切削工具等の工
具材料へ用いることが試みれている。しかしながら、窒
化ケイ素は鉄族金属との親和性に富むために、窒化ケイ
素焼結体の切削工具でもって鉄系材料を切削した場合、
耐摩耗性が極端に劣化し、実用できないという問題があ
る。
2. Description of the Related Art Sintered silicon nitride is excellent in mechanical strength, heat resistance and thermal shock resistance, and has been attempted to be used as a tool material such as a cutting tool. However, since silicon nitride is rich in affinity with iron group metals, when cutting iron-based materials with a cutting tool of silicon nitride sintered body,
There is a problem that the wear resistance is extremely deteriorated and cannot be used practically.

【0003】この問題を解決するために、窒化ケイ素焼
結体の表面に、鉄族金属との親和性に劣る硬質被膜を形
成させた被覆窒化ケイ素焼結体の提案が多数されてお
り、その代表的なものとして、特開昭56−16665
号公報,特開昭56−155080号公報,特開昭57
−16162号公報,特開昭58−74585号公報及
び特許公表昭60−502244号公報がある。
[0003] In order to solve this problem, there have been many proposals for coated silicon nitride sintered bodies in which a hard coating having poor affinity for iron group metals is formed on the surface of the silicon nitride sintered body. As a representative example, JP-A-56-16665
JP, JP-A-56-155080, JP-A-57-155080
JP-A-16162, JP-A-58-74585 and JP-A-60-502244.

【0004】[0004]

【発明が解決しようとする課題】特開昭56−1666
5号公報,特開昭56−155080号公報及び特開昭
57−16162号公報には、窒化ケイ素を主成分とし
て含む窒化ケイ素焼結体の基材に炭化チタン,窒化チタ
ン,炭窒化チタン,炭酸化チタン,炭窒酸化チタンの中
の少なくとも1種の単層もしくは多層でなる内層と、酸
化アルミニウムの外層とを形成することができる切削工
具用被覆焼結体が記載されている。
Problems to be Solved by the Invention JP-A-56-1666
No. 5, JP-A-56-155080 and JP-A-57-16162 disclose titanium carbide, titanium nitride, titanium carbonitride, and titanium nitride as a base material of a silicon nitride sintered body containing silicon nitride as a main component. A coated sintered body for a cutting tool which can form at least one kind of a single layer or a multilayer of titanium carbonate and titanium carbonitride and an outer layer of aluminum oxide is described.

【0005】これらの公報に記載の被覆焼結体は、基材
と被膜の適合性を考慮した基材組成成分の検討が行われ
てないこと、及び基材の主成分である窒化ケイ素自体が
共有結合性の高い化合物であることから、基材と内層と
の密着性が劣り、容易に被膜の剥離が生じ、従来の窒化
ケイ素焼結体と殆んど同等の耐摩耗性及び耐欠損性しか
得られないという問題がある。
[0005] In the coated sintered bodies described in these publications, the composition of the base material has not been studied in consideration of the compatibility between the base material and the coating, and silicon nitride itself, which is the main component of the base material, has not been studied. Since it is a compound with high covalent bonding properties, the adhesion between the substrate and the inner layer is poor, the coating easily peels off, and the wear resistance and chipping resistance are almost the same as those of the conventional silicon nitride sintered body. There is a problem that can only be obtained.

【0006】特開昭58−74585号公報には、酸化
イットリウム,窒化アルミニウム,酸化ハフニウムを選
択した1〜30重量%と、残りが窒化ケイ素でなる窒化
ケイ素焼結体の基材に、炭化ケイ素及び/又は酸化ケイ
素の内層と酸化アルミニウムの外層を形成した高速切削
用被覆窒化ケイ素焼結体が記載されている。
Japanese Patent Application Laid-Open No. 58-74585 discloses that a silicon nitride sintered body composed of 1 to 30% by weight selected from yttrium oxide, aluminum nitride, and hafnium oxide and the remainder consisting of silicon nitride is coated with silicon carbide. And / or a coated silicon nitride sintered body for high-speed cutting in which an inner layer of silicon oxide and an outer layer of aluminum oxide are formed.

【0007】同公報に記載の被覆窒化ケイ素焼結体は、
基材の組成成分を選定したものであるが、基材と内層及
び内層と外層との適合性について考慮されてなく、特に
炭化ケイ素の内層の場合、炭化ケイ素自体が共有結合性
の高い化合物であることから、基材と内層及び内層と外
層との密着性が劣り、結局前述の3件の公報と殆んど同
様の効果しかないという問題がある。
[0007] The coated silicon nitride sintered body described in the publication is
Although the composition of the base material is selected, the compatibility between the base material and the inner layer and between the inner layer and the outer layer is not considered.Especially, for the inner layer of silicon carbide, silicon carbide itself is a compound having a high covalent bond. Because of this, the adhesion between the base material and the inner layer and between the inner layer and the outer layer is poor, and there is a problem that the effects are almost the same as those of the above three publications.

【0008】特許公表昭60−502244号公報に
は、酸化イットリウム,酸化アルミニウム,酸化ハフニ
ウムを選択し、残りが窒化ケイ素でなる焼結体の基材
に、窒化チタンと酸化アルミニウムの被膜を選択して形
成させることができる被覆窒化ケイ素焼結体が記載され
ている。
In Japanese Patent Publication No. 60-502244, yttrium oxide, aluminum oxide, and hafnium oxide are selected, and a titanium nitride and aluminum oxide film is selected as a base material of a sintered body composed of silicon nitride with the balance being silicon nitride. A coated silicon nitride sintered body that can be formed by heating is described.

【0009】同公報に記載の被覆窒化ケイ素焼結体は、
基材として、酸化アルミニウムを選択すると基材自体の
焼結性の促進効果があり好ましいが、高温において強度
低下を生じること及び基材と被膜との密着性強度が低
く、耐摩耗性及び耐欠損性に対する効果も小さいという
問題がある。
The coated silicon nitride sintered body described in the publication is
When aluminum oxide is selected as the base material, it is preferable because it has the effect of promoting the sinterability of the base material itself, but the strength is reduced at high temperatures and the adhesion strength between the base material and the coating film is low, so that the wear resistance and the fracture resistance There is a problem that the effect on sex is small.

【0010】本発明は、上述のような問題点を解決した
もので、具体的には、基材の組成成分として窒化アルミ
ニウムとハフニウム化合物の効果を最大限に引き出し、
この基材組成成分に最適な被膜構成を構築することによ
り、工具として実用化の高い耐摩耗性及び耐欠損性を保
持させた被覆窒化ケイ素焼結体の提供を目的とするもの
である。
The present invention has solved the above-mentioned problems. Specifically, the present invention maximizes the effects of aluminum nitride and a hafnium compound as constituent components of a base material.
An object of the present invention is to provide a coated silicon nitride sintered body having high wear resistance and chipping resistance which is practically used as a tool by constructing an optimum coating composition for the composition of the base material.

【0011】[0011]

【課題を解決するための手段】本発明者らは、従来の被
覆窒化ケイ素焼結体の切削工具でもって鉄系材料からな
る被削材を切削した場合、耐摩耗性及び耐欠損性が急激
に低下するという問題に対して、焼結体の基材と被膜と
の関係から検討していた所、第1に、切削工具として被
覆窒化ケイ素を用いた場合に耐摩耗性及び耐欠損性の急
激な低下が生じる主原因は、被膜の剥離であるという知
見を得た。
Means for Solving the Problems The present inventors have found that when a work material made of an iron-based material is cut with a conventional cutting tool made of a coated silicon nitride sintered body, the wear resistance and the chipping resistance are sharply increased. In order to solve the problem of reduced resistance, we examined the relationship between the base material and the coating of the sintered body. First, when coated silicon nitride was used as a cutting tool, the abrasion resistance and fracture resistance were reduced. It has been found that the main cause of the rapid decrease is peeling of the coating.

【0012】第2に、窒化アルミニウムとハフニウム化
合物を含有した窒化ケイ素焼結体の基材の表面にチタン
化合物の被膜を形成すると、基材と被膜との密着性が著
しく向上するという知見を得た。
Second, it has been found that when a titanium compound film is formed on the surface of a silicon nitride sintered body containing aluminum nitride and a hafnium compound, the adhesion between the substrate and the film is significantly improved. Was.

【0013】本発明は、第1及び第2の知見に基づいて
完成するに至ったものである。
The present invention has been completed based on the first and second findings.

【0014】本発明の工具用被覆窒化ケイ素焼結体は、
窒化ケイ素を主成分とする焼結体の基材表面に硬質被膜
を被覆してなる被覆窒化ケイ素焼結体であって、該基材
が希土類元素の酸化物,酸窒化物及びこれらの相互固溶
体の中の少なくとも1種の希土類元素の化合物1〜8重
量%と、1〜8重量%の窒化アルミニウム又は2重量%
以下の酸化アルミニウムに2〜10重量%の窒化アルミ
ニウムを組み合わせたアルミニウム化合物と、酸化ハフ
ニウム,酸窒化ハフニウム,酸炭化ハフニウム,酸窒炭
化ハフニウムの中の少なくとも1種のハフニウム化合物
1〜8重量%と、残りが窒化ケイ素でなる焼結体で、該
硬質被膜が窒化チタン,炭化チタン,酸窒化チタン,酸
炭化チタン,窒炭化チタン,酸窒炭化チタンの中の1種
の単層又は多層でなる平均層厚0.1〜3.0μmの内
層と、酸化アルミニウム又は酸窒化アルミニウムの単層
もしくは多層でなる平均層厚0.1〜3.0μmの外層
とでなることを特徴とするものである。
The coated silicon nitride sintered body for a tool according to the present invention comprises:
What is claimed is: 1. A coated silicon nitride sintered body obtained by coating a hard coating on the surface of a base material of a sintered body containing silicon nitride as a main component, wherein the base material is a rare earth element oxide, oxynitride, or a mutual solid solution thereof. 1 to 8% by weight of a compound of at least one rare earth element, and 1 to 8% by weight of aluminum nitride or 2% by weight
An aluminum compound obtained by combining 2 to 10% by weight of aluminum nitride with the following aluminum oxide; and 1 to 8% by weight of at least one hafnium compound among hafnium oxide, hafnium oxynitride, hafnium oxycarbide, and hafnium oxynitride carbide. And the remainder is a sintered body of silicon nitride, and the hard coating is a single layer or a multilayer of titanium nitride, titanium carbide, titanium oxynitride, titanium oxycarbide, titanium oxycarbide, and titanium oxycarbide. It is characterized by comprising an inner layer having an average layer thickness of 0.1 to 3.0 μm and an outer layer having an average layer thickness of 0.1 to 3.0 μm, which is a single layer or a multilayer of aluminum oxide or aluminum oxynitride. .

【0015】本発明における基材は、基材に含有する希
土類元素の化合物が1重量%未満になると基材自体を焼
結するときの焼結促進の効果が弱く、緻密な焼結体を得
るのが困難となること、及び室温における焼結体の機械
的強度,靭性が低下すること、逆に8重量%を越えて多
くなると高温における焼結体の機械的強度,耐熱衝撃性
の低下が顕著になる。この希土類元素の化合物は、具体
的には、Sc,Y,ランタノイドの酸化物,酸窒化物及
びこれらの相互固溶体でなり、特に酸化イットリウム,
酸化デイスプロシウムが好ましく、含有量も2〜6重量
%が好ましい。
When the content of the rare earth element compound in the substrate is less than 1% by weight, the effect of promoting sintering when sintering the substrate itself is weak, and a dense sintered body is obtained. , And the mechanical strength and toughness of the sintered body at room temperature decrease. Conversely, if the amount exceeds 8% by weight, the mechanical strength and thermal shock resistance of the sintered body at high temperatures decrease. Become noticeable. The compound of the rare earth element is specifically composed of oxides, oxynitrides of Sc, Y, and lanthanoids and a mutual solid solution thereof, particularly yttrium oxide,
Dysprosium oxide is preferable, and the content is also preferably 2 to 6% by weight.

【0016】基材に含有するアルミニウム化合物は、窒
化アルミニウムのみからなる場合は、1重量%未満にな
ると高温における強度及び耐欠損性が低下すること、逆
に8重量%を越えて多くなると室温における機械的強
度,靭性が低下する。また、基材の焼結を促進させる効
果のある酸化アルミニウムと窒化アルミニウムの組合わ
せからなるアルミニウム化合物の場合は、ガラス相を形
成し易く、高温における強度低下となるために2重量%
以下の酸化アルミニウムとし、酸化アルミニウムによる
高温における強度低下を補足するために2〜10重量%
の窒化アルミニウムを組合わせるものである。
When the aluminum compound contained in the base material is made of aluminum nitride alone, if the amount is less than 1% by weight, the strength and fracture resistance at high temperatures are reduced. Mechanical strength and toughness decrease. Further, in the case of an aluminum compound comprising a combination of aluminum oxide and aluminum nitride which has an effect of promoting sintering of the base material, a glass phase is easily formed and the strength at high temperatures is reduced, so that 2% by weight
The following aluminum oxide is used, and 2 to 10% by weight to supplement the strength reduction at high temperature due to aluminum oxide
Of aluminum nitride.

【0017】基材に含有するハフニウム化合物は、1重
量%未満になると内層の被膜と基材との密着性が低下す
ること及び基材自体の高温における強度が低下するこ
と、逆に8重量%を越えて多くなると室温における機械
的強度が低下すること及び耐熱衝撃性が低下する。ハフ
ニウム化合物が酸化ハフニウムでなる場合は、切削工具
としての耐欠損性を顕著に高めるので好ましく、特に2
〜7重量%の含有量である場合が好ましいものである。
When the content of the hafnium compound in the substrate is less than 1% by weight, the adhesion between the inner layer coating and the substrate is reduced, and the strength of the substrate itself at high temperatures is reduced. When the amount exceeds the above range, the mechanical strength at room temperature decreases and the thermal shock resistance decreases. When the hafnium compound is made of hafnium oxide, it is preferable because fracture resistance as a cutting tool is remarkably enhanced.
It is preferable that the content is 〜7% by weight.

【0018】基材に含有する窒化ケイ素は、低温型のα
−Si34,高温型のβ−Si34,さらには上述の他
の化合物からアルミニウム,酸素及び窒素の元素が介在
した低温型のαサイアロン又は高温型のβサイアロンと
して存在している場合でもよい。特に、β−Si34
主体で、その粒界に、殆んど確認できない程度のβサイ
アロンの存在した結晶構造でなる基材の場合は、高温で
の強度及び安定性が高いことから好ましい。
The silicon nitride contained in the base material is a low-temperature α
-Si 3 N 4 , high-temperature β-Si 3 N 4 , and other compounds described above exist as low-temperature α-sialon or high-temperature β-sialon with elements of aluminum, oxygen and nitrogen interposed. May be the case. In particular, in the case of a base material mainly composed of β-Si 3 N 4 and having a crystal structure in which β sialon is present at an almost unidentifiable grain boundary, the strength and stability at high temperatures are high. preferable.

【0019】被膜としての内層は、平均厚さが0.1μ
m未満になると内層と外層との密着性が低下すること、
逆に3.0μmを越えて厚くなると内層内に発生するク
ラック本数が多くなること及び内層内における剥離が多
発することから、平均層厚0.1〜3.0μmと定めた
ものである。特に、内層と外層との密着性及び内層内の
強度から、内層の平均層厚が0.4〜2.5μmでなる
ことが好ましい。
The inner layer as a coating has an average thickness of 0.1 μm.
m, the adhesion between the inner layer and the outer layer is reduced,
Conversely, when the thickness exceeds 3.0 μm, the number of cracks generated in the inner layer increases, and peeling in the inner layer occurs frequently. Therefore, the average layer thickness is determined to be 0.1 to 3.0 μm. In particular, it is preferable that the average layer thickness of the inner layer be 0.4 to 2.5 μm in consideration of the adhesion between the inner layer and the outer layer and the strength in the inner layer.

【0020】被膜としての外層は、平均層厚が0.1μ
m未満になると耐摩耗性が低下すること、逆に3.0μ
mを越えて厚くなると外層内剥離又は微少チッピングが
多発し易くなることから、平均層厚0.1〜3.0μm
と定めたものである。特に、耐摩耗性又は外層内剥離の
防止から、外層の平均層厚が0.3〜2.5μmでなる
ことが好ましい。この外層が酸化アルミニウムでなる場
合、特にその結晶構造の制限を受けることはないが、κ
−酸化アルミニウムからなると微細粒の外層になること
及び切削工具としての耐摩耗性及び耐欠損性の向上が顕
著になることから好ましいことである。
The outer layer as a coating has an average layer thickness of 0.1 μm.
m, the abrasion resistance is reduced.
When the thickness exceeds m, peeling in the outer layer or minute chipping is apt to occur frequently, so the average layer thickness is 0.1 to 3.0 μm.
It is defined. In particular, the average thickness of the outer layer is preferably 0.3 to 2.5 μm from the viewpoint of abrasion resistance or prevention of peeling in the outer layer. When this outer layer is made of aluminum oxide, there is no particular restriction on its crystal structure, but κ
-Aluminum oxide is preferred because it forms an outer layer of fine grains and significantly improves wear resistance and fracture resistance as a cutting tool.

【0021】また、必要に応じて外層の表面に最外層を
形成する場合は、最外層が淡黄色,黄金色,黄褐色等の
有色でなることから、工具として特にスローアウェイチ
ップのような切削工具として使用した場合、使用前後の
刃先の識別が容易になること、及び耐摩耗性がさらに顕
著に向上することから好ましいことである。耐摩耗性を
高めること及び使用前後の刃先の識別をすることの両方
兼備したものとする場合には、最外層の厚さは、0.2
〜2.0μmにすることが好ましく、使用前後の刃先の
識別のみ重要視する場合には、最外層の厚さは、0.0
5μm以上あればよい。
When the outermost layer is formed on the surface of the outer layer, if necessary, the outermost layer is colored such as pale yellow, golden or yellow-brown, so that a cutting tool such as a throw-away tip is particularly used as a tool. When used as a tool, it is preferable because the edge of the blade before and after use becomes easy and the wear resistance is further remarkably improved. When it is necessary to increase both the wear resistance and the identification of the cutting edge before and after use, the thickness of the outermost layer is 0.2
It is preferable that the thickness of the outermost layer be 0.02 μm.
What is necessary is just 5 micrometers or more.

【0022】本発明の工具用被覆窒化ケイ素焼結体を作
製する場合は、従来の粉末冶金法又はセラミックス焼結
体の製造方法を応用して基材を作製し、この基材に従来
から行われている、例えば化学蒸着法(CVD法)や物
理蒸着法(PVD法)でもって被膜を形成することによ
り得ることができる。
When producing the coated silicon nitride sintered body for a tool of the present invention, a base material is prepared by applying a conventional powder metallurgy method or a method for producing a ceramic sintered body, and the base material is formed by a conventional method. For example, it can be obtained by forming a coating by a chemical vapor deposition method (CVD method) or a physical vapor deposition method (PVD method).

【0023】[0023]

【作用】本発明の工具用被覆窒化ケイ素焼結体は、基材
を構成するアルミニウム化合物とハフニウム化合物の両
者の比率でもって、高温における基材の強度を高める作
用を引き出し、ハフニウム化合物が基材の内部よりも表
面部に多く残留し、被膜の内層との密着性強化作用に寄
与しており、希土類元素の化合物とアルミニウム化合
物、主として希土類元素の化合物が基材の焼結促進作用
に寄与し、被膜の内、内層が基材と外層との密着性の媒
介作用をし、内層と外層又は内層と外層と最外層の構成
でもって、切削工具としての耐摩耗性及び耐欠損性を高
める作用をしているものである。
The coated silicon nitride sintered body for a tool according to the present invention has an effect of increasing the strength of a base material at a high temperature by the ratio of both an aluminum compound and a hafnium compound constituting the base material. More remains on the surface than the inside and contributes to the strengthening of the adhesion to the inner layer of the coating, and the rare earth element compound and the aluminum compound, mainly the rare earth element compound, contribute to the sintering promoting action of the base material. Of the coatings, the inner layer acts as a mediator of the adhesion between the base material and the outer layer, and the structure of the inner layer and the outer layer or the inner layer, the outer layer, and the outermost layer increases the wear resistance and chipping resistance as a cutting tool. Is what you are doing.

【0024】[0024]

【実施例1】平均粒径0.7μmのSi34粉末、平均
粒径1.5μmのHfO2,Hf(O,C),Hf
(O,N)粉末、平均粒径0.5μmのY23,Al
N,Al23粉末をそれぞれ用いて、表1に示す割合に
配合し、ボールミルで粉砕混合後プレス成形した。次い
で、成形体を窒素ガス雰囲気中、1750℃で1時間常
圧焼結した後、1000気圧の窒素ガス中、1700℃
で1時間保持による熱間静水圧処理(HIP処理)を行
って、それぞれの焼結体を得た。こうして得た焼結体を
研削し、ISO規格のSNGN120408形状でなる
スローアウェイチップの基材を得た。
Example 1 Si 3 N 4 powder having an average particle size of 0.7 μm, HfO 2 , Hf (O, C), Hf having an average particle size of 1.5 μm
(O, N) powder, Y 2 O 3 , Al having an average particle size of 0.5 μm
Each of N and Al 2 O 3 powders was blended in the proportions shown in Table 1, and the mixture was pulverized and mixed by a ball mill and press-formed. Then, after sintering the compact at 1750 ° C. for 1 hour under a normal pressure in a nitrogen gas atmosphere, the compact was heated to 1700 ° C. in a nitrogen gas at 1000 atm.
, A hot isostatic pressure treatment (HIP treatment) by holding for 1 hour was performed to obtain each sintered body. The sintered body thus obtained was ground to obtain a base material of a throw-away chip having an SNGN120408 shape according to ISO standard.

【0025】これらの基材をCVDの反応炉に設置し、
TiCl4とN2とH2の混合ガス中、940℃で処理
し、1μm厚さのTiN膜の内層を形成した後、Alと
HClの反応により得たAlCl3とCOとH2の混合ガ
ス中、940℃で処理し、1.5μm厚さのκ−Al2
3膜の外層を形成して本発明品1〜7及び比較品1〜
6を得た。
These substrates are placed in a CVD reactor,
A mixed gas of AlCl 3 , CO and H 2 obtained by a reaction between Al and HCl after a treatment at 940 ° C. in a mixed gas of TiCl 4 , N 2 and H 2 to form an inner layer of a 1 μm thick TiN film Medium, 940 ° C., 1.5 μm thick κ-Al 2
The outer layer of the O 3 film is formed to produce products 1 to 7 of the present invention and comparative products 1 to
6 was obtained.

【0026】本発明品1〜7及び比較品1〜6を用い
て、下記の(A)条件及び(B)条件における切削試験
を行い、その結果を表1に併記した。
Using the products 1 to 7 of the present invention and the comparative products 1 to 6, cutting tests were carried out under the following conditions (A) and (B), and the results are shown in Table 1.

【0027】(A)条件、乾式による連続旋削試験 被削材 :FC35 切削速度:500m/min 切込み :1.5mm 送り :0.3mm/rev 切削時間:2min 評価 :平均逃げ面摩耗量 (B)条件、乾式によるフライス切削試験(VB) 被削材 :FCD60(45×200mm角材) 切削速度:150m/min 切込み :1.5mm 初期送り:0.20mm/rev 評価 :欠損又はチッピングが生じる最大送り(欠損
又はチッピングが生じない場合は、送りを0.03mm
/rev増加する。
(A) Continuous turning test under dry conditions of conditions Work material: FC35 Cutting speed: 500 m / min Depth of cut: 1.5 mm Feed: 0.3 mm / rev Cutting time: 2 min Evaluation: Average flank wear (B) conditions, milling tests with a dry (V B) workpiece: FCD60 (45 × 200mm square bars) cutting speed: 150 meters / min cut: 1.5 mm initial feed: 0.20 mm / rev Rating: feed maximum defect or chipping occurs (If there is no chipping or chipping, feed 0.03mm
/ Rev increases.

【0028】[0028]

【表1】 [Table 1]

【0029】[0029]

【実施例2】実施例1の粉末を用いて、88%Si34
粉末−4%HfO2−4%Y23−4%AlN(重量
%)の配合組成にし、これを実施例1と同様にして焼結
体の基材を作製した後、 TiCl4,AlCl3
2,CH4,CO,CO2,H2のガスの中から選定した
混合ガス中、940〜1100℃で処理し、基材表面に
表2に示した構成からなる被膜を形成して本発明品8〜
16及び比較品7〜10を得た。
Example 2 Using the powder of Example 1, 88% Si 3 N 4
A powdered composition of 4% HfO 2 -4% Y 2 O 3 -4% AlN (% by weight) was prepared, and a base material of a sintered body was prepared in the same manner as in Example 1. Then, TiCl 4 , AlCl 3 ,
In a mixed gas selected from N 2 , CH 4 , CO, CO 2 , and H 2 gases, the mixture is treated at 940 to 1100 ° C. to form a coating having the composition shown in Table 2 on the surface of the base material, and Invention 8 ~
16 and comparative products 7 to 10 were obtained.

【0030】こうして得た本発明品8〜16及び比較品
7〜10を用いて、実施例1の(A)条件及び(B)条
件における切削試験を行い、その結果を表2に併記し
た。
Using the products 8 to 16 of the present invention and the comparative products 7 to 10 thus obtained, cutting tests were performed under the conditions (A) and (B) of Example 1, and the results are also shown in Table 2.

【0031】[0031]

【表2】 [Table 2]

【0032】[0032]

【発明の効果】本発明の工具用被覆窒化ケイ素焼結体
は、従来の窒化ケイ素焼結体(比較品1)に比べて、
1.8〜1.9倍の耐摩耗性及び1.6〜1.9倍の耐
欠損性を有するという効果があり、本発明の焼結体から
外れた比較品に比べて、同等〜1.8倍の耐摩耗性及び
1.1〜1.9倍の耐欠損性を有するという効果があ
り、基材と被膜との密着性及び被膜の耐剥離性に優れて
いるという効果がある。
The coated silicon nitride sintered body for a tool according to the present invention is different from a conventional silicon nitride sintered body (comparative product 1).
It has the effect of having 1.8 to 1.9 times the wear resistance and 1.6 to 1.9 times the fracture resistance, and is equivalent to 1 to 1 compared with the comparative product which is not the sintered body of the present invention. It has the effect of having 0.8 times the wear resistance and 1.1 to 1.9 times the fracture resistance, and has the effect of being excellent in the adhesion between the base material and the film and the peeling resistance of the film.

───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭59−224202(JP,A) 特開 昭58−208182(JP,A) 特開 昭61−101482(JP,A) 特開 昭61−191584(JP,A) 特開 昭63−89461(JP,A) 特開 昭58−74574(JP,A) 特開 平4−124075(JP,A) 特開 平4−240162(JP,A) (58)調査した分野(Int.Cl.7,DB名) C04B 35/58 C04B 41/89 B23P 15/28 ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-59-224202 (JP, A) JP-A-58-208182 (JP, A) JP-A-61-101482 (JP, A) JP-A-61-182 191584 (JP, A) JP-A-63-89461 (JP, A) JP-A-58-74574 (JP, A) JP-A-4-124075 (JP, A) JP-A-4-240162 (JP, A) (58) Field surveyed (Int. Cl. 7 , DB name) C04B 35/58 C04B 41/89 B23P 15/28

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 窒化ケイ素を主成分とする焼結体の基材
表面に硬質被膜を被覆してなる被覆窒化ケイ素焼結体に
おいて、 該基材が希土類元素の酸化物,酸窒化物及びこれらの相
互固溶体の中の少なくとも1種の希土類元素の化合物1
〜8重量%と、1〜8重量%の窒化アルミニウム又は2
重量%以下の酸化アルミニウムに2〜10重量%の窒化
アルミニウムを組合わせたアルミニウム化合物と、酸化
ハフニュウム,酸窒化ハフニウム,酸炭化ハフニウム,
酸窒炭化ハフニウムの中の少なくとも1種のハフニウム
化合物1〜8重量%と、残りが窒化ケイ素でなる焼結体
で、 該硬質被膜が窒化チタン,炭化チタン,酸窒化チタン,
酸炭化チタン,窒炭化チタン,酸窒炭化チタンの中の1
種の単層又は多層でなる平均層厚0.1〜3.0μmの
内層と、酸化アルミニウム又は酸窒化アルミニウムの単
層もしくは多層でなる平均層厚0.1〜3.0μmの外
層とでなることを特徴とする工具用被覆窒化ケイ素焼結
体。
1. A coated silicon nitride sintered body obtained by coating a hard coating on the surface of a base material of a sintered body containing silicon nitride as a main component, wherein the base material is a rare earth element oxide, oxynitride or Compound 1 of at least one rare earth element in a mutual solid solution of
-8% by weight and 1-8% by weight of aluminum nitride or 2
An aluminum compound obtained by combining aluminum oxide of 2% by weight or less with aluminum oxide of 2% by weight or less, hafnium oxide, hafnium oxynitride, hafnium oxycarbide,
A sintered body comprising 1 to 8% by weight of at least one hafnium compound in hafnium oxynitride and the remainder being silicon nitride, wherein the hard coating is made of titanium nitride, titanium carbide, titanium oxynitride,
1 of titanium oxycarbide, titanium nitrocarbide, titanium oxycarbide
An inner layer having an average layer thickness of 0.1 to 3.0 μm consisting of a single layer or a multilayer, and an outer layer having an average layer thickness of 0.1 to 3.0 μm comprising a single layer or a multilayer of aluminum oxide or aluminum oxynitride. A coated silicon nitride sintered body for a tool, comprising:
【請求項2】 上記外層の表面に窒化チタン,酸窒化チ
タン,窒炭化チタン,窒炭酸化チタンの中の1種の単層
又は多層でなる最外層を被覆してなることを特徴とする
請求項1記載の工具用被覆窒化ケイ素焼結体。
2. The method according to claim 1, wherein a surface of the outer layer is coated with a single layer or a multilayer outer layer of one kind selected from titanium nitride, titanium oxynitride, titanium nitrocarbide and titanium nitrocarbonate. Item 2. A coated silicon nitride sintered body for a tool according to Item 1.
JP03220983A 1991-08-06 1991-08-06 Coated silicon nitride sintered body for tools Expired - Fee Related JP3107168B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP03220983A JP3107168B2 (en) 1991-08-06 1991-08-06 Coated silicon nitride sintered body for tools

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP03220983A JP3107168B2 (en) 1991-08-06 1991-08-06 Coated silicon nitride sintered body for tools

Publications (2)

Publication Number Publication Date
JPH0543323A JPH0543323A (en) 1993-02-23
JP3107168B2 true JP3107168B2 (en) 2000-11-06

Family

ID=16759634

Family Applications (1)

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Country Status (1)

Country Link
JP (1) JP3107168B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2402098A1 (en) 2004-12-22 2012-01-04 NGK Spark Plug Co., Ltd. Sialon insert, cutting tool equipped therewith, and manufacturing method thereof

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101225803B1 (en) * 2004-04-13 2013-01-23 스미또모 덴꼬오 하드메탈 가부시끼가이샤 Surface-coated cutting tool
JP4950715B2 (en) * 2007-03-22 2012-06-13 株式会社東芝 Silicon nitride sintered body and sliding member using the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2402098A1 (en) 2004-12-22 2012-01-04 NGK Spark Plug Co., Ltd. Sialon insert, cutting tool equipped therewith, and manufacturing method thereof

Also Published As

Publication number Publication date
JPH0543323A (en) 1993-02-23

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