JP3085849B2 - Alumina sintered body - Google Patents
Alumina sintered bodyInfo
- Publication number
- JP3085849B2 JP3085849B2 JP06081265A JP8126594A JP3085849B2 JP 3085849 B2 JP3085849 B2 JP 3085849B2 JP 06081265 A JP06081265 A JP 06081265A JP 8126594 A JP8126594 A JP 8126594A JP 3085849 B2 JP3085849 B2 JP 3085849B2
- Authority
- JP
- Japan
- Prior art keywords
- volume resistivity
- weight
- alumina
- sintered body
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- Compositions Of Oxide Ceramics (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、アルミナを主成分とす
るアルミナ質焼結体に関し、例えば、静電気防止部品
（例えば、半導体製造装置等で静電気防止が必要な部品
（搬送用アーム、ハンドリング治具、ウェハー把持用ピ
ンセット等））、抵抗用基体、導電材料、接点、ヒー
タ、真空管部品等に用いられるアルミナ質焼結体に関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an alumina-based sintered body containing alumina as a main component, for example, an antistatic component (for example, a component requiring antistatic in a semiconductor manufacturing apparatus or the like (transport arm, handling jig). Tools, wafer tweezers, etc.), resistance bases, conductive materials, contacts, heaters, and alumina sintered bodies used for vacuum tube parts and the like.
【０００２】[0002]
【従来技術】従来、例えば、静電気防止部品（例えば、
半導体製造装置等で静電気防止が必要な部品（搬送用ア
ーム等））、抵抗用基体、導電材料、接点、ヒータ、真
空管外囲管等には、絶縁体と導電体の中間位の体積固有
抵抗（例えば、１×１０7 〜１×１０13Ωｃｍ）を有す
るセラミックが用いられている。2. Description of the Related Art Conventionally, for example, antistatic parts (for example,
Parts that need to prevent static electricity in semiconductor manufacturing equipment (transport arms, etc.), resistive substrates, conductive materials, contacts, heaters, vacuum tube envelopes, etc., have a volume resistivity that is intermediate between insulators and conductors. (For example, a ceramic having 1 × 10 7 to 1 × 10 13 Ωcm) is used.
【０００３】このようなセラミックスとしては、アルミ
ナ質焼結体が知られている。そして、このようなアルミ
ナ質焼結体は、例えば、アルミナ粉末に、アルカリ金
属、チタン、その酸化物等の粉末を添加し、乾式あるい
は湿式で混合後、必要に応じて成形助剤を添加して成形
し、所望の抵抗値を得るために、還元雰囲気下で焼結し
て製造していた。[0003] As such a ceramic, an alumina sintered body is known. Then, such an alumina-based sintered body is obtained, for example, by adding a powder of an alkali metal, titanium, an oxide thereof, or the like to alumina powder, mixing them by a dry method or a wet method, and then adding a molding aid as necessary. In order to obtain a desired resistance value, it has been manufactured by sintering in a reducing atmosphere.
【０００４】[0004]
【発明が解決しようとする問題点】しかしながら、この
ようなアルミナ質焼結体では、室温から高温域まで使用
される場合、その体積固有抵抗が温度の上昇につれて低
下し、例えば、上記のアルミナ質焼結体を抵抗用基体に
用いる場合、温度によって抵抗値が大きく変動するとい
う問題があった。また、温度が低下するにつれて体積固
有抵抗が上昇し、所望の静電気防止効果が得られないと
いう問題があった。However, when such an alumina sintered body is used from room temperature to a high temperature range, its volume resistivity decreases as the temperature rises. When a sintered body is used as a resistance base, there is a problem that the resistance value greatly varies depending on the temperature. Further, there is a problem that the volume resistivity increases as the temperature decreases, and a desired antistatic effect cannot be obtained.
【０００５】即ち、従来のアルミナ質焼結体では、２５
〜７５℃の範囲での体積固有抵抗の温度係数が２％／℃
程度と大きく、温度に対する体積固有抵抗の変化率が大
きいという問題があった。尚、体積固有抵抗の温度係数
ＴＣＲ（％／℃）は、ＴＣＲ（％／℃）＝〔（Ｒ25−Ｒ
75）／（Ｒ25×５０）〕×１００の式で算出される。こ
こで、Ｒ25は２５℃における体積固有抵抗であり、Ｒ75
は７５℃における体積固有抵抗である。That is, in a conventional alumina-based sintered body, 25%
Temperature coefficient of volume resistivity in the range of ~ 75 ° C is 2% / ° C
There is a problem that the change rate of the volume resistivity with respect to temperature is large. Note that the temperature coefficient TCR (% / ° C.) of the volume resistivity is TCR (% / ° C.) = [(R 25 −R
75 ) / (R 25 × 50)] × 100. Here, R 25 is a volume resistivity at 25 ° C., R 75
Is the volume resistivity at 75 ° C.
【０００６】[0006]
【問題点を解決するための手段】本発明者等は、上記の
ような問題点について鋭意検討した結果、アルミナを主
成分とし、これに、２酸化マンガンと、周期律表第５ａ
族元素酸化物から選ばれる少なくとも一種と、鉄族金属
の酸化物から選ばれる少なくとも一種を所定量含有する
アルミナ質焼結体では、２５〜７５℃の温度範囲内で１
×１０7 〜１×１０13Ωｃｍの体積固有抵抗を有し、２
５〜７５℃の温度範囲内での体積固有抵抗の温度係数が
１．８％／℃以下であることを見出し本発明に至った。Means for Solving the Problems The present inventors have conducted intensive studies on the above problems, and as a result, have made alumina as a main component, manganese dioxide, and 5a of the periodic table.
In the case of an alumina-based sintered body containing a predetermined amount of at least one selected from group-group element oxides and at least one selected from iron-group metal oxides, a temperature within a temperature range of 25 to 75 ° C.
Having a volume resistivity of × 10 7 to 1 × 10 13 Ωcm,
The inventors have found that the temperature coefficient of the volume resistivity in the temperature range of 5 to 75 ° C is 1.8% / ° C or less, and have reached the present invention.
【０００７】即ち、本発明のアルミナ質焼結体は、アル
ミナ７０〜９３重量％と添加成分７〜３０重量％とから
なるアルミナ質焼結体であって、前記添加成分が、２酸
化マンガン１５〜９０重量％と、周期律表第５ａ族元素
酸化物のうち少なくとも一種３〜４０重量％と、鉄族金
属の酸化物のうち少なくとも一種５〜８０重量％とから
なるものである。また、２５〜７５℃の温度範囲内で１
×１０7 〜１×１０１３Ωｃｍの体積固有抵抗を有する
とともに、２５〜７５℃の温度範囲内での体積固有抵抗
の温度係数が１．８％／℃以下であるアルミナ質焼結体
である。That is, the alumina-based sintered body of the present invention is an alumina-based sintered body comprising 70 to 93% by weight of alumina and 7 to 30% by weight of an additional component, wherein the additional component is manganese dioxide 15 To 90% by weight, at least 3 to 40% by weight of at least one group 5a element oxide of the periodic table, and at least 5 to 80% by weight of an iron group metal oxide. In addition, within a temperature range of 25 to 75 ° C, 1
An alumina sintered body having a volume resistivity of × 10 7 to 1 × 10 13 Ωcm and a temperature coefficient of volume resistivity within a temperature range of 25 to 75 ° C. of 1.8% / ° C. or less. .
【０００８】本発明の上記焼結体において、アルミナ含
有量を７０〜９３重量％としたのは、アルミナが７０重
量％よりも少ない（添加成分が３０重量％よりも多い）
と、体積固有抵抗が１×１０７ Ωｃｍよりも小さくな
り導電体に近づくからであり、９３重量％よりも多い場
合（添加成分が７重量％よりも少ない場合）には体積固
有抵抗が１×１０13Ωｃｍよりも大きくなり絶縁体に近
づくからである。１×１０7 〜１×１０13Ωｃｍの体積
固有抵抗を有するという点からは、アルミナは７５〜８
５重量％含有することが望ましく、磁器の強度および焼
結性という点からすれば８０〜９３重量％含有すること
が望ましい。In the above sintered body of the present invention, the alumina content is set to 70 to 93% by weight because alumina is less than 70% by weight (additional component is more than 30% by weight).
This is because the volume resistivity is smaller than 1 × 10 7 Ωcm and approaches the conductor. When the volume resistivity is more than 93% by weight (when the added component is less than 7% by weight), the volume resistivity is 1 × 10 7 Ωcm. This is because it becomes larger than 10 13 Ωcm and approaches the insulator. In terms of having a volume resistivity of 1 × 10 7 to 1 × 10 13 Ωcm, alumina is 75 to 8
It is desirably contained in an amount of 5% by weight, and preferably 80 to 93% by weight in view of the strength and sinterability of the porcelain.
【０００９】また、添加成分中に２酸化マンガンを含有
させたのは、焼結性が向上し、比較的低温で焼成でき、
また、所望の体積固有抵抗を得やすいからである。ここ
で、添加成分を重量比で表した時、２酸化マンガンを１
５〜９０重量％含有させたのは、酸化マンガンが１５重
量％よりも少ないと体積固有抵抗が１×１０13Ωｃｍよ
りも大きくなり絶縁体に近づくからであり、２酸化マン
ガンが９０重量％よりも多いと体積固有抵抗が１×１０
7 Ωｃｍよりも小さくなり導電体に近づくからである。
２酸化マンガンは１×１０7 〜１×１０13Ωｃｍの体積
固有抵抗を有するという点からは１８〜８５重量％含有
させることが好ましく、特に３０〜８０重量％含有させ
ることが望ましく、磁器の焼結性という点からは３０〜
９０重量％含有させることが望ましい。[0009] The addition of manganese dioxide in the additive component improves the sinterability and allows firing at a relatively low temperature.
Also, it is easy to obtain a desired volume specific resistance. Here, when the additive component is represented by weight ratio, manganese dioxide is 1
The reason for containing 5 to 90% by weight is that if the amount of manganese oxide is less than 15% by weight, the volume resistivity becomes larger than 1 × 10 13 Ωcm and approaches the insulator. Volume resistivity is 1 × 10
This is because it becomes smaller than 7 Ωcm and approaches the conductor.
Manganese dioxide is preferably contained in an amount of 18 to 85% by weight, more preferably 30 to 80% by weight, from the viewpoint of having a volume resistivity of 1 × 10 7 to 1 × 10 13 Ωcm. 30 ~
It is desirable to contain 90% by weight.
【００１０】また、添加成分中に周期律表第５ａ族元素
酸化物のうち少なくとも一種を含有させたのは、所望の
体積固有抵抗が得られやすく、体積固有抵抗の温度係数
が小さくなり易いからである。そして、添加成分を重量
比で表した時、周期律表第５ａ族元素酸化物のうち少な
くとも一種を３〜４０重量％させたのは、３重量％より
も少ない場合には体積固有抵抗の温度係数が１．８％／
℃以上となり、温度に対する体積固有抵抗が大きくなる
からである。また、４０重量％よりも多い場合には体積
固有抵抗が１×１０7 Ωｃｍよりも小さくなり導電体に
近づくからである。周期律表第５ａ族元素酸化物は、体
積固有抵抗が小さく、所望の体積固有抵抗を得るという
点からは３．５〜３０重量％含有させることが好まし
く、特に３．５〜２５重量％含有させることが望まし
い。周期律表第５ａ族元素としては、バナジウム，ニオ
ブ，タンタルがあり、本発明では特にニオブが好まし
い。[0010] The addition of at least one of Group 5a element oxides in the periodic table in the additive component is because a desired volume resistivity is easily obtained and a temperature coefficient of the volume resistivity is easily reduced. It is. When the additive components are expressed in terms of weight ratio, at least one of the group 5a element oxides of the periodic table is made 3 to 40% by weight. The coefficient is 1.8% /
This is because the temperature is higher than or equal to ° C., and the volume resistivity with respect to temperature increases. On the other hand, when the content is more than 40% by weight, the volume resistivity becomes smaller than 1 × 10 7 Ωcm and approaches the conductor. The group 5a element oxide of the periodic table preferably contains 3.5 to 30% by weight, particularly 3.5 to 25% by weight from the viewpoint that the volume resistivity is small and a desired volume resistivity is obtained. It is desirable to make it. The group 5a element of the periodic table includes vanadium, niobium, and tantalum, and in the present invention, niobium is particularly preferable.
【００１１】さらに、添加成分中に鉄族金属の酸化物の
うち少なくとも一種を含有させたのは、所望の体積固有
抵抗が得られやすいからである。そして、添加成分を重
量比で表した時、鉄族金属酸化物のうち少なくとも一種
を５〜８０重量％させたのは、５重量％よりも少ない場
合には体積固有抵抗が１×１０13Ωｃｍよりも大きくな
り絶縁体に近づくからであり、８０重量％よりも多い場
合には体積固有抵抗が１×１０7 Ωｃｍよりも小さくな
り導電体に近づくからである。鉄族金属酸化物は、所望
の体積固有抵抗を得るという点からは１０〜８０重量％
含有させることが好ましく、特に１０〜６０重量％含有
させることが望ましい。鉄族としては、鉄，コバルト，
ニッケルがあり、本発明では特に鉄が好ましい。Further, the reason why at least one of the oxides of the iron group metal is contained in the additive component is that a desired volume resistivity is easily obtained. When the additive components are expressed in terms of weight ratio, at least one of the iron group metal oxides is made 5 to 80% by weight. When the content is less than 5% by weight, the volume resistivity is 1 × 10 13 Ωcm. This is because the volume resistivity becomes smaller than 1 × 10 7 Ωcm and approaches the conductor when the content is more than 80% by weight. The iron group metal oxide is 10 to 80% by weight from the viewpoint of obtaining a desired volume resistivity.
It is preferably contained, particularly preferably 10 to 60% by weight. Iron, cobalt,
There is nickel, and iron is particularly preferred in the present invention.
【００１２】そして、本発明のアルミナ質焼結体では、
アルミナを８０〜８５重量％と、添加成分が１５〜２０
重量％とからなるとともに、添加物成分中の２酸化マン
ガンが２６〜６５重量％、酸化鉄が２７〜６５重量％、
酸化ニオブが５〜１５重量％であることが最適である。And, in the alumina sintered body of the present invention,
80 to 85% by weight of alumina and 15 to 20
Manganese dioxide in the additive component is 26 to 65% by weight, iron oxide is 27 to 65% by weight,
Optimally, niobium oxide is 5 to 15% by weight.
【００１３】また、本発明では、２５〜７５℃の温度範
囲内で１×１０9 〜１×１０12Ωｃｍの体積固有抵抗を
有することが望ましく、また、２５〜７５℃の温度範囲
内での体積固有抵抗の温度係数は１．６％／℃以下であ
ることが望ましい。Further, in the present invention, it is desirable to have a volume resistivity of 1 × 10 9 to 1 × 10 12 Ωcm within a temperature range of 25 to 75 ° C. The temperature coefficient of the volume resistivity is desirably 1.6% / ° C. or less.
【００１４】このようなアルミナ質焼結体は、例えば、
アルミナ粉末、２酸化マンガン粉末、周期律表第５ａ族
元素酸化物粉末、鉄族金属の酸化物粉末を用い、或い
は、焼成中にこれらの材料に変化しうる、前記材料の水
酸化物粉末、炭酸化物を用い、これらを混合した後、所
望の成形手段により所定形状に成形し、酸化性雰囲気に
おいて１２００〜１５００℃で１〜３時間焼成すること
により得られる。原料粉末の混合は乾式で行って良い
が、湿式で混合した場合にはスプレードライ等で造粒
し、成形する。Such an alumina-based sintered body is, for example,
Alumina powder, manganese oxide powder, oxide powder of a Group 5a element of the periodic table, oxide powder of an iron group metal, or a hydroxide powder of the above material, which can be changed to these materials during firing, It is obtained by using a carbonate, mixing them, forming the mixture into a predetermined shape by a desired forming means, and calcining in an oxidizing atmosphere at 1200 to 1500 ° C. for 1 to 3 hours. The mixing of the raw material powders may be performed in a dry manner, but when the raw powders are mixed in a wet manner, granulation is performed by spray drying or the like, followed by molding.
【００１５】尚、ボールミル等で粉砕混合する場合に
は、ボールより酸化カルシウム、酸化クロム，酸化コバ
ルト、酸化マグネシウム、シリカ，酸化マンガン，酸化
鉄が混入する場合があるが、前記組成を満足する範囲内
であれば、何ら問題はない。In the case of pulverizing and mixing with a ball mill or the like, calcium oxide, chromium oxide, cobalt oxide, magnesium oxide, silica, manganese oxide, and iron oxide may be mixed in from the balls, but the range satisfying the above-mentioned composition is required. If it is inside, there is no problem.
【００１６】[0016]
【作用】本発明のアルミナ質焼結体は、主にアルミナ含
有量と添加成分の含有量を制御するとともに、添加成分
中の周期律表第５ａ族元素酸化物量、２酸化マンガン
量、鉄族金属酸化物量を制御することにより、２５〜７
５℃の温度範囲内で０．０１〜１００００ＧΩｃｍ程度
の体積固有抵抗を有するとともに、２５〜７５℃の温度
範囲内での体積固有抵抗の温度係数を１．８％／℃以下
とすることが可能となる。The alumina-based sintered body of the present invention mainly controls the alumina content and the content of the additional component, and also contains an oxide of a Group 5a element of the periodic table in the additional component, an amount of manganese dioxide, and an iron group. By controlling the amount of metal oxide, 25 to 7
It has a volume resistivity of about 0.01 to 10000 GΩcm within a temperature range of 5 ° C and can have a temperature coefficient of volume resistivity of 1.8% / ° C or less within a temperature range of 25 to 75 ° C. Becomes
【００１７】以下、本発明を次の例で説明する。Hereinafter, the present invention will be described with reference to the following examples.
【００１８】[0018]
実施例１ 先ず、アルミナ粉末、２酸化マンガン粉末、周期律表第
５ａ族元素酸化物粉末、鉄族金属の酸化物粉末を用意
し、焼結体の組成が表１および表２に示すような割合と
なるように秤量後、回転ミルにて湿式混合した。混合後
のスラリーをスプレードライにて乾燥して焼結用原料と
した。これをプレス成形し、大気中において表１および
表２に示すような温度で２時間焼成し、直径６０ｍｍ厚
み３ｍｍの円板状の焼結体を得た。そして、これの両端
を研磨して試料の厚みを２ｍｍとした。Example 1 First, an alumina powder, a manganese oxide powder, an oxide powder of a Group 5a element of the periodic table, and an oxide powder of an iron group metal were prepared, and the composition of the sintered body was as shown in Tables 1 and 2. After weighing so as to obtain the ratio, the mixture was wet-mixed with a rotary mill. The mixed slurry was dried by spray drying to obtain a raw material for sintering. This was press-formed and fired in the atmosphere at a temperature shown in Tables 1 and 2 for 2 hours to obtain a disc-shaped sintered body having a diameter of 60 mm and a thickness of 3 mm. Then, both ends thereof were polished to reduce the thickness of the sample to 2 mm.
【００１９】[0019]
【表１】 [Table 1]
【００２０】[0020]
【表２】 [Table 2]
【００２１】そして、この試料を、ＪＩＳ Ｃ ２１４
１に定められた絶縁抵抗の測定方法に基づき、試料を約
１０-6ｔｏｒｒの真空中に収容し、試料の両端の電極に
超絶縁抵抗計の端子を接続し、真空装置内が２５℃、７
５℃のうちの所望の温度に到達後１０分間放置した後、
試料に１０００Ｖを５分間印加した時の抵抗値を読み取
った。この抵抗値から体積固有抵抗を算出し、体積固有
抵抗の温度係数を求めた。体積固有抵抗は、ＪＩＳ Ｃ
２１４１に定められるように、Ｒ＝ｒ×Ｓ／ｔ（Ｒ：
体積固有抵抗、ｒ：抵抗値、Ｓ：電極面積、ｔ：試料厚
み）により求めた。また、体積固有抵抗の温度係数ＴＣ
Ｒ（％／℃）は、ＴＣＲ（％／℃）＝〔（Ｒ25−Ｒ75）
／（Ｒ25×５０）〕×１００で求めた。ここで、Ｒ25は
２５℃における体積固有抵抗であり、Ｒ75は７５℃にお
ける体積固有抵抗である。この結果を表１および表２に
示す。Then, this sample was subjected to JIS C 214
Based on the insulation resistance measurement method specified in 1, the sample is housed in a vacuum of about 10 -6 torr, the terminals of the super insulation resistance meter are connected to the electrodes at both ends of the sample, and the inside of the vacuum device is set at 25 ° C. 7
After reaching the desired temperature of 5 ° C. and left for 10 minutes,
The resistance value when 1000 V was applied to the sample for 5 minutes was read. The volume resistivity was calculated from the resistance value, and the temperature coefficient of the volume resistivity was determined. The volume resistivity is JIS C
R = r × S / t (R:
Volume specific resistance, r: resistance value, S: electrode area, t: sample thickness). Also, the temperature coefficient TC of the volume resistivity
R (% / ° C.) is TCR (% / ° C.) = [(R 25 −R 75 )
/ (R 25 × 50)] × 100. Here, R 25 is the volume resistivity at 25 ° C., and R 75 is the volume resistivity at 75 ° C. The results are shown in Tables 1 and 2.
【００２２】表１および表２より、本発明のアルミナ質
焼結体では、２５〜７５℃の温度範囲内で１×１０7 〜
１×１０13Ωｃｍの体積固有抵抗を有するとともに、２
５〜７５℃の温度範囲内での体積固有抵抗の温度係数が
１．８％／℃以下となることが判る。一方、本発明の範
囲外の試料Ｎo.１，７，１６，２０，２２，２４，２６
は、２５〜７５℃の温度範囲内で１×１０7 〜１×１０
13Ωｃｍを有しておらず、また、試料Ｎo.１，１８は、
２５〜７５℃の温度範囲内で体積固有抵抗の温度係数が
１．８％／℃以上になっていることが判る。[0022] Table than 1 and Table 2, an alumina sintered body of the present invention, 1 × 10 7 ~ in the temperature range of 25 to 75 ° C.
It has a volume resistivity of 1 × 10 13 Ωcm and 2
It turns out that the temperature coefficient of the volume resistivity in the temperature range of 5 to 75 ° C. is 1.8% / ° C. or less. On the other hand, Samples No. 1, 7, 16, 20, 22, 24, 26 outside the scope of the present invention
Is 1 × 10 7 to 1 × 10 within a temperature range of 25 to 75 ° C.
13 Ωcm, and samples Nos. 1 and 18
It can be seen that the temperature coefficient of the volume resistivity is 1.8% / ° C. or more within the temperature range of 25 to 75 ° C.
【００２３】また、従来では所望の抵抗値を得るため
に、還元雰囲気下で焼成していたためコスト高になって
いたが、本発明のアルミナ質焼結体によれば、大気中で
焼成するため、所望の抵抗値を有するアルミナ質焼結体
を安価に得ることができる。Further, conventionally, firing was performed in a reducing atmosphere in order to obtain a desired resistance value, so that the cost was high. However, according to the alumina-based sintered body of the present invention, the firing was performed in air. Thus, an alumina sintered body having a desired resistance value can be obtained at low cost.
【００２４】[0024]
【発明の効果】以上詳述した通り、本発明のアルミナ質
焼結体では、２５〜７５℃の温度範囲内で１×１０7 〜
１×１０13Ωｃｍ程度の体積固有抵抗を有するととも
に、２５〜７５℃の温度範囲内での体積固有抵抗の温度
係数が１．８％／℃以下となり、絶縁体と導電体の中間
位の体積固有抵抗を有するとともに、焼結体の温度によ
って体積固有抵抗が変動する幅が大幅に低減され、所望
の体積固有抵抗を容易に得ることができ、例えば、静電
気防止部品（例えば、半導体製造装置等で静電気防止が
必要な部品（搬送用アーム、ハンドリング治具、ウェハ
ー把持用ピンセット等））、抵抗用基体、導電材料、接
点、ヒータ、真空管外囲管等に最適なアルミナ質焼結体
を得ることができる。As described above in detail, the alumina-based sintered body of the present invention has a temperature of 1 × 10 7 to 25 × 75 ° C.
It has a volume resistivity of about 1 × 10 13 Ωcm and a temperature coefficient of volume resistivity within a temperature range of 25 to 75 ° C. becomes 1.8% / ° C. or less, and a volume at an intermediate level between the insulator and the conductor. In addition to having a specific resistance, the range in which the volume specific resistance fluctuates depending on the temperature of the sintered body is greatly reduced, and a desired volume specific resistance can be easily obtained. To obtain the most suitable alumina sintered body for parts that need to prevent static electricity (transfer arm, handling jig, wafer gripping tweezers, etc.), resistive substrate, conductive material, contacts, heater, vacuum tube envelope, etc. be able to.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 鞭 常雄 東京都品川区北品川６丁目７番35号 ソ ニー株式会社内 審査官 深草 祐一 (56)参考文献 特開 平４−285048（ＪＰ，Ａ) 特開 平３−279252（ＪＰ，Ａ) 特開 昭64−42359（ＪＰ，Ａ) (58)調査した分野(Int.Cl.7，ＤＢ名) C04B 35/10 ──────────────────────────────────────────────────続 き Continuing from the front page (72) Inventor Tsuneo Whip 6-7-35 Kita Shinagawa, Shinagawa-ku, Tokyo Examiner at Sony Corporation Yuichi Fukakusa (56) References JP-A-4-285048 (JP, A JP-A-3-279252 (JP, A) JP-A-64-42359 (JP, A) (58) Fields investigated (Int. Cl. 7 , DB name) C04B 35/10
Claims (2)
３０重量％とからなるアルミナ質焼結体であって、前記
添加成分が、２酸化マンガン１５〜９０重量％と、周期
律表第５ａ族元素酸化物のうち少なくとも一種３〜４０
重量％と、鉄族金属の酸化物のうち少なくとも一種５〜
８０重量％とからなることを特徴とするアルミナ質焼結
体。(1) 70-93% by weight of alumina and 7-
30% by weight of an alumina-based sintered body, wherein the additive component is 15 to 90% by weight of manganese dioxide and at least one element of Group 5a element oxide of the periodic table, 3 to 40%.
% By weight and at least one of oxides of iron group metals
An alumina-based sintered body comprising 80% by weight.
１×１０13Ωｃｍの体積固有抵抗を有するとともに、２
５〜７５℃の温度範囲内での体積固有抵抗の温度係数が
１．８％／℃以下である請求項１記載のアルミナ質焼結
体。2. The method according to claim 1, wherein the temperature is within a range of 1 × 10 7 to 25 ° C.
It has a volume resistivity of 1 × 10 13 Ωcm and 2
The alumina-based sintered body according to claim 1, wherein a temperature coefficient of a volume resistivity in a temperature range of 5 to 75C is 1.8% / C or less.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP06081265A JP3085849B2 (en) | 1994-04-20 | 1994-04-20 | Alumina sintered body |
| US08/424,782 US5830819A (en) | 1994-04-20 | 1995-04-19 | Alumina sintered product |
| KR1019950009315A KR100368474B1 (en) | 1994-04-20 | 1995-04-20 | Alumina Sintered Body |
| GB9508071A GB2288597B (en) | 1994-04-20 | 1995-04-20 | Alumina sintered product |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP06081265A JP3085849B2 (en) | 1994-04-20 | 1994-04-20 | Alumina sintered body |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07291719A JPH07291719A (en) | 1995-11-07 |
| JP3085849B2 true JP3085849B2 (en) | 2000-09-11 |
Family
ID=13741538
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP06081265A Expired - Lifetime JP3085849B2 (en) | 1994-04-20 | 1994-04-20 | Alumina sintered body |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3085849B2 (en) |
-
1994
- 1994-04-20 JP JP06081265A patent/JP3085849B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07291719A (en) | 1995-11-07 |
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