JP2901102B2 - Silicon nitride sintered body for tools and coated silicon nitride sintered body for tools - Google Patents

Silicon nitride sintered body for tools and coated silicon nitride sintered body for tools

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Publication number
JP2901102B2
JP2901102B2 JP3237227A JP23722791A JP2901102B2 JP 2901102 B2 JP2901102 B2 JP 2901102B2 JP 3237227 A JP3237227 A JP 3237227A JP 23722791 A JP23722791 A JP 23722791A JP 2901102 B2 JP2901102 B2 JP 2901102B2
Authority
JP
Japan
Prior art keywords
sintered body
silicon nitride
nitride sintered
tool
oxides
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP3237227A
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Japanese (ja)
Other versions
JPH0551259A (en
Inventor
裕二 佐藤
晴逸 石井
祐次 勝村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tungaloy Corp
Original Assignee
Toshiba Tungaloy Co Ltd
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Publication date
Application filed by Toshiba Tungaloy Co Ltd filed Critical Toshiba Tungaloy Co Ltd
Priority to JP3237227A priority Critical patent/JP2901102B2/en
Publication of JPH0551259A publication Critical patent/JPH0551259A/en
Application granted granted Critical
Publication of JP2901102B2 publication Critical patent/JP2901102B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、旋削工具,フライス工
具,ドリル,エンドミル等の切削工具又はスリッター,
ブッシュ,ワイヤカッター,ガイド,ノズル,バルブ,
ボール等の耐摩耐食用工具として適し、特にスローアウ
ェイチップとして用いる切削工具に最適な工具用窒化ケ
イ素焼結体及びその表面に被膜を形成した工具用被覆窒
化ケイ素焼結体に関するものである。
BACKGROUND OF THE INVENTION The present invention relates to a cutting tool such as a turning tool, a milling tool, a drill, an end mill or a slitter,
Bush, wire cutter, guide, nozzle, valve,
The present invention relates to a silicon nitride sintered body for a tool, which is suitable as a tool for wear and corrosion resistance such as a ball, and is particularly suitable for a cutting tool used as a throw-away tip, and a coated silicon nitride sintered body for a tool having a film formed on the surface thereof.

【0002】[0002]

【従来の技術】窒化ケイ素焼結体は、機械的強度,耐熱
性,耐熱衝撃性に優れていることから、切削工具等の工
具材料へ用いることが試みられている。しかしながら、
窒化ケイ素自体が鉄族金属との親和性に富むために、窒
化ケイ素焼結体の切削工具でもって鉄系材料を切削した
場合、耐摩耗性が極端に劣化し、実用できないという問
題がある。
2. Description of the Related Art Sintered silicon nitride is excellent in mechanical strength, heat resistance and thermal shock resistance, and has been attempted to be used as a tool material for cutting tools and the like. However,
Since silicon nitride itself has a high affinity for the iron group metal, there is a problem in that when an iron-based material is cut with a cutting tool made of a silicon nitride sintered body, wear resistance is extremely deteriorated, making it impractical.

【0003】この問題を解決するために、窒化ケイ素焼
結体の表面部を改質すること、又は窒化ケイ素焼結体の
表面に鉄系材料との親和性に劣る硬質被膜を形成させる
という多数の提案が行われており、この代表的なものと
して、特開平2−153865号公報,特開平2−27
5763号公報,特開平3−8785号公報,特開昭5
6−16665号公報及び特許公表昭60−50224
4号公報がある。
[0003] In order to solve this problem, there have been many attempts to modify the surface portion of the silicon nitride sintered body or to form a hard coating having poor affinity with iron-based materials on the surface of the silicon nitride sintered body. Are proposed as typical ones of Japanese Patent Application Laid-Open Nos. 2-153865 and 2-27.
No. 5,763, Japanese Unexamined Patent Publication No. Hei 3-8785, Japanese Unexamined Patent Publication No.
No. 6-16665 and Patent Publication No. 60-50224
No. 4 gazette.

【0004】[0004]

【発明が解決しようとする課題】特開平2−15386
5号公報及び特開平2−275763号公報には、窒化
ケイ素又はサイアロンの焼結体の表面部が内部に比べて
Si含有量もしくは窒化ケイ素あるいはサイアロン結晶
粒子の含有量を少なくした組成構造の焼結体について記
載されている。
Problems to be Solved by the Invention
No. 5 and Japanese Patent Application Laid-Open No. 2-275763 teach that a sintered structure of a silicon nitride or sialon sintered body has a composition structure in which the content of Si or the content of silicon nitride or sialon crystal particles is smaller than that of the inside. The body is described.

【0005】また、特開平3−8785号公報には、β
窒化ケイ素焼結体の10〜1000μmの表面層が内部
から外部に向って連続的に酸化ジルコニウム含有率の増
加、及び窒化ジルコニウム含有率の減少という濃度変化
を有する焼結体について記載されている。
Japanese Patent Application Laid-Open No. Hei 3-8785 discloses that β
It describes a sintered body in which a surface layer of 10 to 1000 μm of a silicon nitride sintered body has a concentration change such that the zirconium oxide content continuously increases from the inside to the outside and the zirconium nitride content decreases.

【0006】これらの内、前者の2公報に記載されてい
る焼結体には、焼結体の表面におけるSi含有量,又は
窒化ケイ素,サイアロンの含有量が内部に比べて減少し
ていることにより、鉄族金属との親和性の問題が解決さ
れたかのようであるが、Si,窒化ケイ素,サイアロン
の減少した分に対し、鉄族金属との親和性の高い他物質
が増加すると、結局同じ問題が生じること、又仮にこの
問題を解決できたとしても、さらに耐摩耗性及び耐欠損
性を高める目的で、この焼結体の表面に被膜を形成する
場合、焼結体と被膜との密着性に対する配慮が行われて
ないことから被膜の剥離が生じやすいという問題があ
る。
[0006] Of these, the sintered body described in the former two publications has a reduced content of Si or silicon nitride or sialon on the surface of the sintered body as compared with the inside. Seems to have solved the problem of affinity with the iron group metal. However, the amount of Si, silicon nitride, and sialon decreased, but the amount of other substances with high affinity with the iron group metal increased. If a problem occurs, and even if this problem can be solved, if a film is formed on the surface of this sintered body for the purpose of further enhancing wear resistance and fracture resistance, the adhesion between the sintered body and the film Since no consideration is given to the properties, there is a problem that the coating is apt to be peeled off.

【0007】一方、後者の公報に記載されている焼結体
は、焼結体の表面における酸化ジルコニウムの含有率を
増加させることにより、強度及び靭性を高めることがで
きたというものであるが、高温における強度及び耐摩耗
性の低下が著しくなること、及び耐摩耗性を高めるため
にこの焼結体の表面に硬質な被膜を形成したとしても焼
結体の表面の酸化ジルコニウムが被膜との密着性を阻害
し、被膜が剥離し易いという問題がある。
On the other hand, the sintered body described in the latter publication can increase the strength and toughness by increasing the content of zirconium oxide on the surface of the sintered body. The strength and abrasion resistance at high temperatures are remarkably reduced, and even if a hard coating is formed on the surface of this sintered body in order to enhance the abrasion resistance, the zirconium oxide on the surface of the sintered body adheres to the coating. There is a problem that the properties are hindered and the coating is easily peeled off.

【0008】本発明は、上述のような問題点を解決した
もので、具体的には、Ti及び/又はHfを少なくとも
含む化合物のスケルトンと窒化ケイ素焼結体を主成分と
するマトリックスとからなる窒化ケイ素焼結体の表面に
おけるTi及び/又はHfの平均的元素量を高めること
により鉄族金属との親和性を小さくすると共に、高温に
おける強度及び耐摩耗性に優れるようにした工具用窒化
ケイ素焼結体、並びに被膜の密着性に優れた工具用被覆
窒化ケイ素焼結体の提供を目的とするものである。
The present invention has solved the above-mentioned problems. More specifically, the present invention comprises a skeleton of a compound containing at least Ti and / or Hf and a matrix mainly containing a silicon nitride sintered body. Silicon nitride for tools with high affinity for iron group metals and high strength and wear resistance at high temperatures by increasing the average elemental content of Ti and / or Hf on the surface of the silicon nitride sintered body An object of the present invention is to provide a sintered body and a coated silicon nitride sintered body for a tool having excellent adhesion of a film.

【課題を解決するための手段】本発明者らは、従来の窒
化ケイ素焼結体の切削工具でもって鉄系材料からなる被
削材を切削した場合、耐摩耗性及び耐欠損性が急激に低
下すること、及び窒化ケイ素焼結体の表面に被膜を形成
した場合、被膜が容易に剥離することに対する対策を検
討していた所、第1に、窒化ケイ素焼結体中にTi及び
/又はHfを少なくとも含む化合物を存在させて、かつ
焼結体の表面におけるTi及び/又はHfの元素量を増
加させた焼結体は、鉄系材料を被削材としたときの切削
工具として実用し得るという知見を得た。
SUMMARY OF THE INVENTION The present inventors have found that when a work material made of an iron-based material is cut with a conventional cutting tool of a silicon nitride sintered body, the wear resistance and chipping resistance are rapidly increased. When a countermeasure was taken to prevent the film from being lowered and that the film was easily peeled off when a film was formed on the surface of the silicon nitride sintered body, firstly, Ti and / or A sintered body in which a compound containing at least Hf is present and the amount of elements of Ti and / or Hf on the surface of the sintered body is increased is practically used as a cutting tool when an iron-based material is used as a work material. I got the knowledge that I can get it.

【0009】第2に、窒化ケイ素焼結体の表面にTi及
び/又はHfの化合物からなる被膜を形成する場合、窒
化ケイ素焼結体中にTi及び/又はHfの化合物が存在
していると、焼結体と被膜の密着性を高めることができ
るという知見を得た。
Second, when a film made of a compound of Ti and / or Hf is formed on the surface of the silicon nitride sintered body, it is determined that the compound of Ti and / or Hf is present in the silicon nitride sintered body. It has been found that the adhesion between the sintered body and the coating can be improved.

【0010】第3に、窒化ケイ素焼結体へのTi及び/
又はHfの化合物の過度の含有は、窒化ケイ素焼結体の
強度,耐熱性及び耐熱衝撃性を損うものの、焼結体の表
面における含有量を多くし、焼結体の内部における含有
量を少なくすることにより解決すると共に、逆に焼結体
の表面に被膜を形成する場合には、これが焼結体と被膜
の密着性を高めるという知見を得た。
Third, Ti and / or
Or, an excessive content of the Hf compound impairs the strength, heat resistance and thermal shock resistance of the silicon nitride sintered body, but increases the content on the surface of the sintered body and reduces the content inside the sintered body. In addition to solving the problem by reducing the amount, when a film is formed on the surface of the sintered body, it has been found that this enhances the adhesion between the sintered body and the film.

【0011】本発明は、上述の第1,第2及び第3の知
見に基づいて完成するに至ったものである。
The present invention has been completed based on the first, second, and third findings described above.

【0012】本発明の工具用窒化ケイ素焼結体は、窒化
ケイ素を主成分とするマトリックス70重量%以上と、
残部がTi及び/又はHfを少なくとも含む化合物のス
ケルトンとからなる窒化ケイ素焼結体であって、該スケ
ルトン中のTi及び/又はHfの元素量が1〜20重量
%(焼結体全体の比)であり、かつ該窒化ケイ素焼結体
の表面におけるTi及び/又はHfの平均的元素量が該
窒化ケイ素焼結体の表面から200μm以上の内部にお
けるTi及び/又はHfの平均的元素量に比べて増加し
ていることを特徴とする工具用窒化ケイ素焼結体。
[0012] The silicon nitride sintered body for a tool according to the present invention comprises at least 70% by weight of a matrix containing silicon nitride as a main component;
The remainder is a silicon nitride sintered body composed of a skeleton of a compound containing at least Ti and / or Hf, wherein the element amount of Ti and / or Hf in the skeleton is 1 to 20% by weight (the ratio of the whole sintered body) ), And the average element amount of Ti and / or Hf on the surface of the silicon nitride sintered body is reduced to the average element amount of Ti and / or Hf within 200 μm or more from the surface of the silicon nitride sintered body. A silicon nitride sintered body for a tool, wherein the sintered body is increased in comparison with the prior art.

【0013】本発明の工具用窒化ケイ素焼結体における
マトリックスとは、α−Si34(低温型),β−Si
34 (高温型),Si6−nAlnOn の固溶体でな
るβサイアロン(但し、n=0〜4.2)及びM(S
i,Al)12(O,N)16の固溶体でなるαーサイアロ
ン(但し、O<X<Zで、M=周期律表の2a,3a族
元素の1種以上でなる。)の中の1種以上でなり、この
マトリックスが焼結体全体の70重量%以上含有してい
るものである。このマトリックスが70重量%未満にな
ると、相対的にスケルトンが30重量%を超えて多くな
り、窒化ケイ素自体が有している高硬度,高強度の特性
を引き出すことが困難になる。
The matrix in the silicon nitride sintered body for a tool according to the present invention includes α-Si 3 N 4 (low temperature type) and β-Si
Β sialon (n = 0 to 4.2) and M (S), which are solid solutions of 3 N 4 (high temperature type) and Si 6 —nAlnOn
α-sialon which is a solid solution of i, Al) 12 (O, N) 16 (provided that O <X <Z, M = at least one element of group 2a or 3a of the periodic table) Or more, and the matrix contains at least 70% by weight of the entire sintered body. If this matrix is less than 70% by weight, the skeleton relatively increases to more than 30% by weight, making it difficult to bring out the high hardness and high strength characteristics of silicon nitride itself.

【0014】本発明の工具用窒化ケイ素焼結体における
スケルトンとは、Ti及び/又はHfの化合物、具体的
にはTi,Hfの酸化物,窒化物,炭化物,ホウ化物,
ケイ化物及びこれらの相互固溶体の中の1種以上でなる
場合、又はTi及び/又はHfと他にZr,V,Nb,
Ta,W,Mo,Cr,Si,Al,希土類元素の中の
1種以上とからなる酸化物,窒化物,炭化物,ホウ化
物,ケイ化物及びこれらの相互固溶体でなるものであ
る。このスケルトン中のTi及び/又はHfの元素量が
焼結体全体の比で1重量%未満になると、焼結体の表面
にTi及び/又はHfを含む化合物を富化させることが
困難になること、逆に20重量%を超えて多く含有する
と、緻密な焼結体にするのが困難になる。
The skeleton in the silicon nitride sintered body for a tool of the present invention is a compound of Ti and / or Hf, specifically, an oxide, nitride, carbide, boride, Ti, Hf of Ti, Hf.
A mixture of one or more of silicides and their mutual solid solutions, or Ti and / or Hf and Zr, V, Nb,
It is composed of oxides, nitrides, carbides, borides, silicides, and mutual solid solutions of at least one of Ta, W, Mo, Cr, Si, Al, and rare earth elements. If the elemental amount of Ti and / or Hf in the skeleton is less than 1% by weight based on the whole sintered body, it becomes difficult to enrich the surface of the sintered body with a compound containing Ti and / or Hf. On the other hand, if the content exceeds 20% by weight, it becomes difficult to obtain a dense sintered body.

【0015】本発明の特徴の1つは、上述のマトリック
スとスケルトンとでなる焼結体の表面部が内部と異なっ
た組成成分からなっていること、具体的には、焼結体を
構成している各種の元素の内、焼結体の表面におけるT
i及び/又はHfの平均的元素量が焼結体の表面から2
00μm以上の内部におけるTi及び/又はHfの平均
的元素量に比べて増加しているもので、この増加率が5
%以上でなる場合が好ましく、さらに好ましくは、Ti
及び/又はHfの平均的元素量が焼結体の表面で最大と
なっていることである。
One of the features of the present invention is that the surface of the sintered body composed of the matrix and the skeleton has a composition different from that of the inside, specifically, the sintered body is constituted. Of the various types of elements, T on the surface of the sintered body
The average elemental amount of i and / or Hf is 2 from the surface of the sintered body.
It is increased compared to the average elemental amount of Ti and / or Hf in the interior of the metal having a thickness of not less than 00 μm.
% Or more, more preferably Ti
And / or the average elemental amount of Hf is maximum on the surface of the sintered body.

【0016】この焼結体中のTi及び/又はHfの元素
の変動について、例示すると、第1に焼結体の表面で最
大となった後、焼結体の内部に向って連続的に減少し、
内部の平均的元素量に達する場合、第2に焼結体の表面
で最大となり、その最大値の状態で焼結体の表面から1
0μm以下の内部までほぼ持続したあと、内部へ向って
連続的に減少し、内部の平均的元素量に達する場合等を
挙げることができる。
As to the variation of the elements of Ti and / or Hf in the sintered body, for example, firstly, after the maximum at the surface of the sintered body, it continuously decreases toward the inside of the sintered body. And
Secondly, when the average amount of elements inside reaches the maximum, the maximum value is obtained at the surface of the sintered body.
A case may be mentioned in which, after substantially continuing to the inside of 0 μm or less, the amount continuously decreases toward the inside, and reaches the average amount of elements in the inside.

【0017】以上述べた本発明の焼結体を基材とし、こ
の基材の表面にTi,Zr,Hfの炭化物,窒化物,酸
化物,Alの酸化物,窒酸化物及びこれらの相互固溶体
の中の少なくとも1種の単層又は多層からなる被膜を形
成して本発明の工具用被覆窒化ケイ素焼結体とすること
ができる。
The above-described sintered body of the present invention is used as a base material, and on the surface of the base material, carbides, nitrides, oxides, oxides of Al, oxides of nitrides of Ti, Zr, and Hf, and mutual solid solutions thereof The coated silicon nitride sintered body for a tool of the present invention can be formed by forming at least one kind of a single-layer or multilayer coating.

【0018】被膜の構成は、基材の表面に直接接触する
第1層がTi,Zr,Hfの炭化物,窒化物,炭酸化
物,窒酸化物及びこれらの相互固溶体でなる場合、基材
との密着性の点から好ましく、この第1層のみでなる場
合、又は第1層の表面にさらに第2層,第3層と多層の
構成にする等、用途によって使い分けることも好ましい
ことである。
When the first layer, which is in direct contact with the surface of the substrate, is made of carbides, nitrides, carbonates, nitrides of Ti, Zr, and Hf, and a mutual solid solution thereof, It is preferable from the viewpoint of adhesion, and it is also preferable to use the first layer alone or to use a second layer and a third layer on the surface of the first layer, depending on the application.

【0019】被膜の厚さは、多層にする場合の第1層の
厚さは、0.5〜2μmが好ましく、単層又は多層の場
合の総厚さは、工具形状,用途及び被膜の構成等で選択
すべきもので、例えば衝撃力がほとんど加わらない用途
の場合、総被膜厚さを厚く、例えば2〜10μm程度と
し、切削工具のように熱的衝撃力が加わるような用途、
特にフライス切削工具,断続切削工具のような用途、又
はシャープな切刃を要求されるドリル等に応用する場
合、5μm以下の総被膜厚さ、より好ましくは0.5〜
3μmである。
The thickness of the coating is preferably 0.5 to 2 μm for the first layer in the case of forming a multilayer, and the total thickness in the case of a single layer or a multilayer is determined by the tool shape, application and composition of the coating. For example, in the case of an application in which an impact force is hardly applied, the total coating thickness is large, for example, about 2 to 10 μm, and an application in which a thermal impact force is applied like a cutting tool,
In particular, when applied to a milling cutting tool, an intermittent cutting tool, or a drill requiring a sharp cutting edge, a total coating thickness of 5 μm or less, more preferably 0.5 to 5 μm.
3 μm.

【0020】本発明の工具用窒化ケイ素焼結体を作製す
る方法としては、具体的には、市販のできるだけ微細な
出発原料粉末を用いて、配合及び混合粉砕した後、粉末
圧粉体の成形時に、例えば内部と表面部の組成成分に変
化を与えて成形する方法、または従来のように均一組成
成分による粉末圧粉体とした後、焼結時にTi及び/又
はHfの化合物を含む粉末中に埋設し、この埋設に用い
る粉末の元素を粉末圧粉体の表面部へ侵入拡散させる方
法、さらには焼結時の圧力、雰囲気の調整でもって粉末
圧粉体内に含有しているTi及び/又はHfの化合物を
表面部に移動拡散させる方法、あるいはこれらを組合わ
せた方法を挙げることができる。
As a method of producing the silicon nitride sintered body for a tool of the present invention, specifically, a commercially available starting material powder as fine as possible is blended, mixed and pulverized, and then formed into a powder compact. Occasionally, for example, a method of forming by changing the composition components of the inside and the surface, or forming a powder compact with a uniform composition component as in the past, and then sintering the powder containing a compound of Ti and / or Hf And the elements of the powder used for this embedding are penetrated and diffused into the surface of the powder compact, and furthermore, the Ti and / or Ti contained in the powder compact are adjusted by adjusting the pressure and atmosphere during sintering. Alternatively, a method of moving and diffusing a compound of Hf to a surface portion, or a method of combining these can be used.

【0021】また、この焼結体の表面に被膜を形成する
には、従来から行われている化学蒸着法(CVD法)や
物理蒸着法(PVD法)でもって行うことができる。
The formation of a film on the surface of the sintered body can be carried out by a conventional chemical vapor deposition method (CVD method) or physical vapor deposition method (PVD method).

【0022】[0022]

【作用】本発明の工具用窒化ケイ素焼結体は、焼結体の
表面におけるTi及び/又はHfの元素含有量が相手
材、特に切削時の被削材としての鉄系材料との親和性を
貧化させる作用をし、Ti及び/又はHfの含有した化
合物が高温における焼結体の強度を向上させる作用を
し、焼結体の表面部におけるTi及び/又はHfの元素
の含有分布構成が焼結体の耐熱衝撃性を向上させる作用
をしているものである。
The silicon nitride sintered body for a tool according to the present invention has an element content of Ti and / or Hf on the surface of the sintered body that is compatible with a counterpart material, particularly an iron-based material as a work material at the time of cutting. The compound containing Ti and / or Hf acts to improve the strength of the sintered body at a high temperature, and the content distribution of the Ti and / or Hf element on the surface of the sintered body Has an effect of improving the thermal shock resistance of the sintered body.

【0023】また、本発明の工具用被覆窒化ケイ素焼結
体は、焼結体の表面におけるTi及び/又はHfの元素
の存在が被膜との密着性を高める作用をしているもので
ある。
Further, in the coated silicon nitride sintered body for a tool according to the present invention, the presence of the element of Ti and / or Hf on the surface of the sintered body acts to enhance the adhesion to the coating.

【0024】[0024]

【実施例1】平均粒径0.5〜1.5μmの市販されて
いるSi34 粉末,Al23 粉末,Y23 粉末,T
iC粉末,TiN粉末,Ti(C,N)粉末,TiO2
粉末,HfO2 粉末,HfN粉末を用いて、表1に示す
割合に配合し、ボールミルで粉砕混合後、加圧成形して
粉末圧粉体を得た。これらの粉末圧粉体を表1に併記し
たTi及び/又はHfの元素拡散助剤としてのパッキン
グ材粉末に埋設し、窒素ガス雰囲気中、1750℃で1
時間常圧焼結し、次いで窒素ガス1000気圧、170
0℃で1時間保持による熱間静水圧処理(HIP処理)
を施して本発明の窒化ケイ素焼結体No1〜6を得た。
Example 1 Commercially available Si 3 N 4 powder, Al 2 O 3 powder, Y 2 O 3 powder, T 2 powder having an average particle size of 0.5 to 1.5 μm
iC powder, TiN powder, Ti (C, N) powder, TiO 2
Powder, HfO 2 powder, and HfN powder were blended in the proportions shown in Table 1, mixed by pulverization in a ball mill, and then press-molded to obtain a powder compact. These powder compacts were embedded in a packing material powder as an element diffusion aid of Ti and / or Hf described in Table 1 and were placed at 1750 ° C. in a nitrogen gas atmosphere.
Sintering at atmospheric pressure for 1000 hours,
Hot isostatic pressure treatment by holding at 0 ° C for 1 hour (HIP treatment)
To obtain silicon nitride sintered bodies No. 1 to 6 of the present invention.

【0025】比較として、表1に示す比較品1〜6の配
合組成成分に配合し、焼結時のパッキング材粉末に10
0%Si34 粉末を用いた以外は、上述の本発明品と
同様の製造方法でもって比較の窒化ケイ素焼結体No1
〜6を得た。
As a comparison, 10 parts were added to the packing material powder at the time of sintering by blending with the composition components of comparative products 1 to 6 shown in Table 1.
Comparative silicon nitride sintered body No. 1 was manufactured by the same manufacturing method as that of the above-described product of the present invention except that 0% Si 3 N 4 powder was used.
~ 6.

【0026】[0026]

【表1】 こうして得た本発明品1〜6及び比較品1〜6の焼結体
の表面及びその表面から200μm内部までにおけるT
i及び/又はHfの元素量分析をEPMA(電子ブロー
ブマイクロアナリシス)にて行い、表2にその結果を記
載した。
[Table 1] The surfaces of the sintered bodies of the inventive products 1 to 6 and the comparative products 1 to 6 thus obtained and the T from the surface to the inside of 200 μm.
Elemental analysis of i and / or Hf was performed by EPMA (Electron Probe Micro-Analysis), and the results are shown in Table 2.

【0027】次いで、本発明品1〜6及び比較品1〜6
を用いて、下記(A)条件による旋削試験と(B)条件
によるフライス切削試験を行い、表2にその結果を併記
した。 (A)乾式による連続旋削試験条件 被削材 :FC35 切削速度 :500m/min 切込み :1.5mm 送り :0.3mm/rev 切削時間 :2min チップ形状:SNMN120408 評価 :平均逃げ面摩耗量(VB ) (B)乾式によるフライス切削試験条件 被削材 :FCD60(45H ×200l ) 切削速度 :150m/min 切込み :1.5mm 初期送り :0.20mm/rev チップ形状:SNMN120408 評価 :チップが欠損に至る最大送り(1Pass
で欠損しない場合、0.03mm/rev送り増加)
Next, products 1 to 6 of the present invention and comparative products 1 to 6
, A turning test under the following conditions (A) and a milling test under the conditions (B) were performed, and the results are also shown in Table 2. (A) Dry-type continuous turning test conditions Work material: FC35 Cutting speed: 500 m / min Depth of cut: 1.5 mm Feed: 0.3 mm / rev Cutting time: 2 min Chip shape: SNNM120408 Evaluation: Average flank wear (VB) (B) Milling cutting test conditions by dry method Work material: FCD60 (45H × 200 l) Cutting speed: 150 m / min Depth of cut: 1.5 mm Initial feed: 0.20 mm / rev Chip shape: SNMN120408 Evaluation: Maximum chip breakage Feed (1 Pass
0.03mm / rev feed increase if not lost at

【0028】[0028]

【表2】 [Table 2]

【0029】[0029]

【実施例2】実施例1で得た本発明品1〜6及び比較品
1〜6を用いて、それぞれの焼結体の表面にCVD法で
もって被膜を形成した。被膜は、焼結体の表面に形成さ
せた層を第1層、次が第2層、その次が第3層として、
表3に示したように、それぞれの焼結体の表面に形成し
て、本発明の被覆窒化ケイ素焼結体No7〜12及び比
較の被覆窒化ケイ素焼結体No7〜12を得た。
Example 2 Using the products 1 to 6 of the present invention and the comparative products 1 to 6 obtained in Example 1, a film was formed on the surface of each sintered body by a CVD method. As for the coating, the layer formed on the surface of the sintered body is the first layer, the next is the second layer, and the next is the third layer,
As shown in Table 3, the coated silicon nitride sintered bodies Nos. 7 to 12 of the present invention and comparative coated silicon nitride sintered bodies Nos. 7 to 12 were formed on the surfaces of the respective sintered bodies.

【0030】こうして得た本発明品7〜12及び比較品
7〜12を用いて、実施例1の(A)条件及び(B)条
件による切削試験を行い、表3にその結果を併記した。
Using the products 7 to 12 of the present invention and the comparative products 7 to 12 thus obtained, cutting tests were performed under the conditions (A) and (B) of Example 1, and the results are shown in Table 3.

【0031】[0031]

【表3】 [Table 3]

【0032】[0032]

【発明の効果】本発明の窒化ケイ素焼結体は、比較品に
比べて切削試験における耐欠損性が同等であって、耐摩
耗性が約45〜62%も向上するという効果がある。
The silicon nitride sintered body of the present invention has the same effect of the chipping resistance in the cutting test as compared with the comparative product, and has the effect of improving the abrasion resistance by about 45 to 62%.

【0033】また、本発明の被覆窒化ケイ素焼結体は、
比較の被覆窒化ケイ素焼結体に比べて、切削試験におけ
る耐摩耗性が約43〜97%向上し、耐欠損性が約39
〜52%向上するという顕著な効果がある。
Further, the coated silicon nitride sintered body of the present invention
Compared with the comparative coated silicon nitride sintered body, the abrasion resistance in the cutting test is improved by about 43 to 97%, and the fracture resistance is about 39%.
There is a remarkable effect of improving by ~ 52%.

───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭58−208182(JP,A) 特開 昭53−55312(JP,A) (58)調査した分野(Int.Cl.6,DB名) C04B 35/584 B23P 15/28 C04B 41/87 ────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-58-208182 (JP, A) JP-A-53-55312 (JP, A) (58) Fields investigated (Int. Cl. 6 , DB name) C04B 35/584 B23P 15/28 C04B 41/87

Claims (6)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 窒化ケイ素を主成分とするマトリックス
70重量%以上と、残部がTi及び/又はHfを少なく
とも含む化合物のスケルトンとからなる窒化ケイ素焼結
体において、該スケルトン中のTi及び/又はHfの元
素量が1〜20重量%(焼結体全体の比)であり、かつ
該窒化ケイ素焼結体の表面におけるTi及び/又はHf
の平均的元素量が該窒化ケイ素焼結体の表面から200
μm以上の内部におけるTi及び/又はHfの平均的元
素量に比べて増加していることを特徴とする工具用窒化
ケイ素焼結体。
1. A silicon nitride sintered body comprising at least 70% by weight of a matrix containing silicon nitride as a main component and a skeleton of a compound containing at least Ti and / or Hf, wherein Ti and / or The elemental amount of Hf is 1 to 20% by weight (ratio of the whole sintered body), and Ti and / or Hf on the surface of the silicon nitride sintered body
Is 200 from the surface of the silicon nitride sintered body.
A silicon nitride sintered body for a tool, wherein the silicon nitride sintered body for a tool has an increase in the average elemental content of Ti and / or Hf in the interior of not less than μm.
【請求項2】 上記窒化ケイ素焼結体の表面におけるT
i及び/又はHfの平均的元素量が該窒化ケイ素焼結体
の表面から200μm以上の内部におけるTi及び/又
はHfの平均的元素量に対して5%以上増加しているこ
とを特徴とする請求項1記載の工具用窒化ケイ素焼結
体。
2. The T on the surface of the silicon nitride sintered body
The average elemental amount of i and / or Hf is increased by 5% or more with respect to the average elemental amount of Ti and / or Hf within 200 μm or more from the surface of the silicon nitride sintered body. The silicon nitride sintered body for a tool according to claim 1.
【請求項3】 窒化ケイ素を主成分とするマトリックス
70重量%以上と、残部がTi及び/又はHfを少なく
とも含む化合物のスケルトンとからなる窒化ケイ素焼結
体において、該スケルトン中のTi及び/又はHfの元
素量が1〜20重量%(焼結体全体の比)であり、かつ
該窒化ケイ素焼結体の表面におけるTi及び/又はHf
の平均的元素量が該窒化ケイ素焼結体の表面で最大とな
っていることを特徴とする工具用窒化ケイ素焼結体。
3. A silicon nitride sintered body comprising at least 70% by weight of a matrix containing silicon nitride as a main component and a skeleton of a compound containing at least Ti and / or Hf, wherein Ti and / or The elemental amount of Hf is 1 to 20% by weight (ratio of the whole sintered body), and Ti and / or Hf on the surface of the silicon nitride sintered body
A silicon nitride sintered body for a tool, characterized in that the average element amount of the above is maximum on the surface of the silicon nitride sintered body.
【請求項4】 請求項1記載の窒化ケイ素焼結体の基材
表面にTi,Zr,Hfの炭化物,窒化物,酸化物,A
lの酸化物,窒酸化物及びこれらの相互固溶体の中の少
なくとも1種の単層又は多層からなる被膜を形成したこ
とを特徴とする工具用被覆窒化ケイ素焼結体。
4. The method according to claim 1, wherein the silicon nitride sintered body has a surface of Ti, Zr, Hf carbide, nitride, oxide, A
(1) a coated silicon nitride sintered body for a tool, wherein a coating comprising at least one kind of a single layer or a multilayer of oxides, nitride oxides and mutual solid solutions thereof is formed.
【請求項5】 請求項2記載の窒化ケイ素焼結体の基材
表面にTi,Zr,Hfの炭化物,窒化物,酸化物,A
lの酸化物,窒酸化物及びこれらの相互固溶体の中の少
なくとも1種の単層又は多層からなる被膜を形成したこ
とを特徴とする工具用被覆窒化ケイ素焼結体。
5. The silicon nitride sintered body according to claim 2, wherein Ti, Zr, Hf carbide, nitride, oxide, A
(1) a coated silicon nitride sintered body for a tool, wherein a coating comprising at least one kind of a single layer or a multilayer of oxides, nitride oxides and mutual solid solutions thereof is formed.
【請求項6】 請求項3記載の窒化ケイ素焼結体の基材
表面にTi,Zr,Hfの炭化物,窒化物,酸化物,A
lの酸化物,窒酸化物及びこれらの相互固溶体の中の少
なくとも1種の単層又は多層からなる被膜を形成したこ
とを特徴とする工具用被覆窒化ケイ素焼結体。
6. The silicon nitride sintered body according to claim 3, wherein Ti, Zr, Hf carbide, nitride, oxide, A
(1) a coated silicon nitride sintered body for a tool, wherein a coating comprising at least one kind of a single layer or a multilayer of oxides, nitride oxides and mutual solid solutions thereof is formed.
JP3237227A 1991-08-23 1991-08-23 Silicon nitride sintered body for tools and coated silicon nitride sintered body for tools Expired - Fee Related JP2901102B2 (en)

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JP2901102B2 true JP2901102B2 (en) 1999-06-07

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19990010329A (en) * 1997-07-16 1999-02-18 레나르트 태퀴스트 Silicon nitride cutting tool material

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